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SIGMAKOKI HIT-M User Manual

Link controller for multi-axes stages

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User's Manual
Link controller for multi-axes stages
HIT-M / HIT-S / HIT-SH
1
Copyright 2018, SIGMAKOKI Co.,Ltd.

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Summary of Contents for SIGMAKOKI HIT-M

  • Page 1 User’s Manual Link controller for multi-axes stages HIT-M / HIT-S / HIT-SH Copyright 2018, SIGMAKOKI Co.,Ltd.
  • Page 2 ・ The prior written approval of SIGMAKOKI CO., LTD. is necessary to reprint or reproduce in whole or in part these materials. ・ If these products or technologies are subject to the Japanese export control restrictions, they must be exported under a license Japanese government and cannot be imported into a country other than the approved destination.
  • Page 3 6 6 6 6 - - - - 2.Connector Pin Assignments 2.Connector Pin Assignments ............................70 2.Connector Pin Assignments 2.Connector Pin Assignments 6 6 6 6 - - - - 3.Outlines 3.Outlines 3.Outlines ....................................72 3.Outlines Copyright 2018, SIGMAKOKI Co.,Ltd.
  • Page 4 The symbol mark on the product calls your attention. Please refer to the manual, in the case that you operate the part of the symbol mark on the product. This symbol labeled on the portion calls your attention. Copyright 2018, SIGMAKOKI Co.,Ltd.
  • Page 5 God, action by any third party, other accidents, and deliberate or accidental misuse. ④ If the equipment is used in a manner not specified by the SIGMAKOKI CO., LTD., the protection provided by the equipment may be impaired.
  • Page 6 Since micro-step driver is installed, it is possible to be done with high resolutional operation and positioning. When HIT-M is connected to an ordinary personal computer via an RS232C, USB or LAN interface, the stage can be accurately moved to the desired position by simple commands sent from the PC.
  • Page 7 D15D15A cable D15D15A-CA LAN cable(*1) D15D15A-CA (*1) Please use a crossover cable when directly Scale cable D15RP cable Connecting HIT-M to PC. And a straight cable GSEF-CA D15RP-CA When connecting through a HUB. D15D15A cable HIT-S (Stepping motor specifications) D15D15A-CA...
  • Page 8 : In case of connection through Ethernet from PC, connect with using straight or cross LAN cable. Make sure to set up and wire the cable supplying DC+24V and FG_GND to the HIT-M so that the maximum length of cable is not longer than 2m.
  • Page 9 : Shows the HIT-S condition. When it is booted with no fault, LED flashes. In case of fault-booting, LED light is on. : Sets the HIT-S address. Please refer to 「 2-2 Interface between HIT-M and 2) No.Switch HIT-S(HIT-SH)」 for further details.
  • Page 10 : Connects to the cable attached to the Glass Scale in use. 5) LINK Connector : Connects to a straight LAN cable, for connecting HIT-M and HIT-S and HIT-SH. 6) Connector for Stage Driver : Connects to the cable attached to the motorized stage in use.
  • Page 11 2-2.Interface between HIT-M and HIT-S(HIT-SH) (1) How to connect HIT-M and HIT-S(HIT-SH) Here it shows the case that HIT-M is connected to HIT-S. In the case of HIT-SH, it is the same. Please connect HIT-M LINK connector and HIT-S LINK connector (address 0) with straight LAN cable .
  • Page 12 ① First, switch HIT-S and HIT-SH on. ② Next, switch HIT-M on. 7 Seg LED on HIT-M will show the No. of axis of connected HIT-S and HIT-SH. to HIT-M for approx. 4 seconds, and dot in LED will start to flicker.
  • Page 13 Electric current when the motor is stopped can be set with STOP potentiometer. STOP current is set as a percentage of the RUN current. Its factory default is set to approx. 50%. *) STOP current is normally set to approx. 50% of RUN current. (Factory default setting) Vol. Gradation STOP Current(%) Copyright 2018, SIGMAKOKI Co.,Ltd.
  • Page 14 * ) When change Motor Divide, the change of the STEP switch of HIT-SH and the change of the memory switch of HIT-M is necessary. *) The command (S:) is sent from a PC, the Motor Divide can't be changed. *) When change Motor Divide of HIT-SH, please change the memory switch of HIT-M to the same. Copyright 2018, SIGMAKOKI Co.,Ltd.
