Edwards iGX Series Instruction Manual

Dry pumping systems

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Description

iGX100L 200 V – 230 V 50/60 Hz

iGX100L 380 V – 460 V 50/60 Hz

iGX100L 200 V – 230 V 50/60 Hz SS

iGX100L 380 V – 460 V 50/60 Hz SS

iGX600L 200 V – 230 V 50/60 Hz

iGX600L 380 V – 460 V 50/60 Hz

iGX600L 200 V – 230 V 50/60 Hz SS

iGX600L 380 V – 460 V 50/60 Hz SS

iGX100N 200 V – 230 V 50/60 Hz

iGX100N 380 V – 460 V 50/60 Hz

iGX100N 200 V – 230 V 50/60 Hz SS

iGX600N 200 V – 230 V 50/60 Hz

iGX600N 380 V – 460 V 50/60 Hz

Instruction Manual

iGX Dry Pumping Systems

Description

A546-10-958

iGX1000N 200 V – 230 V 50 Hz

A546-10-959

iGX1000N 380 V – 460 V 50 Hz

A548-10-958

iGX1000N 200 V – 230 V 50/60 Hz SS

A548-10-959

iGX100M 200 V – 230 V 50/60 Hz

A546-30-958

iGX100M 380 V – 460 V 50/60 Hz

A546-30-959

iGX100M 200 V – 230 V 50/60 Hz SS

A548-30-958

iGX100MTi 200 V – 230 V 50/60 Hz

A548-30-959

iGX100MTi 380 V – 460 V 50/60 Hz

A546-11-958

iGX100MTi 200 V – 230 V 50/60 Hz SS

A546-11-959

iGX600M 200 V – 230 V 50/60 Hz

A548-11-958

iGX600M 380 V – 460 V 50/60 Hz

A546-31-958

iGX600M 200 V – 230 V 50/60 Hz SS

A546-31-959

A546–00–880

Issue C Original

Description

A546-81-958

A546-81-959

A548-81-958

A546-12-958

A546-12-959

A548-12-958

A546-48-958

A546-48-959

A548-48-958

A546-32-958

A546-32-959

A548-32-958

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Summary of Contents for Edwards iGX Series

