FILMETRICS F20 Operation Manual
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FILMETRICS F20 Operation Manual

Thin-film analyzer
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Operations Manual
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FILMETRICS F20
Thin-Film Analyzer
Revision 6.9.2
Copyright © 2012 by Filmetrics, Inc.
All Rights Reserved

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Summary of Contents for FILMETRICS F20

  • Page 1 Operations Manual for the FILMETRICS F20 Thin-Film Analyzer Revision 6.9.2 Copyright © 2012 by Filmetrics, Inc. All Rights Reserved...
  • Page 2 Welcome What is the F20 used for? The Filmetrics F20 is used to measure the thickness and optical constants (n and k) of dielectric and semiconductor thin films. Measured films must be optically smooth and within the thickness range set by the system configuration requirements specified in Specifications.

  • Page 3: Safety, Maintenance And Care

    Equipment) Directive 2002/96/EC. This symbol indicates that the product meets the applicable EU safety, health and environmental protection directive requirements. This label indicates the Model Number and Serial Number of the instrument. This information may be necessary when contacting Filmetrics for assistance.
  • Page 4 Disclaimer:Use of this instrument in a manner inconsistent with the information and directions included in this manual may impair the protections designed into the product resulting in danger to the operator or damage to the instrument Installation Location: When deciding on a location for the instrument, ensure that the instrument in installed in a well-ventilated location.

  • Page 5: Ce Mandated Warnings

    CE Mandated Warnings Please read the following instructions carefully to prevent potential shock or fire hazards. This manual should be retained for future use Bitte lesen Sie die nachstehende Anleitung sorgfältig durch um Stromschlag und Feuergefahr zu vermeiden. Diese Betriebsanleitung sollte für späteren Gebrauch sorgfältig aufbewahrt werden. Preghiamo di leggere accuratamente, le sequenti Instruzioni, per evitare Prossiomi Incendi e Correnti.
  • Page 6 Evitare contatto con acqua oppure liquidi Infiammabili al Macchineggio. Auche entrate di Sole. Do not insert any objects into the unit. Keinen Gegenstand in das Gerät einbringen. Do non inseriamo any obietta into gli unità. Non mettere ogetti dentro la Macchina. Do not use near open flame or heat.

  • Page 7: Software Overview

    The following pages outline the main features of the FILMeasure software. The basic steps for any F20 measurement are selecting and editing the film structure, taking a base- line measurement, and then making and evaluating the measurement. The details of each of these steps are explained below, followed by descriptions of other FILMeasure functions.
  • Page 8 2. The Edit menu is used for viewing and editing the material library. 3. Used to Setup various parameters and the graphic display. 4. For starting and stopping continuous reflectance acquisition and data measurement. 5. Used to access the Help, Diagnostic and Support functions of the software. 6.
  • Page 9 Graph Options can be accessed and edited by double-clicking on the main graph window. 16. This allows the user to enter information about the Operator and Sample for tracking purposes.

  • Page 10: History Tab

    History Tab 1. Standard Windows File menu for saving and retrieving data, printing, etc. 2. The menu is used for viewing and editing the material library. Edit 3. Used to various parameters and the graphic display. Setup 4. For starting and stopping continuous reflectance acquisition and data measurement. 5.
  • Page 11 When the Measurement Trend tab is selected in the History window, the right side of the screens graphs the results. 9. Displays the measurement results for the currently selected measurement number. 10. Displays the spectra for the currently selected measurement number. 11.

  • Page 12: Edit Recipe Window

    Edit Recipe Window The Edit Recipe Window is used to define the film stack and to set analysis and acquisition param- eters. A recipe defines the film to be measured and its approximate thickness, any other films present, and the quantities to be measured: 1.

  • Page 13: Editing Film Structures

    6. Select from different recipes saved under the Recipes folder. 7. Author, as defined by user login name and recipe modification date are indicated here. 8. Additional solving options for Composition, Thickness, and Non-Uniformity can be hidden or revealed by pressing the + or - buttons. 9.
  • Page 14 then clicking on Save Changes. New structures may be added to the Recipe: list by opening the Edit Recipe dialog box, setting the desired specifications, and then clicking on Save As. Similarly, a structure may be deleted (removed from the Recipe: list) by clicking on the Delete Recipe but- ton.

