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NTEGRA Aura
Probe NanoLaboratory
(configuration for vacuum
–2
measurements, up to 10
Torr)
Instruction Manual
2011
Copyright © "NT-MDT"
Web Page:
http://www.ntmdt.com
General Information:
spm@ntmdt.ru
Technical Support:
support@ntmdt.ru
NT-MDT Co., building 100,
Zelenograd, 124482, Moscow, Russia
Tel.: +7-499-735-77-77
Fax: +7-499-735-64-10
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Summary of Contents for NT-MDT NTEGRA Aura Probe NanoLaboratory
- Page 1 NTEGRA Aura Probe NanoLaboratory (configuration for vacuum –2 measurements, up to 10 Torr) Instruction Manual 2011 Copyright © “NT-MDT” Web Page: http://www.ntmdt.com General Information: spm@ntmdt.ru Technical Support: support@ntmdt.ru NT-MDT Co., building 100, Zelenograd, 124482, Moscow, Russia Tel.: +7-499-735-77-77 Fax: +7-499-735-64-10...
- Page 2 Read me First! Observe safety measures for operation with devices containing sources of laser radiation. Do not stare into the beam. A label warning about the presence of laser radiation is attached to the laser sources (Fig. 1). Fig. 1 Before you start working with the instrument, get acquainted with the basic safety measures and the operation conditions for the instrument! If you are a beginner in scanning probe microscopy, we recommend you to familiarize with...
- Page 3 User’s documentation set The following manuals are included into the user’s documentation set: − Instruction Manual – is the guidance for the preparation of the instrument and other equipment for operation on various techniques of Scanning Probe Microscopy. The contents of the user’s documentation set may differ in dependence on the delivery set of the instrument.
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Page 4: Table Of Contents
NTEGRA Aura Probe NanoLaboratory NTEGRA Aura Probe NanoLaboratory Table of Contents 1. BASIC INFORMATION ......................... 5 1.1.............................. 5 ESIGN 1.1.1. Base unit ..........................6 1.1.2. Exchangeable mount and the positioning device............... 8 1.1.3. Vacuum system ........................9 1.2....................... 12... -
Page 5: Basic Information
Chapter 1. Basic information 1. Basic information NTEGRA Aura PNL is represented by several configurations. This manual considers the corresponding configuration intended for vacuum measurements, up to 10 Torr. When operating in vacuum, measurement sensitivity is increased due to the higher Q-factor of the cantilever and, in addition, the influence of adsorbats is minimized. -
Page 6: Base Unit
NTEGRA Aura Probe NanoLaboratory Fig. 1-1. NTEGRA Aura 1 – base unit; 2 – measuring head; 3 – vibration isolation system; 4 – optical viewing system; 5 – vacuum pump; 6 – vacuum gauge Description of the basic parts of the NTEGRA PNL is provided in Performing measurements and Control electronics. - Page 7 Chapter 1. Basic information The base module accommodates the stepper motor 2, which provides the approach of the sample to the probe. There is no function of manual approach of the sample in the vacuum measurement configuration. Therefore control of the stepper motor is provided only through the control program Nova.
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Page 8: Exchangeable Mount And The Positioning Device
NTEGRA Aura Probe NanoLaboratory 1.1.2. Exchangeable mount and the positioning device The exchangeable mount is set into the base unit of the instrument and is fastened with three screws. Fig. 1-4 illustrates the positions of the main parts of the exchangeable mount. -
Page 9: Vacuum System
Chapter 1. Basic information Positioning in the XY plane is performed by means of the micrometer screws 1 (Fig. 1-6) and the spring seats 2. Fig. 1-6. Main components of the positioning device 1 – micrometer screws; 2 – spring clips 1.1.3. - Page 10 NTEGRA Aura Probe NanoLaboratory Vacuum hood The vacuum hood (Fig. 1-7) provides enclosed volume for vacuum or controlled gas environment measurements. In addition, it can be used as a shield against electromagnetic fields, acoustic noise and temperature variations. Fig. 1-7. Vacuum hood There are two viewing windows in the top part of the hood.
