Making An Average Roughness Measurement - Veeco Dektak 150 User Manual

To run a scan and level the trace:
1 Select Window > Automation Programs to display the Automation Programs window.
2 Select File > New from the menu to enter the default scan routine into the current automation program.
3 Select Run > Scan Here with the stage in position to run the current scan routine.
4 Select Plot > Level to replot and level the trace.

MAKING AN AVERAGE ROUGHNESS MEASUREMENT

After you run the scan and level the profile trace, you may perform an analytical function from the
Data Plot window. The procedure for executing the Average Roughness (Ra) analytical function on
the raw profile data is described below. The analytical function domain is on the data between the R
and M cursors. You can relocate the cursors if desired, but for this exercise use the default cursor
setting of 100 and 1900 µm for a 2 mm scan.
1 Select Analysis > Analytical Functions to display the Analytical Functions dialog box with selections for
setting roughness, waviness, heights, and geometry parameters.
2 Click Ra under Roughness in the Analytical Functions dialog box (see
3 Click Measure in the Analytical Functions dialog box (selecting Measure and Program automatically
enters the analytical function into the scan routine program).
4 Click Compute to clear the dialog box and calculate the average roughness.
Analytical Functions
NOTE –
Once you run the scan routine and the profile plots, you must level the trace.
NOTE –
Software level the trace prior to initiating any analytical function to obtain accurate
results.
NOTE –
The result from the Ra function and the cursor locations display in the Analytic
Results area located on the left of the Data Plot window. An asterisk appears next to the Ra
indicating that the analytical function was calculated on raw, unfiltered data.
Figure 6-1
).
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