  • Page 15: Film Stack

    Film Stack The Film Stack tab is used to define the film structure, as well as the starting guesses and con- straints for thickness, n and k. This is also where you determine your analysis method, Grid, or None, as well as any that may be present in the sample.
  • Page 16 a) choose a material in the library that is similar. b) if the material is transparent (an insulator), select “Enter Refractive Index Value” from the material list and enter a value for the refractive index (n will automatically be varied by FILMeasure to account for dispersion effects, with the entered value being n at 632 nm).
  • Page 17 Fourier search for thickness The FFT option in the thickness dropdown is an alternative option to let FILMeasure choose an ini- tial thickness for analysis. The Fourier Transform method analyzes the oscillations present in the spectrum and determines the film thicknesses based on the periodicity of those oscillations. It is somewhat less robust than the method, but is better at finding the correct thickness in cases Grid...
  • Page 18 Non-Uniformity Selecting this option enables modeling of thickness non-uniformity within the measurement spot. An initial guess for Non-Uniformity must first be made, and then solving can be enabled or dis- abled by toggling the check box.
  • Page 19 Search The Search Materials dialog box is accessible by left clicking on a material name in the Edit  Recipe > Film Stack tab. This feature allows the user to search for materials by using either the materials name, or a keyword for a certain class of materials. The search function will also show a brief Description of the material selected, as well as any Synonyms or Keywords related to the material file.

  • Page 20: Analysis Options

    Analysis Options Correct setting of the following options will help ensure accurate measurements. Many of the options are set automatically when film information is supplied in the Edit Recipe dialog box, and all of them can be saved so that subsequent measurements can be made as quickly and easily as possible.
  • Page 21 (defined as index multiplied by thickness) equal or greater than the specified value. This value should be lowered to increase smoothing, and raised to decrease smoothing. To eliminate smooth- ing, a very high value (for example, 1000 um) should be entered. Source Data If more than one data set is present, this optiontells the software whether to analyze the reflection, transmission data, 70 degree reflection data, or some combination of the three.
  • Page 22 Display Details This feature controls the wavelength at which n and k are displayed in the Measurement Details portion of the main screen. These values are only displayed if solving for n or k is enabled in the Film Stack window. Advanced Analysis Options for FFT Analysis.
  • Page 23 Tilted Sample/Lost Light Samples with nonplanar surfaces scatter some of the light away from the collection optics. This option automatically compensates for the light lost due to nonplanarity. Lock Identical Layers Samples comprised of repeating layers can be more accurately measured by activating this option. By activating these options, all properties of any layers that initially have the same material or thick- ness are locked together.

  • Page 24: Acquisition Settings

    Acquisition Settings This menu lets the user control sampling settings, active spectrometers (on EXR and UVX sys- tems), and required baseline reference. Measurement Timing Use Recommended Sampling Time Selecting this option uses the sampling time that has been automatically calculated by the software during the baseline procedure.
  • Page 25 Use Manually Set Parameters Users can set the integration time per acquisition cycle and set a number of integration cycles over which to average. When using this option, the total sampling time is equal to the integration time multiplied by the number of integration cycles. To set the integration time manually, set the sample on the stage and select Setup>Raw Signal…...
  • Page 26 Alarms GOF Error Constraining the GOF Error will exclude measurements where the calculated does not reach the specified limit. A warning or “Invalid” result will appear if the GOF constraint is not met. Specify 0 to have all solutions reported. Activate Alarms When Activate Alarms is selected, an alarm will trigger if the measured thickness of the sample is outside the specified Thickness Limits.

  • Page 27: Understand And Evaluating Measurement Results

    Understand and Evaluating Measurement Results This section covers information on the Display of Measured Spectra and a more in depth look at Goodness Of Fit value. Display of Measured Data Once film stack and measurement information have been entered and baseline spectra taken, meas- urements may be made by clicking on the Measure button.

  • Page 28: File Menu

    Custom materials, either created by the user or provided by Filmetrics, can be imported using this command. Import: License… When the user purchases an upgrade for the system, Filmetrics will send a license file to the user. The license must be imported into the software before upgrades are effective.
  • Page 29 Export: SystemInfo File… For certain upgrade purchases that can be done through software, the user will be required to send the SystemInfo file to Filmetrics, which can be exported using this command. Edit Menu This Menu allows access to the Material Library.
  • Page 30 Material Library The material library is used to display information about existing materials as well as create new ones. Material files shipped with FILMeasure have the file extension “.fibnk” and will only display limited information. User created material files can be plotted on a graph or viewed in table form. A new material may be entered into the material library manually if refractive index (n) and extinc- tion coefficient (k) are known as a function of wavelength for the new material.

