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NT-MDT NTEGRA Spectra Probe NanoLaboratory Instruction Manual

Inverted configuration with solar tii spectrometer
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NTEGRA Spectra
Probe NanoLaboratory
Inverted Configuration with Solar TII spectrometer
Instruction Manual
12 April 2010
Copyright © NT-MDT
Web Page:
http://www.ntmdt.com
General Information:
spm@ntmdt.ru
Technical Support:
support@ntmdt.ru
NT-MDT Co., building 100,
Zelenograd, 124482, Moscow, Russia
Tel.: +7 499-735-77-77
Fax: +7 499-735-64-10

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  • Page 1 NTEGRA Spectra Probe NanoLaboratory Inverted Configuration with Solar TII spectrometer Instruction Manual 12 April 2010 Copyright © NT-MDT Web Page: http://www.ntmdt.com General Information: spm@ntmdt.ru Technical Support: support@ntmdt.ru NT-MDT Co., building 100, Zelenograd, 124482, Moscow, Russia Tel.: +7 499-735-77-77 Fax: +7 499-735-64-10...
  • Page 2 Read me First! Observe safety measures for operation with devices containing sources of laser radiation. Do not stare into the beam. A label warning about the presence of laser radiation is attached to the measuring head (Fig. 1) as well as to the laser sources. Fig.
  • Page 3 User’s documentation set The following manuals are included into the user’s documentation set: - Instruction Manual – is the guidance on preparation of the instrument and other equipment for operation on various techniques of Scanning Probe Microscopy. The contents of the user’s documentation set may differ depending on the delivery set of the instrument.

  • Page 4: Table Of Contents

    NTEGRA Spectra Probe NanoLaboratory. (Inverted Configuration with Solar TII spectrometer) NTEGRA Spectra Probe NanoLaboratory. Inverted Configuration with Solar TII spectrometer Table of Contents 1. OVERVIEW ............................. 5 2. DESIGN..............................7 2.1..................... 8 NVERTED PTICAL ICROSCOPE 2.2. NTEGRA B ........................9 2.3.

  • Page 5: Overview

    Chapter 1. Overview 1. Overview NTEGRA Spectra PNL combines measurement capabilities of spectrometry, SNOM and AFM, which are enhanced by SNOM-spectrometry and AFM-spectrometry. Theses capabilities are illustrated by the conceptual scheme of Fig. 1-1. Fig. 1-1. Conceptual scheme of the NTEGRA Spectra PNL The spectrometer is based on the infinity-corrected confocal optical scheme that provides submicron spatial resolution (200÷300 nm in the lateral (XY) and 500÷700 nm in the normal (Z) directions).
  • Page 6 NTEGRA Spectra Probe NanoLaboratory. (Inverted Configuration with Solar TII spectrometer) In addition to measurements, the NTEGRA Spectra PNL facilitates to perform volumetric lithography. The SNOM-Spectrometer configuration allows the following: - measuring surface topography with the Shear Force Microscopy; - in the transmission mode, measuring optical and spectral properties of the object with the resolution achievable by the Scanning Near-field Optical Microscopy.

  • Page 7: Design

    Chapter 2. Design 2. Design Fig. 2-1 shows general view of the NTEGRA Spectra PNL instrument. Fig. 2-1. NTEGRA Spectra PNL NTEGRA Spectra PNL consists of the following main parts: - Inverted optical microscope Olympus IX71. - Base Unit of NTEGRA. - XY scanning optical exchangeable mount.

  • Page 8: Inverted Optical Microscope

    NTEGRA Spectra Probe NanoLaboratory. (Inverted Configuration with Solar TII spectrometer) Fig. 2-2. NTEGRA Spectra PNL block diagram 2.1. Inverted Optical Microscope An inverted optical microscope Olympus IX71 (Fig. 2-3) serves for taking common optical images. The base unit of the instrument is mounted on it.

  • Page 9: Ntegra Base Unit

    Chapter 2. Design The microscope is equipped with an optical system that provides the following options for NTEGRA Spectra: - delivering laser beam to the sample; - delivering the light reflected from the sample to the spectrometer; - monitoring the process of approaching the lens to the sample; - displaying the sample image taken from the video camera of the microscope.

