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Veeco Dektak 150 User Manual

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  • Page 2 150 S EKTAK URFACE ROFILER ’ ANUAL P/N 980-294 (Standard) P/N 980-298 (Cleanroom) Revision A...
  • Page 3 Veeco Instruments Inc., except in the normal use of the software or to make a backup copy. This exception does not allow copies to be made for others, whether or not sold, but all of the material purchased (with all backup copies) may be sold, given, or loaned to another person.
  • Page 4 Veeco Instruments Inc. Statement of Limited Warranty This product is covered by the terms of the Veeco standard warranty as in effect on the date of shipment and as reflected on Veeco's Order Acknowledgement and Quote. While a summary of the warranty statement is provided below, please refer to the Order Acknowledgement or Quote for a complete statement of the applicable warranty provisions.
  • Page 5 . You can also run Wyko Vision independently of hardware under Microsoft Windows XP. The Dektak 150 and Wyko Vision software follows all Windows XP commands and conventions of use. If you need a refresher on how to work in the Windows XP environment, please refer to your Windows software guide.
  • Page 6 will pop down from the menu bar. You can then select a command from the pop-down menu by clicking on it. • Shortcut menus are available by clicking with the right mouse button on a plot (such as the 3D, Contour, or Profile plot).

  • Page 8: Table Of Contents

    Chapter 1. Dektak 150 System Overview ........
  • Page 9 Inspecting and Unpacking the Boxes ..........2-5 Unpacking Guidelines.
  • Page 10 Opening a Dektak 150 Scan in Vision ........
  • Page 11 Automation Program Options ............5-22 Data File/Data Export .
  • Page 12 Using the Scan Parameters Dialog Box ..........7-2 Scan ID .
  • Page 13 Help Menu ..............8-16 General Tab .
  • Page 14 Dektak 150 Dimensions without Enclosure ........
  • Page 15 Appendix E. 3D Mapping Function ........E-1 Overview .
  • Page 16 Masking ............... . E-31 Analysis Mask .

  • Page 18: Chapter 1. Dektak 150 System Overview

    100Å. It also measures samples up to six inches in dimension and up to four inches thick. You can use the Dektak 150 to profile surface topography and waviness, as well as to measure surface roughness in the nanometer range. The system provides a step-height repeatability of 0.6 nm (6Å.)

  • Page 19: System Components

    SYSTEM COMPONENTS This section briefly describes the major components of the Dektak 150 system. For a complete listing of components and optional accessories, see Appendix B, Technical Specifications and Purchased Options. System Configurations The Dektak 150 stylus profiler comes in the following three configurations: •...

  • Page 20: Computer And Software

    The optional Dektak 150 monitor provides a 17-inch, high-resolution, flat-panel color display. It shows programs and graphics in full color, along with a color video image of the sample surface from the USB camera in the optical assembly. The Dektak 150 software displays the substrate either alone or with superimposed graphics.

  • Page 21: Environmental Enclosure

    50 mm, 100 mm and 150 mm wafer alignment pins, the stage chuck provides three-point suspension for performing stress analysis. Options and Accessories A number of options and accessories are available for the Dektak 150, including: • A 4-inch Y auto stage that enables 3D mapping (see Figure 1-2).

  • Page 22: How The System Works

    Options. HOW THE SYSTEM WORKS The Dektak 150 profiler takes measurements electromechanically by moving the sample beneath a diamond-tipped stylus. The high-precision stage moves a sample beneath the stylus according to a user-programmed scan length, speed and stylus force. The stylus is mechanically coupled to the core of an LVDT (Linear Variable Differential Transformer).

  • Page 23: Sample Positioning

    Window on page 1-8). NOTE – When the optional Cantilever Deflection software is installed, the Dektak 150 profiler moves the stylus in a manner that produces highly accurate force-over-time measurements. The scan drive does not move. Profile Manipulation and Measurement An initial scan profile may require software leveling, zero referencing and software magnification to zoom in on an area of interest.

  • Page 24: Measurement Output

    Window on page 1-8. DEKTAK 150 SOFTWARE FUNCTIONS The Dektak 150 Version 9 software carries out all of the functions necessary to taking a single- or multiple-scan measurement and calculating analytical functions. In addition, it performs: • MicroForm™ adjustment, which reveals difficult shapes and overcomes steep slopes, thus improving the accuracy of the slope calculation.

  • Page 25: Data Plot Window

    If you requested analytical functions, the results of those calculations also appear. Furthermore, the plotting screen includes a Watch List, which serves as a real-time monitor of ASH (delta average step height), horizontal distance and vertical distance. Figure 1-6: Data Plot Window Dektak 150 System Overview...

  • Page 26: Dektak 150 Reference Materials

    Information about that item appears in a pop-up window. Online Help The online Help in the Dektak 150 application consists of this manual in PDF format. To access it, follow the instructions in the section below. This Manual in PDF Format To access the PDF file of this manual, do one of the following: •...
  • Page 27 The appendices that follow them provide instructions for using specialized functions of the software. Whether you actually perform the hands-on exercises or simply read them for information, this manual provides all the instructions that you need to effectively operate the Dektak 150 stylus surface profiler. 1-10...

  • Page 28: Chapter 2. Installing The Dektak 150 System

    NSTALLING THE EKTAK YSTEM This chapter tells you how to install the Dektak 150 surface profiler and verify that the system is functioning correctly. If you encounter problems, call Dektak 150 Technical Support at 520-741- 1044, extension 1220. SAFETY PRECAUTIONS Use Dektak 150 equipment only as specified in this manual and as specified in any documentation associated with its components.
  • Page 29 Die elektrischen Spannungen, die dem System zugeführt werden, sowie Spannungen im System selbst sind potentiell gefährlich und können zu Verletzungen von Personen führen. Bevor elektrische Servicearbeiten irgendwelcher Art durchgeführt werden ist das System auszuschalten und vom Netz zu trennen. (Veeco Personal.) Installing the Dektak 150 System...

  • Page 30: Profiler Components

    PROFILER COMPONENTS Figure 2-1 shows the main components of the front of the Dektak 150 surface profiler. Figure 2-2 shows the main components of the back. Refer to these figures as you install the system. Figure 2-1: Major Components of the Dektak 150 Surface Profiler...

  • Page 31: Preparing For Installation

    Vacuum connect Base PREPARING FOR INSTALLATION This section tells you how to prepare an operating environment, unpack the Dektak 150 shipping boxes, and remove the shipping brackets on the surface profiler. For instructions on installing the system, see Installing the System on page 2-9.

  • Page 32: Inspecting And Unpacking The Boxes

    The Dektak 150 ships in multiple boxes. Before unpacking any of them, check the entire shipment for signs of damage or mishandling. Inspect the shock indicator on Box 2 (see...

  • Page 33: Unpacking Guidelines

    The system is shipped in a plastic bag. Open the top of the bag and push it down to expose the profiler. With at least two people, lift the profiler by placing your hands under its base at either end of the casting Figure 2-4 (see ). Do not lift from the top of the system. Installing the Dektak 150 System...
  • Page 34 Figure 2-4: Lifting the Profiler by Its Base Place the system on the work table or vibration isolation table, with the Veeco logo facing forward. Figure 2-5 Use the bubble gauge at the base of the tower to verify that the work surface is level (see Adjust the work surface if necessary.

  • Page 35: Removing The Shipping Brackets From The Profiler

    Locate the red sensor shipping bracket attached to the bottom side of the sensor (see ). Loosen the thumb screws and remove the bracket. Be sure to keep the bracket for future use. Figure 2-7: Removing the Red Sensor Shipping Bracket Installing the Dektak 150 System...

  • Page 36: Installing The System

    INSTALLING THE SYSTEM This section tells you how to install the Dektak 150 system. Setting Up the Computer Locate the installation tool kit in Box 3. Keep the tools nearby throughout the installation. Locate the power strip in Box 3, and plug it into your building's AC power outlet. You must connect all computer and profiler power cords to this strip.

  • Page 37: Connecting The Cables

    Connecting the Cables Figure 2-9: Dektak 150 Cabling Diagram CAUTION: Do not connect or disconnect any cables while the power is on. ATTENTION: Ne pas connecter ou déconnecter de cables lorsque l’appareil est branché. VORSICHT: Während die Spannungsversorgung eingeschaltet ist, dürfen Kabel weder vom Gerät getrennt, noch angeschlossen werden.
  • Page 38 Connect the USB cable to the USB port in the Cable Manifold (see , left) on the back of the Figure 2-11 profiler. Then connect it to any USB port on the back of the computer. (see , right). Figure 2-10: Blank Cable Manifold Installing the Dektak 150 System 2-11...
  • Page 39 Connecting the serial cable to the Connecting the serial cable to the profiler computer Figure 2-10 Connect the power supply cable to its port in the cable manifold (see ) on the back of the Figure 2-13 profiler (see 2-12 Installing the Dektak 150 System...
  • Page 40 Connect the ground strap from the back of the computer to the CASE screw on the back of the profiler (see Figure 2-15 ). Use the 3mm hex wrench to tighten the strap in place. Installing the Dektak 150 System 2-13...

  • Page 41: Installing The Optical Assembly

    Connect the EMO box to the back of the system, and hand-tighten the black connector (see Figure 2-16: Connecting the EMO Box Installing the Optical Assembly Locate the optical assembly in Box 3. Figure 2-17 Loosen the optics hold-down screw on the optics mounting plate (see 2-14 Installing the Dektak 150 System...
  • Page 42 Rotate the optical assembly slightly such that the camera's USB port faces the rear of the system. Tighten the optics hold-down screw. Figure 2-19 Connect the USB cable from the system to the camera (see Installing the Dektak 150 System 2-15...

  • Page 43: Installing The Stage

    Locate the X-Y stage in Box 3 and remove it from its plastic bag. Figure 2- Remove the lint-free tissue from the polished aluminum block on the base of the system (see Figure 2-20: Polished Aluminum Block 2-16 Installing the Dektak 150 System...
  • Page 44 Figure 2-21 block. All of these parts appear in NOTE – Do not worry about the position of the scan drive. The Dektak 150 software will home it upon start-up. Figure 2-21: Placing the Stage on the Polished Aluminum Block...

  • Page 45: Installing The Stylus

    The stylus arm must be centered within the long trench (see ). The stylus tip should point down. Figure 2-24: Alignment of Stylus and Stylus Exchange Tool Incorrect Green dot position Stylus misaligned with exchange tool Stylus correctly aligned with exchange tool 2-18 Installing the Dektak 150 System...
  • Page 46 Figure 2-27 Place the shield around the sensor head, such that the right-front corner tab is engaged ( Figure 2-28 Press in on the left -rear corner tab until the shield clicks into place ( Installing the Dektak 150 System 2-19...

  • Page 47: Turning On The Power And Checking Out The System

    Attach left-rear corner tab last NOTE – As you use your Dektak 150 system, you may want to remove a stylus and install General Care and Handling on page 9-6 one of a different size. For more information, see Turning on the Power and Checking Out the System Verify that the power switches on the monitor and profiler EMO box are in the On position.
  • Page 48 Double-click the Dektak icon to launch the Dektak 150 software. As the software starts up, the tower moves to its upper limit switch. The system stops with the stylus in the “tower up” position, allowing you to safely position a sample beneath it.
  • Page 49 Verify all power cords are connected properly. • Repeat the power-on procedure. ATTENTION: Si le Dektak 150 ne s’allume pas lors du démarrage, suivre les indications suivantes avant de contacter Veeco: • Vérifier que tous les cables sont correctement connectés et non endommagés.

  • Page 50: Adjusting The Optics

    Near the base of the optical assembly, loosen the zoom lock screw. Watching the computer monitor, turn Figure 2-34 the focus ring until the stylus tip on screen is as sharp as possible (see ). Finger-tighten the focus lock screw. Installing the Dektak 150 System 2-23...
  • Page 51 Watching the computer monitor, turn the thumb screws on the back of the mirror plate (if necessary) to Figure 2-36 align the stylus tip with the center of the crosshairs (see ). This is a delicate adjustment, so turn the screw in increments of only half a turn. 2-24 Installing the Dektak 150 System...

  • Page 52: Taking A Test Measurement

    (see Figure 2-37: Adjustment Knobs on the Stage Left-to-right adjustment knob Front-to-back adjustment knob Click the Scan Here button to perform the factory-loaded measurement routine. Installing the Dektak 150 System 2-25...
  • Page 53 Figure 2-39 At the end of the measurement, the Data Plot window appears (see Figure 2-39: Typical Data Plot Window When you are ready to replace the vertical standard in its case: Open the case. 2-26 Installing the Dektak 150 System...

  • Page 54: Turning Off The System

    Slide the cables slide through the rear slot. Attach the enclosure’s ground strap to the grounding screw on the back of the profiler. NOTE – The enclosure that you receive may look different from the one shown here. Installing the Dektak 150 System 2-27...