  • Page 31: Setup Menu

    e. Alternatively, select on the Model>Custom option button and click the Model button. A Custom Model Information dialog box will appear. Select the appropriate model. Enter in the known coefficients and click OK. Cauchy coefficients are displayed in microns. If they are entered in Å, FILMeasure will automatically detect this and convert them to microns.
  • Page 32 Take Background This button allows the background portion of the baseline measurement to be taken without having to re-take the reference measurement. Take Reference This button allows the reference portion of the baseline measurement to be taken without having to re-take the background measurement.
  • Page 33 The Optics Configuration dialog box is accessible through both the Setup menu and the Acqui- sition Settings tab under the Edit Recipe window. It is important to make sure that you remember to select the proper configuration for your measurements in order to obtain the best possible results. Not all options are available with all systems.
  • Page 34 Spectrum Color Display: Fixed Luminance The user can fix the luminance of the displayed color. Since antireflective coatings, for example, are inherently transmitting, the spectra has very little luminance and the coating color may appear black on screen. Fixing the luminance does not affect the color space coordinate results. Spectrum colors of the same spectrum with fixed luminance of 0%, 30%, and 60%, respectively.
  • Page 35 Turning on access control requires Supervisor level access. The software is delivered with one user, a supervisor, in the list of authorized users as shown below: UserID: filmsuper Password: filmetricsfff To turn on access control, log in as filmsuper using the password shown above. The Activate Access Control checkbox should now be enabled.
  • Page 36 Raw Signal Raw Signal The Raw Signal dialog box allows the user to plot the raw (no baseline corrections applied) spec- trometer signal on the main graph. No spectral smoothing is applied, and there are no saturation warnings. This is useful when adjusting the focus or when setting integration times manually. Integration Time This sets the integration time of the spectrometer.
  • Page 37 Graph Limits This allows the user to set temporary graph limits. Options The General Settings tab is used to enable, disable, and modify various options in the software. The Selected Camera pull down menu allows the user to enable the Sample Cam, or choose between different cameras if there is more than one attached to the system.

  • Page 38: Acquire Menu

    The Data Recording tab allows for automatic saving of all spectra and results to a central file. Acquire Menu Acquire > Continuous Acquire (Measure Tab only) This feature collects real-time data from the spectrometer. It is useful when searching for a specific location to measure (for example, locating a more uniform area of the sample that exhibits inter- ference fringes).

  • Page 39: Batch Acquire

    This feature collects a spectrum and analyzes it. This is the same as pressing the Measure Button. Batch Acquire The Batch functions allow you to act on groups of spectra, rather than each individual spectrum Acquire > Batch > Acquire This option allows you to acquire a pre-selected number of spectra.

  • Page 40: Help Menu

    Help>Diagnostics shows the user information regarding the data taken during the baseline routine. Help > About FILMeasure Information about the hardware and software versions and the system serial number can be found here. Please have this information available when calling Filmetrics for technical assistance.

  • Page 41: Taking A Baseline

    Help>About FILMeasure... window Taking a Baseline The baseline measurement allows the FILMeasure software to take into account the response inher- ent to the reflectance measurement hardware. It does this by first measuring the sample, then a ref- erence standard, and finally by taking a “dark” reading. The light source should be allowed to stabilize at least ten minutes before the baseline is taken.
  • Page 42 placing the sample on the stage underneath the light path. This step is used by the software to help determine the needed integration times and cycles to best measure the sample. The next step is to take a reference spectrum. This done by placing a reference sample of similar reflectance to the test sample (usually silicon) on the sample stage.

  • Page 43: Making Measurements

    Making Measurements Accurate measurements with the F20 rely on using the proper measurement setup. The basic steps for any F20 measurement are: 1) selecting and editing the type of film to be measured 2) taking a baseline measurement 3) clicking on the Measure button to make the measurement.