  • Page 15 Set 4 kinds of travel stage Speed (minimum S, maximum F, and acceleration/deceleration time R) at Power ON. [Setting Range] S:1~500000 (Unit:pulse/s) [SHOT mode] S:1~999999999 (Unit:0.01µm/s) [HIT mode] F:1~500000 (Unit:pulse/s) [SHOT mode] F:1~999999999 (Unit:0.01µm/s) [HIT mode] R:1~1000 (Unit:ms) [SHOTmode][HITmode] *) Minimum S values should be set smaller than maximum F at Speed Setting. Copyright 2018, SIGMAKOKI Co.,Ltd.
  • Page 16 Normal High:Hi level (Active low) normally Normal Low:Lo level (Active High) normally 16) LED_ON: Display setting for 7seg LED on HIT-M and for LED display on HIT-S Set ON or OFF for 7seg LED on HIT-M and for LED display on HIT-S.
  • Page 17 POS/NEG Move7 POS/NEG ORG0 SEL 0~6 ORG1 SEL 0~6 ORG2 SEL 0~6 ORG3 SEL 0~6 ORG4 SEL 0~6 ORG5 SEL 0~6 ORG6 SEL 0~6 ORG7 SEL 0~6 ORG offset20 0~999999999 ORG offset21 0~999999999 ORG offset22 0~999999999 Copyright 2018, SIGMAKOKI Co.,Ltd.
  • Page 18 (Setting Unit: 0.1µm ) [Setting range] 1~1000 (0.1µm~100µm) Reference: OSMS20 OSMS80-20ZF OSMS60-5ZF OSMS-YAW HDS-120YAW OSMS60-10ZF OSMS26 OSMS-60A60 HDS-80YAW SGSP-ACT OSMS33 HST-YAW OSMS-60A85 TAMM OSMS40-5ZF HDS-60YAW OSMS-60A105 OSMS-40A Base Rate *)This HDS and OSMS-Gonio becomes the recommendation level Copyright 2018, SIGMAKOKI Co.,Ltd.
  • Page 19 *) When Setting range is set [0], ORG offset value is 0.5mm. 41~48) EMG Excitation 0~7: Motor Exitation setting at Emergency STOP. Set Motor Exitation ON or OFF for each axis at at Emergency STOP. [Select item] ON: Exitation ON OFF: Exitation OFF Copyright 2018, SIGMAKOKI Co.,Ltd.
  • Page 20 Detect CW limit sensor ORG reset speed F Detect CCW limit sensor ORG reset speed M Move 0.5mm ORG reset speed S Detect CCW limit sensor ORG reset speed M Move halfway point between CW/CCW sensor LS halfway point Copyright 2018, SIGMAKOKI Co.,Ltd.
  • Page 21 Detect ORG sensor Caution1) In case that after detect CW (CCW) sensor, stage move toward CCW direction and then can not detect ORG sensor (in case of no ORG sensor), stage stop at CCW (CW) sensor position. Copyright 2018, SIGMAKOKI Co.,Ltd.
  • Page 22 ORG sensor (in case of no ORG sensor), stage stop at CCW (CW) sensor position. Caution 2) In case that after detect NEAR ORG sensor, stage move toward CW direction and then can not detect ORG sensor (in case of no ORG sensor), stage stop at CW (CCW) sensor position. Copyright 2018, SIGMAKOKI Co.,Ltd.
  • Page 23 ORG reset speed F Detect CW limit sensor ORG reset speed F Move to offset position ORG reset speed S After detect ORG sensor, move to 0.5mm position ORG reset speed S Detect ORG sensor (Z phase) Copyright 2018, SIGMAKOKI Co.,Ltd.
  • Page 24 Normal Close:(Normally switch OFF by detecting ORG sensor from ON condition) 17~24) N sensor Level 0~7: NEAR ORG sensor input logic level setting (0~7axis) Select NEAR ORG sensor detecting level (Input logic level) for each axis Copyright 2018, SIGMAKOKI Co.,Ltd.
