Related Manuals for Cee 300X
Summary of Contents for Cee 300X
- Page 1 ® 300X Precision Spin Coater Operator/User Manual New users: Read this manual in its entirety before operating the equipment. © 2017 Cost Effective Equipment LLC...
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Page 2: Table Of Contents
Machines Covered This manual covers the Cee Model 300X series machines. It is to be used to install, operate, and troubleshoot this model Spin Coater. Table of Contents Machines Covered ....................2 Table of Contents ....................2 Introduction to the Model 300X ................. 4 Dimensions ....................... - Page 3 5.10 Writing a Spin Recipe ..................20 5.10.1 Entering data ................... 20 5.10.2 Recipe Management ................22 5.10.3 Recipe Backup ..................22 5.10.4 Desktop Recipe Editing................23 5.11 DiagScreen ..................... 24 5.11.1 Spin Diagnostics Screen ................25 5.11.2 Configuration Screen ................27 5.11.3 Spin Configuration Screen ...............
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Page 4: Introduction To The Model 300X
Introduction to the Model 300X Dimensions • 27.75” (70.5 cm) W x 34.75” (88.3 cm) L × 20.25” (51.5 cm) H • Machine weight: 115 lb (52.2 kg) • Shipping weight: 250 lb (113.4 kg) Programmability • PC-controlled • PC-based touch screen interface and display •... -
Page 5: Bowl Design
Bowl Design • Stainless steel bowl (for all stainless steel construction) • Optional polyethylene splash ring • Closed and optional open lid designs for process flexibility • Drain and exhaust ports located in the bottom of bowl • Optional nitrogen purge for an inert spin environment Utilities •... -
Page 6: Equipment Description
Fully programmable and user-friendly, the Cee® 300X precision spin coater features the accuracy and repeatability needed to eliminate processing variability from critical experiments. With its convenient compact footprint, wide array of chemical compatibility, and durability, this easy-to-use benchtop system will provide years of high-performance operation, making the Cee®... -
Page 7: Model And Revisions
Model and Revisions The model and serial number information for the Cee 300X are located on the rear panel near the power inlet. Software version information can be found on the Main screen. See Software for screen shots and a detailed explanation of the system software. -
Page 8: Chemical
Model 300X is intended for use as a Semiconductor/Optical application spin coating machine. It is primarily intended for substrates up to the maximum size. The Model 300X is not intended for use in food or medical applications or for use in hazardous locations. -
Page 9: Installation
Remove plastic wrap and packing foam. Place Cee Model 300X on a table of proper height and strength so that the controls and spin chuck are at the proper ergonomic height. Level the machine using the feet so that the spin chuck is level front-to- back and side-to-side. -
Page 10: Software
300X unit has passwords enabled, the beginning screen will be blank with login and logout buttons. To login, press the Login button in the upper right of the touch-screen and this will bring up the keyboard to enter your password. By default, the passwords for a 300X are: Super User Level: User Level:... -
Page 11: Run Screen
Run Screen Once logged in, or if passwords are not enabled, this is how the Run Screen looks. From here you can get the Spin Processing Screen by pressing the large buttons in the left-center of the screen. It is also possible to navigate to other windows by using the navigation Bar. -
Page 12: Spin Process Page
Spin process Page This is the page where Spin processes are run and monitored on the 300X Model software. The controls and indicators from the Spin Process page are listed here, for instructions on how to run a spin process go to the next page. - Page 13 13. Process Button: The process button has four modes; a. Start Centering: This mode starts the wafer spinning very slowly to check for centering on the Spin Chuck. b. Start Process: This mode starts the selected process. c. Abort: This mode aborts a currently running process. d.
- Page 14 To run a substrate, first a recipe must be loaded. Pressing the Load button will bring up the Recipe Selection Screen. A recipe may be selected by double clicking on the desired recipe or selecting the desired recipe and clicking Enter.
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Page 15: Centering A Substrate
Centering a Substrate The Cee 300X has 2 methods of centering a substrate. The Centering Time parameter set on the Spin Config screen determines the method used. If the Centering Time parameter (3) is set to 0 seconds, pressing the Start Centering button will start the Spin Chuck spinning. -
Page 16: Starting The Process
Starting the Process Once the substrate is on the Spin Chuck at a desired position, pressing the Start Process button will begin the process. For the duration of the process, the lid must remaine closed. Aborting a Process Once the process is started, the Abort button can be used to abort the process. This put the machine into a safe position for the user to recover the substrate. -
Page 17: Process Complete
Process Complet Once the Process is completed, the 300X will sound an audible alarm. Pressing the OK button will silence the alarm. The 300X is now ready to Center another substrate. Running Multiple Iterations It is possible to run a process multiple times consecutively. By entering a value greater than 1 in the Iterations field will cause the process to run the specified number of times. -
Page 18: Edit Screen
Edit Screen This is the page where Spin Recipes are edited on the 300X. The controls and indicators from the Spin Recipe Edit page are listed here, for instructions on how to edit a spin process go to the next page. - Page 19 RPM’s. Ramp Column: This box is where Ramp data is entered for each step in RPM/sec. Time Column: This box is where the length of each step is entered in seconds. Dispenses Column: This box opens the dialog which allows you to select which dispenses are active for each step.
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Page 20: Writing A Spin Recipe
5.10 Writing a Spin Recipe The Spin Edit Screen is where Spin Recipes are written. 5.10.1 Entering data By clicking on the Velocity (5), Ramp (6), Time (7), Exhaust (9), or Oscillation (10) boxes a numeric pad will appear. Using the Numeric Pad, you can now enter the parameter for the selected step. The Numeric Pad will indicate the valid range for at the top of the window. - Page 21 By clicking on the Dispenses box (8), a Dispense Select screen will appear. The Dispense Select screen will show all the installed dispenses on the tool. Dispenses are selected to turn on by clicking on the dispense name, clicking again will deselect the dispense.