  • Page 10: Xy Scanning Optical Exchangeable Mount

    NTEGRA Spectra Probe NanoLaboratory. (Inverted Configuration with Solar TII spectrometer) –connector of a heating element, used for connecting a heating stage, heating Т liquid cells etc.; – connector of the stepper motor; – connector of the ultrasonic piezoelectric transducer; AFAM –...
  • Page 11 Chapter 2. Design Fig. 2-5 XY Scanning Optical Exchangeable Mount 1 – measuring head seats; 2 – measuring head positioning screws; 3 – XY positioning device micrometer screws; 4 – sample stage; 5 – spring clips; 6 – scanning platform The scanning platform 6 serves to move the investigated sample in the process of XY scanning.

  • Page 12: Measuring Heads

    NTEGRA Spectra Probe NanoLaboratory. (Inverted Configuration with Solar TII spectrometer) Exchangeable mount technical specifications: XY measuring head travel 55 mm XY positioning device travel 55 mm XY positioning device translation resolution 5 µm XY scanning range 100100 µm Lens focusing range with Z piezo drive 50 µm...
  • Page 13 Chapter 2. Design All elements of the SNOM measurement head are assembled on the mounting plate 5 and contained within the housing 4. The capacitance sensors are fixed to the bottom part of the scanner. The end of the scanner has a special holder for the optical fiber probe 3. The top part of the housing 4 has an output orifice 1 for the free end of the optical fiber.
  • Page 14 NTEGRA Spectra Probe NanoLaboratory. (Inverted Configuration with Solar TII spectrometer) Resolution: - shear Force method: in XY plane < 100 nm in Z direction < 1 nm - optical method: in XY plane ~ 100 nm in Z direction –...
  • Page 15 Chapter 2. Design There are three leveling posts to secure installation, horizontal leveling and approaching of the probe to the sample. Two of them (pos. 6) are ordinary screws with fastening nuts. The third post is a micrometer screw driven by a stepper motor 6 (motorized leveling post) that provides the motorized translation of the probe towards the sample.

  • Page 16: Spectrometer

    NTEGRA Spectra Probe NanoLaboratory. (Inverted Configuration with Solar TII spectrometer) 2.5. Spectrometer Raman spectrometer (Fig. 2-11) is used to carry out spectroscopy and to form the image. A detailed description is given in the manual Raman Spectrometer. User’s Manual. Fig. 2-11. Raman spectrometer...
  • Page 17 Chapter 2. Design Fig. 2-12. CCD camera CCD-camera technical characteristics Parameter Value Quantity of sensors (pixels) 1024×255 Sensing element size 26 m Active area size 26.6×6.7 mm Vertical scanning rate 16 ms  NOTE. Model of the CCD-camera can change without prior notice. APD module Avalanche photodiode (APD module) (Fig.
  • Page 18 NTEGRA Spectra Probe NanoLaboratory. (Inverted Configuration with Solar TII spectrometer) Fig. 2-14. Spectral range APD module technical characteristics Parameter Value Ambient temperature +5 ÷ 40 ºC Working range at temperature 22ºC 400 ÷ 1060 nm 175 m Active area diameter...
  • Page 19 Chapter 2. Design Fig. 2-15. PMT module Fig. 2-16. Photomultiplier sensitivity Fig. 2-17. Effective spectral range PMT module technical characteristics 25 °C Parameter Value Sensitivity (at 420 nm) 3.0×10 185÷850 m Operating spectral range Output voltage shift ±3 mV Current-to-voltage conversion gain 1×10 Frequency range from 0 to 20 kHz...

  • Page 20: Laser

    NTEGRA Spectra Probe NanoLaboratory. (Inverted Configuration with Solar TII spectrometer) 2.7. Laser  ATTENTION! Direct or scattered laser radiation is hazardous and may cause eye injuries. Avoid direct eye exposure to beam. The delivery set of the NTEGRA Spectra PNL contains the LM473 solid-state laser with diode pumping.

  • Page 21: Optical Fiber Transport System

    Chapter 2. Design 2.8. Optical Fiber Transport System Optical fiber transport system (hereinafter – OTS) and radiation feedthrough (see Fig. 2-19) are designed for easy, safe and secure transfer the laser radiation to the NTEGRA Spectra PNL entrance port or immediately to the sample when the side illumination module is used.

  • Page 22: Additional Cables

    NTEGRA Spectra Probe NanoLaboratory. (Inverted Configuration with Solar TII spectrometer) 2.9. Additional Cables For AFM spectrometry or for SNOM spectrometry, the X- and Y-scanners of the exchangeable mount and the Z-scanner of the measuring head are connected to the main controller while the X- and Y-scanners of the measuring head and the Z-scanner of the lens are connected to the slave controller.