  • Page 55: Installing The Optional Vibration Isolation Table

    The optional floor-mounted vibration isolation table or benchtop-mounted vibration isolation platform significantly decreases vibration and enables more accurate profiling. The vibration isolation system must be installed and ready for the Dektak 150 when the profiler arrives at your site. Review the information in Appendix A, Facilities Specifications, and then refer to the manufacturer’s...

  • Page 56: Installing A Printer

    19,500 bytes of disk space. CHANGING THE VOLTAGE SETTING The Dektak 150 operates on 60Hz AC with either 110V or 220V. The Dektak 150 requires four power connections, two electronic power supplies, a monitor and a computer. If the unit is transferred to a facility where the voltage is different, the computer must be reset for alternate voltage.
  • Page 57 To change the voltage supply setting, use a small flat head screw driver to slide the voltage switch (see Figure 2-8 ) until the appropriate voltage setting appears. Connect the power bar into an outlet that provides the appropriate voltage as shown on the voltage select card. 2-30 Installing the Dektak 150 System...

  • Page 58: Chapter 3. Basic User Interface And Stage Positioning Techniques

    OSITIONING ECHNIQUES After explaining how to start up the system, this chapter provides an introduction to the basic elements of the Dektak 150 user interface. For a detailed description of the Dektak 150 menus and toolbars, see Chapter The user interface sections are followed by a step-by-step exercise that shows you how to position the sample stage to measure the vertical standard that came with your system or another appropriate sample.
  • Page 59 Figure 3-2: Ready Notation in the Startup Window Figure 3-3: Dektak 150 Startup Window Toolbar NOTE – When other Dektak 150 windows are displayed, click Window > Close All Windows to re-display the Startup window. Basic User Interface and Stage Positioning Techniques...

  • Page 60: Software Interface And Stage Controls

    The Dektak 150 uses the following software interface and stage control devices. Stage Control The Dektak 150 has an optional automated X-Y stage that allows both automatic and semi-automatic sample positioning. Automatic or programmable positioning is described in detail in...

  • Page 61: Mouse Functions

    Mouse Functions The Dektak 150 ships with a mouse. Moving the mouse moves the pointer on the screen. To select a command, move the tip of the pointer until it rests on the desired command and click the left mouse button.
  • Page 62 Table 3-3: Keyboard Shortcuts for the Data Plot Window Keyboard Function Key(s) Ctrl+R Selects the R cursor. Ctrl+M Selects the M cursor. Ctrl+F Toggles between fast and slow cursor movement speeds. Ctrl+ (Right Moves the selected cursor to the right at the selected speed. Arrow) Ctrl+ (Left Moves the selected cursor to the left at the selected speed.

  • Page 63: Assigning Analytical Functions To Keystrokes

    Ctrl+U Re-runs the selected scan. Assigning Analytical Functions to Keystrokes Dektak 150 analytical functions (which are described in Chapter 6) can be assigned to the F11 and F12 function keys. This is useful for analytical functions that are are used frequently.

  • Page 64: Side Bar Buttons

    NOTE – Click Apply instead of OK if you want to keep the dialog box open to assign an analytical function to another key. After you have run a scan and the profile appears in the the Data Plot window, you can run the selected analytical functions with the F11 and F12 keys.

  • Page 65: X-Y Auto And Y Auto Stage Control Panel

    Table 3-1: Side Bar Buttons Window(s) Description Button Startup Open Automation Program file. Switch to Automation Program window. Switch to Sample Positioning window. Launch Dektak Help file. Sample Positioning and Data Plot Execute the current scan routine. Run the automation program. Abort the current operation.
  • Page 66 Figure 3-6: Stage Control Panel Top Section of the Stage Control Panel The top section of the Stage Control Panel (Figure 3-7) contains an illustration of the template you have chosen for your application (see Using the Templates Feature on page 3- 13).
  • Page 67 Figure 3-10), where you can modify and save existing templates and create new ones. Each template is saved to the configuration, so when you restart the Dektak 150 system, your template will still be available. For more information, see Working in the...

  • Page 68: Bottom Section Of The Stage Control Panel

    Bottom Section of the Stage Control Panel The bottom section of the Stage Control Panel contains fields and buttons for monitoring and controlling the positions of the stage and stylus. The stage can be moved in the X and Y directions to place the stylus over any desired location on your sample.

  • Page 69: Working In The Template Editor

    Working in the Template Editor Right-click in the center section of the Stage Control Panel to open the Template Editor dialog box. You can use this dialog box to create custom templates for various size discs, wafers, or panels. The selected template serves to restrict access to just the area of the stage that is covered by your sample, as defined by the template.

  • Page 70: Using The Templates Feature

    (Double-click the name of a template type to display templates stored under that type.) The selected template appears in the Template section of the Stage Control Panel. SAMPLE LOADING AND UNLOADING The Dektak 150 automatically positions the stage to home (0.0). To load a sample: Verify that the tower is raised.
  • Page 71 Figure 3-12: Window Menu, Sample Positioning In the Sample Positioning window, verify that the Stage Control Panel is displayed. If not, select Profiler > Stage Control Panel from the system menu bar (or press C +T on the keyboard). Figure 3-13: Sample Positioning Window with Stage Control Panel Feature Reticule Cursor...

  • Page 72: Positioning The Vertical Standard

    If the Z-axis limit switch has been modified, you may need to adjust it. The Dektak 150 has four inches of clearance.

  • Page 73: Stage Tracking

    Figure 3-15: Vertical Standard Correctly Positioned on the Stage STAGE TRACKING To use stage tracking to obtain fine stage movements: Figure 3-16 Move the mouse pointer into the camera view pane (see Left-click the mouse button once to activate Stage Tracking. You can now: •...

  • Page 74: Viewing The Sample

    Figure 3-16: Camera View Pane (Partial View) Select Profiler > Tower Down to lower the optical assembly toward the sample. NOTE – When using a 200-mm template, you have access to an entire 8-inch wafer. However, the Z-axis limit switch should keep the stylus from touching down directly onto the stage (unless you have moved the switch).

  • Page 75: Lowering/Raising The Stylus

    Figure 3-17: Theta Positioners Theta positioners NOTE – Prior to making a scan measurement, you may need to level the stage according Manual Stage Leveling on page 4-12 Chapter 4 to the procedures in LOWERING/RAISING THE STYLUS Lowering the stylus onto the sample surface nulls the stylus LVDT and brings the sample into focus. When the stylus is lowered, it should make contact with the surface at the center of the reticule for easy sample positioning.

  • Page 76: Optics Illumination Adjustment

    OPTICS ILLUMINATION ADJUSTMENT After lowering the optics tower to focus the camera, adjust the illumination level of the video image displayed on the Dektak 150 monitor using the toolbar icons (see Dektak Database Window on page 8-27), or the Up and Down arrow keys on the keyboard.
  • Page 77 Figure 3-20: Sample Positioning Window Pop-up Menu In the pop-up menu, click Stylus Reticule to display two options: Align and Reset. • Align allows you to manually reposition the reticle. • Reset repositions the reticule to the original default location in the center of the screen. Figure 3-21 Select Align to display the crosshair box ( ).
  • Page 78 Figure 3-21: Stylus Reticle Alignment Figure 3-22: Stylus Tip Aligned with Crosshair Basic User Interface and Stage Positioning Techniques 3-21...

  • Page 79: Feature Reticle Alignment

    FEATURE RETICLE ALIGNMENT The feature reticle is the smaller green reticle displayed in the camera view pane of the Sample Positioning window. Figure 3-23: Feature Reticle Alignment Part of Camera View Pane Feature Reticule Cursor Align the feature reticle with surface features to more accurately position the sample prior to scanning.

  • Page 80: Powering Down

    POWERING DOWN To power down the Dektak 150 system: Select File > Exit from the Dektak menu bar to exit the Dektak software. Select Start > Shut Down from the Windows XP Start menu, and then click Shut Down in the dialog box that appears.

  • Page 82: Loading The Sample

    NOTE – If you have not already done so, you may want to familiarize yourself with the Chapter 3 Chapter 8 Dektak 150 user interface by reading LOADING THE SAMPLE Before you begin the exercises in this chapter, you must: •...

  • Page 83: Creating A Single-Scan Automation Program

    With the exception of the Illumination and the optional Soft Touchdown settings, the settings available from the icons in the Hardware section of the Configuration Settings window should not be changed by the user. For help, contact Veeco Technical Support. CREATING A SINGLE-SCAN AUTOMATION PROGRAM Prior to running a scan routine, you must first create an automation program.
  • Page 84 If you are currently in an automation program that has had changes made to it, a dialog box asks if you want to save your changes to the current automation program. Click Yes to save the current automation program. NOTE – Be aware that if the current automation program was previously loaded and then modified, it will be saved under its original file name.

  • Page 85: Defining Scan Location And Length

    Figure 4-3: Scan Routines Window with Default Scan Routine You can edit the options for this automation program and add or modify scan routine parameters (see Chapter Save the automation program according to the instructions in Saving an Automation Program on page 4-20.
  • Page 86 Figure 4-4: Scan Location/Length Dialog Box Click the Enter button in the Current Location section to assign the coordinates to the scan routine. Initiate Stage Tracking (left-click in the camera view pane), and roll the mouse until the stylus reticle is at the end of the scan.

  • Page 87: Running A Scan Routine

    Figure 4-5: Scan Parameters Dialog Box If desired, adjust the scan parameters in the dialog box, such as scan ID, Duration, horizontal Resolution, Stylus Force, Measurement Range, Soft Touchdown (optional) and Tower Up After Scan. For more Chapter 7, Scan Routine Parameters information, see Click Apply and then click OK to accept your entries and close the dialog box.
  • Page 88 NOTE – Because the camera is mounted at the right side of the stylus, during a scan the video image shows the sample moving from right to left below the stylus. In actuality, during a scan the stage is moving from back to front. •...

  • Page 89: Changing Units Before Or After A Scan

    NOTE – You can add user notes to the scan parameters, which are listed to the left of the plot. To do this, right-click a parameter, click Edit User Information, make your notes in the Title/Notes box, and then click OK. Figure 4-7: Title/Notes Dialog Box CHANGING UNITS BEFORE OR AFTER A SCAN You can specify different units before or after a scan.

  • Page 90: Reference/Measurement Cursors

    This is useful for leveling and average step height measurements. NOTE – Veeco recommends that you do not use zero (0) bandwidths unless you want point- to-point measurements. Such measurements can vary substantially from the averaged results that you get with non-zero bandwidths.

  • Page 91: Setting Cursor Bandwidths

    Refer to the following sections for alternate procedures to position the cursors and increase/decrease cursor bandwidth: Cursor Positioning with Arrows on page 4-11 • Numeric Entry Cursor Positioning on page 4-12 • For this exercise, use the default cursor band widths for leveling and measuring. To activate the default cursor bands select Plot >...

  • Page 92: Cursor Positioning With Arrows

    Figure 4-10: Setting Cursor Band Widths: Handle and Dialog Box R Cursor M Cursor Band width is Band width is to the right. to the left. R Cursor Bandwidth Handle Cursor Positioning with Arrows The R. Cursor and M. Cursor sections in the Data Plot box at the bottom center of the window indicate the locations of the cursors and their bandwidths (see Figure 4-11).

  • Page 93: Numeric Entry Cursor Positioning

    The Distance section below it displays the horizontal distance between the cursors. MANUAL STAGE LEVELING All configurations of the Dektak 150 allow you to manually level the stage by turning the leveling thumbwheel below the it (see Figure 4-13).
  • Page 94 If not, repeat the manual leveling procedure above. NOTE – For maximum performance of the Dektak 150, it is important to position the sample surface to within +/- 0.01º of level. Use the formula tan-1 (slope of leveled trace) to determine the level accuracy.

  • Page 95: Software Leveling

    NOTE – If the profile trace is extremely out of level, change the measurement range to the maximum range of 2,620kÅ. Level the trace as described above, change to the intermediate range and repeat the procedure until leveled. The best level is achieved by using the 65kÅ range.

  • Page 96: Setting The Zero Point

    SETTING THE ZERO POINT You may select any point on the profile trace as the zero point. The zero point is the point of reference from which all measurements are taken. Software leveling sets both the R and M cursor intercepts at zero. However, when the Zero function is activated, it sets the zero point only at the R cursor intercept.
  • Page 97 Figure 4-16: Analytical Functions Dialog Box In the Height section, select ASH to activate the delta average step height function. In the Cursor Positioning section, change the cursor bandwidth values if appropriate. The cursor positions normally should be within 20 to 50 microns of the step, on each side. Click the Measure button located at the bottom of the Analytical Functions dialog box.