  • Page 44: Measuring Thickness

    For this example we will demonstrate only the measurement of SiO2 on silicon (the SiO2 on Sil- icon Test Sample provided with the F20 may be used), but this type of measurement has an extremely broad range of applications, including hardcoats, polysilicon, and LCD cell gaps, to name just a few.
  • Page 45 Step 2: Edit the film recipe To edit the structure, click the Edit Recipe button to open the dialog box. Check to see that the film sequence matches that of the actual sample. If not, different films can be selected. Also enter your best guess for the thickness of the film to be measured, and check that only the SiO2 layer thickness is being measured.
  • Page 46 In the event you are using a contact probe, make the background measurement by pointing the tip of the probe away from any light source or bright objects. Do not place the contact probe on a dark surface for the background measurement. Click “Finish”...
  • Page 47 Example #2: Thickness of Films Less Than ½ Micron Thick on Thick Transparent Substrates: TiO2 on Glass This example demonstrates the measurement of TiO2 on glass. This type of measurement has a broad range of other applications, most commonly optical coating and flat-panel display process films.
  • Page 48 Example Edit recipe>Film Stack window for measuring the thickness of a film less than ½ micron thick on a thick, clear substrate. Step 2: Edit the film recipe To edit the structure, click the Edit Recipe button to open the dialog box. Check to see that the film sequence matches that of the actual sample.
  • Page 49 Hardware: For this type of measurement the sample must be flat, with the front and backsides parallel. The standard SS-3 sample stage is required. The contact stage option is recommended. If you are able to take the baseline measurements with an uncoated substrate, then follow the film structure setup instructions in Example Step 1: Select the film recipe...
  • Page 50 thickness is being measured. The Robust (adaptive; thickness only) button should be deselected under the Analysis Options tab. Example Edit Recipe>Analysis Options window for measuring the thickness of films less than ½ micron thick on thin transparent substrate. Step 3: Take a Baseline Measurement Take a baseline measurement by first clicking on the Baseline button on the main screen.

  • Page 51: Example 4: Transmittance Measurements

    Step 4: Make the Measurement Make the measurement by placing your sample on the stage (or the contact probe on your sample) and click on the Measure button. FILMeasure will then acquire the reflectance spectrum and cal- culate the corresponding thickness. If the measurement was successful, the minima and the maxima of the calculated reflectance (the red line on the graph) will coincide in wavelength with the minima and the maxima of the measured reflectance (the blue line on the graph).
  • Page 52 Step 1: Specify Transmittance Configuration Under the Setup menu select Optics Configuration and select standard stage with transmittance option. Setup menu. Optics Configuration dialog box.

  • Page 53: Measuring Thickness And Refractive Index

    Step 2: Take a Baseline Measurement Take a baseline measurement by first clicking on the Baseline button on the main screen. A dialog box will appear to guide you through the process. The first step will be a measurement of the ref- erence material.
  • Page 54 Example 2: Thickness and Optical Constants of Films on Thick Transparent Substrates Example 1: Thickness and Optical Constants of Films on Opaque Sub- strates: Si3N4 on Silicon For this example we will demonstrate the measurement of Si3N4 on silicon but this type of meas- urement has an extremely broad range of applications, including the measurement of oxides, poly- silicon, and optical coatings.
  • Page 55 Step 2: Edit the film recipe To edit the recipe, click the Edit Recipe button to open the dialog box. Check to see that the film sequence matches that of the actual sample. If not, different films can be selected. Also enter your best guess for the thickness of the film to be measured.
  • Page 56 Step 4: Make the Measurement Make the measurement by placing your sample on the stage and click on the Measure button. FILMeasure will then acquire the reflectance spectrum and calculate the corresponding thickness. If the measurement was successful, the calculated reflectance (the red line on the graph) will coin- cide with the measured reflectance (the blue line on the graph).
  • Page 57 Hardware: The contact stage must be used when measuring the thickness and optical constants of films on a thick transparent substrate (see Chapter 1 for setup of the contact stage). Use of the contact stage means that the front side of the sample must be flat. Step 1: Select the film recipe Select the film structure to be measured, in this case “MgF2 on BK7”, from the Recipe: list box on the main screen.
  • Page 58 Example Edit Structure>Analysis Options window for measuring the thickness, n, and k of films on a thick transparent substrate. Step 3: Take a Baseline Measurement Take a baseline measurement by first clicking on the Baseline button on the main screen. A dialog box will appear to guide you through the process.

  • Page 59: Measurement Assumptions

    Measured and calculated reflectance spectra when measuring the thickness, n, and k of MgF2 on BK7 glass. Measurement Assumptions The following assumptions must be valid if accurate measurements are to be made with the F20: 1. Every film present in the structure is specified in the Edit Recipe dialog box. This includes every film present in the sample including so-called adhesion films, oxide films (unless they are less than 20 Å...