  • Page 23: Controllers

    Chapter 2. Design Fig. 2-22. Switching cable 1 – SCAN+SENSOR socket; 2 –XY socket 2.10. Controllers The main and slave controllers are used to control the NTEGRA Spectra PNL measurement system and to process signals from measuring heads, to convert signals from the control software as well as to control the scanners, the probe holder piezo-drive, and auxiliary devices.

  • Page 24: Computer

    NTEGRA Spectra Probe NanoLaboratory. (Inverted Configuration with Solar TII spectrometer) The controllers are installed in a special electronics cabinet. General view of the electronics cabinet with the controllers inside it is shown in Fig. 2-23. Fig. 2-23. Electronics cabinet with controllers inside The controllers interact with the system’s computers through interface cards installed...

  • Page 25: Principle Of Operation Of The Ntegra Spectra Pnl

    Chapter 3. Principle of Operation of the NTEGRA Spectra PNL 3. Principle of Operation of the NTEGRA Spectra PNL Fig. 3-1 gives a simplified illustration of optical schematics of the NTEGRA Spectra PNL. Fig. 3-1. Simplified optical schematics of the NTEGRA Spectra PNL 1 –...
  • Page 26 NTEGRA Spectra Probe NanoLaboratory. (Inverted Configuration with Solar TII spectrometer) When needed, the laser beam intensity can be fixed by the adjustable circular density neutral filter 18 before directing it onto the PMT. Confocal 2D or 3D pictures are formed by the means of scanning the sample and simultaneous recording the intensity of the reflected laser light, recorded with PMT.
  • Page 27 Chapter 3. Principle of Operation of the NTEGRA Spectra PNL AFM-Spectrometer With the AFM measuring head, confocal data and surface topography can be acquired in the same run (Fig. 3-3). Fig. 3-3. AFM-Spectrometer...

  • Page 28: Basic Safety Measures

    NTEGRA Spectra Probe NanoLaboratory. (Inverted Configuration with Solar TII spectrometer) 4. Basic Safety Measures General Safety Measures - Ground the instrument before operation! - Do not disassemble any part of the instrument. Disassembling of the product is permitted only to persons certified by NT-MDT Co.
  • Page 29 Chapter 4. Basic Safety Measures Fig. 4-2 Scanner - Do not press the scanner more than it is needed to install the probe. Avoid scanner shocks and its lateral deformation. Remember that the width of scanner walls is only 0.5 mm. Optical components Optical components include the following units and elements: - optical elements in the spectrometer unit;...
  • Page 30 NTEGRA Spectra Probe NanoLaboratory. (Inverted Configuration with Solar TII spectrometer) Adjust optical elements with minimum power of the laser. Use eye protectors to reduce the laser’s power. Radiation detectors Radiation detectors include CCD-camera and APD (PMT). When storing or handling the CCD-camera, avoid ingress of contamination into the camera.

  • Page 31: Operating Conditions

    Chapter 5. Operating Conditions 5. Operating Conditions The SPM should be installed in a room of total area larger 12 sq. meters that provides range of purity better 7÷8 (by ISO 14644-1). For normal operation of the instrument, the following operating conditions are recommended: - Ambient temperature: (25±10) °C;...
  • Page 32 NTEGRA Spectra Probe NanoLaboratory. (Inverted Configuration with Solar TII spectrometer) - The table for installation of the measuring unit of the instrument must be stable and, whenever possible, massive. Heat flow and draughts badly influence the instrument.

  • Page 33: Storage And Transport Regulation

    Chapter 6. Storage and Transport Regulation 6. Storage and Transport Regulation Storing The units must be stored in package in a clean room with a stable temperature and humidity: - storage temperature (20±10) °С; - storage humidity less 80 %. Transportation - transport the device in a package, excluding possible damage.

  • Page 34: General Requirements On Installation

    NTEGRA Spectra Probe NanoLaboratory. (Inverted Configuration with Solar TII spectrometer) 7. General Requirements on Installation NTEGRA Spectra PNL is a precise optical device. Special requirements on the work room, on the power supply system, and on the optical table should be met.