  • Page 25 ORG4 Speed(R) 1~1000 ORG5 Speed(S) 1~999999999 50000 ORG5 Speed(F) 1~999999999 500000 ORG5 Speed(R) 1~1000 ORG6 Speed(S) 1~999999999 50000 ORG6 Speed(F) 1~999999999 500000 ORG6 Speed(R) 1~1000 ORG7 Speed(S) 1~999999999 50000 ORG7 Speed(F) 1~999999999 500000 ORG7 Speed(R) 1~1000 Copyright 2018, SIGMAKOKI Co.,Ltd.
  • Page 26 [HIT mode] F:1~500000(Unit:pulse/s) [SHOT mode] F:1~999999999(Unit:0.01µm/s) [HIT mode] R:1~1000(Unit:ms) [SHOT mode] [HIT mode] M:1~999999999(Unit:0.01µm/s) [HIT mode] M:1~500000(Unit:pulse/s) [SHOT mode] *) Regarding Speed setting, minimum speed S should be set smaller than maximum speed F and medium speed Copyright 2018, SIGMAKOKI Co.,Ltd.
  • Page 27 Close:Closed Loop control method 9~16) INPOS 0~7: Inposition range setting In case of Closed Loop setting condition, set Inposition renge (which is the range of stop position at stop completion) for each axis. [Setting range] 1~99 Copyright 2018, SIGMAKOKI Co.,Ltd.
  • Page 28 Setting Value=99: INPOS range is 99×±0.01µm=±0.99µm 17~24) RES_UNIT 0~7: Scale setting Set Scale resolution and direction. [Setting Range] -30000~30000: - input is reverse direction. Unit is nm. Reference: Stage RES_UNIT OSMS(CS)20 OSMS(CS)26 OSMS(CS)33 HST(GS)-50 HST(GS)-100 HST(GS)-200 Copyright 2018, SIGMAKOKI Co.,Ltd.
  • Page 29 3-5.LAN settings LAN settings for HIT-M ① Connect PC and HIT-M using LAN. Regarding interface between PC and LAN, please refer to「2-3 Interface with PC」. ② Activate SGSample. Figure 3-3:Sample software Figure 3-4:Menu choice ③ Please choose a HIT-M. 3-3.) Figure ④...
  • Page 30 Figure 3-7:LAN settings ⑦ Click OK after setting IP address on Figure 3-7 LAN settings in accordance with PC condition. *) Redo PC settings according to new LAN settings when any changes have been made in settings. Copyright 2018, SIGMAKOKI Co.,Ltd.
  • Page 31 ‘NG’ sign will be responded for incorrect commands, which will result in the whole command not being executed. When commands are issued to a disconnected slave, the command parameter of disconnected slave will be disregarded, however, commands to the other slaves will be executed normally. Copyright 2018, SIGMAKOKI Co.,Ltd.
  • Page 32 When the designated slave number with parameter is 1, the mechanical origin will be operated. No operation to 0 or abbreviated slave unit. (2) Example H:1,1,0 means to operate the mechanical origin to slave number 0 and 1 Copyright 2018, SIGMAKOKI Co.,Ltd.
  • Page 33 In the conition of closed loop control, a positioning of stage is completed when a reading of scale reaches inside a range of INPOS. (2) Example A:, 0,-20000,,30000 means to return to origin (0), -0.2mm and 0.3mm of absolute position to slave number 1, 2 and 4 respectively. Copyright 2018, SIGMAKOKI Co.,Ltd.
  • Page 34 Due to operation by calculation, there is a calculation error to the ended point of E: : : : 1 command (Arc interpolation movement command 1) and E: : : : 2command (Arc interpolation movement command 2). Please check the actual stage. Copyright 2018, SIGMAKOKI Co.,Ltd.
  • Page 35 E: : : : 0,2,5,0,0,0,5000,-5000 A center point coordinate is based on a relative coordinate of the current position (0.05mm,-0.05mm) and move stages of slave unit No2, Slave unit No5 one round clockwise until the current position. Axis 5 Axis 2 0.05mm -0.05mm Copyright 2018, SIGMAKOKI Co.,Ltd.
  • Page 36 A center point coordinate is based on a relative coordinate of the current position (0.05mm,-0.05mm) and move stages of slave unit No6、 Slave unit No7 90°from current position to degree of ended point position clockwise. Axis 7 0.05mm Axis 6 90° -0.05mm Copyright 2018, SIGMAKOKI Co.,Ltd.