  • Page 98: Changing The Plot Magnification

    Figure 4-17: Step Height Measurement CHANGING THE PLOT MAGNIFICATION Once you run the scan and plot the profile trace, you can isolate and magnify a portion of the Data Plot window for more detailed analysis of the profile trace. To isolate and magnify an area of interest: Move the mouse pointer into the data plot grid.

  • Page 99: Saving The Data Plot

    Figure 4-18: Plot Magnification SAVING THE DATA PLOT Right-click on the data plot. The pop-up menu that appears provides two options: Save as Image and Video. The Video option includes two choices: Graphics Only and Video and Graphics. Do one of the following: •...

  • Page 100: Printing The Scan Data

    Figure 4-19: Save Image Dialog Box PRINTING THE SCAN DATA You can obtain a printout of all the scan data with the plotted profile, a summary of the scan data, the scan routine information, the automation program information, the Automation Program Summary Report, and the Watch List using a Windows-compatible printer.

  • Page 101: Saving An Automation Program

    SAVING AN AUTOMATION PROGRAM You may store an automation program on your hard drive, the network, or portable media. For the purpose of this exercise, follow the procedure described below to save the automation program created in this chapter exercise onto the C drive. NOTE –...

  • Page 102: Aborting An Operation

    ABORTING AN OPERATION To abort a Dektak 150 operation, select an Abort icon or press the Esc or A key on the keyboard. NOTE – If you abort an operation while the stage is rotating, you must reset the hardware by selecting Profiler >...

  • Page 103: Opening A Dektak 150 Scan In Vision

    Dektak scan as described here. When you open the results of a Dektak 150 scan in Vision, the program analyzes the data and displays it as a 2D plot. You then can analyze and manipulate this plot with routines such as: •...

  • Page 104: Saving Upon Exiting The Dektak Program

    Figure 4-23: 2D Contour Plot of a Dektak 150 Scan in Vision with 100% Scaling NOTE – For complete information about opening and analyzing Dektak 150 scans in Vision, Appendix E SAVING UPON EXITING THE DEKTAK PROGRAM When you exit the Dektak program, one or more of the following prompts may appear.

  • Page 106: Loading The Sample

    3-13. ABOUT THE AUTOMATION PROGRAM The automation program is the basis for all operations performed on the Dektak 150. The Automation Program window displays the current scan routines, along with their X and Y locations, as well as data destination options.

  • Page 107: Opening A New Automation Program

    The Automation Program menu bar contains File and Edit menus items that are not available in other windows. These menus are described in further detail in Chapter OPENING A NEW AUTOMATION PROGRAM This exercise explains how to open a new automation program to create a multi-scan automation program.

  • Page 108: Copying An Automation Program

    COPYING AN AUTOMATION PROGRAM This section explains how to copy a current scan routine to create an automation program containing multiple scan routines. An automation program may contain up to 10,000 scan routines. However, in this exercise, you will create an automation program containing only four scan routines. Click the Copy Currently Selected Scan Routine to a Range of Scan Routines icon or select Edit >...

  • Page 109: Defining Scan Location And Length

    The scan routine is identified in the Scan Routines area by three entries: the left number is the scan number; the center entry is the Scan Type and the number to the right is the scan length (see Figure 5-3). NOTE –...
  • Page 110 Figure 5-5: Sample Positioning Window for Default Program, Routine 3 Figure 5-6 Select Profiler > Tower Down (see ) or click the Tower Down to Null Position - Stylus Up icon Figure 5-6: Profiler Menu with Tower Down Selected Multiple Scan Operation...
  • Page 111 Use the Illumination Adjustment icons to adjust the illumination to adequately view the sample. With the tower down (stylus up), initiate Stage Tracking (left-click in the camera view pane) for fine sample positioning. The image now tracks the motion of the mouse. Position the stylus reticle just to the left of the feature that you want to measure.
  • Page 112 Figure 5-8: Edit Menu with Go To Scan Routine Selected Figure 5-9 Type 2 in the pop-up dialog box (see ) and press the E key on the keyboard. This makes NTER Figure 5- Scan Routine #2 the currently active scan routine in the Automation Program window (see Figure 5-9: Go to Scan Routine Dialog Box NOTE –...

  • Page 113: Setting Other Scan Routine Options

    Either accept the values shown in the dialog box, or edit the values with the keyboard. Click the Enter button in the Current Location section to assign the coordinates to this scan routine. Repeat the above steps to define scan locations for each of the remaining scan routines.You are now ready to define a length for each of the scan routines.
  • Page 114 Figure 5-12: General Tab of the Automation Program Options Dialog Box Figure 5-13: Extended Tab of the Automation Program Options Dialog Box Multiple Scan Operation...

  • Page 115: About The Scan Routines Window

    About the Scan Routines Window The Scan Routines window allows you to edit the scan parameters, modify the display parameters, and choose data-processing settings for each scan routine in your automation program (see Figure 5- 14). The scan routine number appears in the title bar at the top of the window, along with the total number of scan routines in the automation program (see items circled in magenta in Figure 5-14).

  • Page 116: Editing Scan Routines

    • Click the Next Scan Routine icon to display the previous or next scan routine. Figure 5-16: Next Scan Routine in the Scan Routines Window • Select Edit > Previous or Edit > Next on the menu bar to display the previous or next scan routine.
  • Page 117 A Map Parameters tab is available only if the 3D Mapping option has been installed. Use it to set the parameters for a 3D map scan. The Dektak 150 software allows you to include both standard scans and map scans in a single automation program. For more information, see...

  • Page 118: Display Parameters

    Display Parameters • Each of the items in the Display Parameters section of the Scan Routines window opens a different tab of the Display Parameters dialog box . • Click Software Leveling to open the Leveling tab (see Figure 5-20). Figure 5-20: Leveling Tab of the Display Parameters Dialog Box Use the Leveling tab to determine whether or not the system should automatically remove tilt from the trace based on the defined cursor location and width.
  • Page 119 Click Display Range to open the Range tab (see Figure 5-22)—or just click the Range tab itself. Figure 5-22: Range Tab of the Display Parameters Dialog Box Use the Range tab to enable the system to automatically determine the vertical range or to select Set Range Values and enter your own Lower Bound(ary) and Display Range values.

  • Page 120: Data Processing Settings

    Use the Type tab to determine if you want display the data in raw form, with roughness included, and/or with waviness included. NOTE – You cannot select the roughness data type unless you first activate the short pass Figure filter on the Filter Cutoffs tab of the Data Processing Parameters dialog box (see 5-25 ).
  • Page 121 Figure 5-25: Filter Cutoffs Tab of the Data Processing Parameters Dialog Box Set in order to specify Rough- ness in the Dis- play Parameters dialog box. Set in order to specify Waviness in the Display Parameters dia- log box. Enter values for the Short Pass Filter cutoff and the Long Pass Filter cutoff, or enter a value of zero (0) to disable the Filter Cutoffs function.

  • Page 122: Analytical Functions

    Select the degree of smoothing that you want the system to perform on the data. If desired, enter a width for the smoothing band.. For details on filters, see: For details on smoothing, see: Determining the Cutoff Wavelength on page 6- Using the Smoothing Function on page 6-18 Activating the Cutoff Filters on page 6-11 Activating the Smoothing Function on page 6-...

  • Page 123: Global Editing Of Scan Routine Parameters

    Figure 5-28: Analytical Functions Dialog Box If you want to append the same analytical functions to all of the scan routines in your automation program, you can save time by using the Global Edit Mode described in the next section. NOTE –...
  • Page 124 Figure 5-29: Scan Routines Window in Global Edit Mode A Global Edit Warning dialog box emphasizes that Global Edit Mode affects all of the scans in the Figure current automation program. Click Y to continue. A global edit symbol similar to the one shown in 5-29 appears.
  • Page 125 Figure 5-31: Cursors Tab Click Apply and then click OK. Select Edit > Append Analytical Functions or right-click in the window to display the Analytical Functions dialog box. Figure 5-32 Enter 300 in the R. Cursor Width field and enter 900 in the M. Cursor Width field (see Figure 5-32: Cursor Positioning Section of the Analytical Functions Dialog Box Figure 5-33 In the Height section of the Available panel, select ASH (see...
  • Page 126 Figure 5-34: Analytical Functions Dialog Box Click Add and then click Done. Figure 5-35: Analytical Function Appended To disable Global Edit Mode, either: • Click the Global Edit icon • Figure 5-36 Select Edit > Global Edit Mode from the menu bar (see •...

  • Page 127: Automation Program Options

    Enter the desired file location and file name. The path of the file location is C:\Program Setup Menu on page 8-7 Files\Veeco\DektakV9\Program\, unless you have changed it (see NOTE – Your file name cannot have cannot contain more than 80 characters and must include the extension “.prog”.
  • Page 128 Figure 5-38: Automation Program Window: Automation Programs Options Section Choose from the following data-destination options: • Data File • Data Export • APS File • APS Export • Printer Output In addition, the Automation Programs Options dialog box contains the following options on the Extended tab (see Figure 5-39):...

  • Page 129: Data File/Data Export

    Figure 5-39: Extended Tab of the Automation Program Options Dialog Box) Data File/Data Export When you save your scan data using the Data File option, the system always saves it as a *.data file (see Figure 5-41). This file type, which is not user-definable, allows you to open the file in the Dektak 150 application.
  • Page 130 Figure 5-40: Automation Program Options General Tab Figure 5-40 In the Scan Data section (see ), do one of the following: • Accept the default file to save the scan data. NOTE – Unless otherwise specified, data automatically saves to the Default data file in the DektakV9\Data\Defaul\Default folder on the C: drive.
  • Page 131 ), do one of the following: • Leave both check boxes cleared, which prevents the APS Report from being computed and saved. • Select the Compute & Display check box, which directs the Dektak 150 software to compute the APS Report. • Figure 5-43 Click the button to open the Specify File dialog box (see ), where you can select a .report file...

  • Page 132: Working With Aps Reports

    NOTE – The Dektak 150 application generates a plot for all analytical functions in the automation program. It cannot plot only selected analytical functions. At the end of the scan run, you can use the APS Report to select and rerun only certain scan routines.
  • Page 133 Figure 5-45: General Tab of the Automation Program Options Dialog Box In the Auto Program Summary (APS) section, select the Compute & Display check box. If you want the Dektak 150 application to automatically save the APS Report to a text file upon completion of each scan routine:...
  • Page 134 Figure 5-47: Extended Tab of the Automation Program Options Dialog Box Figure 5-48 In the Automation Program window, select Run > Auto Program (see ). The APS Report for Figure 5-49 the current analytical function appears over the Data Plot window (see ).

  • Page 135: Contents Of The Aps Report

    Figure 5-49: APS Report Superimposed Over the Data Plot Window If you did not choose to automatically export and/or print the APS Report: • Click the Save icon on the APS Report toolbar. Alternatively, select File > Save or File > Save As from the Automation Program Window menu bar.

  • Page 136: Plot Tabs Of The Aps Report

    Figure 5-50: Grid View Tab of the APS Report • The items in the bar above the grid include the automation program file name as well as the automation program start time and date. • The first section lists information about the reference and measurement cursors for each analytical function.

  • Page 137: Rerunning Selected Scans In The Aps Report

    Figure 5-51: ASH Plot Tab of an APS Report Rerunning Selected Scans in the APS Report You can select and rerun certain scan routines in the APS Report. After a rerun, you can exclude some of the scan routines that you selected and run the automation program again. To rerun selected scans in the APS Report: Figure 5-52 In the list of scan routines on the Grid View tab (...

  • Page 138: Selecting A Rerun Scan For Viewing

    Figure 5-53: Update Button and List Opening a Saved APS Report You can open an APS Report inside or outside of the Dektak 150 application. To open a saved APS Report within the Dektak 150 application: Click the Open icon on the APS Report toolbar.

  • Page 139: Exporting An Aps Report To Excel

    To open a saved APS Report when Dektak is not running: Click the desktop shortcut to the Dektak database or navigate to C:\Program Files\Veeco\DektakV9\Data\dektakdatabase.exe. Double-click the APS Report file that you want to open. Exporting an APS Report to Excel ®...

  • Page 140: Enabling Microform Measurement

    In the Save in field, navigate to the location where you want to save the file. In the File name field, enter a file name. In the Save as type list, select Excel Files (*.xls). Click Save. NOTE – Within Excel, all exported values are stored as text only. If you want to manipulate these values, you must first manually convert each cell to the Excel number format.
  • Page 141 Figure 5-57: Configuration Settings Menu Figure In the User Interface section, click Data Processing. The Data Processing settings appear. (see 5-58 Figure 5-58: Configuration Settings Dialog Box with Data Processing Settings Displayed Figure 5-59 In the Micro Form Measurement section, select the Enable check box (see 5-36 Multiple Scan Operation...