  • Page 60: Hints For Improved Accuracy

    3. The light source has been allowed to warm up for at least 5 minutes if measuring thickness of films greater than 250nm, or 15 minutes if measuring thickness of films less than 250nm, refractive index, or reflectance. In addition, the following assumptions are made if optical constants and/or very thin films (<500 Å) are to be measured: 4.

  • Page 61: Restricting The Wavelength Range Of The Analyzed Reflectance Spectrum

    surface looks hazy at the measurement spot. The fact that haze can be seen means that there is scat- tered light. (A perfectly smooth surface will scatter no light, and thus the measured spot will not be visible.) Usually roughness less than 2.5 nm will not be visible, while roughness greater than about 25 nm will be extremely hazy.

  • Page 62: Troubleshooting

    Example of a reduced wavelength range for measuring thickness of non-ideal films. Measuring thickness when the approximate thickness is not well known Unless otherwise specified, FILMeasure will determine a film’s thickness by finding the best answer within about 1000 Å of the initial (user supplied) value. If the approximate thickness of the film is not known to better than about 1000 Å, then the Grid method or the Fourier Transform method of determining approximate thickness may be applied.
  • Page 63 Case #1: No oscillations, or portions of oscillations, are present in the measured reflectance spectrum. Case #2: The measured reflectance spectrum has periodic oscillations across the entire screen, but its minima and maxima do not match up with the calculated reflectance. Case #3: Two or more different, but nearly the same, thickness readings are obtainable from the same measurement location.

  • Page 64: Case 4: Not All Of The Measured Spectrum Displays Oscillations

    wavelength range and then gradually walk off one another outside this wavelength range). When thickness is the only value being measured, this is normally caused by the refractive index of the measured layer not matching that used by FILMeasure, especially when the film is greater than one micron thick.

  • Page 65: Advanced Features

    Advanced Features This section describes several advanced features available within the FILMeasure 6 software. This includes a description of the Fast Fourier Transform Thickness solver, as well as how to create and edit n and k files. Fast Fourier Transform Thickness Only Mode Creating and Editing n and k Files Fast Fourier Transform Thickness Only Mode (FFT mode)
  • Page 66 In FFT TO mode, instead of matching the measured reflectance spectrum with a calculated reflec- tance spectrum, FILMeasure identifies the peaks in the FFT Spectrum and uses them to compute the layer thicknesses. The number of possible FFT peaks is n*(n+1)/2 where n is the number of lay- ers.

  • Page 67: Creating And Editing N And K Files

    b) Incorrect Structure Definition – If the refractive index of one or more layers in the structure is different from what is described in the layer structure, then the FFT peak amplitudes in the blue curve will not match the peak heights in the red curve. The software will attempt to scale the red curve, but if there is more than one FFT peak present, the scaling will only result in one correct peak height.
  • Page 68 Converting Microsoft Excel files into FILMeasure n and k files For wavelength versus n or wavelength versus k data saved in Excel (*.xls) format, the data can be directly saved as material files that can be read by FILMeasure. For .nnn and .kkk files. For both n and k files, the data should follow the format shown below, where the wavelength values, in units of nanometers, are in the first column, and the n or k values are in the second.
  • Page 69 (and their corresponding numbers) are: metal (1), semiconductor (2), insulator (3), photoresist (4), and other (5). To save the file created by Microsoft Excel, go to File>Save As… For Save as Type: choose CSV (Comma delimited) (*.csv). Save the file as “FILENAME.fitnk” (FILENAME represents the name you wish to call the file;...

  • Page 70: Theory Of Operation

    Theory of Operation This section describes how the instruments work and includes the theory the measurements are based on, specifics about the hardware, and more detail about the baseline measurement. Measurement Theory Thickness Measurement Details Hardware Operation The Baseline Measurement Measurement Theory Our instruments measure thin-film characteristics by either reflecting or transmitting light through the sample, and then analyzing this light over a range of wavelengths.

  • Page 71: Thickness Measurement Details

    The intensity of the reflected light is measured at different wavelengths with a spec- trometer. The F20 spectrometer uses a diffraction grating to disperse the light and a linear photodiode array to measure the light at the different wavelengths. After a user-selectable inte- gration time, the accumulated charge in each photodiode is read by the computer.

  • Page 72: The Baseline Measurement

    The Baseline Measurement The baseline measurement allows the FILMeasure software to take into account the response inher- ent to the reflectance measurement hardware. It does this by measuring a reference sample and by taking a “dark” reading. In any optical system there are many components whose characteristics vary with wavelength (e.g., the output of the light source and the sensitivity of the spectrometer).