  • Page 37 Pass point coordinate and ended point coordinate are based on a relative coordinate of the current position (+0.05mm, +0.03mm) and (+0.08mm, +0.12mm). Then, stages of slave unit No2、Slave unit No5 move circularly. Axis 7 0.12mm 0.03mm Axis 2 0.05mm 0.08mm Copyright 2018, SIGMAKOKI Co.,Ltd.
  • Page 38 K: : : : 1,4,,+10000,20000 Ended point coordinate is based on a relative coordinate of the current position (+0.1mm, +0.2mm) and move stages of slave unit No1、Slave unit 4 axis No4 linearly. 0.2mm 1 axis 0.1mm Copyright 2018, SIGMAKOKI Co.,Ltd.
  • Page 39 4-1-9 L:E command (Emergency stop (Immediate stop) command) (1) Function This command indicates to stop stages of all slave units immediately. (2) Example L: : : : E means to stop stages of all slave units immediately. Copyright 2018, SIGMAKOKI Co.,Ltd.
  • Page 40 0.01µm/s unit), OK will be returned, but it will be treated as speed of 800000(pulse/s). D: : : : 5,10000,100000,200 means Start-up speed : 0.1mm/s, 1mm/s : Maximum speed, 200ms : Acceleration / deceleration time to slave unit No5. Copyright 2018, SIGMAKOKI Co.,Ltd.
  • Page 41 ※ ※ ※ ※ ) HIT-SH cannot change the Motor Divide by this command. (2) Example S: : : : d0,d1,d2,d3,d4,d5,d6,d7 d: means to input the command with the above 15 types of number or abbreviation to Copyright 2018, SIGMAKOKI Co.,Ltd.
  • Page 42 0 or 1 0 or 1 Example of returned data 00,01,02,,,,,,01 means master accepted the received command. Detect –LS by Slave unit No0 and 7, detect +LS by Slave unit No1 and Unconnected status by slave unit No2-6. Copyright 2018, SIGMAKOKI Co.,Ltd.
  • Page 43 Travel per pulse (µm) 1.00,2.00,1.00,2.00,,,, Microstep 2,2,20,10,,,, Travel speed 1000,500000,100 Returning origin speed 1000,500000,100,200000 Status of program operation ProgNo、ProgRun、LineNo、Count of remaining Loop (Example)2,1,13,4 13 row of program No.2 is running and count of remaining Loop is 4. Copyright 2018, SIGMAKOKI Co.,Ltd.
  • Page 44 Line No.( ( ( ( Example) ) ) ) P: : : : E U0: : : : Stop program temporarily. When the the command is accepted, it will temporarily stop after the under operating program in the current Line No. Copyright 2018, SIGMAKOKI Co.,Ltd.
  • Page 45 (2) Example Z: : : : p p: : : : 0 represents SHOT mode and 1 represents HIT mode. Z: : : : 0 Changed to SHOT mode Copyright 2018, SIGMAKOKI Co.,Ltd.
  • Page 46 In case of other commands, it will be returned OK (correct acceptance) or NG (Reject cceptance due to devious commands) In case of command use like drive commands which are M, A, E, K and J except H, it needs to be activate command (G). Copyright 2018, SIGMAKOKI Co.,Ltd.
  • Page 47 If command in busy condition except Q、?、L、!、I、Q command is issued, it return NG as malformed command and not execute the command. If the command is issued to unconnected slave, command parameter of unconnected slave is ignored and command parameter to the other slave will execute normally. Copyright 2018, SIGMAKOKI Co.,Ltd.
  • Page 48 Travel 100 microns in the + direction on the 1st axis, 50 microns in the –direction on the 2nd, not move on the 3rd axis and 200 microns in the - direction on the 4th axis. (In closed loop) Copyright 2018, SIGMAKOKI Co.,Ltd.
  • Page 49 The speed of axis 1 & 2( ( ( ( S,F,R) ) ) ) , travel per pulse and acceleration / deceleration speed formula (between trapezoidal shape and S shape) need to be set to same values on two different axes. Copyright 2018, SIGMAKOKI Co.,Ltd.
  • Page 50 (between trapezoidal shape and S shape) need to be set to same values on 2 different axes. (2) Example E:W+P1000+P500 Travel using linear interpolation to the 1000 pulse position on the first axis and the 500 pulse position on the second axis. Final coordinates Copyright 2018, SIGMAKOKI Co.,Ltd.