  • Page 142: Setting Printer Options

    NOTE – The h and L values in the Micro Form Measurement section are factory-set. If there is a problem with these settings, call Veeco. SETTING PRINTER OPTIONS In the Automation Program window, click Printer Output in the Automation Program Options section.

  • Page 143: Adding User Information

    • Select No Pause During Processing to direct the system to run all scan routines within the automation program one right after another. • Select Adjust Position Before Each Scan to direct the system to stop after each scan routine. This allows the operator to make any necessary adjustments to the sample position between scans.
  • Page 144 prompt the user to enter notes prior to running a scan. In any set of scan data, new notes can be added, and existing notes can be edited. In the Automation Program window, click Prompt for User Info or Save User Info to open the Extended tab of the Automation Program Options dialog box (see Figure 5-13).

  • Page 145: Running A Multiple Scan Routine

    When the final scan is complete, the stylus lifts, and the stage returns to the location where the scan originated. The profiler then automatically replots and rescales. NOTE – If problems occur during a scan, you can log them and send them to Veeco. If you Aborting an Operation on page 4-21 need to abort a scan, see...

  • Page 146: Exporting A Scan Data Plot

    EXPORTING A SCAN DATA PLOT Rather than using the automation program export functions as described in Data File/Data Export on page 5-24, you can export one or more data plots using the Export ASCII Data dialog box. If you specify the short pass filter and the long pass filter that generate roughness and waviness scan data, you can export that data along with the raw data.

  • Page 147: Opening A Saved Scan Data Plot

    Select File > Open at the conclusion of the automation program to retrieve the data plots through the Load Figure 5-68 File dialog box (see Under Files of type, confirm that Auto has been selected. This displays all stored Dektak 150 files, including data and program files. NOTE –...

  • Page 148: Post-Scan Processing

    Printing the Scan Data on page 4-19 • Saving an Automation Program on page 4-20 • Opening a Dektak 150 Scan in Vision on page 4-22 • Saving upon Exiting the Dektak Program on page 4-23 Multiple Scan Operation 5-43...

  • Page 150: Chapter 6. Analytical Functions

    NALYTICAL UNCTIONS The analytical functions that are included as part of the standard Dektak 150 software allow you to perform complex analytical computations on the profile data. ABOUT ANALYTICAL FUNCTIONS The Dektak 150 application has many different analytical functions for measuring surface texture and other parameters.

  • Page 151: Roughness Parameters

    Figure 6-1: Analytical Functions Dialog Box from Data Plot Window If you plan to conduct extensive surface texture analysis, refer to the ANSI B46.1 specification on surface texture. You can obtain a copy of this specification from the American Society of Mechanical Engineers, 345 East 47th Street, New York, NY 10017, telephone number: 1-800-843-2763, web site: www.asme.org.
  • Page 152 MaxRa (Maximum Roughness) Identifies the portion of the assessment length that has the highest Ra. The assessment length, Ra (Average Roughness) defined by the cursors, divides into nineteen overlapping segments. Each segment is equal to one-tenth of the assessment length distance. The Ra is calculated for each segment. The R Formerly known as Arithmetic Average (AA) and Center Line Average (CL), Ra is the universally recognized, and most used, international parameter of roughness.
  • Page 153 Rq (Root-Mean-Square (RMS)) Determines the root-mean-square value of roughness corresponding to Ra (see Figure 6-3). Rq has the greatest value in optical applications where it is directly related to the optical quality of a surface. Figure 6-3: Rq Roughness Analytical Function Rt (Maximum Peak to Valley) The sum total of the maximum peak and maximum valley measurements of roughness within the assessment length (Rt = Rp + Rv) (see...
  • Page 154 Figure 6-5: Rv Roughness Analytical Function RZ_din (Ten Point Height Average) The average height difference between the five highest peaks and the five lowest valleys in accordance with DIN 4768/1 specification published by the Deutsche Institut fuer Normung c.v. (see Figure 6-6).

  • Page 155: Waviness Parameters

    WAVINESS PARAMETERS The following parameters are listed alphabetically. Wa (Arithmetic Average of Waviness) The average deviation of waviness from the mean line (see Figure 6-7). (Corresponds to Ra.) Figure 6-7: Wa Waviness Analytical Function WMaxdev (Maximum Deviation of Waviness) Measures the distance of the furthest data point above or below the mean line of the waviness profile.

  • Page 156: Height Parameters

    HEIGHT PARAMETERS The following parameters are listed alphabetically. ASH (Delta Average Step Height) Used to obtain a step height measurement in applications where roughness or noise is present on the profile trace. It computes the difference between two average height measurements. Avg Ht (Average Height) Calculates the average height of a step with respect to the zero line, using the R and M cursors to define the area of measurement.

  • Page 157: Running A Scan And Leveling The Trace

    Perim (Perimeter) Calculates the outside perimeter of a profile between the R and M cursors. A horizontal reference line is created using the R and M cursor intercepts. You must level the profile for accurate results. Radius A least-squares-arc is fitted to the data points and the radius is calculated from the equation for a circle.

  • Page 158: Making An Average Roughness Measurement

    To run a scan and level the trace: Select Window > Automation Programs to display the Automation Programs window. Select File > New from the menu to enter the default scan routine into the current automation program. Select Run > Scan Here with the stage in position to run the current scan routine. NOTE –...

  • Page 159: Determining The Cutoff Wavelength

    Figure 6-9: Analytical Results Display with Ra from Raw Data DETERMINING THE CUTOFF WAVELENGTH The Dektak 150 application is equipped with short pass and long pass digital filters for filtering out high and low frequency signals. The cutoff frequencies define the intended difference between roughness and waviness.

  • Page 160: Short (High) Pass Filter

    8 equals 4.10, so the minimum acceptable cut-off wavelength is 5 µm. The scan length must equal the cut-off wavelength, so the maximum cutoff length is 2000. Therefore, you must select a cut-off value between 5 and 2000 µm. As shown in Figure 6-10, you set the filter cutoff values in the Roughness and Waviness Filters dialog box, which provides the following three separate cut-off filters for selecting the wavelength...

  • Page 161: Entering Filter Cutoffs Into A Scan Routine

    NOTE – The white trace represents the raw profile data, the yellow trace represents the roughness profile as determined with the short pass filter, and the red trace represents the waviness profile as determined by the long pass filter. Figure 6-11: Filtered Profile with Three Separate Traces ENTERING FILTER CUTOFFS INTO A SCAN ROUTINE The procedure below shows you how to enter the short pass and long pass filters into the scan routine to automatically calculate the roughness and waviness analytical functions.

  • Page 162: Selecting The Data Type

    Figure 6-12: Filter Cutoffs Tab of the Data Processing Dialog Box SELECTING THE DATA TYPE You can select the type of data to display in the Data Plot window. You can display the raw, roughness, and waviness profile data either individually or simultaneously. Select Plot >...

  • Page 163: Entering Data Types Into A Scan Routine

    Figure 6-13: Data Type Dialog Box Click to clear Click to clear the Waviness check box. Click OK to replot the data with the roughness and raw data profiles displayed and the waviness profile deleted. ENTERING DATA TYPES INTO A SCAN ROUTINE You can predetermine the type of profile data to display at the conclusion of a scan by entering the selected data types into the scan routine.

  • Page 164: Measuring And Entering Analytical Functions

    NOTE – When you use the default scan routine, the raw profile data is entered as the Display Data Type parameter. In this exercise, all three data types are selected. Select the Waviness and Roughness check boxes to enter all three data types into the scan routine. NOTE –...
  • Page 165 Figure 6-15: Analytical Functions Dialog Box and Results/Data Plot Window Analytical Results Section of Data Plot Window Analytical Functions Dialog Box from Data Plot Window Figure 6-16: Analytical Functions Dialog Box from Scan Routines Window 6-16 Analytical Functions...

  • Page 166: Entering Analytical Functions Into A Scan Routine

    ENTERING ANALYTICAL FUNCTIONS INTO A SCAN ROUTINE You can enter one or more analytical functions into the Scan Routines window to be automatically calculated at the conclusion of the scan. Select Window > Scan Routines to display the Scan Routines window. Select Edit >...

  • Page 167: Deleting Analytical Functions Or Results

    Alternatively, you can select the smoothing function after a scan has been completed. The Dektak 150 application offers the following three degrees of smoothing. The higher the degree, the more smoothing is realized.

  • Page 168: Activating The Smoothing Function

    routine calculates the new value of each point by looking at the four closest points that lie within the band. When the algorithm encounters a point that lies outside the band, the calculation is interrupted. The new point is left as is and becomes a center point of a new noise band. If the next five points are within the new band, the calculation restarts.
  • Page 169 Figure 6-20: Smoothing Tab of the Data Processing Dialog Box Figure 6-20 Choose the desired smoothing Degree (1, 2, or 3) on the Smoothing tab (see Determine the smoothing band value by performing the Total Indicated Reading (TIR) analytical function Activating the Smoothing Function on page 6- on the scan to be smoothed.

  • Page 170: Chapter 7. Scan Routine Parameters

    OUTINE ARAMETERS This chapter describes the scan parameters, display parameters, and data processing parameters that are available in the Scan Routines window. Figure 7-1: Scan Routine Window You can enter up to 10,000 different scan routines into a single automation program file. Each scan routine within an automation program contains all the necessary parameters for performing a Scan Routine Parameters...

  • Page 171: Scan Parameters

    These individual parameters are user selectable, providing extraordinary flexibility to adapt the Dektak 150 for a wide range of applications. SCAN PARAMETERS All of the scan parameters are user selectable and can be accessed from the Scan Routines window.

  • Page 172: Stylus Type

    Figure 7-3: Scan Parameters Dialog Box: ID Click OK to close the dialog box and enter the ID into the scan program. Stylus Type The Stylus Type parameter allows you to specify which stylus type is used in your system. Figure 7-1 Click any parameter in the Scan Parameters section of the Scan Routines window (see ) to...

  • Page 173: Scan Location

    Figure 7-4: Scan Parameters Dialog Box: Stylus Type Appears only if your system includes the optional x-y auto stage. Scan Location This parameter displays the X and Y location in µm for this particular scan routine. NOTE – In order for this parameter to be active, your system must include the optional x-y auto stage.

  • Page 174: Scan Length

    Edit > Define Scan Location/Length. Scan Length Scan lengths from 50 µm to 55,000 µm (50 mm) are possible using the standard Dektak 150 system. Figure 7-1 Click any parameter in the Scan Parameters section of the Scan Routines window (see ) to display the Nominal Parameters tab of the Scan Parameters dialog box.

  • Page 175: Scan Duration/Speed

    Figure 7-6: Scan Parameters Dialog Box: Length The scan length can also be set from the Sample Positioning window by selecting Edit > Enter Scan Length. You can enter the scan length manually using Stage Tracking, as discussed in Chapter Scan Duration/Speed The Duration setting displays the amount of time it takes to complete a given scan.

  • Page 176: Scan Resolution

    The Dektak 150 provides horizontal resolution with a maximum 60,000 data points available per scan. Scan length and scan duration determine the horizontal resolution of the Dektak 150. The profiler maintains a constant sampling rate of 300 data points per second. By slowing scan speed, you can process more samples with a given scan length over a longer period of time.
  • Page 177 2.222 m/sample The horizontal resolution of the Dektak 150 directly relates to the scan length and number of data points per scan. The scan length is selectable from 50 µm to 55 mm. Without altering the number of data points per scan, it is possible to adjust the horizontal resolution or the distance between data points by altering the scan length.

  • Page 178: Scan Type

    Scan Type The Scan Type parameter allows you to specify which type of scan to be run. Figure 7-1 Click any parameter in the Scan Parameters section of the Scan Routines window (see ) to display the Nominal Parameters tab of the Scan Parameters dialog box. In the Scan Type section, choose one of the following scan types from the drop-down list (see Figure 7-9 •...

  • Page 179: Measurement Range

    Figure 7-1 Click any parameter in the Scan Parameters section of the Scan Routines window (see ) to display the Nominal Parameters tab of the Scan Parameters dialog box. Figure 7-10 In the Stylus Force field, enter the desired stylus force (see Click OK to close the dialog box and enter the stylus force into the scan program.

  • Page 180: Profile

    Figure 7-11: Scan Parameters Dialog Box: Measurement Range Profile The Profile setting scales the measurement range according to the profile selected. Three different profiles are available for a variety of sample surface characteristics (see Figure 7-12). Figure 7-12: Sample Surface Profiles •...
  • Page 181 Figure 7-13 Select the desired profile (see Click OK to close the dialog box and enter the selected profile into the scan program. Figure 7-13: Scan Parameters Dialog Box: Profile When you are running scans to be plotted using the optional 3-D mapping feature described in Appendix E and your system includes the N-Lite option described in Appendix...