  • Page 35: Setup And Installation

    Chapter 8. Setup and Installation 8. Setup and Installation The NTEGRA Spectra PNL is put into operation by an authorized person after installation. Restarting the instrument is needed only if the exciting laser has been changed. 8.1. Preparing the Spectrometer 8.1.1.
  • Page 36 NTEGRA Spectra Probe NanoLaboratory. (Inverted Configuration with Solar TII spectrometer) 3. Open the laser shutter by turning its handle counterclockwise against the stop (Fig. 8-3 a). a) shutter open b) shutter closed Fig. 8-3. Laser shutter 4. Rotate the adjusting screws 1 (Fig. 8-2) and observe the laser spot on the opaque screen.
  • Page 37 Chapter 8. Setup and Installation Fig. 8-4. Polarization key inserted into the reference slot  ATTENTION! The OUTPUT end of the optical fiber is tightly fixed in the spectral unit. Removal of the optical fiber end from the spectral unit will totally misalign the system.

  • Page 38: Installing The Spectrometer And The Optical Microscope

    NTEGRA Spectra Probe NanoLaboratory. (Inverted Configuration with Solar TII spectrometer) 8.1.2. Installing the Spectrometer and the Optical Microscope The spectrometer unit and the inverted optical microscope are the main parts of the NTEGRA Spectra PNL. The PNL scheme requires that these parts are installed in the same plane and hardly fixed on the optical table (Fig.

  • Page 39: Connecting The Electromechanical Units

    Chapter 8. Setup and Installation Fig. 8-7. Location of the base unit, the spectrometer, and the laser (top view) 8.2. Connecting the Electromechanical Units  ATTENTION! Before connecting or disconnecting any parts of the instrument, power off the controller. Any connections during the instrument operation may result in damage of the electronic circuitry.
  • Page 40 NTEGRA Spectra Probe NanoLaboratory. (Inverted Configuration with Solar TII spectrometer) Fig. 8-8. Commutation schematics of the NTEGRA Spectra electromechanical units 1. Connect the following connectors to the socket of SCAN+SENSOR SCAN+SENSOR the base unit: a. connector of the cable of the exchangeable mount (pos. 1 on Fig. 8-9);...

  • Page 41: Powering Sequence

    Chapter 8. Setup and Installation 2. Connect the connector of the measuring head to the same-name socket of the HEAD base unit. Connect the stepper motor of the measuring head to the socket of the base unit. 3. Connect the Z-splitter as follows: connector –...
  • Page 42 NTEGRA Spectra Probe NanoLaboratory. (Inverted Configuration with Solar TII spectrometer) 4. Launch the Nova program with one of the following methods: - Using a shortcut located on the Desktop; - Using the file located in the program directory. Nova.exe (Fig. 8-10 ) dialog box will open to indicate the controllers Nano30PRE-starting initialization process.
  • Page 43 Chapter 8. Setup and Installation Switching off 1. Take the lens away from the sample. 2. Open the feedback loop. 3. Warm the CCD matrix up to the room temperature. 4. Switch off the laser. 5. Switch off the controllers PNL. 6.

  • Page 44: Preparing For Operation

    NTEGRA Spectra Probe NanoLaboratory. (Inverted Configuration with Solar TII spectrometer) 9. Prep aring for Operation Basic preparatory procedures include the following: 1. Launching the Control Program (see sec. 9.1 on p. 44). 2. Verifying Adjustment of the Displacement Sensors (see sec. 9.2 on p. 45).

  • Page 45: Verifying Adjustment Of The Displacement Sensors

    Chapter 9. Preparing for Operation Nano30PRE-starting Fig. 9-1. dialog 6. In the group, select one of the following options: Type of pre-starting procedure – for the initial start of the program in the beginning of the working day. With Full this option, positions of all movable components of the system are initiated –...

  • Page 46: Adjusting The Spectral Unit

    NTEGRA Spectra Probe NanoLaboratory. (Inverted Configuration with Solar TII spectrometer) 9.3. Adjusting the Spectral Unit To adjust the spectral unit to the laser wavelength, perform the following steps: 1. Open the dialog box (Fig. 9-2) by clicking the button in Nano 30 the Instrument Parameters Adjustment panel.
  • Page 47 Chapter 9. Preparing for Operation 2. Excitation Nano 30 Fig. 9-3. tab of the dialog 5. Define the following parameters in the tab: 2. Excitation - In the input field, enter attenuation N of the exciting laser power (intensity ND-filter will be reduced by 10 factor).
  • Page 48 NTEGRA Spectra Probe NanoLaboratory. (Inverted Configuration with Solar TII spectrometer) Entrance Nano 30 Fig. 9-4. tab of the dialog 7. In the tab select a laser for operation by clicking the corresponding 1. Entrance, button. This will change the button caption to...
  • Page 49 Chapter 9. Preparing for Operation Spectrometer Nano 30 Fig. 9-5. tab of the dialog a. In the field, select position of the deflecting mirror at exit of the Exit Port spectrometer (see pos. 16 in Fig. 3-1). b. In the field, define the exit slit size: Exit Slit 3.

