Buehler EcoMet 300 Standard Operating Manual
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Buehler EcoMet 300 Standard Operating Manual

Silicon polisher
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NANOSYSTEM FABRICATION FACILITY (NFF), HKUST
Standard Operating Manual
___________________________________________________________
TM
Buehler EcoMet
300 Silicon Polisher
Version 1.0
Page 1 of 20

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Summary of Contents for Buehler EcoMet 300

  • Page 1 NANOSYSTEM FABRICATION FACILITY (NFF), HKUST Standard Operating Manual ___________________________________________________________ Buehler EcoMet 300 Silicon Polisher Version 1.0 Page 1 of 20...

  • Page 2: Table Of Contents

    NANOSYSTEM FABRICATION FACILITY (NFF), HKUST Contents Picture and Location Process Capabilities 2.1 Cleanliness Standard 2.2 Possible Polishing Materials 2.3 Process Specification Contact List and How to Become a Qualified User 3.1 Emergency Responses and Communications 3.2 Training to Become a Qualified EcoMet 300 User Operating Procedures System Description...

  • Page 3: Picture And Location

    NANOSYSTEM FABRICATION FACILITY (NFF), HKUST Buehler EcoMet 300 Silicon Polisher 1. Picture and Location Fig.1 Buehler EcoMet 300 Silicon Polishing Machine This tool is located at Room 2227. 2. Process Capabilities 2.1 Cleanliness Standard EcoMet 300 silicon polisher is classified as a Semi-Clean equipment.

  • Page 4: Process Specification

    NANOSYSTEM FABRICATION FACILITY (NFF), HKUST 2.3 Process Specification What EcoMet 300 Silicon Polisher CAN do 1. EcoMet 300 can provide mechanical polish of sample surface using different size of slurry corresponding to different type of polish cloth. 2. EcoMet 300 can polish the samples with thickness from tens microns to one millimeters.

  • Page 5: Contact List And How To Become A Qualified User

    NANOSYSTEM FABRICATION FACILITY (NFF), HKUST 3. Contact List and How to Become a Qualified User 3.1 Emergency Responses and Communications 1. Security Control Center: 2358-8999 (24hr) & 2358-6565 (24hr) 2. Wing Leong CHUNG - Safety Officer (2358-7211 & 64406238) 3. Preason Man Wai Lee – Deputy Safety Officer (2358-7900), 4.

  • Page 6: Safety Warnings

    NANOSYSTEM FABRICATION FACILITY (NFF), HKUST surface using different slurry corresponding to different type of polish cloth. To get a defect-free surface, it normally needs multi-steps from coarse to intermediate and to fine polish. The sample needs to be bounded on a 4-inch ceramic holder using wax. Then put the ceramic holder and the drive adapter together and fix them using adhesive tape.

  • Page 7: Initial Status Checks

    NANOSYSTEM FABRICATION FACILITY (NFF), HKUST 5. Do not use the equipment after office hour. 4.4 Initial Status checks 1. Please check the status of shutdown notice posted in the NFF reservation website. 2. Please check the reservation status on the website, and reserve the right time slot by your own.
  • Page 8 NANOSYSTEM FABRICATION FACILITY (NFF), HKUST for 3~5 minute. Fig. 2 4) Melting enough wax on the ceramic holder, as shown in Fig. 3. Fig. 3 5) Put your sample on top of the wax, and move the wafer in different direction to even the wax for a flat surface, see Fig.
  • Page 9 NANOSYSTEM FABRICATION FACILITY (NFF), HKUST 6) Move the ceramic holder onto the bonder very carefully, and put an oil-paper (Fig.5a) and a soft silicone pad on the top, as shown in Fig. 5b. Oil paper Silicone pad Fig. 5 7) Switch the RED pneumatic button to horizontal (position 2), as shown in Fig. 6a, and let the heavy metal drop down to the sample surface.
  • Page 10 NANOSYSTEM FABRICATION FACILITY (NFF), HKUST 8) Take out the ceramic holder by switching the RED pneumatic button back to position 2 and then position 1. The heavy metal will lift up to initial position. Please be careful about the ceramic holder. Sometimes the ceramic holder will goes up together with the heavy metal.

  • Page 11: Polish Cloth And Slurry Selection

    NANOSYSTEM FABRICATION FACILITY (NFF), HKUST B) Drive adapter and ceramic holder bonding Step1 Step2 Step3 Fig. 8  As shown in Fig. 8. The sample is bonded on the ceramic holder.  Put the ceramic holder and the drive adapter together as shown in step 2. ...
  • Page 12 NANOSYSTEM FABRICATION FACILITY (NFF), HKUST the beginning.  You have to buy your own polishing pad from NFF for normal user.  You have to keep your own polishing pad by yourself.  DON’T use any polishing cloth, slurry or lubricant not from NFF Different size of diamond suspension and Lubricant Different type of polishing cloth in cabinet...

  • Page 13: Polish Parameters Setting

    NANOSYSTEM FABRICATION FACILITY (NFF), HKUST 4.8 Polish Parameters Setting Fig. 10 shows the control panel of EcoMet 300 silicon polisher. The detailed functions of the buttons are listed below. TIME Increase Decrease SPEED Water (ON/OFF)  Fresh water  Recirculating FLUIDS Platen Only ...
  • Page 14 NANOSYSTEM FABRICATION FACILITY (NFF), HKUST ……… Displays the time set for a grinding polishing cycle TIME Displays the selected rpms of the platen or power ……… SPEED head Selects between fresh water, recirculated water, and ……… Fluids Selects the rotational direction of the head and ………...
  • Page 15 NANOSYSTEM FABRICATION FACILITY (NFF), HKUST step 2. Steps 5&6 are for final polish. The polishing time here is typical and can be adjusted according to the result. Slurry Polishing cloth Time Steps Lubricant Ingredients/Size Color Name Color (min) Diamond/15µm Brown TexMet Lt yellow MetaDi Fluid...

  • Page 16: During The Run

    NANOSYSTEM FABRICATION FACILITY (NFF), HKUST 4.9 During the Run (1) Moving and positioning the power head Locking Handle Fig. 11 Locking handle of the power head  Remove the cover of the D-shape bowl.  Rotate the locking handle, as shown in Fig. 11, counter-clockwise to loosen the power head.
  • Page 17 NANOSYSTEM FABRICATION FACILITY (NFF), HKUST  Raise the outer sleeve of the lift-lock of the power head, as shown in Fig. 12-step 1. Step2 Step1 Alignment lock Step3 Fig. 12 Sample loading  Insert the sample holder, and gently rotate it until it aligns to the lock, as shown in Fig.12-step 2.
  • Page 18 NANOSYSTEM FABRICATION FACILITY (NFF), HKUST (3) Start the polishing process Green start button 1# (not shown) Green start button 2# Fig. 13 Power head start buttons  Before the process, spray proper lubricant and diamond suspension to the polishing pad and spread them by rotating the platen manually. ...

  • Page 19: Process Recording During The Process

    NANOSYSTEM FABRICATION FACILITY (NFF), HKUST  Repeat the above polishing steps using suitable polishing cloth, slurry and lubricant until the surface roughness meets the requirement. (4) Unloading and cleaning  When process is finished, raise the lift-lock chuck and release the sample holder.

  • Page 20: Check Out

    NANOSYSTEM FABRICATION FACILITY (NFF), HKUST from coming into air. 4.12 Check out Check out the equipment in the NFF equipment reservation website immediately after 4.13 Important Notice  DON’T spray any water on the polishing cloth except using silica 0.06µm slurry.

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