  • Page 182: Tower Up After Scan

    Figure 7-14: Scan Parameters Dialog Box: Soft Touchdown Appears only if your system includes the optional x-y auto stage. Tower Up After Scan Select this feature to make the stylus automatically tower up after the scan is completed. This is particularly useful for hard disk runout measurements.

  • Page 183: Deflection Scan

    Figure 7-15: Scan Parameters Dialog Box: Tower Up After Scan Click OK to close the dialog box and enter the Tower Up After Scan function into the scan program. Deflection Scan A Deflection Scan is an optional scan type in which the scan is performed at the same point (the stage does not move), but the stylus force is successively incremented beyond the specified value.

  • Page 184: Display Parameters

    NOTE – The End Force that will be applied by the stylus is calculated and displayed. Figure 7-16: Scan Parameter Dialog Box: Deflection Parameters (Optional) Example: • Scan Duration is set at 13 seconds. • Stylus Force is set at 3 mg (on the Nominal Parameters tab). •...

  • Page 185: Software Leveling

    You can also enter cursor band widths to perform delta average leveling. IMPORTANT! Veeco recommends that you hardware-level the sample to less than 10% of the measurement range. Software-level the trace only by amounts that are less than 10% of the vertical range.

  • Page 186: Reference/Measurement Cursors

    Figure 7-18: Display Parameters: Cursors R Cursor M Cursor Bandwidth to the Bandwidth to the left right NOTE – You can also enter cursor bandwidths from the Data Plot window. A delta averaging technique provides a roughness average reading of the section of the profile trace within the bands.

  • Page 187: Display Range

    To level the trace accurately, position the measurement cursor some distance away from the reference cursor but along the same horizontal plane (such as the base of the step or the lip of the etched depth). After the cursors are properly positioned, select Edit > Enter Software Leveling from the menu bar to enter the new cursor locations into the scan routine.

  • Page 188: Data Processing Parameters

    profiles individually or simultaneously, to easily correlate the profiles. See Entering Data Types into a Scan Routine on page 6-14 for a detailed description of the function and use of the Display Data Type parameter. Figure 7-20: Display Parameters Dialog Box: Type DATA PROCESSING PARAMETERS These parameters allow you to filter and smooth your data, as well as set the options for Step Detection analysis.

  • Page 189: Smoothing

    Figure 7-21: Data Processing, Filter Cutoffs Tab Smoothing The Data Processing section of the Scan Routines window includes the Smoothing tab, which contains options that allow you to activate smoothing filters (Figure 7-22). For a full description of the smoothing filters, see Data Processing Settings on page 5-15.

  • Page 190: Step Detection

    Step Detection The Data Processing section of the Scan Routines window includes Step Detection settings, which appear on the General Settings tab (Figure 7-23) and the Every Step tab (Figure 7-24). For instructions on making setting for Step Detection analysis, see Appendix Figure 7-23: Step Detection, General Settings Tab Figure 7-24: Step Detection, Every Step Tab.

  • Page 192: Chapter 8. Menu And Toolbar Descriptions

    8-1). The menu bar and the toolbar below it continually appear at the top of all Dektak 150 windows, and the status bar appears at the bottom. Each Dektak 150 window has its own specific menus and tool bars. These menu items and toolbar icons are described in the following sections.

  • Page 193: Default Menu Bar

    Default Menu Bar The default menu bar (see Figure 8-1) provides access to the different types of operations available. The various menus contained within the default menu bar in the Startup window appear under the headings File, Run, Profiler, Setup, Calibration, Window, and Help. A description of the contents of each menu, the keyboard shortcuts (if any) associated with the menu items, and instructions for accessing them are provided in the remainder of this chapter.
  • Page 194 Figure 8-2: File Menu Ctrl+N The New command creates a new automation program with a single scan containing the default scan parameters. Ctrl+O Open The Open command opens an automation program or other previously saved files. Select File > Open to display a list of available files. Save Ctrl+S The Save command by default saves any recent changes to the current automation program.

  • Page 195: Run Menu

    Ctrl+Alt+E Explore Dektak Directory Opens Windows Explorer at the active directory (\Veeco\Dektak32 by default). Alt+F4 Exit Closes the Dektak 150 application (after confirmation).

  • Page 196: Profiler Menu

    Scan Select Run > Scan to run the current scan at the stage position specified in the scan. Scan Here Ctrl+F4 Select Run > Scan Here to run the current scan starting at the current stage position. Auto Program Select Run > Auto Program to run all of the scan routines in the current automation program, beginning with scan routine 1.
  • Page 197 Figure 8-4: Profiler Menu Tower Up Ctrl+F3 Select Tower Up to lift the stylus and raise the tower and optics up to the home position. Ctrl+Shift+F3 Tower Down Select Tower Down to lower the tower and optics down to the stylus null position, and then raise the stylus from the sample.

  • Page 198: Setup Menu

    Manual Leveling The stage can be manually tilted until level. SETUP MENU Use this menu to set up the Dektak 150 system. Figure 8-5: Setup Menu Configuration Settings Select Setup > Configuration Settings and press the CTRL key or enter the password in the dialog box to open the Configuration Settings dialog box.

  • Page 199: User Interface Settings

    USER INTERFACE SETTINGS Click the following icons to access settings that affect the appearance of your Dektak 150 software. Directories These settings allow you to specify the default working directories for data, program, export and 3D map files. Select the Make shortcuts available system wide check box if you want icons for the directories to appear in file dialog boxes such as Open, Save and Save As.

  • Page 200: Shortcuts

    Figure 8-8: Data Processing Dialog Box Shortcuts This dialog box allows you to ace the drop-down list (see Figure 8-10) to assign an analytical function to the F11 and F12 keys . For more information, see Assigning Analytical Functions to Keystrokes on page 3-6.

  • Page 201: Units

    Figure 8-10: Drop-Down List of Analytical Functions Units In the All Units section, select Angstroms, um, or nm. In the Notation section, select Fixed or Scientific. The system then makes the appropriate Decimal Places setting. This field cannot be modified by the user. NOTE –...

  • Page 202: Visual

    Figure 8-11: Units Dialog Box Visual In the General section, click Show Sidebar Buttons to display them on the screen. Different buttons are available for each screen. For more information, see Side Bar Buttons on page 3-7. Figure 8-12: Sidebar Buttons in Data Plot Window Sidebar buttons Menu and Toolbar Descriptions...

  • Page 203: Hardware Settings

    8-6. CAUTION: The Dektak 150 hardware settings are set at the factory and should not be modified by the user. Changing hardware settings affects both scan results and the performance of the Dektak 150 system. Furthermore, it may void the warranty. The only exceptions are the Illumination and Soft Touchdown settings, which are discussed in this section.

  • Page 204: Calibration Menu

    CALIBRATION MENU This menu is used for calibrating various operations of the system. Figure 8-15: Calibration Men Stylus Force This selection opens the Force Calibration dialog box. CAUTION The force calibration settings should be changed only by trained personnel. Figure 8-16: Force Calibration Dialog Box Menu and Toolbar Descriptions 8-13...

  • Page 205: Window Menu

    Vertical Select Calibration > Vertical to open the Vertical Calibration dialog box, which allows you to set and clear the vertical calibration of the Dektak 150 profiler. Figure 8-17: Vertical Calibration Dialog Box NOTE – Always clear the existing vertical calibration for the selected range before re- performing the vertical calibration.
  • Page 206 Figure 8-18: Window Menu on Startup Screen Automation Programs Ctrl+1 Select Window > Automation Programs to make alterations to the automation programs. Scan Routines Ctrl+2 Select Window > Scan Routines to edit the scan parameters in the Scan Routines window. Sample Positioning Ctrl+3 This selection opens the Sample Positioning window, which is a real-time video display that allows...

  • Page 207: Help Menu

    Dektak 150 software. Figure 8-19: Help Menu Contents Select click Help > Contents > Dektak 150 Manual.pdf or press the F1 key to view this manual in PDF format. About Select Help > About to view the number of the currently installed version of the Dektak software.

  • Page 208: Installed Options Tab

    Figure 8-20: General Tab of the About Help Dialog Box Installed Options Tab On the Installed Options tab, you can view a list of the add-on software options that are installed in your system. Figure 8-21: Installed Options Tab of the About Help Dialog Box Menu and Toolbar Descriptions 8-17...

  • Page 209: Automation Programs Window Menu Selections

    AUTOMATION PROGRAMS WINDOW MENU SELECTIONS The Automation Programs window provides the Run menu, Profiler menu, Setup menu, Calibration menu, Window menu, and Help menu. All of these menus are described earlier in this chapter. In addition, the Automation Programs window includes an Edit menu (see Figure 8-22).

  • Page 210: Scan Routines Window Menu Selections

    SCAN ROUTINES WINDOW MENU SELECTIONS The Scan Routines window provides the Run menu, Profiler menu, Setup menu, Calibration menu, Window menu, and Help menu. All of these menus are described earlier in this chapter. In addition, the Scan Routines window includes an Edit menu (see Figure 8-23), which is described below.

  • Page 211: Sample Positioning Window Pop-Up Menu Selections

    Ctrl+B Global Edit Mode Toggles Global Edit Mode on or off. When on, changes made to the current scan routine are also made in all the other scan routines within a multiscan Automation Program. For more information, Global Editing of Scan Routine Parameters on page 5-18.
  • Page 212 Ctrl+F2 Stylus Up Select Stylus Up to lift the stylus off the sample surface without raising the tower. This allows the user to view the video image of the sample surface while positioning the stage, without contact between the stylus and sample. Stylus Down Ctrl+Shift+F2 Select Stylus Down to lower the stylus onto the sample surface.
  • Page 213 Video Only Select Video > Video Only to project the video image of the sample surface from the Dektak 150 camera on the monitor. Graphics Only Select Video > Graphics Only to display the graphic screen on the monitor without the video image.

  • Page 214: Data Plot Window Menu Selections

    DATA PLOT WINDOW MENU SELECTIONS The Data Plot window provides the Run menu, Profiler menu, Setup menu, Calibration menu, Window menu, and Help menu. All of these menus are described earlier in this chapter. In addition, the Data Plot window includes an Edit menu, Plot menu, and Analysis menu (see Figure 8-25).
  • Page 215 Level Levels the trace at the current R and M cursor intercepts. Zero Changes the zero position of the graph vertically to align with the intercept of the R cursor and the plot. Display Options Opens the Display Parameters dialog box (see Figure 8-26), where: •...

  • Page 216: Analysis Menu

    Clear Bands Resets the bands to zero width at the R and M cursors. Default Bands Sets the width of the bands at the R and M cursors to the number of samples acquired in one second, according to the formula: 300 * (scan length) / (number of data points) Band Widths Opens the Set Band Widths dialog box, where you can type in the widths of the bands at the R and at...
  • Page 217 Cutoff Filters Select Analysis > Cutoff Filters to open the Roughness and Waviness Filters dialog box, where you can specify values for Long Pass and Short Pass Filter Cutoffs. Select the check box if you want to apply a Band Pass Filter. For more information, see Activating the Cutoff Filters on page 6- Smoothing Select Analysis >...

  • Page 218: Dektak Database Window

    NOTE – The Stress Measurement Option must be installed and stress must be computed, for this menu item to appear. DEKTAK DATABASE WINDOW SELECTIONS The Dektak Database window provides a File menu, a Window menu and a Help menu. File Menu This menu provides Open, Save, Page Setup, Print, and Print Preview options.

  • Page 219: Customizing The Toolbars

    (The specific contents of the list boxes reflect the toolbar of the particular Dektak 150 window that is displayed.) The Current toolbar buttons list box at the right shows the buttons (icons) currently on the toolbar for the window that is displayed.

  • Page 220: Startup Window Toolbar And Icons

    • Click Close to accept your changes, or Reset to return to the default toolbar configuration. • If you want to save your modified toolbar for use the next time you launch the Dektak program, be sure to right-click anywhere in the toolbar ribbon to pop up the Toolbar menu and click Save (see Figure 8-28).

  • Page 221: Automation Programs Window Toolbar And Icons

    Automation Programs Window Toolbar and Icons Figure 8-31: Automation Programs Window Toolbar Table 8-5: Automation Programs Window Toolbar Icon Descriptions Description Icon New: Create new Automation Program. Open: Open Automation Program file. Save: Save currently active Automation Program. Print: Print Automation Program parameters. Export: Export currently active Automation Program.

  • Page 222: Scan Routines Window Toolbar And Icons

    Scan Routines Window: Switch to the Scan Routines window. Sample Positioning Window: Switch to the Sample Positioning window. Data Plot Window: Switch to the Data Plot window. Dektak Database: Switch to the Dektak Database. Scan Routines Window Toolbar and Icons Figure 8-32: Scan Routines Window Toolbar Table 8-6: Scan Routines Window Toolbar Icon Descriptions New: Create new Automation Program.