  • Page 50: Mounting The Sample

    NTEGRA Spectra Probe NanoLaboratory. (Inverted Configuration with Solar TII spectrometer) 9.4. Mounting the Sample To mount the sample, perform the following steps: 1. Move the lens down with the manual approach knob (see pos. 2 in Fig. 2-4). 2. Prepare the sample for measurement by placing it on a glass substrate and fixing this assembly, if necessary.

  • Page 51: Measuring With The Confocal Microscopy Mode

    Chapter 10. Measuring with the Confocal Microscopy Mode 10. Measuring with the Confocal Microscopy Mode Preparation of the device for operation is required before starting measurements with confocal microscopy techniques. The confocal scanning includes the following main operations: 1. Focusing the Laser Beam (item 10.1 on page 51). 2.

  • Page 52: Adjusting Channels Of Detection

    NTEGRA Spectra Probe NanoLaboratory. (Inverted Configuration with Solar TII spectrometer) 3. Approach the sample to the lens slowly and very carefully by rotating the manual approach knob and observing the sample on the display of the viewing system. Control the lens focus by contrast of the sample image or by focusing the laser beam on the sample (if the spectrometer laser is on).
  • Page 53 Chapter 10. Measuring with the Confocal Microscopy Mode 4. Start cooling the CCD-matrix by pressing the button placed to the right of the input field. The cooling process will begin and the text caption of the pressed-in button will indicate the current temperature of the matrix. 5.
  • Page 54 NTEGRA Spectra Probe NanoLaboratory. (Inverted Configuration with Solar TII spectrometer) c. To acquire a spectrum from the whole CCD-matrix, click the button. d. Collect the spectrum by clicking the button (Fig. 10-4). Fig. 10-4. Spectrum collected from the whole CCD-matrix ...
  • Page 55 Chapter 10. Measuring with the Confocal Microscopy Mode b. In the input fields of the groups step Reg.ObjXYZ-X drive Reg.ObjXYZ- , enter the value four times less Y drive Pinhole c. Adjust the signal to its maximum by moving the entrance objective over the X and Y directions with the buttons in the groups Reg.ObjXYZ-X drive...
  • Page 56 NTEGRA Spectra Probe NanoLaboratory. (Inverted Configuration with Solar TII spectrometer)  NOTE. To activate the option of scan -time updating of the image, click the button. 3. Using the collected image, select a band of the CCD-matrix that receives the spectral signal from the sample.

  • Page 57: Adjusting Detection Parameters Of The Pmt Module

    Chapter 10. Measuring with the Confocal Microscopy Mode 10.2.2. Adjusting Detection Parameters of the PMT Module 1. Switch to the tab by clicking the button in the Main Operations Spectra Panel. 2. Go to the tab by clicking the corresponding title in the left top of the Andor CCD tab.
  • Page 58 NTEGRA Spectra Probe NanoLaboratory. (Inverted Configuration with Solar TII spectrometer) 5. Select the signal in the drop-down list of the Main Parameters panel PMT1 (Fig. 10-12). PMT1 Fig. 10-12. Selecting the signal 6. Double-click in the field to the right from the list (Fig. 10-13) to open a slider that adjusts voltage applied to the PMT.

  • Page 59: Adjusting Detection Parameters Of The Apd Module

    Chapter 10. Measuring with the Confocal Microscopy Mode c. In the input fields of the groups step Reg.ObjXYZ-X drive Reg.ObjXYZ- , enter the value four times less Y drive Pinhole d. Narrow the slit opening gradually entering decreasing values in the field Pinhole (e.g., using the sequence 1000 ...
  • Page 60 NTEGRA Spectra Probe NanoLaboratory. (Inverted Configuration with Solar TII spectrometer) Spectrometer Nano 30 Fig. 10-16. tab of the dialog b. Enter 50÷100 m in the input field to define opening of the exit slit. Exit Slit c. Click the button to activate and to save the modifications made.

  • Page 61: Adjusting Scan Parameters

    Chapter 10. Measuring with the Confocal Microscopy Mode 6. Go to the tab (Fig. 10-16) of the window by clicking the Spectrometer Nano 30 corresponding title. a. Enter position of the diffraction grating according to the desired spectral range in the input field of the panel (Fig.
  • Page 62 NTEGRA Spectra Probe NanoLaboratory. (Inverted Configuration with Solar TII spectrometer) Fig. 10-20. Defining numbers of scan points for every direction 5. Select the scan area. for 2D scanning: a. Enable the function of selecting the scan area by pressing the button (Fig.

