Inficon VSA200 Operating Manual

Vacuum Switch
VSA200, VSD200
Operating Manual
Incl. EC Declaration of Conformity
tina65e1

Product Identification

In all communications with INFICON, please specify the in-
formation on the product nameplate. For convenient refe-
rence copy that information into the space provided below.
Model:
Set point:
PN:
SN:
V
Validity
This document applies to products with the following part
numbers:
VSA200
3SA1-xxx-xxx0
Set-point value
Flange 1 ⇒ DN 16 ISO-KF
Unit
VSD200
3SD1-Mxx-xxx0
Setpoint value
Sign
Flange 1 ⇒ DN 16 ISO-KF
Unit
The part number (PN) can be taken from the product name-
plate.
If not indicated otherwise in the legends, the illustrations in
this document correspond to the vacuum switch with vacuum
connection DN 16 ISO-KF. They apply to vacuum switches
with other vacuum connection by analogy.
We reserve the right to make technical changes without prior
notice.
All dimensions in mm.

Intended Use

The vacuum switches have been designed for the use in
vacuum systems as absolute pressure switch (VSA200) or as
differential pressure switch (VSD200) in different measure-
ment ranges.
Trademark
®
VCR
Safety
Symbols Used
Information on preventing any kind of physical injury.
(2011-01)
Information on preventing extensive equipment and envi-
ronmental damage.
Information on correct handling or use. Disregard can lead
to malfunctions or minor equipment damage.
LI-9496 Balzers
W
Personnel Qualifications
All work described in this document may only be carried out
by persons who have suitable technical training and the
necessary experience or who have been instructed by the
end-user of the product.

General Safety Instructions

• Adhere to the applicable regulations and take the nec-
essary precautions for the process media used.
Consider possible reactions between the materials and the
process media.
• Adhere to the applicable regulations and take the neces-
C ⇒ 4 VCR male
sary precautions for all work you are going to do and con-
D ⇒ 4 VCR female
sider the safety instructions in this document.
F5 ⇒ 1000 Torr
• Before beginning to work, find out whether any vacuum
G6 ⇒ 1100 mbar
components are contaminated. Adhere to the relevant re-
gulations and take the necessary precautions when hand-
ling contaminated parts.
Communicate the safety instructions to all other users.
A ⇒ +
Liability and Warranty
B ⇒ –
INFICON assumes no liability and the warranty becomes null
and void if the end-user or third parties
C ⇒ 4 VCR male
D ⇒ 4 VCR female
• disregard the information in this document
• use the product in a non-conforming manner
5 ⇒ Torr
6 ⇒ mbar
• make any kind of interventions (modifications, alterations
etc.) on the product
• use the product with accessories not listed in the product
documentation.
The end-user assumes the responsibility in conjunction with
the process media used.
Gauge failures due to contamination or wear and tear, are not
covered by the warranty.
Swagelok Marketing Co.
DANGER
WARNING
Caution
Skilled personnel

Technical Data

Measurement range
VSA200 (absolute) 1100 mbar (F.S.)
1000 Torr (F.S.)
VSD200 (relative to atm) -100 ... +50 mbar, Torr
Setpoint (setting range)
VSA200 30 ... 1060 mbar
20 ... 970 Torr
VSD200 -99 ... +46 mbar, Torr
Switching contact changeover contact, floating
Hysteresis 2 % above setpoint
Contact rating 30 V, 1 A DC
125 V, 0.3 A AC
Switching
1)
characteristics Low Trip Point
Accuracy ≤0.5 % F.S.
Resolution 10 bit
Switching frequency 0.5 Hz
Response time ≤45 ms
Temperature effect on zero
and span ≤±0.02 % F.S. / 1K
Long-term stability ≤±0.5 % F.S. / a
Effect supply voltage ≤±0.005 % F.S. / V
Starting time 1 s
Service live >1×10
Electronic 25'000 h
Relay >3×10
Supply
DANGER
The vacuum switch may only be connected to
power supplies, instruments or control devices
that conform to the requirements of a grounded
extra-low voltage (SELV). The connection to the
vacuum switch has to be fused.
Supply voltage +14 ... +30 VDC
Current consumption ≤15 mA
Power consumption ≤0.5 W
Electrical connection D-Sub, 9 pin, male
Cable 6 pin plus shielding
Cable length ≤100 m (8×0.14 mm
Materials exposed to
vacuum
Housing 1.4571, 1.4404
Diaphragm 1.4435
Internal volume
DN 16 ISO-KF 2.81 cm
®
4 VCR 0.93 cm
Admissible pressure (abs.)
VSA200 5 bar
VSD200 2 bar
Admissible temperatures
Operation 0 ... +70 °C
Storage –40 ... +80
Relative humidity ≤80 at temperatures up to
≤+31 °C, decreasing to 50
at +40 °C
Use indoors only, altitude up to
4000 m NN
Mounting orientation any
Degree of protection IP40
1)
The switching characteristics and the setpoint can be
programmed via the serial interface (pin 6, 7, 8).
8
cycles
6
cycles
2
)
3
3