LEYBOLD 141 00 Technical Handbook
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LEYBOLD 141 00 Technical Handbook

Helium leak detector
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Vacuum Measurement
Leak Detection
and Components
TH 10.211/ 8.02
In Situ Analysis
LEYBOLD INFICON
T h e I n s t r u m e n t a l D i f f e r e n c e
View our inventory
UL 200
Helium Leak Detector
Cat. No.
140 00
141 00
140 01
141 01
140 10
141 10
140 11
141 11
for software version V 2.6
Technical Handbook
T M
142 00
142 10
142 11

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Summary of Contents for LEYBOLD 141 00

  • Page 1 T h e I n s t r u m e n t a l D i f f e r e n c e TH 10.211/ 8.02 View our inventory UL 200 Helium Leak Detector Cat. No. 140 00 141 00 142 00 140 01 141 01 142 10 140 10 141 10...

  • Page 2: Table Of Contents

    Maintenance ..... . . 31 LEYBOLD service ....31 Maintenance plan .

  • Page 3: Description

    1 Description 1.1 General Information Caution Avoid contact of the UL 200 with bases, acids and solvents as well as exposure to extreme climatic conditions. The UL 200 helium leak detector is supplied ready for operation. Even so, we recommend that you carefully read the Operating Instruc- tions and the Technical Handbook so as to ensure optimum operating conditions right...

  • Page 4: Other Data

    1.2.3 Other Data 1.3 Equipment Noise level < 54 dBA 1.3.1 Supplied Equipment Valves solenoid UL 200 helium leak detector, ready for operation. Dimensions (W x H x D) in mm 490 x 430 x 250 Mains cord, 2.5 m long Weight 37 kg Operating Instructions...

  • Page 5: Technical Description

    1.4 Technical Description Heavier gases are evacuated owing to the high com- pression, whereas the helium test gas is able to diffuse upstream into the mass spectrometer. The UL 200 is capable of detecting and quantifying heli- um test gas flowing into a test sample having a leak by This pump offers two special features: means of a selective mass spectrometer.

  • Page 6: Separation System

    are attracted by the positively charged anode (1/2). But 1.4.7 Electrometer Amplifier they do not immediately impinge on the anode (1/2); The electrometer amplifier amplifies the current which is instead they oscillate to and fro several times until they generated on the ion collector of the mass spectrometer. finally arrive at the filament of the anode (1/2).

  • Page 7: Description Of The Functions Of The Ul 200

    1.5 Description of the Functions of the UL 200 The mass spectrometer (2/7) only operates under high the FINE mode, i.e. valve (2/5) closes and valve (2/8) vacuum conditions, i.e. the pressure here must always opens so that the gas flow enters the turbomolecular remain below 10 mbar.

  • Page 8: Operation

    2 Operation Key to Fig. 2 Calibrated leak (optional) Valve for the calibrated leak (V 7) Inlet valve (V 2.a) Pirani gauge p Inlet valve (V 2.b) Turbomolecular pump (TMP) Mass spectrometer Inlet valve (V 4) Partial flow pump set (optional) 10 Venting valve (V 3) 11 Connection flange 12 External partial flow valve (V 8) (optional)
  • Page 9 TRIG 1 TRIG 2 TRIG 3 VALUE SCROLL MANUAL MENUE SERVICE CLEAR ENTER Key to Fig. 4 LED for trigger 1 VALUE push-button 11 MANUAL push-button LCD display MENU push-button 12 SERVICE push-button LED for trigger 2 ENTER push-button 13 Vacuum diagram (simplified) LED for trigger 3 CAL push-button SCROLL push-button...

  • Page 10: Installation Of The Instrument

    2.1 Installation of the For this also refer to Chapter 3.2.1 with figures 6 and 7. Then pull the mechanical cover upwards to the stop and Instrument take it away to the front (please refer to the enclosed operating instructions for the pump when wanting to check the oil level).

  • Page 11: Start-Up (First Pump-Down Cycle)

    Blank off the connection flan- ge (3/2) Set the mains switch (3/7) to Running up of the forevacu- „LEYBOLD INFICON“ All display components are on. the „1“ position um pump and the turbomole- „UL 200 Version x.x“...

  • Page 12: The Controls And Their Functions

    2.4 The Controls and their Note The trigger thresholds (menu item 1) should fall into the Functions range of the bargraph display. Trigger levels outside the range of the bargraph display are not usable in the case of manual range selection. 2.4.1 Overview of the Controls and Displays The LED in the MANUAL push-button is not on and the...

  • Page 13: Controls On The Hand Unit

    CLEAR push-button 2.4.4 Controls on the Hand Unit The CLEAR push-button (4/10) is used to cancel pro- An overview of the controls on the hand unit is given in cesses and functions which have been started. Moreo- Fig. 5. ver, this push-button may be used to acknowledge war- nings and error messages.

  • Page 14: Displays On The Hand Unit

    10 s, the helium background of the UL 200 is conti- celled automatically as soon as the STOP / VENT push- nuously monitored. This helium background may be indi- button (5/2) is pressed. cated when selecting menu function „21: System BG dis- The ZERO function has an effect on all output devices play on“.