  • Page 73: How To Contact Us

    We may be reached by phone at +1-858-573-9300, by fax at +1-858-573-9400, or by e-mail at support@filmetrics.com.

  • Page 74: Performance Specifications

    Thermally grown SiO2 on Si (except for F20-XT: Si on SiO2 on Si). Standard deviation of 100 thickness readings of 500 nm SiO2 film on silicon substrate. Value is average of standard deviations measured over twenty successive days. F20-XT values are based on 7 µm Si on SiO2 on Si sample.

  • Page 75: System Configurations

    Contact Probe (CP-1 and CP-C) Connect the Contact Probe to the F20 as shown below. The two fiber ends leading from the Con- tact Probe are identical; they can be attached to either the light source or spectrometer.

  • Page 76: Contact Stage (Ss-3 With Cs-1 Option)

    Contact Stage (SS-3 with CS-1 option): Connect the contact stage fiber optic cable to the F20 as shown below. The two fiber ends leading from the common end of the fiber are identical and can each be attached to either the light source or spectrometer.

  • Page 77: Reduced Kinematic Mount With Lens Assembly (La1-Rkm)

    Reduced Kinematic Mount with Lens Assembly (LA1-RKM) Step #1: Connect Fiber-Optic Cable to the F20 Connect the fiber-optic cable between the F20 front panel and the LA1-RKM as shown below. Slide the fiber-optic cable part way into the lens assembly. The spring-loaded setscrew should be adjusted so that the fiber-optic cable is held in place, yet it may be moved in and out for focus adjustments.
  • Page 78 Step #2: Adjust the lens assembly: The focus and tilt of the lens assembly need to be adjusted for maximum signal and assumes that the lens assembly has been mounted on a fixture approximately 6 inches above the sample surface, and the “read”...
  • Page 79 Next connect the fiber-optic cable between the F20 and the stage as shown below. If the fiber does not have a white label indicating “Light Source”, then the two fiber ends are identical and can each be attached to either the light source or spectrometer.

  • Page 80: Transmission Option (Ss-3 With T-1 Option)

    Transmission Option (SS-3 with T-1 option): Connect the fiber-optic cable between the F20 and the stage as shown below. The fiber-optic cable should be fully inserted into the arm on the stage. The screw on the end of the stage arm is actually a spring-loaded ball plunger and does not require tightening.
  • Page 81 If the SS-3 stage is not already in UV position, it can be repositioned by removing the hex-socket bolt accessed on the backside of the stage arm. Next connect the fiber-optic cable between the F20, the UV light source and the stage as shown below. If the fiber does not have a white label indi- cating “Light Source”, then the two fiber ends are identical and can each be attached to either the...

  • Page 82: Light Bulb Replacement

    SS-3 in UVX Configuration Connect the fiber-optic cable by attaching the blue end labeled “UV Illumination” to the external UV light source and the red end labeled “nir illumination” to the internal tungsten-halogen light source. Attach the remaining two ends to the respective color coded spectrometer inputs: blue for UV, red for NIR.