Page 1 A546–00–880 Issue C Original Instruction Manual iGX Dry Pumping Systems Description Description Description Description iGX100L 200 V – 230 V 50/60 Hz A546-10-958 iGX1000N 200 V – 230 V 50 Hz A546-81-958 iGX100L 380 V – 460 V 50/60 Hz A546-10-959 iGX1000N 380 V –...
Page 3 P601- 00- 700 Issue C Product Manual Addendum - Equipment types: iH Vacuum Pump Range GX Vacuum Pump Range DiHxK Vacuum Pump Range iF Vacuum Pump Range iHxK Vacuum Pump Range DiFxK Vacuum Pump Range iGX Vacuum Pump Range iFxK Vacuum Pump Range EPX Vacuum Pump Range iQ/QDP/QMB Vacuum Pump IPX Vacuum Pump Range...
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Page 5: Table Of Contents
Relocate the system for maintenance ................28 Draining the cooling-water ....................29 Cleaning the pump ......................30 TRANSPORTATION, STORAGE AND DISPOSAL ..........31 Transportation ......................31 Storage ........................31 © Edwards Limited 2008. All rights reserved. Page i Edwards and the Edwards logo are trade marks of Edwards Limited.
Page 6 Installing 3/8" quick connect fittings (provided) ..............20 Gas module access panel ....................21 Flow tube (14 slm) ......................21 Flow tube (4 slm) .......................22 Page ii © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trade marks of Edwards Limited.
Page 7 Technical data ......................10 Safety sensors ......................25 Accessories ....................... 34 Associated publications Publication title Publication number Vacuum pump and vacuum system safety P300–20–000 © Edwards Limited 2008. All rights reserved. Page iii Edwards and the Edwards logo are trade marks of Edwards Limited.
Page 9: Introduction
Introduction Scope and definitions This manual provides installation, operation and maintenance instructions for the Edwards iGX dry pumping systems. You must use your pump as specified in this manual. Read this manual before you install and operate your pump. Important safety information is highlighted as WARNING and CAUTION instructions;...
Page 10: Applications
If you use the iGX system on an application for which it is not suitable (refer to Figure 1), you may invalidate your warranties. If in doubt, contact Edwards who will advise you as to the suitability of the iGX system for any particular application. Figure 1 - iGX Applications chart...
Page 11: The Controls/Connectors
Gas Module access panel Exhaust gas outlet connection Comms 3 Ethernet Extraction port Nitrogen purge port Leak-test port connection not on T variants © Edwards Limited 2008. All rights reserved. Page 3 Edwards and the Edwards logo are trade marks of Edwards Limited.
Page 12: Priority Of Control
The PDT indicates who is in control. LEDs are also provided on the rear panel, front panel or PDT, which illuminate to indicate 'in control'. Please refer to Figure Page 4 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trade marks of Edwards Limited.
Page 13: Active Utility Control
Advanced Active Utility Control (AAUC) is also available. This function, in addition to AUC, can reduce the water flow of the iGX system while on stand-by, therefore allowing further reductions in power. Contact Edwards for advice. The AUC functionality is controlled by the on/off process signal from the Tool Interface Module (TIM).
Page 15: Technical Data
Mass flow transducer accuracy Interstage (I) Peak pumping speed, interstage Ultimate, interstage mbar Pump interstage flange NW16 NW16 © Edwards Limited 2008. All rights reserved. Page 7 Edwards and the Edwards logo are trade marks of Edwards Limited.
Page 16: Electrical Data
Table 4 - Centre of gravity and levelling foot loads (Refer to Figure 6) 1000 Centre of gravity Levelling foot loads Figure 6 - Centre of gravity and levelling foot loads Page 8 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trade marks of Edwards Limited.
Page 17: Connections
2 - Normally open and 4 - normally 30 V d.c. 1 A closed 5 - Normally open and 6 - common 60 V d.c. 0.5 A © Edwards Limited 2008. All rights reserved. Page 9 Edwards and the Edwards logo are trade marks of Edwards Limited.
Page 18: General Data
°C Storage -45 to +55 °C Relative humidity 10 to 90 Maximum operating altitude 2000 Pollution degree 2 (IEC 61010) Page 10 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trade marks of Edwards Limited.
Page 19: Installation
Detailed safety information is given in Edwards Publication Number P300-20-000 'Vacuum Pump and Vacuum System Safety'. Only Edwards engineers may install the dry pumping system. Users can be trained by Edwards to conduct the tasks described in this manual, contact your local service centre or Edwards for more information.
Page 20: Locate The Dry Pumping System
The iGX system seismic brackets (Figure 2, item 19) are designed to withstand a level 4 earthquake in a ground floor installation. Page 12 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trade marks of Edwards Limited.
Page 21: Lubrication
Incorporate flexible pipelines in the vacuum pipeline to reduce the transmission of vibration and to prevent loading of coupling-joints. We recommend that you use Edwards braided flexible pipelines. The pipelines should be suitable for 110 °C.
Page 22: Connect To Your Factory Extraction System (Optional)
(limiting oxidant concentration). For further information please refer to Semiconductor Pumping Application Guide (Publication no. P411-00- 090) or contact Edwards: refer to the address page at the rear of this manual for details of your nearest Edwards company. Page 14 ©...
Page 23: Gas Purges
Leak test the system after installation and seal any leaks found to prevent leakage of dangerous substances out of the system and leakage of air into the system. Note: If you need further information on leak-testing, look it up on the Edwards website at www.edwardsvacuum.com, or contact your supplier or Edwards for advice. Refer to Figure 2, item 28.
Page 24: Connect The Electrical Supply
Edwards recommend that the electrical supply be connected to a suitable isolator, which is easily accessible for maintenance and clearly identified. If you need further information on connecting the electrical supply, look it up on the Edwards website at www.edwardsvacuum.com, or contact your supplier or Edwards for advice.