  • Page 223: Sample Positioning Window Toolbar And Icons

    Run Scan Routine: Run the currently active scan routine. Run Scan Routine Here: Run currently active scan routine starting at the current stage location. Run Automation Program: Run Automation Program. Automation Program Window: Switch to the Automation Program Window. Sample Positioning Window: Switch to the Sample Positioning window.

  • Page 224: Data Plot Window Toolbar And Icons

    Stylus Up: Lift the stylus off the sample surface, while the tower and camera remain in the null position. Stylus Down: Move the tower down to the null position. Lower the stylus. Run Scan Routine: Run currently active scan routine. Run Scan Routine Here: Run currently active scan routine at current stage location.
  • Page 225 Table 8-8: Data Plot Window Toolbar Icon Descriptions New: Create new Automation Program. Open: Open scan data file. Save: Save scan data. Export: Export scan data. Print: Print scan data and parameters. Display Analytical Functions: Display Analytical Functions dialog box. Level: Level the trace at the current R and M cursor intercepts.

  • Page 226: Dektak Database Toolbar And Icons

    Abort: Abort current operation. Note: If you abort an operation while moving the stage, the stage position is lost, and you cannot continue. You must reset the hardware as X-Y Auto and Y Auto Stage described in Control Panel on page 3-8 Automation Programs Window: Switch to the Automation Programs window.
  • Page 227 Table 8-9: Dektak Database Toolbar Icon Descriptions Open: Open an APS Report. Save: Save an APS Report. Print: Print an APS Report. Print Preview: Preview an APS Report prior to printing. Toolbar Options: Add or remove toolbar options. Update: Refreshes the data to display the latest changes to an APS Report.

  • Page 228: Chapter 9. Calibration And Maintenance

    ALIBRATION AND AINTENANCE This chapter tells you how to keep your Dektak 150 surface profiler in top working condition. OVERVIEW OF VERTICAL CALIBRATION Setting the vertical calibration requires taking a height or depth measurement and comparing the results with the standard’s certified value. A measured value that is within of the certified ±...

  • Page 229: Calibrating The 65 Kå Range

    Make some preliminary measurements and to ensure that the standard is correctly positioned and that the profile trace is in range. Run an automation program provided by Veeco to perform five measurements, calculate an analytical function, and average the results.
  • Page 230 Figure 9-1: Vertical Calibration Dialog Box with Cleared VCFs Select File > Open from the menu bar. The Local Automation Program dialog box appears. Select the 65KA_SIMETRIC.prog file from Data folder in the C:\\DEKTAK\Program folder (see Figure 9-2 Figure 9-2: Simetric Program File If your system includes the X-Y auto stage: Select Window >...

  • Page 231: Calculating The Average Step Height

    Click any underlined scan parameter to open the Scan Parameters dialog box. Select Use Current Location. In the Profile Section, select Hills&Valleys. Perform the preliminary scans: μm Select Run > Scan Here. The scan should be at least 2500 in length As you observe the profile trace in the Data Plot window, do the following, as necessary: •...

  • Page 232: Setting The Vertical Calibration

    Figure 9-4: Summary Results for ASH Measurement with Values Shown in Angstroms Setting the Vertical Calibration Select Calibration > Vertical > Set from the menu bar to open the Vertical Calibration dialog box. Figure 9-5: Vertical Calibration Dialog Box with Cleared VCFs NOTE –...

  • Page 233: Calibrating The Other Ranges

    Like any precision instrument, the Dektak 150 system requires care in handling and operation. Please adhere to the following recommendations: • Allow the Dektak 150 system to warm up for approximately 15 minutes prior to use to stabilize the electronics. Calibration and Maintenance...

  • Page 234: Cleaning The Profiler

    STYLUS REPLACEMENT AND TIP CLEANING All Dektak 150 styli have the same shank size but differ in the radius of the diamond tip. This section describes the procedure for removing and replacing a stylus.

  • Page 235: Removing The Stylus

    Figure 9-7: Stylus Assembly CAUTION The stylus suspension system is very delicate. Use the stylus replacement fixture when removing or installing a stylus. Removing the Stylus Select Profiler > Tower Up to raise the stylus and optical assembly to the maximum vertical position. Remove the stylus sensor shield using a small slot screwdriver to gently pry the sensor air shield down and away from the stylus head.
  • Page 236 Figure 9-8: Removing the Sensor Shield Stylus head Pry here. Sensor shield Remove the stylus using the stylus exchange tool. Figure 9-9: Stylus Exchange Tool NOTE – The quick-release stylus mechanism enables fast and easy stylus replacement. Verify that the stylus exchange tool is in the disengaged position (that is, make sure that the magnet wheel Figure 9-10 is rotated so that the end notch is visible, as shown on the left side of Calibration and Maintenance...
  • Page 237 Figure 9-10: Stylus Exchange Tool Details Magnet Magnet Wheel, Wheel, Notch Green Dot Visible Visible Alignment Pins Stylus Channel Magnet Engaged Magnet Disengaged (Stylus Captured) (Stylus Released) Place the stylus exchange tool underneath the scan head. Align the pins of the stylus exchange tool with the stylus sensor housing. Figure 9-11: Aligning the Stylus Replacement Fixture Push the stylus exchange tool up until the bottom of the scan head is against the top of it.

  • Page 238: Installing A New Stylus

    Carefully lower the stylus exchange tool. The stylus is held in place magnetically. Figure 9-13: Fixture with Captured Stylus Stylus To remove the stylus from the stylus exchange tool: Disengage the magnet by rotating the wheel in either direction so a notch is visible. Gently lift the stylus out of the tool, and then place it in its protective case.
  • Page 239 Figure 9-14 Turn the knob on the stylus exchange tool so that the green dot is visible (right side of ) and the magnet is engaged. Holding the stylus exchange tool from the edges, align its pins with the outside of the sensor. (Because this is a precision alignment, you may want to practice several times without the stylus in the way.) Push up Figure 9-15 until the tool is flush with the bottom of the sensor (see...

  • Page 240: Cleaning The Stylus

    Figure 9-17: Attaching the Right-Front Corner Tab Attach right-front corner tab first Figure 9-18: Attaching Left-Rear Corner Tab Attach left-rear corner tab last NOTE – Adjusting the Optics on page 9-17 for instructions for adjusting the video image of the stylus tip. Cleaning the Stylus A stylus may need to be cleaned periodically to remove any dust particles from the tip.

  • Page 241: Cleaning The X-Y Stage And Block

    CAUTION: Dispose of wipes in an appropriately labelled solvent-contaminated waste container. ATTENTION: Jeter les compressesde nettoyage daus une poubelle correctement étiquettée pour les solvents. VORSICHT: Entsorgen Sie Alkohol-getränkte Tücher in einem dafür vorgesehenen Behälter für Lösungsmittel abfälle. CLEANING THE X-Y STAGE AND BLOCK Contamination of the stage decreases scan performance.
  • Page 242 CAUTION: Do not use other solvents, such as spectrograde acetone, which may attack the adhesives used to mount the Teflon tapes. To avoid damage to the Teflon tapes, do not allow them to touch any surface other than the reference block. ATTENTION: Ne pas utiliser d’autres solvants, tels que de l’acétone pour spectrographie, qui pourraient attaquer les adhésifs utilisés pour...
  • Page 243 Ensure that no debris is embedded in tapes. Check to see that there is no excess adhesive from the tapes adhering to any running surface. NOTE – Replace the Teflon tapes every three years or as needed. Contact Veeco for service. Figure 9-21: Teflon Tapes on the Bottom of the Stage...

  • Page 244: Adjusting The Optics

    IMPORTANT! DO NOT touch the Teflon tapes or the polished aluminum block after cleaning. If this happens, you must repeat the cleaning procedure. Figure 9-19 Figure 9-19 Figure 9-22 Clean the stage rack (see ) and drive pinion (see ) with instrument grade “canned air.”...

  • Page 245: Adjusting The Standard Fixed Optics

    Adjusting the Standard Fixed Optics To adjust the standard fixed optics: Place the vertical standard that came with your system on the stage beneath the stylus, with the printing Figure 9-23 facing the front of the system ( ). The system scans from front to back, so be sure there are at least a few millimeters of the standard located to the back of the stylus tip.
  • Page 246 Figure 9-25: Stylus Tip in Focus If the system is out of alignment, use the thumb screws on the back of the mirror plate to adjust the mirror Figure 9-26 in or out (see ). The two thumb screws on the left adjust the image from top to bottom, while the single thumb screw on the right adjusts the image from left to right (for the normal optical assembly position).

  • Page 247: Adjusting The Optional Zoom Optics

    Figure 9-27: Optical Assembly Locking Screw Optical assembly locking screw Adjusting the Optional Zoom Optics Place the vertical standard that came with your system on the stage beneath the stylus, with the printing Figure 9-23 facing the front of the system ( ).
  • Page 248 Adjusting Zoom Optics Parcentering Zoom all the way out. Note the location of the stylus tip. Zoom all the way in. Figure 9-26 Adjust the thumb screws on the back of the mirror plate (see ) to put the stylus tip where it was in step 2.

  • Page 249: Adjusting The Coarse Alignment

    For more information on service contracts, contact your local Veeco Service Center. MAJOR REPAIRS The Dektak 150 cannot be readily repaired after major component failures without the assistance of specialized test equipment and software routines. In the event of equipment failure, please call the Veeco Service Center nearest you for assistance.
  • Page 250 Before calling the Veeco Service Center, do the following: Have the serial number of your profiler and the version of your Dektak 150 software at hand. Restart the Dektak 150 by closing the Windows application, turning off the system, and then turning the power back on.

  • Page 252: Appendix A. Facilities Specifications

    ACILITIES PECIFICATIONS As a a high-precision measuring instrument capable of measuring minute physical surface variations, the Dektak 150 is extremely sensitive to the environment in which it operates. You must set up one of the following operating environments: • Normal Operating Conditions: The area that houses the Dektak 150 must be free from excessive dust.

  • Page 253: Vibration Interference

    (such as from a cleanroom air duct). For optimum performance, place the tool in an area with minimal foot traffic and low acoustical noise. Floor The floor must be level, rigid and capable of supporting the Dektak 150 surface profiler on a bench or the preferred vibration isolation table. System Location and Service Access Position the system with the work area in front to allow adequate working space for the operator.

  • Page 254: Cable Connections

    Figure A-1: Dektak 150 Cable Connections Dektak 150 Dimensions with Enclosure The following drawings show the dimensions of the Dektak 150 system dimensions of the system with the environmental enclosure. Figure A-2: Dektak 150 Dimensions with Enclosure - Front View...
  • Page 255 Figure A-3: Dektak 150 Dimensions with Enclosure - Side View Figure A-4: Dektak 150 Dimensions with Enclosure - Center of Mass Facilities Specifications...

  • Page 256: Dektak 150 Dimensions Without Enclosure

    Dektak 150 Dimensions without Enclosure The following drawings show the dimensions of the Dektak 150 surface profiler without the environmental enclosure. Figure A-5: Dektak 150 without Enclosure - Front View Facilities Specifications...
  • Page 257 Figure A-6:Dektak 150 without Enclosure - Side View Facilities Specifications...
  • Page 258 Figure A-7: Dektak 150 Dimensions without Enclosure - Top View Facilities Specifications...
  • Page 259 Figure A-8: Dektak 150 without Enclosure - Center of Mass Facilities Specifications...

  • Page 260: Appendix B. Technical Specifications And Purchased Options

    ECHNICAL PECIFICATIONS AND URCHASED PTIONS DEKTAK 150 TECHNICAL SPECIFICATIONS Table B-1: Dektak 150 Technical Specifications SYSTEM Measurement Technique Stylus profilometry (contact) Measurement Capability Two-dimensional surface profile measurement (standard) Sample Viewing (Camera and Optical • 640 x 480-pixel (1/3 in.-format) color camera, USB Assembly) •...
  • Page 261 Scan Speed Ranges 3 seconds to 200 seconds Data Points per Scan 60,000 maximum Maximum Sample Thickness 101 mm (4 in.), depending on Dektak 150 system configuration Maximum Wafer Size 150 mm (6 in.) Maximum Sample Weight 3 kg (6.6 lbs) Vertical Range 524 μm (0.02 in.) standard;...