  • Page 15: Equipment Settings (Menu Structure)

    81). This password will only This entry is performed digit by digit through the VALUE be made available after suitable training by Leybold. push-button (4/6) and the ENTER push-button (4/8). When selecting menu item 09 for the first time, the mes- sage „locked“...

  • Page 16: Menu Functions (Overview)

    Caution Display example (4/2) Brief description This type of locking will not protect the –––––––––––––––––––––––––––––––––––––––––––– instrument against a fully intentional act 32:ZERO-time 1 s Entry of time constant for sliding Zero of sabotage. 33:QUICK-Pump time Entry of time defining sequences in partial flow mode 49:Change Password 1 ? Change password 1...
  • Page 17 01. The display will indicate the following, for exam- lines (5; 20; 50 m). ple: Part.flow for connection of an external LEYBOLD parti- 01: Trigger 1 2.5E-10 al flow pump set (see Chapter 1.3.2). Here two partial flow modes may be selected.
  • Page 18 Normal: Standard partial flow operating mode The same applies correspondingly when the UL 200 has been set to M = 2 amu (H ) or M = 3 amu. Oil-free Avoids possibly occurring backstreaming of oil vapour from the partial flow pump. 05: to 08: not assigned Note Switch off the FINE MODE lock (menu item 31) „Only...
  • Page 19 red values at intervals of 20 ms, provided the b) Selected assignment: LR + PE most sensitive preamplifier area has been sel- Assignment ected. ———————————————————————— Switchover occurs at a leak rate of about Leak rate, logarithmic 1·10 mbar·l·s . This kind of averaging also U = 1 to 10 V;...
  • Page 20 14: Control Keyboard 1 Select control location / 15:RS 232 Baud rate 9600 Parameter setting for the define locks SERIAL connection (3/10) The UL 200 may be controlled from 3 locations. Here it (refer also to the descripti- is possible to define which location is to control the on for the interface UL 200.
  • Page 21 on: This operating mode is recommended when a pas- When the push-button is pressed or the con- sed/rejected statement is to be made. trol input is actuated for a period of time which The loudspeaker will be active if the leak rate falls - is longer than the delay time specified here, for the first time following the start procedure - below the UL 200 will vent the test connection and...
  • Page 22 27:Language english Set language partial flow valve block in opened (For detailed descripti- Choice between German, English, French or Italian lan- ons please refer to the operating instructions „GA 10.277“ guage. of the partial flow pump system). At T = 0 s valve V 10 will not open for the time being. 28: Power Frequency 50 Hz Set mains frequency This selection is recommended for large volumes or dirty...
  • Page 23 52: 01 E53 03.07.96 13:00 List error log Depending on the strength of the magnetic field of the Outputs the 10 most recent error messages or warnings built-in magnets, the peaks for the preamplifier voltages together with date and time. must fall into the following ranges: M2: 785 ...
  • Page 24 56: Cycles V1 0012354 Display valve cycle counter 76: Selection of the post amplification factor / display of Here the number is displayed which indicates how often A/D converter voltage the valve has been opened. The desired valve may be First the second password has to be entered in service selected through the Value push-button.
  • Page 25 Manual mass alignment: „76: Gain M“ via the Value push-buttons and acknowled- As a rule, a mass alignment is run automatically during ge by pressing the ENTER push-button. Then enter the the calibration process. Through this menu item, the required post amplification factor with the aid of the value mass may be aligned manually.
  • Page 26 button (4/8) whereas pressing of the CLEAR push-button GROSS / FINE: (4/10) ends the AMP test. For accurate testing, the pre- Sensitivities alignment in the GROSS and FINE vacuum amplifier signal should be displayed on an oscilloscope ranges. (BMEVS and EVS on the control assembly). Connect a calibrated leak of 1E-7 ...

  • Page 27: Equipment Connections

    START / STOP signals. the relay changeover contacts the three triggers (menu - OPTION (3/13): Connections for driving of Leybold item 1) and the mode (Ready / Fail) of the UL 200 (menu accessories (8 pins) (partial flow valve, for example).

  • Page 28: Connection For Accessories (Option)

    +24 V, constantly applied, power supply for In the case of systems leak detection, the influences of the LEYBOLD partial flow valve or the pressure within the test samples and the pressure sniffer lines. conditions in the partial flow mode of operation must be taken into account.

  • Page 29: External Calibration

    - Mass alignment Displayed message Action required by the - Measurement of the calibrated leak (4/2) operator ————————————————————————– - Zero measurement Autotune none - Calculation of the calibration factor Open Cal-Leak <enter> Open the calibrated leak and The calibration process takes about 25 s and has been acknowledge by pressing completed when the message „Calibration complete“...

  • Page 30: Shutdown

    Enter the measurement mode by operating the START push-button, for example. When the green light emitting diode on the hand unit (5/3) is on continuously, or when the LCD display (4/2) indicates a measured value, then press the CAL push- button (4/9).