  • Page 51 4-2-10 L command ( ( ( ( Deceleration stop command) ) ) ) (1) Function It decelerates and terminates designated axis (stage). (2) Example Decelerate axis 1 until it terminates. Decelerate axis 4 until it terminates. Decelerate axis 1 to 4 until they terminate. Copyright 2018, SIGMAKOKI Co.,Ltd.
  • Page 52 It can be switched ON/OFF by putting the 4 digit of command 0 and 1 respectively. (2) Example C:10 Switch OFF the excitation of axis 1. C:41 Switch ON the excitation of axis 4. C:W1 Switch ON the excitation of axis 1 to 4. Copyright 2018, SIGMAKOKI Co.,Ltd.
  • Page 53 ※ ※ ※ ※ ) HIT-SH cannot change the Motor Divide by this command. (2) Example S:12 Divide the step angle of axis 1 into 2. S:280 Devide the step angle of axis 2 into 80. S:4250 Devide the step angle of axis 4 into 250. Copyright 2018, SIGMAKOKI Co.,Ltd.
  • Page 54 Controller is engaged and only Q, !, L, I, O, and ? commands are acceptable. Q: S command is also effective in SHOT mode. Refer to the page 4-1-15 for further explanation. Response data format is equal to HIT mode, however, with 4 axes only. Copyright 2018, SIGMAKOKI Co.,Ltd.
  • Page 55 Travel speed S100F1000R200 Origin return speed 1000,500000,100,200000 Program running status Program No, Program Run, Line No., residual Loop counter (e.g.) 2,1,13, 4 line of Program No. 2 is running and count left from loop is 4. Copyright 2018, SIGMAKOKI Co.,Ltd.
  • Page 56 ‘NG’ sign. Default value is set to (exe)P:P2 Select program No.2. S: Start program. Selected program will start. E: Terminate program. Program will end at the point of when ongoing operation finishes once the termination command has been recognized. Copyright 2018, SIGMAKOKI Co.,Ltd.
  • Page 57 (distance value / pulse rate). Switching the mode during the ongoing operation may cause malfunction. Switching should be made just afterwards the initial settings when needed. (2) Example p: 0 is to be switched into SHOT mode and 1 into HIT mode. It is to be switched into HIT mode. Copyright 2018, SIGMAKOKI Co.,Ltd.
  • Page 58 4-3.Program functions 10 kinds of program, numbered 0 to 9, can be stored in HIT-M controller. These programs are stored in unerasable memory, which means they will not be erased even when POWER goes OFF. Maximum capacity for each program is 1024 lines. Please use tool software by Sigma Koki when composing, editing, loading and saving programs.
  • Page 59 - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - Copyright 2018, SIGMAKOKI Co.,Ltd.
  • Page 60 CW direction with keeping OUT1 and waiting 0.4seconds after completion of circular interporation (in closed loop). Wating input signal, if INPUT is 3 execute next step. Repating 1000 times 1 micron move at speed 1 at 0 axis with keeping OUT1。 Quit. Copyright 2018, SIGMAKOKI Co.,Ltd.
  • Page 61 2, ORG1 (MINI method compatible, however stage moves to ORG offset value) CW (CCW) Sensor ORG reset speed F Detect CW limit sensor ORG reset speed M Move 0.5mm ORG reset speed S Detect CW limit sensor ORG reset speed M Move to offset position Copyright 2018, SIGMAKOKI Co.,Ltd.
  • Page 62 ④-1 In case that ORG sensor is set on the inside of CW(CCW) sensor ORG sensor CW (CCW) Sensor ORG reset speed F Detect ORG sensor ORG reset speed M Move 0.5mm ORG reset speed S Detect ORG sensor Copyright 2018, SIGMAKOKI Co.,Ltd.
  • Page 63 ⑤-1 In case that NEAR ORG sensor is on the inside of CW(CCW) sensor. NEAR ORG sensor ORG sensor CW (CCW) sensor ORG reset speed F Detect NEAR ORG sensor ORG reset speed S Detect ORG sensor Copyright 2018, SIGMAKOKI Co.,Ltd.