  • Page 262: Dektak 150 Purchased Options

    Box 5 (optional monitor): 18” x 15” x 7” Box 6 (optional vibration isolation table or platform): 42” x 36” x 50” (table) or 29” x 30” x 6” (platform) DEKTAK 150 PURCHASED OPTIONS Table B-2: Dektak 150 Options and Accessories Item Description/Function Part Number...
  • Page 263 N-Lite Low Force Package Allows stylus-to-surface engage routines for ultra-low force 775-315 profiling. Dektak 150 Software Additional license of Dektak 150 software to allow 775-312 installation on remote workstation 3D Wyko Vision Analysis Wyko Vision analyzes 3-D maps of the scan data taken...
  • Page 264 Table B-3: Styli and Calibration Standards Item Description Part No. Standard Low Inertia Color Code Size Sensor 3 Styli Orange Assy, Stylus, 5 838-030-1 Orange µm White Assy, Stylus, 838-030-2 White 2w x 2d Hi Aspect Ratio Green Assy, Stylus, 838-030-3 Green 0.7 µm R x 45°...
  • Page 265 Item Description Part No. Individual Calibration Description Part No. Standards Vertical Standard, 50NM (.5 KÅ), VSO, 300-998 Silicon Vertical Standard, 100NM (1 KÅ), VSO, 300-999 Silicon Vertical Standard, 230NM (2.3 KÅ), VSO, 301-005 Silicon Vertical Standard, 450NM (4.5 KÅ), VSO, 301-006 Silicon Vertical Standard, 1UM (10 KÅ), VSE,...

  • Page 266: Appendix C. Stress Measurement

    Stress Measurement is an optional feature that must be installed in the Dektak software prior to use. The Dektak 150 stress measurement function calculates tensile or compressive stress on processed wafers. Its algorithm creates a curve comprising stress values for every data point on the scan trace. If...

  • Page 267: Three-Point Substrate Suspension

    Figure C-1: Dektak Stress Measurement Formula Figure C-2: Analytical Results Window NOTE – Only those values of the stress curve between the cursors are considered. THREE-POINT SUBSTRATE SUSPENSION To compensate for substrate deflection created by gravity or by a vacuum hold stage, the stress measurement provides three-point substrate suspension.

  • Page 268: Creating A Stress Reference

    CREATING A STRESS REFERENCE Prior to calculating stress, you must establish a reference. You can calculate stress using a straight line as the reference, or by producing a preliminary reference scan on the sample prior to processing. In order to accurately measure stress, the reference scan and the scan produced after thin film deposition must have identical scan parameters, including cursor locations (stress computes the data between the reference and measurement cursors).
  • Page 269 Figure C-3: Stress Parameters Dialog Box Click Editor in the Thin Film Substrate section to view the pre-programmed thin film substrate elasticity Figure C-4 constants (see Figure C-4: Substrate Editor Select the thin film substrate to be measured for stress and double-click to set/select. Stress Measurement...

  • Page 270: Entering Stress Parameters

    ENTERING STRESS PARAMETERS Once you identify the substrate material and orientation, you can enter other stress parameters in the Stress Parameters dialog box (see Figure C-3). Verify the correct value displays in the Elasticity field. If the elasticity of the substrate is different than the value displayed, click Editor and enter the correct value.

  • Page 271: Constraints And Limitations

    Figure C-6: Display Parameters Dialog Box: Type Tab You can select the following types of stress plots from the dialog box: Curve Fit Curve fit plots in cyan. PreDeposition Predeposition data curve plots in blue. NOTE – This choice is available only if a pre-deposition data file was loaded. PostDeposition Post-deposition data curve plots in green.
  • Page 272 • Ensure that both pre- and post-stress scans must have the same number of data points. Do not abort either scan before completion. • Measure flat wafers to obtain optimal performance of the algorithm. Surface features can throw off the curve-fitting algorithm and produce invalid maximum stress values. Stress Measurement...

  • Page 274: Appendix D. Step Detection Function

    Figure D-1). You can open the Step Detection dialog box from two of the Dektak 150 application windows. One of the choices displayed in the dialog box depends on the window from which the box was opened: Step Detection Function...

  • Page 275: General Settings Tab

    To open the Step Detection dialog box from the Data Plot window containing a plot, select Analysis > Step Detection from the menu bar. IMPORTANT! Veeco recommends that you scan a representative sample and set up step detection in the Data Plot window, where you can immediately see the effects of your changes.

  • Page 276: Detection Range Section

    Figure D-2: General Settings Tab With First Step Selected Detection Range Section • Start Position: The position, in μm, to start searching for a step. • End Position: The position, in μm, to end searching for a step. The default end position is 2000 μm regardless of the actual scan length.

  • Page 277: Every Step Tab

    NOTE – This check box is available only when the dialog box is opened from the Data Processing section of the Scan Routines window. Every Step Tab You may need to change the parameter values on the Every Step tab, depending on the steps to measure (see Figure D-3).

  • Page 278: Analytical Functions Section

    Analytical Functions Section • ASH: Compute Average Step Height function. • Slope: Compute Slope function. • AvgHt: Compute Average Height function. • Peak: Compute Maximum Peak function. • Valley: Compute Maximum Valley function. • P_V: Compute Maximum Peak to Valley function. •...

  • Page 279: Band Width Section

    Band Width Section • R: Width of R cursor band positioned to the left of the potential step being detected. • M: Width of M cursor band positioned to the right of the potential step being detected. Additional Parameters • Smoothing: Factor used for smoothing.

  • Page 280: Step Detection Setup

    Width Columns R (μm) R-cursor band width used when performing corresponding analytical function. You may enter up to 10 widths for each analytical function. M (μm) M-cursor band width used when performing corresponding analytical function. You may enter up to 10 widths for each analytical function. STEP DETECTION SETUP Step Detection is typically used for finding and measuring steps when performing multi-scan automated operations.

  • Page 281: Performing Step Detection On A Single Scan

    Performing Step Detection on a Single Scan With the Step Parameters dialog box displayed, select the Step Detection method (First Step or Every Step). Select the desired parameters for the scan to measure the scanned step or steps. Click OK. The resulting scan after you enable Step Detection redisplays the plotted profile and detects and measures the steps applicable to selected Step Detection parameters.
  • Page 282 Select Window > Automation Programs to run the automation programs. Select Run > Auto Program From... after highlighting the first automation program to execute. The result is an Automation Program Summary Report with Mean, Standard Deviation, Minimum, Maximum and Range values for ASH measurements at each detected step. Step Detection Function...

  • Page 284: Appendix E. 3D Mapping Function

    (X, Y, and Z), instead of the two dimensions (X and Z) that standard products provide. Dektak 150 surface profilers collect 3D data through the use of mapped scans. The mapped scan data is then converted into data files that the Vision software can analyze and display.

  • Page 285: Setting Up A 3D Mapping Program

    Steps for the Y Auto Stage If your Dektak 150 profiler includes the the Y auto stage, follow these steps to set up a 3D map: Open the Scan Routines window. Click any of the entries in the Scan Parameters section to open the Scan Parameters dialog box with the...

  • Page 286: Steps For The X-Y Auto Stage

    Click OK to close the dialog box. Steps for the X-Y Auto Stage If your Dektak 150 profiler includes the X-Y auto stage, follow these steps to set up a 3D map: Open the Scan Routines window. Click any of the entries in the Scan Parameters section to open the Scan Parameters dialog box with the...

  • Page 287: Selecting Files For Saving Mapping Data

    Figure E-2: Scan Parameters Dialog Box: Map Parameters Tab Click OK in the Scan Parameters dialog box to accept the scan parameters. The mapping parameters are now stored in the automation program. SELECTING FILES FOR SAVING MAPPING DATA In the Automation Programs window, click Data File in the Automation Program Options section to display the General tab in the Automation Program Options dialog box.

  • Page 288: Running A 3D Mapping Program

    RUNNING A 3D MAPPING PROGRAM To execute a 3D mapping program, run the automation program containing the desired mapping parameters. To do this, select Run > Auto Program. NOTE – The Data Plot window displays and plots each scan in real time. Once all the scans in the automation mapping program are complete, the map file (*.data) is created.
  • Page 289 Enter the modified balance point value into the soft touchdown settings: Select Setup > Configuration Settings. Enter the password and click Enter. dektak32 Figure In the Hardware section, click Soft Touchdown. The Soft Touchdown dialog box appears (see step 1 Subtract 600 from the balance point that you recorded in , and then enter the result in the Initial Force field.

  • Page 290: Checking Stylus Operation After Calibration

    Checking Stylus Operation after Calibration With soft touchdown enabled, watch the stylus as it finishes a scan and the stage moves to next scan location. The stylus should be slightly below its balance point, and you should see it gently bobbing, but not touching the surface.

  • Page 291: Using Vision's Basic Functions

    To enter soft touchdown into a scan routine: Click any parameter in the Scan Parameters section of the Scan Routines window to open the Nominal Parameters tab of the Scan Parameters dialog box. Figure E-6: Nominal Parameters Tab of Scan Parameters Dialog Box Figure E-6 In the Additional Parameters section, select the Soft Touchdown check box (see ) , and then...

  • Page 292: Open

    Figure E-7: Vision Start-Up Window Open Select File > Open Stored Dataset or click the icon to open a scanned image file and transfer the data into a working data buffer (current data set) for use by the package. The Open Stored Dataset dialog box appears (see Figure E-9).

  • Page 293: Save

    Figure E-9: Open Dialog Box Preview Window Save Select File > Save As to save an image. This command is typically used when you have transformed the dataset and wish to save the results of the transformation independent of the raw data set. The data is saved in Vision file format (*.opd format, not in data file format (*.data).
  • Page 294 The following table describes the icons on the Vision tool bar. Table E-1Vision Menu Bar Description Button/Icon Open: Opens a dataset for viewing and analysis. Save: Saves the current database. Print: Prints the active dataset. Processed Options: Opens the Processed Options dialog box, where you can set various data processing parameters.

  • Page 295: Analyzing Data

    ANALYZING DATA After you have taken a measurement, you can use a number of options and analyses to produce a vast array of information about your sample data. Analyses calculate a wide range of statistics from measured data. Analyses can be applied automatically following each new measurement. The name of the analysis, in this case, is stored with the configuration file.
  • Page 296 Figure E-11: Processed Options Dialog Box - Terms Removal Tab • None Click this option to perform an analysis with no terms removal. • Tilt Only (Plane Fit) Click this option to remove linear tilt from surface measurements. Since the system and the sample always have some inherent tilt, most users remove this term when new data is taken.

  • Page 297: Filtering Options

    appears in the upper right corner of the Terms Removal dialog box. Select this box to set the zero height to the mean of the current data. Otherwise, it is set to the height of parent. Filtering Options The filtering options create a modified data array to produce one of the effects described after the figure.

  • Page 298: Masking Options

    Table E-2Digital Filter Options Digital Filter Description Fourier Low Pass Removes spatial frequency components above the specified Low Digital Cutoff Frequency. It makes the larger features of the dataset easier to distinguish. Fourier High Pass Removes spatial frequency components below the specified High Digital Cutoff Frequency.

  • Page 299: Dektak Options

    Figure E-13: Processed Options Dialog Box - Masking Tab • Use Analysis Mask: Activates the mask associated with the current analysis. • Use Terms Mask: Activates the current terms mask. For the mask option to be valid, you must set a mask for the selected dataset. If terms are selected for removal, but a terms mask is not applied, terms will be removed across the entire dataset.
  • Page 300 Figure E-14: Processed Options Dialog Box - Dektak Tab 3D Options To apply data flattening: Click Flatten Using X Average (the recommended flattening method). Click the Masking tab. Select a flat region on your sample and apply a terms mask through the entire Y Figure E-15 axis.
  • Page 301 Figure E-15: Terms Mask Editor 2D Options To select a scaling method: Select one of the following options from the Scaling Method list — Length, Percentage, or Aspect Ratio. The label of the field on the left below the list changes accordingly. Figure E-16: 2D Scaling Method Options Enter a value in the Length, Percentage, or Aspect Ratio field.

  • Page 302: Displaying Data

    DISPLAYING DATA Vision provides a large number of graphical plots, allowing you to produce meaningful data from test results. Setting the Units You may want to display your data in specific units or in a common unit system. By clicking the Units icon or by selecting Options >...

  • Page 303: Display Custom Files (.Cdf

    Click Calculate to perform the analysis and display the output. Display Custom Files (.cdf) Your Veeco customer representative may provide you with one or more custom display (.cdf) files designed for your particular application. You can choose to use one of these output files, or you can create your own .cdf file.

  • Page 304: Setting Titles And User Notes

    Figure E-18: Set Default Output Dialog Box Setting Titles and User Notes Vision offers two fields that you can customize on most display files: Title and Note. The Title and Note are displayed on any of the standard display files. You may also add them to any custom display files.

  • Page 305: Contour Plot

    Figure E-19: Icons for Main Analysis Plots. Filtered Bearing Contour Plot Ratio Analysis Filtered Histogram Analysis 2D Analysis 3D interactive 3D Plot Contour Plot A contour plot provides a visual, pixel-for-pixel representation of your dataset and applicable dataset statistics. Data heights are color-coded for easy interpretation. To display a contour plot of the current dataset, select Analysis >...