  • Page 83: Automation And Data

    FILMeasure software. Assuming that the FILMeasure program is installed in the default location, the example software can be found in C:\Program Files\Filmetrics\FILMeasure\Sourc- eCode\FIRemoteTest. Additionally, an executable, FIRemoteTest.exe, is located in the FILMeasure folder.
  • Page 84 Browser which is built into Microsoft Visual Studio in order to discover the available properties and methods. Methods, Property and Events: AcquireSpectrum ActivateChannelDisplayTab AnalyzeSpectrum AuthenticateRefBac BaselineAcquireBackgroundAfterRef BaselineAcquireReference BaselineAcquireReferenceT BaselineAcquireReferenceUsingOldSampleReflectance BaselineAcquireSpectrumFromSample BaselineCommit BaselineSetRefMat BaselineShowDialog GUIVisible MeasChannelGuid MeasChannelGuids MeasChannelHWName MeasChannelHWSerialNumber MeasChannelName Measure NumberOfChannels NumberOfSpectrometers NumberOfSubSystems...
  • Page 85 measChannel guid. However, some methods are relevant only to a single channel. If you supply a measSystem guid as the argument for one of these methods, an exception will be thrown. ActivateMonitorDisplayTab BaselineExistsAndIsAuthenticated MeasSystemGuid MeasSystemGuids MeasSystemHWName MeasSystemName NumberOfSystems ShutdownRequestedHandler SystemAutoSave SystemAutoSaveBaseFileNameAndPath SystemMeasure SystemStartMonitoring...
  • Page 86 guiWindowStartupState – If is set to then the FIRemote User inter- guiStartupState Shown face window will appear on the screen at the completion of the startup process. Note that this argu- ment has no effect if . The state of the window is controlled by guiType = None .
  • Page 87 Public Sub AcquireSpectrum(ByVal measChannelGuid Guid, ByRef spectrumWavelengths() Single, ByRef spectrumData() Single, ByVal flushPipeline Boolean, ByRef pri- marySpecIsReflectance Boolean) measChannelGuid – The GUID of the measurement channel for which a spectrum should be acquired. If multiple measurement channels exist, the measChannelGuid must be specified. spectrumWavelengths –...
  • Page 88 AnalyzeSpectrum Public Function AnalyzeSpectrum(ByVal formatSummaryAsRtf Boolean) FIMeasResults Public Function AnalyzeSpectrum(ByVal formatSummaryAsRtf Boolean, ByVal addToHistory Boolean) FIMeasResults Public Function AnalyzeSpectrum(ByVal measChannelGuid Guid, ByVal formatSummaryAsRtf Boolean) FIMeasResults Public Function AnalyzeSpectrum(ByVal measChannelGuid Guid, ByVal formatSummaryAsRtf Boolean, ByVal addToHistory Boolean) FIMeasResults measChannelGuid – The GUID of the measurement channel for which a spectrum should be analyzed and optionally added to history.
  • Page 89 Return to Index... BaselineAcquireBackgroundAfterRef Public Sub BaselineAcquireBackgroundAfterRef() Public Sub BaselineAcquireBackgroundAfterRef(ByVal meas- ChannelOrSystemGuid Guid) measChannelOrSystemGuid – The GUID of the measurement channel for which a background should be acquired. If multiple measurement channels exist, the measChannelGuid must be spec- ified. Remarks: This method provides a means to automate what is most commonly called step #3 of the Baseline procedure (step #4 for F10-VC, “Reflection Only”...
  • Page 90 measChannelOrSystemGuid – The GUID of the measurement channel for which a Transmittance reference should be acquired. If multiple measurement channels exist, the measChannelGuid must be specified. Remarks: This method should only be called for the F10-VC. It provides a means to automate step #3 of the Baseline procedure for “Reflectance Only”...
  • Page 91 Public Sub BaselineCommit(ByVal measChannelOrSystemGuid Guid) measChannelOrSystemGuid – The GUID of the measurement channel for which a new baseline should be commited. If multiple measurement channels exist, the measChannelGuid must be spec- ified. Remarks: Call this method to finalize the baseline procedure and commit the acquired spectra for use as a new baseline measurement.
  • Page 92 – The GUID of the measurement channel for which the channel hardware name should be returned. Remarks: The hardware name is composed of a system name string and a serial number string sep- arated by a colon. Example: F20:09A006.
  • Page 93 Return to Index... MeasChannelHWSerialNumber Public ReadOnly Property MeasChannelHWSerialNumber(ByVal meas- ChannelGuid Guid) As String Public ReadOnly Property MeasChannelHWSerialNumber(ByVal meas- ChannelGuid Guid, ByVal spectrometerIndex Integer) String Public ReadOnly Property MeasChannelHWSerialNumber(ByVal meas- ChannelGuid Guid, ByVal subsystemIndex Integer, ByVal spectrometerIndex Integer) As String measChannelGuid – The GUID of the measurement channel. spectrometerIndex –...
  • Page 94 Public Function Measure(ByVal measChannelGuid Guid, ByVal formatSummaryAsRtf Booleanl) FIMeasResults Public Function Measure(ByVal measChannelGuid Guid, ByVal formatSummaryAsRtf Booleanl, ByVal addToHistory Booleanl) FIMeasResults measChannelGuid – The GUID of the measurement channel for which a spectrum should be acquired and analyzed. If multiple measurement channels exist, the measChannelGuid must be specified.
