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FILMETRICS F54 User Manual

Thin film mapping analyzer
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Filmetrics F54
Thin Film Mapping Analyzer
User Manual

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Summary of Contents for FILMETRICS F54

  • Page 1 Filmetrics F54 Thin Film Mapping Analyzer User Manual...
  • Page 2 WARNINGS DO NOT TOUCH/BEND THE FIBERS KEEP HANDS AWAY (high speed stage)
  • Page 3 WARNINGS DO NOT TOUCH/SCRATCH: AVOID SAMPLE CRASH: stage reference & background mirror Measurement objectives...
  • Page 4 Turn the light source on Tool usually always ON...
  • Page 5 Start the FILMapper software Stage initializes without warnings: KEEP HANDS AWAY!
  • Page 6 Move the stage to Load position RISK OF DAMAGING THE OPTICS: Do not load with stage under the objective!
  • Page 7 Sample loading: good practice OK (stage at 0,100) NO EXCHANGE UNDER OBJECTIVE!
  • Page 8 Choose a Recipe and Edit it From Wafer Map tab: From Measurement tab: (Under Thickness, n, k, r )
  • Page 9 Pick a Recipe • CMi folder: standard recipes (DO NOT MODIFY) • Users folder: custom recipes...
  • Page 10 Define the stack (Film Stack tab) • Choose the units (µm, nm, Å) • Define substrate/film(s)/medium • Input expected thickness (nominal ± range), tick to measure (enable fit) • -> Move to Analysis Options...
  • Page 11 Specify Analysis Options • Limit the Wavelength Range if appropriate • Adjust moving-average Smoothing to denoise the spectrum (use >=1000um to disable) • Change Method to Exact for stacks and/or thickness <150nm -> Move to Wafer Map...
  • Page 12 Choose a Wafer Map • Modify measurement configuration (sample size, number of points, exclusion, …) • OK to limit autofocus in center for the sake of speed -> Move to Acquisition Settings Advanced options (including Deskew) under Wafer Map tab: Edit -> Map Pattern…...

  • Page 13: Acquisition Settings

    Acquisition settings • Enable/disable Autofocus • Available methods are Goodness Of Fit, Max of reflectometer signal, and Image-based focus • Save As to create a new recipe (DO NOT OVERWRITE CMi ones) -> Acquire a Baseline (optional) and perform a Measurement...
  • Page 14 Objective and Baseline • Select the objective matching the current configuration (IMPORTANT!) • Optional: take a Baseline measurement (lamp warm-up time ~5min)
  • Page 15 Objectives • 5x -red ring (spot size 50µm) • 15x -violet ring (spot size 17µm)
  • Page 16 Baseline procedure To move the stage (when prompted) 1. Load your sample 2. Acquire sample reflectance 3. Unload sample and load reference standard (Si) 4. Acquire reference standard reflectance Height for best autofocus on 525µm-thick wafers 5. Let the machine acquire the background (45°...
  • Page 17 Baseline calibration sample for SiO2 on Si Filmetrics calibration sample: 1. Sample reflectance calibration region (go to 30,0) 2. Reference reflectance calibration region (go to 0,0) 3. (patterned sample region) One Si wafer available for reference reflectance calibration...
  • Page 18 Baseline steps 1. Sample reflectance (your wafer) 2. Reflectance standard (Si wafer)
  • Page 19 Baseline warning Software issues a warning in case of important intensity difference after new baseline This can be due to • Lamp state (off or burnt, not warmed-up) • Objective used for last baseline Acknowledge if it makes sense!
  • Page 20 Point measurements • Navigate to the point of interest by means of • camera and r/theta controls (arrows), or • Go To… button (wafer center: 0,0) • Clic Measure Check goodness of fit (GOF)
  • Page 21 Measurement summary (History tab) • Basic statistics available in realtime on all stored data => Purge history • Export to text/spreadsheet...
  • Page 22 Wafer Mapping Click on Start Interacting with the map: • Left click: go to point • Right click: mark as invalid/interpolate from neighbours...
  • Page 23 Turn lamp off when done!

  • Page 24: Tool Specifications

    Tool specifications Thickness Range ~20nm -- ~40um Accuracy 2nm or 0.2% Precision 0.2nm Stability 0.05nm Wavelength range 380-1050nm Spot size 250um aperture: 50um@5x, 17um@15x (on request) 500um aperture: 100um@5x, 33um@15x Typical speed 5 points: 5’’ 25 points: 25’’ 56 points: 29’’...