  • Page 306: Surface Plot

    Surface Plot A plot of the surface as viewed from directly above (see Figure E-20). Surface heights are depicted by the colors on the vertical height scale to the right of the plot. Height (Z) Scale A vertical height scale, centered about the mean height (see Figure E-20).

  • Page 307: 2D Analysis

    E-21). This option is available when a dataset is open. NOTE – When you open the results of a Dektak 150 scan in Vision, the program performs 2D-trace analysis on the data and displays it as a 2D plot similar to the one shown in...
  • Page 308 2D Analysis Plot Cursors On the 2D Analysis plots, set these cursors at the points of interest by clicking and dragging them to position (see Figure E-22). The statistics to the right of the X and Y profile plots refer to the area between the cursors.

  • Page 309: 3D Interactive Plot

    2D Analysis Plot Statistics Surface statistics for the region between the cursors on the X profile or Y profile (see Figure E-22): • Rq: Root mean square (RMS) roughness. • Ra: Average roughness. • Rt: Maximum height of profile, Rp + Rv. •...

  • Page 310: Filtered Histogram

    Figure E-23: 3D Interactive Plot 3D Interactive Plot Menu Right-click on the plot to view the following options in the 3D Interactive menu: • Analysis Options: Opens the Processed Options dialog box. • Plot Options: Opens the 3D Settings dialog box where you can adjust lighting, scaling and other plot options.
  • Page 311 Figure E-24: Filtered Histogram Plot Filtered Histogram Plot Box Filtered Histogram Plot Filtered Histogram Plot In addition to showing the height distribution, the histogram also shows the amount of noise in the measurement. For a random surface, noise spikes are suggested by infrequently occurring peaks.

  • Page 312: Filtered Bearing Ratio Analysis Plot

    • To obtain a more detailed listing of the histogram data and Q value statistics, click the right mouse button on the histogram. Select Print Table to print two histogram data tables: one based on the point distribution, and one based on the Q value distribution. The Q value distribution can be listed in terms of percent (if the Q Value Table by Percent option is selected) or in terms of peak-to-valley.
  • Page 313 Figure E-25: Filtered Bearing Ratio Analysis Plot Statistics Filtered Bearing Ratio Analysis Plot Statistics Box To determine these parameters, the analysis calculates the area of minimum slope of the bearing ratio curve within a 40% window. This is accomplished by computing the height difference of the curve’s profile depth axis for points separated by 40% on the tp axis.

  • Page 314: Masking

    • Rq: Root Mean Square (RMS) Roughness • Rz: Average Maximum Height Filtered Bearing Ratio Analysis Options Right click the Filtered Ratio Analysis plot and click Bearing Options to display the Bearing Ratio Options dialog box. The following options are available: •...

  • Page 315: Terms Mask

    Analysis Mask An analysis mask enables you to block areas of data that could adversely affect your measurements. You can use an analysis mask to view or analyze specified portions of a dataset. With the analysis mask applied, the system eliminates the blocked data from the analysis, and the surface statistics change to depict the masked dataset.

  • Page 316: Creating And Editing Masks

    Check the Apply Mask to Stored Data box to apply the mask. To save a mask to the current Configuration file, click Save in the Mask Editor window. Creating and Editing Masks NOTE – Analysis and terms masks are automatically saved with the dataset. Datasets are stored as raw data and processed data.

  • Page 317: Height Threshold (Histogram) Masks

    blocks all the data inside the circle. • Pass: Allows data to pass through area(s) that may have been previously blocked. For example, if you create a blocked inner circle, select Pass, and then click on the Inside button, the program will define a mask that passes the data within the circle.

  • Page 318: Selecting Data Displays

    • Black indicates that data is bad and unmasked if a detector mask is not applied. If a detector mask is applied, black can indicate both bad and masked data. • Red indicates that data is bad and masked. Selecting Data Displays In the Mask Editor window you can choose to display data before or after processing.

  • Page 319: Applying A Saved Mask To An Existing Dataset

    Applying a Saved Mask to an Existing Dataset To apply a saved analysis or terms mask to an existing (unmasked) dataset: Select Edit > Edit Mask. From the Current Mask menu, select To/From Disk. Click Load. Select your mask and click OK. The selected mask is applied to the current dataset only.
  • Page 320 Figure E-26: Database Options Button Figure E-27: Database Options Dialog Box 3D Mapping Function E-37...

  • Page 322: Appendix F. N-Lite Option

    NOTE – N-Lite is a purchased option that must be installed in your system before you can open and analyze a Dektak 150 2D scan as described in this appendix. ABOUT THE N-LITE OPTION The N-Lite Low Inertia Sensor (LIS) 3 Option allows stylus-to-surface engagement for ultra-low- force profiling.

  • Page 323: Main Functions

    NOTE – Some calibration is required after installation of the N-Lite option. MAIN FUNCTIONS The Servoed Engaged, Fine Positioning, and Stylus Retouch functions allow the N-Lite Option to produce very low, accurate forces for any sensor position: Servoed Engage The servoed engage function prevents the stylus from traveling across the sample surface during tower engagement.

  • Page 324: Solving Stiction Problems

    Problems. NOTE – If you are unsure of how to make a particular measurement or experience difficulties, contact Veeco Applications Support for assistance in designing specific tests to measure, quantify, and qualify your procedures. SOLVING STICTION PROBLEMS Static electricity is usually responsible for stiction problems during the retouch phase. Take the following steps to check the system and sample grounding.
  • Page 325 NOTE – Adjusting the timeout and lift increment parameters in the Dektak 150 configuration file also can help alleviate stiction problems. For assistance with editing the configuration file, call Veeco Technical Support. N-Lite Option...

  • Page 326: Appendix G. Scan Stitching

    Scan stitching enables you to make measurements of smooth surfaces greater than 100 mm (the physical limitation of the Dektak 150 system) for applications such as wafer stress measurements. The 200 mm Scan Capability extends the maximum scan of the Dektak profiler to 200 mm. Without this option, scan lengths are limited to 100 mm or less.

  • Page 327: Modifying The Default Data Stitching Settings

    MODIFYING THE DEFAULT DATA STITCHING SETTINGS NOTE – The Dektak 150 system applies data stitching using the default settings unless you customize those settings as described below. From the Setup menu, select Configuration Settings. In the Configuration Settings dialog box, click the Data Stitching icon. The Data Stitching dialog box appears.
  • Page 328 Figure G-2: Data Stitching Icon and Dialog Box If you want to apply averaging: Select the Average Overlapping Samples check box. Enter the length of overlap that you want the system to apply in terms of percentage of total scan length. NOTE –...

  • Page 329: Effects Of Averaging

    Figure G-3: Data Stitching Dialog Box. Select this check box and enter a Length value to apply averaging. Click this button and enter a Win- dow value to apply smoothing. EFFECTS OF AVERAGING Averaging can be useful for scans of smooth, unpatterned surfaces such as bare wafers. It is normally not useful for samples with features.

  • Page 330: Effects Of Smoothing

    EFFECTS OF SMOOTHING Like averaging, smoothing can be useful for scans of smooth, unpatterned surfaces such as bare wafers. It is normally not useful for samples that have features. The Moving Average smoothing function that is available in the 200 mm Scan Capability takes an X data points window, calculates the height average, and repeats this through the entire overlap region before combining scans M1 and M2.

  • Page 332: Appendix H. Rohs Compliancy Environmental Data Sheets

    That same environmental data sheet translated into Chinese by TÜVReinland ® • An environmental data sheet from Dell , Inc. (in English) regarding the EU RoHS compliancy of the Optiplex 320 computer. That computer or an equivalent is used in the Dektak 150 system. RoHS Compliancy Environmental Data Sheets...
  • Page 334 2650 East Elvira Road Tucson, AZ 85706 USA Product description / Model (Series) No.: Dektak 150 and D8 Surface Profiler with options/Model#’s D150/D8 Marking for Names and Contents of Toxic or Hazardous Substances or Elements Toxic or hazardous Substances and Elements...
  • Page 335 Products & Environmental Analysis Page 2 of 2 Marking for Names and Contents of Toxic or Hazardous Substances or Elements Toxic or hazardous Substances and Elements Hexavalent Polybrominated Lead Mercury Cadmium Chromium Polybrominated diphenyl ethers Part No. Part Name (Pb) (Hg) (Cd) (CrVI)
  • Page 338 ENVIRONMENTAL DATA SHEET Dell Inc. PRODUCT: Optiplex 320 Mini Tower www.dell.com Effective Date: 2006-11-6 SYSTEM DIMENSION AND WEIGHT Depth, cm Width, cm Height, cm Weight, kg 43.8 18.7 41.1 14.29 depending on options installed DECLARATIONS AND CERTIFICATIONS This system received the following approvals and may be labeled with one or more of these marks depending on point of purchase: Approvals Certificate # Yes / No /...
  • Page 339 Declared Noise Emissions in accordance with ISO 9296 Sound Power Sound Pressure Operator Sound Pressure Bystander Service Level , bels) Position Position (1 bel=10 decibels, re Watts) , decibels) , decibels) (re 2x10 (re 2x10 Floppy Drive Accessing Hard Drive Accessing CD Drive Accessing Idle PRODUCT MATERIALS INFORMATION...
  • Page 340 Chromium, lead, mercury, or cadmium are not intentionally added to packaging materials and are not present in a cumulative concentration greater than 100 ppm as incidental impurities. No halogenated plastics or polymers are used for packaging material. Dell complies with the EU Directive 94/62/EEC. Packaging Materials Weight, kg Corrugate cardboard...

  • Page 341: Index

    NDEX Numerics Auto Stages 1-2, 3-3 2D Analysis Automatic Leveling (Step Detection) E-24 3D Interactive Plot Automation Program E-26 creating a multiple scan creating a single-scan Abort 4-22 description AC Power Cord, Connecting 2-13 editing Acoustics opening Analyses E-12 saving 4-20 custom display file E-20...
  • Page 342 E-12 2-14 Default Menu Bar described Default Output fFle setting up E-20 Deflection Scan technical specifications 7-14 Dektak 150 Software Functions Configuration Settings Dektak 150 Surface Profiler changing calibrating Illumination folder 8-12 cleaning Configuration Settings Dialog Box components Contour Plot...
  • Page 343 Display Parameters - cont. Geometry Parameters reference/measurement cursors 7-17 Area software leveling 7-16 Perim Display Parameters Dialog Box 8-25 Radius Display Range 7-18 Slope E-Box connecting cables to cable manifold 2-11 Volume illustrated Global Edit Mode 5-18 light bar 2-21 Graphical Plots Editing Scan Routines 5-11...
  • Page 344 Linear Variable Differential Transformer solving measurement problems solving stiction problems stylus retouch Magnification, Changing Plot 4-17 Notes, Adding to Scan Parameters Maintenance Dektak 150 profiler exterior stage and block 9-14 OPD Files E-12 stylus Opening Manually Leveling the Stage 4-12...
  • Page 345 Power Rp (Maximum Peak) connections Rq (Root-Mean-Square) demand Rt (Maximum Peak to Valley) requirements Run Menu Power On Rv (Maximum Valley) 2-20, 3-1 Power Strip Rz_din (Ten Point Height Average) Power Supply Cable, Connecting 2-13 Powering Down 3-23 Safety Hazards Precision Scan Head Sample Loading 3-13...
  • Page 346 Scan Speed Ranges Stage Configurations Scan Speeds Stage Control 7-6, 7-8 Scan Stitching G-1 Stage Control Panel 3-8, 3-11 Scan Type Stage Tracking 3-16 Scanning Process keyboard shortcuts Scanning, principle of operation Stage, Manual X-Y Serial Cable, Connecting described 2-12 Service Contract technical specifications 9-22...
  • Page 347 Stylus - cont. Units, Changing type 4-8, 8-10 USB Cable, Connecting use with soft touchdown routine 2-11 USB Video Camera Stylus Force User Notes Stylus Reticle Alignment 5-23, 5-38, 5-39 3-19 Stylus Retouch, N-Lite Stylus Shield 2-19, 9-12 Valley (Maximum Valley) Substrate Characteristics, identifying for Valley, Maximum (RV) Stress Measurement...
  • Page 348 Waviness Parameters - cont. WDF file E-19 Weight Window Menu 8-14 WMaxdev (Maximum Deviation of Waviness) Wp (Maximum Peak of Waviness) Wq (Root-Mean-Square of Waviness) Wt (Maximum Peak to Valley of Waviness) Wv (Maximum Valley of Waviness) X-Y Auto Stage manually leveling 4-12 setting up 3D mapping...

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