  • Page 95 Remarks: The number of spectrometers in the specified subsystem. If subsystemIndex is not pro- vided, the default index = 0 will be used. Return to Index... NumberOfSubSystems Public ReadOnly Property NumberOfSubSystems(ByVal meas- ChannelGuid Guid) As Integer measChannelGuid – The GUID of the measurement channel. Remarks: The number of subsystems that compose the specified measurement channel.
  • Page 96 Return to Index... OpenSpectrumFromBuffer Public Sub OpenSpectrumFromBuffer(ByVal theBuffer Byte()) Public Sub OpenSpectrumFromBuffer(ByVal theBuffer Byte(), ByVal measChannelGuid Guid) theBuffer – Byte array containing spectrum. Data in this array must have been created by Save- SpectrumToBuffer method. measChannelGuid – The GUID of the measurement channel for a spectrum which is to be opened.
  • Page 97 opaque. Any changes to the data in the buffer may render the data unusable and/or may not be com- patible with future versions of FILMeasure. Return to Index. SetAnalysisWavelengthRange Public Sub SetRecipeSetAnalysisWavelengthRange(ByVal meas- ChannelGuidmeasChannelOrSystemGuid AsGuid, ByVal start- Wavelength_nm Single, ByVal endWavelength_nm Single) Public Sub SetAnalysisWavelengthRange(ByVal...
  • Page 98 Return to Index. SetN Public Sub SetN(ByVal measChannelOrSystemGuid AsGuid, ByVal layerNumber Integer, ByVal refractiveIndex Single) Public Sub SetN(ByVal layerNumber Integer, ByVal refrac- tiveIndex Single) measChannelOrSystemGuid – The GUID of the measurement channel or system. If multiple meas- urement channels exist, the measChannelOrSystemGuid must be specified (since each meas- urement channel has its own active recipe).
  • Page 99 SetRoughness Public Sub SetRoughness(ByVal measChannelOrSystemGuid Guid, ByVal layerNumber Integer, ByVal roughness_nm Single) Public Sub SetRoughness(ByVal layerNumber Integer, ByVal roughness_nm Single) measChannelOrSystemGuid – The GUID of the measurement channel or system. If multiple meas- urement channels exist, the measChannelOrSystemGuid must be specified (since each meas- urement channel has its own active recipe).
  • Page 100 SpectrometerDiagnostics Public ReadOnly Property SpectrometerDiagnostics() AsFISpec- DiagnosticsInfo() Public ReadOnly Property SpectrometerDiagnostics(ByVal meas- ChannelGuid AsGuid)As FISpecDiagnosticsInfo() Public ReadOnly Property SpectrometerDiagnostics(ByVal meas- ChannelGuid Guid, ByVal subsystemIndex Integer) As FISpecDiagnosticsInfo() measChannelGuid – The GUID of the measurement channel. subsystemIndex – The subsystem index (to select among multiple subsystems in the channel). Remarks: Returns an array of objects containing information about the spectrometers.
  • Page 101 Remarks: In some cases, it is desirable to check whether the baseline is already authenticated and if not whether it is possible to authenticate it. The client software has the option of automatically authenticating the baseline if that is desirable. Return to Index...
  • Page 102 MeasSystemName Public ReadOnly Property MeasSystemName(ByVal systemGuid Guid) As String systemGuid – The GUID of a measurement system. Remarks: The default system name is the empty string. Return to Index... NumberOfSystems Public ReadOnly Property NumberOfSystems() As Integer Remarks: Number of measurement systems that exist. Return to Index...
  • Page 103 Return to Index... SystemAutoSaveBaseFileNameAndPath Public Property SystemAutoSaveBaseFileNameAndPath() As String Public Property SystemAutoSaveBaseFileNameAndPath(ByVal sys- temGuid Guid) As String systemGuid – The GUID of a measurement system. Remarks: You can set or get the base filename and path for the AutoSave file using this property. The full filename is generated by appending a date and time stamp to the base filename.
  • Page 104 This license agreement ("license") permits you to use one copy of FILMeasure ("Software") on any single computer. The Software is owned by Filmetrics, Inc. and is protected by United States copyright law and international treaty provisions. Therefore, this software should be treated as any...
  • Page 105 other copyrighted material except that you may either: (1) make one copy of the Software for archival backup purposes, or (2) copy the Software to a single hard disk. If the Software is used on a networked computer system where more than one computer can access the Software provisions must be made to insure that the number of concurrently executing copies of the Software cannot exceed the number of licenses.
  • Page 106 Filmetrics, Inc. Limited Liability Statement In no event will Filmetrics, Inc. be liable for any damages or expenses, including any lost profits, lost savings, or other incidental or consequential damages arising or associated with the use of, mis- use of, or inability to use its products.

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