Page 25: High And Low Volt Coding Pin Arrangement
15. Coding pin 16. b2 17. a2 18. Coding pin High Volt pin configuration Low Volt pin configuration 19. PE © Edwards Limited 2008. All rights reserved. Page 17 Edwards and the Edwards logo are trade marks of Edwards Limited.
Page 26: Connect An Additional Rf Earth (Ground) (Optional)
2. Electrical supply to the iGX system (Figure 2, item 2) 3. EMO (Figure 2, item 10) 4. Emergency stop 5. Electrical supply Page 18 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trade marks of Edwards Limited.
Page 27: Connect The Cooling-Water Hoses
SEMI S2 requirements. The photohelic switch/gauge when fitted, allows monitoring for loss of extraction from the enclosure, thereby satisfying SEMI S2 requirements. © Edwards Limited 2008. All rights reserved. Page 19 Edwards and the Edwards logo are trade marks of Edwards Limited.
Page 28: Commission The Igx System
(Figure 4, item 9) goes on. If the LED does not go on, Contact Edwards or refer to the Edwards website. 2. Switch on the cooling-water and nitrogen supplies. 3. Ensure that the exhaust-extraction system is not blocked (for example, that valves in the exhaust-extraction system are open).
Page 29: Gas Module Access Panel
Figure 12 - Gas module access panel 1. Securing screw 2. Access panel Figure 13 - Flow tube (14 slm) © Edwards Limited 2008. All rights reserved. Page 21 Edwards and the Edwards logo are trade marks of Edwards Limited.
Page 30: Install Additional Safety Equipment
A546–00–880 Issue C Figure 14 - Flow tube (4 slm) If a different nitrogen flow rate is required please contact Edwards for further advice. 8. After you have commissioned the iGX system: If you want to continue to operate the iGX system, refer to Section 4.1, step 4.
Page 31: Operation
Press and hold the Start button (Figure 4, item 2) until pumps starts and the Running LED (Figure 4, item 8) is illuminated. © Edwards Limited 2008. All rights reserved. Page 23 Edwards and the Edwards logo are trade marks of Edwards Limited.
Page 32: Status Indicators
If the pump is not going to be required for some time, switch off the electrical supply and the cooling-water supply. Page 24 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trade marks of Edwards Limited.
Page 33: Automatic Shut-Down
The decision on whether or not to shutdown the pump is left with the tool. If the iGX system has an unplanned shutdown, ensure that the cause of the shutdown is identified and rectified before restarting. If you are in any doubt, please call a Edwards Service Engineer. Emergency stop Note: The emergency stop switch is not an electrical isolator.
Page 34: Restart The Pump After An Emergency Stop Or Automatic Shut-Down
If there is an SEM connected to your iGX system, you are able to download configuration sets, which contain preset configuration values, for example setpoints. Contact Edwards or go to the Edwards website for more details. Page 26 ©...
Page 35: Maintenance
Particular caution should be exercised when working with Fomblin oil which may have been exposed to temperatures greater than 260 °C. Refer to Edwards Material Safety Data Sheets for detailed information. Ensure that the maintenance technician is familiar with the safety procedures which relate to the products pumped.
Page 36: Relocate The System For Maintenance
Fluorinated materials in the iGX system may include oils, greases and seals. The iGX system may have overheated if it was misused, if it malfunctioned or if it was in a fire. Edwards Material Safety Data Sheets for fluorinated materials used in the pump are available on request: contact your supplier or Edwards (refer to the address page at the rear of this manual for contact details).
Page 37: Draining The Cooling-Water
7. The cooling-water drain procedure is now complete. Disconnect the air supply, electrical supply and the drain hoses. Dispose of the drained cooling-water accordingly. © Edwards Limited 2008. All rights reserved. Page 29 Edwards and the Edwards logo are trade marks of Edwards Limited.
Page 38: Cleaning The Pump
Inspect the pump monthly and, if necessary, wipe the outside clean with a soft lint free cloth and a proprietary cleaning material based on demineralised water or isopropanol. Page 30 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trade marks of Edwards Limited.
Page 39: Transportation, Storage And Disposal
Dispose of the system and any components safely and in accordance with all local and national safety and environmental requirements. Edwards products are supported by a world-wide network of Edwards Service Centres. Each Service Centre offers a wide range of options including disposal. Refer to Section 7.2...
Page 41: Service, Spares And Accessories
Return of Edwards Equipment Procedure (refer to forms HS1 and HS2 at the rear of this manual). Notes: Whenever you return the iGX system to a Edwards Service Centre or other Edwards company, you must comply with the requirements of Section 7 and with the requirements of the Return of Edwards Equipment Procedure (refer to forms HS1 and HS2 at the rear of this manual).
Page 42: Ordering Accessories
A507-48-000 Flow control valve 1 lpm (100 only) A507-38-000 2 lpm (3/100, 6/100 and 10/100 only) A507-39-000 PDT holster D372-09-800 Page 34 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trade marks of Edwards Limited.
Page 43 Water flow switch kit (Combination) A507-25-000 † iGX Water flow monitor kit A507-26-000 * Not on T variant † ASM required © Edwards Limited 2008. All rights reserved. Page 35 Edwards and the Edwards logo are trade marks of Edwards Limited.

This manual is also suitable for:

Igx100n Igx100l Igx600l Igx1000n Igx600n Igx100m ... Show all

Edwards iGX Series Instruction Manual

Introduction

Technical Data

Installation

Operation

Maintenance

Transportation, Storage and Disposal

Service, Spares and Accessories

Quick Links

Need help?

Questions and answers

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Summary of Contents for Edwards iGX Series

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