  • Page 31: Maintenance

    The rotary vane pump is located on the side This „Declaration of Contamination“ is required to meet of the mechanical section at the bottom of the leak German Law and to protect our personnel. Leybold must detector. return any equipment without a „Declaration of Contami- nation“...

  • Page 32: Exchanging The Filter Mats

    Use two flat blade screwdrivers and insert these into the To exchange the filter mats remove the covers (see openings (6/9) and lever the cover for the mechanical Chapter 3.2.1). section out at the bottom. Filter mat a.) This filter mat is attached to the cover of In doing so, the cover should at first be moved somewhat the electronics section by means of a to the front by the downward motion of the screwdrivers...

  • Page 33: Cleaning

    these must be followed closely. Use a screwdriver to fold out the lid of the mains socket (3/7) from the right (the mains switch is not affected by As already stated in Chapter 3.2 only Arctic oil must be this). used for the D 2,5 E pump in the UL 200.
  • Page 34 No in Desig- Fuse Remark No in Desig- Fuse Remark Fig. nation rating Fig. nation rating ———————————————————————— ———————————————————————— F1 in 1 AT Protects the electronics which F2 on 24 V system voltage of the NT 12 drive the turbomolecular pump. mass spectrometer supply.

  • Page 35: Messages

    4 Messages LCD text display Meaning ———————————————————————— LEYBOLD INFICON First message to appear after the instrument has been swit- During leak detection operations, the LCD display (3/2) ched on. will indicate information which supports the operator LR = x.xE-xx mbar·l/s Indication of the leak rate in operating the UL 200.
  • Page 36 LCD text display Meaning LCD text display Meaning ———————————————————————— ———————————————————————— The correct password must be Performing Standby After having switched on the entered in service menu item automatic functions (serv. me- 50 first. nu item 70), the UL 200 per- Password failed The wrong password has forms a warm boot and then...

  • Page 37: Warnings And Error Messages

    4.2 Warnings and Error Mes- Control panel Fig. 4: The trigger status displays (4/1), (4/3) and (4/4) are sages off. The error information is indicated by the LCD dis- play whereby an unambiguous error cause has been assigned to each error condition (e.g. „E21: ...“). The UL 200 is equipped with comprehensive self-dia- In the case of several errors, the individual errors are gnostic facilities.

  • Page 38: List Of All Warnings And Error Messages

    4.2.3 List of all Warnings and E13: (STE EEPROM failed) - Acknowledgement signal ACK has not been received. Error Messages - Write/read test has failed during initialization. Each message is composed of three parts: EEPROM faulty. The first letter of the message (E or W) indicates whether E14: (STE Real-time Clock failed) this message is an error message or a warning messa- - Time and data information does not make any sense.
  • Page 39 W33: Amp T < 10 °C E43: MSV Cat-Heater I>> - The temperature sensor in the preamplifier signals Signal MPKZH on MSV board is active; cathode current T < 10 °C. is too high; I > 3.6 A Run-up time for the forevacuum pump will be longer. MSV is faulty.
  • Page 40 E52: TMP-Freq F<<,t>5min E61: Emission Fail TMP frequency is too low. Emission should be switched on. MSV subassembly indi- The frequency of f = 1000 Hz has not been reached after cates a fault. t = 5 minutes. Time t starts as soon as the pressure has MENB emission current not within range.
  • Page 41 W79: Signal too small W93: Syntax Error Calibrated leak is too small or has not been opened. See interface description SB 10.211. Preamplifier voltage < 10 mV. The tune process is ignored and the calibration process is continued. W80: Request for Cal Abbreviations which are used: Request for calibration.

  • Page 42: Definition Of Terms

    Definition of Terms the lowest value which can be obtained. In this way the values Autoranging The range of the preamplifier and adapt automatically to a decaying the vacuum ranges are selected background (adaptive backgro- automatically. und correction). The autoranging feature of the The entire measurement process UL 200 covers the entire range or may take up to 10 s after opera-...
  • Page 43 Service menu Comprises menu lines 50 to 99. The service menu is called up by operating the Service push-but- ton (see also Chapter 2.5 and 2.5.4). Partial flow range 1 Valves V2a, V4.1 and V8 are open; PE = 1 ... 100 mbar. Partial flow range 2 Valves V2a, V2b and V8 are open;...
  • Page 44 TH 10.211/8.02 - 12/97...
  • Page 45 Declaration of Contamination of Vacuum Equipment and Components The repair and/or service of vacuum equipment and components will only be carried out if a correctly completed declaration has been submitted. Non-completion will result in delay. The manufacturer could refuse to accept any equipment without a declara- tion.
  • Page 46 LEYBOLD INFICON Bonner Strasse 498 (Bayenthal) D-50968 Cologne Tel.: + 49 (221) 347-0 Fax: + 49 (221) 347-1250 http://www.leyboldvac.de e-mail:documentation@leyboldvac.de TH 10.211/8.02 - 12/97...

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