- Page 11 Chapter 1. Basic information Variant A Fig. 1-9 illustrates the vacuum system assembly scheme on variant A. In this case the vacuum system is connected to the flange located on the rear side of the base unit. Linking the fore pump line, the pressure gauge 8 and the inlet gas pipe at the same port of the pipeline is the specifics of variant A.
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Page 12: Basic Safety Measures
− Ground the instrument before operation! − Do not disassemble any part of the device. Disassembling of the product is permitted only to persons certified by NT-MDT. − Do not connect additional devices to the instrument without prior advice from an authorized person from NT-MDT. - Page 13 Chapter 1. Basic information Electronics − To reduce possible influence of power line disturbances on the measurements, we recommend supplying the instrument units with a surge filter. − Before operation, set the power switch of the SPM controller to the position corresponding to value of the local electrical power line (this is only done with the controller being off!).
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Page 14: Operating Conditions
NTEGRA Aura Probe NanoLaboratory Scanner − Do not apply to the scanner forces bigger than it is necessary for installation of a probe or a substrate with a sample. Avoid impacts on the scanner and its lateral displacement. Remember that thickness of the scanner walls makes only 0.5 mm. -
Page 15: Storage And Transport Instructions
Chapter 1. Basic information Notes on operating the instrument − Treat the sealing surfaces of the instrument with care. Protect the viton gasket from accidental damage. − If required, a new layer of grease should be applied to the hood sealing. When mounting the sample, it is not recommended to leave the vacuum hood open for longer than 1 –... -
Page 16: Setup And Installation
2.2. Vacuum system installation ATTENTION! Assembly of the vacuum system is only allowed to authorized persons of NT-MDT. Assembly performed by users themselves voids warranty agreements. Assembly of the vacuum system is performed as described in the schemes provided in 1.1.3... -
Page 17: Specifics Of The Optical Viewing System Preparation
Chapter 2. Setup and installation 2.3. Specifics of the optical viewing system preparation Preparation of the optical viewing system for operation is provided in the appendix of Performing measurements. Nevertheless preparation of the optical viewing system for operation in vacuum has some specifics. For the configuration without the adapter flange When operating with the vacuum system without the adaptor flange (Variant A), an additional lens 0.5×... - Page 18 NTEGRA Aura Probe NanoLaboratory 2. Loose the angular position fastening screw 2 of the stand. 3. Take off the focusing device 3. 4. Install the extension rod in the place of the focusing device so that the extension rod lug 2 would be above the stand lug 1 (Fig. 2-3).
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Page 19: Preparation For Measurements And Operations
Chapter 3. Preparation for measurements and operations 3. Preparation for measurements and operations 3.1. Preparation of the instrument and measurements in air It is first recommended to prepare the instrument for operating, and then perform test scanning, in air. The corresponding preparation and measurement procedures for operating in air are described in detail in Performing measurements. - Page 20 NTEGRA Aura Probe NanoLaboratory ÷10 5. Continue vacuum forming till the pressure reaches 5×10 Torr. Once the chamber ÷10 pressure reaches 5×10 Torr, measurements can be started. Fig. 3-2. Vacuum system. Variant А. 1 – vacuum hood; 2 – vacuometer; 3 – pump; 4 – valve connecting the hood with the pump;...
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Page 21: Performing Measurements
Chapter 3. Preparation for measurements and operations 3.3. Performing measurements When performing measurements on semicontact methods, tune system to the resonance frequency (see Performing measurements, Part 3, Chapter “Semicontact AFM”). Further operations are analogous to those applicable to measurements in air. 3.4. - Page 22 NTEGRA Aura Probe NanoLaboratory 3. Open the valve 6 and deliver gas through the leak gas valve 5. When controlling pressure, allow for the pressure gauge 8 thermocouple inertia. Also see its calibration data sheet. Remember that the thermocouple provides pressure data within the range 10÷10...
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