  • Page 64 6, ORG5 (for 3 sensor use (LS+ORG(Z phase))) CW (CCW) sensor ORG sensor (Z phase) ORG reset speed F Detect CW limit sensor ORG reset speed F Move to offset position ORG reset speed S Detect ORG sensor (Z phase) Copyright 2018, SIGMAKOKI Co.,Ltd.
  • Page 65 For each slave axes, the motor excitation ON/OFF status during activation of the EMG STOP is selectable. (Use memory switch (No.130) to (No.137) “EMG Excitation” for this setting.) Fig. 4-5-1: An Example of “EMG_STOP Switch” connection Copyright 2018, SIGMAKOKI Co.,Ltd.
  • Page 66 Speed setting with memory switch in the case of a rotation stage or the speed to set by D command and B command a rotary angle (set it in 0.0001 degrees unit ) / second.) [Example] In the case of 300000, F speed shows 300,000 × 0.0001 degree = 30 degrees/s. Copyright 2018, SIGMAKOKI Co.,Ltd.
  • Page 67 The positional information that is sent back by Q command: send back a position at an angle of a 0.0001 degrees unit now. [Example] When turn 45 degrees by M command, set it with M:1+P450000. When it is sent back with 450000 by Q command, a position shows that it is 45.0000 degrees now. Copyright 2018, SIGMAKOKI Co.,Ltd.
  • Page 68 Ambient Humidity 20~80%RH (No Condensation) Altitude up to 2000m Indoor use only Ⅱ Installation category Pollution degree External Dimensions 130mm x 120mm x 50mm (HIT-S) 130mm x 120mm x 65mm (HIT-SH) Weight 630g (HIT-S) 720g (HIT-SH) Copyright 2018, SIGMAKOKI Co.,Ltd.
  • Page 69 Bi-polar pentagon micro-steps system Driving Electric Current 0.1A/Phase~1.1A/Phase (HIT-S) 1.4A/Phase (HIT-SH) Current Down 0.1A/Phase~0.7A/Phase (HIT-S) 0.7A/Phase (HIT-SH) Division settings 1,2,4,5,8,10,20,25,40,50,80,100,125,200,250 divisions 4. Electrical Fast Transient / Burst Noise EN61000-4-4(2012) Level 2 5. Electrostatic Discharge EN61000-4-2(2009) Level 2 Copyright 2018, SIGMAKOKI Co.,Ltd.
  • Page 70 IN COM OUT1 (H) OUT1 (L) OUT2 (H) OUT2 (L) OUT3 (H) OUT3 (L) OUT4 (H) OUT4 (L) +V (DC24V) Connector 10220-52A2PE (by Sumitomo 3M Limited) used Figure 5-2-1:IN1~4 Input Circuit Diagram Figure 5-2-2:OUT1~4 Output Circuit Diagram Copyright 2018, SIGMAKOKI Co.,Ltd.
  • Page 71 (Sensor Power Source) Sensor Power Source Connector XM2D-1501 (By Omron) used 6-2-3 SCALE1~ ~ ~ ~ 8 Connector Description Description Alarm- Connector XM4L-1542-112 (By Omron) used 6-2-4 RS232C Connector Description Description Connector XM3B-0922-132 (By Omron) used Copyright 2018, SIGMAKOKI Co.,Ltd.
  • Page 72 Description Description DATA+ DATA- Connector XM7B-0442 (By Omron) used 6-2-6 ETHERNET Connector Description Description Connector J0011D21BNL (By PULSE) used 6-2-7 LINK Connector Description Description DATA- DATA+ Connector TM11R-5LF-88(50) (By Hirose Electric) used 6-3.Outlines (1) HIT-M Outlines Copyright 2018, SIGMAKOKI Co.,Ltd.
  • Page 73 (2) HIT-S Outlines (3) HIT-SH Outlines Copyright 2018, SIGMAKOKI Co.,Ltd.
  • Page 74 SIGMAKOKI CO., LTD. Tokyo Head Office SIGMAKOKI Tokyo Head office 19-9, Midori 1 chome, Sumida-ku, Tokyo 130-0021, JAPAN Tel:+81-3-5638-8228 Fax:+81-3-5638-6550 e-mail: international@sigma-koki.com Technology center 1-1 Yatsukaho, Hakusan-shi, Ishikawa, 924-0838, Japan 8th edition 2018.08...

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