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Page 22: Recipe Management
Recipes are saved in Comma Separated Value (.csv) format. The Model X system uses a Windows Operating system. The Spin Recipes are saved in the c:\Cee\Spin folder in the Windows File System. To backup recipes you can simply copy to a storage device via the front USB port. -
Page 23: Desktop Recipe Editing
5.10.4 Desktop Recipe Editing Since the recipes are stored in a simple Comma Separated Value (.csv) format, they are easily editable on a PC. Each step is stored as a line of data. It looks like this: Velocity, Ramp, Time, Dispenses, EX, Exhaust, Oscillation, EX, EX, EX, EX, EX, For example: 1000,3000,100,1.2.3,0,100,50,0,0,0,0,0 where Velocity is 1000, Ramp is 3000, Time is 10 seconds (tenths are stored in the last... -
Page 24: Diagscreen
2. Digital Inputs / Outputs: These panels show the current state for all the digital I/O for the entire system. 3. Show Desktop Button: This button will minimize the Model 300X control software taking you to the Windows desktop. 4. Exit Button: This button will exit the Model X software. -
Page 25: Spin Diagnostics Screen
5.11.1 Spin Diagnostics Screen The Diagnostic Screen allows manual operation of most of the hardware of the Model 300X. 1. Spin Velocity Display: Current spin chuck velocity is displayed here. 2. Spin Velocity: Clicking this box will bring up a numeric pad allowing entry of a desired velocity. - Page 26 home sensor. (Exhaust not available on all Models)
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Page 27: Configuration Screen
5.11.2 Configuration Screen The Configuration Screen allows for the setting of parameters for Model X operation. Not all parameters are available to all user levels. 1. Spin Configuration Button: This button navigates to the Spin Configuration Screen. 2. Password Configuration Button: This button navigates to the Password Configuration Screen. -
Page 28: Spin Configuration Screen
5.11.3 Spin Configuration Screen The Spin Configuration Screen allows for the setting of parameters for Model X operation, specific to the spin module. Not all parameters are available to all user levels. 1. Dispense Name Column: This column allows the user to label each dispense with a unique name to reflect the material dispensed. -
Page 29: Naming Dispenses On The Spin Config Screen
5.11.4 Naming Dispenses on the Spin Config Screen The dispenses may be named to reflect the material in each dispense. This name is then displayed on the TODO Spin Diagnostics screen and the TODO Dispense Selector screen used while writing a recipe. To name a dispense, click on the desired dispense in the Dispense Name Column. -
Page 30: Selecting Empty Sensors On The Spin Config Screen
5.11.5 Selecting Empty Sensors on the Spin Config Screen A sensor may be used to indicate when dispense material has run out. The sensor number tied to each dispense is displayed on the Spin Configuration screen. These are usually set at the factory and need no adjustment. However, if the material containers need to be switched or you no longer wish to use a sensor for a dispense, the Empty Sensors can be set here. -
Page 31: Password Configuration Screen
5.11.6 Password Configuration Screen The Password Configuration screen allows the user to change passwords. The default passwords are: Super User Level: CEE User Level: 200X Maintenance: DIAG To change a password, click into the New Password box for the desired User Level, an On-Screen Keyboard will appear allowing the user to enter a new password. -
Page 32: Navigation Bar
Navigation Bar The Navigation Bar enables Quick navigation of the X Model Software. The currently selected page is highlighted in white. The Run button navigates to the Run screen. This is where processes are run and monitored on the X Model. Edit The Edit button navigates to the Edit screen. -
Page 33: Live Update Feature
LIVE Update feature The LIVE Update feature of the Model X software allows the user to update the running recipe while its running. The LIVE Update feature is not available on all models. Figure 7.1 Spin Process Page with LIVE Update button highlighted The LIVE update button appears once a process has started. - Page 34 The editor will load with the currently running recipe. This editor will function just as the normal process editor functions. You can edit current steps, add steps, and delete steps. Some buttons have different functions in LIVE Update mode: Update button: This button loads the recipe currently in the editor into the spinner module, but does not save it to the hard drive.
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Page 35: Limitations Of Live Update Mode
Limitations of LIVE Update Mode Changes made to the recipe will not be reflected in the process module until the next step starts on the process module. Deleting a step that has already started will result in a step being skipped. Inserting a step before the current step being processed will result in a step being repeated. -
Page 36: Service & Maintenance
Service & Maintenance This maintenance manual provides personnel with procedure and guidelines for maintaining a Cee® 300X Spin Coater. Below is a chart of recommend maintenance scheduling. Maintenance Section Maintenance Schedule Safety Checks Before daily tool use Cleaning After daily tool use Mechanical Checklist See Section 5.2 for Details... -
Page 37: Maintenance - Vacuum Liquid Trap
Use only isopropyl or water based cleaner on the "power on-off", Cee® logo, the yellow "Caution ... Eye Protection", and the "Cee® model/serial number" labels. The display may be cleaned with glass cleaner, water, or isopropyl alcohol. - Page 38 Model 300X is now ready to use. 8.6. Spin Chuck Replacement The Cee Model 300X is capable of processing many different sizes of substrates. It may be necessary to change spin chucks to run different sizes of substrates, depending on the spin chuck design.
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Page 39: Troubleshooting Chart
8.7. Troubleshooting Chart The following chart gives alarm messages that may appear on the touch screen and how to resolve them. It also gives other conditions that may cause problems and their potential solutions. Alarm or Indication Potential Problem Resolution Blown fuses System dead, no display on Machine not plugged in/power...