  • Page 63: Additional Adjusting For Scanning With Afm Head

    Chapter 10. Measuring with the Confocal Microscopy Mode 6. Define the acquisition time at a scan point. Regarding the detector in use, this time is determined by one of the following parameters: - for the CCD camera – in the tab;...
  • Page 64 NTEGRA Spectra Probe NanoLaboratory. (Inverted Configuration with Solar TII spectrometer) Adjusting Parameters of Preliminary Scan 1. Switch to the tab by clicking the button in the Main Operations Spectra Panel. 2. Open the tab by clicking the corresponding title in the left top of the Scan(Slave) tab.
  • Page 65 Chapter 10. Measuring with the Confocal Microscopy Mode 6. Place the tip in the center of the scanning area: a. Activate the function of the tip displacement by clicking the button in the tool bar. b. Place the tip in the center of the scanning area with the mouse. Approaching Probe to Lens Optical Axis 1.
  • Page 66 NTEGRA Spectra Probe NanoLaboratory. (Inverted Configuration with Solar TII spectrometer) Fig. 10-29. Measuring head moving screws 1 – screw for moving along X direction; 2 – screw for moving along Y direction A convenient way to observe the displacement process is with the image from the upper videomicroscope.
  • Page 67 Chapter 10. Measuring with the Confocal Microscopy Mode Preliminary Scanning and Precise Aligning the Tip 1. Switch to the tab by clicking the button in the Main Operations Spectra Panel. 2. Open the tab (Fig. 10-31) by clicking the corresponding title in the left top Scan(Slave) of the tab.

  • Page 68: Scanning

    NTEGRA Spectra Probe NanoLaboratory. (Inverted Configuration with Solar TII spectrometer) Fig. 10-33. SNOM image of the scanned surface with the spot of scattering by the tip  NOTE. If placement of the tip to the center of the scattering spot is hard due to small size of the spot, decrease the scanning area around the spot and repeat scanning.
  • Page 69 Chapter 10. Measuring with the Confocal Microscopy Mode 3. Press the <Ctrl> key. Holding the key pressed, highlight with the mouse the desired regions around peaks in the collected spectrum (Fig. 10-34) (the procedures on spectrum acquisition are explained in i. 10.2.1 on p. 52). Fig.
  • Page 70 NTEGRA Spectra Probe NanoLaboratory. (Inverted Configuration with Solar TII spectrometer) Fig. 10-37 6. Switch to the tab (Fig. 10-38) by clicking the corresponding title in the Scan(Master) left top of the tab. Spectra Scan(Master) Fig. 10-38. Control panel of the 7.

  • Page 71: Scanning With Recording By The Pmt Module

    Chapter 10. Measuring with the Confocal Microscopy Mode Clicking the button results in analyzing the selected spectrum regions at every scan point with the functions selected in the panel of the tab. Functions Andor CCD Outputs of the functions will be displayed in separate 2D viewers. 10.5.2.

  • Page 72: Scanning With Recording By The Apd Module

    NTEGRA Spectra Probe NanoLaboratory. (Inverted Configuration with Solar TII spectrometer) 3. Launch scanning with the button (Fig. 10-40).  ATTENTION! Do not open any other tab of the program until scanning completes because they may interfere with the running process.

  • Page 73: Saving Data

    File Save 2. A dialog box will appear. Define the folder to store the data (by default, it is C:\Program Files\NT-MDT\Nova). 3. Type in a filename and save it with the extension *.mdt.  NOTE. By default, the images obtained are sto red in files “NoNameXX.mdt”,...
  • Page 74 NTEGRA Spectra Probe NanoLaboratory. (Inverted Configuration with Solar TII spectrometer) Photomultiplier module Enter zero voltage in the input field in the Main Parameters panel. PMT1 Avalanche photodiode module Close the avalanche photodiode shutter on the spectrometer exit by clicking the...

  • Page 75: Afm And Snom Measurements

    Chapter 11. AFM and SNOM Measurements 11. AFM and SNOM Measurements Instructions on performing measurements with measuring heads of the atomic-force microscope (AFM) and scanning near-field optical microscope (SNOM) are given in detail in user’s manuals on devices SMENA and NTEGRA Solaris.

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