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5.3.2. Fix tightly the sample on the sample holder with the double-sided conductive tape (don't use too much
tape). If the sample drops into the chamber, the chamber will have to be disassembled,
5.3.3. Fix the height of the sample with the lock screw. The highest part of the sample should not exceed the
level gauge by 0.5mm or it could damage the lens inside the main chamber.
5.3.4. Check that the stage is in its initial position, that is: X=Y=12.5mm, Z=12mm, Tilt=0˚, θ=0˚. If it is not the
case, display the "Stage Control" window and click "Go To Home". Otherwise, set the initial position by
rotating manually the knob.
5.3.5. Check that MV-1 is closed (C side). This is the valve between S.C and S.E.C.
5.3.6. CHAMBER → Press AIR button
5.3.7. Wait for atmospheric pressure and pull the door open by grabbing the door itself, not the rod.
5.3.8. Push a little the rod and screw the specimen holder onto the tip of the rod.
5.3.9. Pull the rod back into the locked position and close the door.
5.3.10. Press the EVAC button to evacuate the exchange chamber.
5.3.11. Wait until the SEC vacuum reads "high" on the front panel.
5.3.12. Turn the handle counterclockwise (O direction) to open MV-1.
5.3.13. While observing inside S.C., push the rod slowly to insert the holder into the stage. If it does not fit
smoothly there is a chance that the stage is not at the initial position. Don't force unreasonably. If it was not
in the initial position, pull out the rod slowly into the locked position, close MV-1 and set the stage in the
initial position.
5.3.14. Turn the rod counterclockwise, and when the screw is completely out, pull out the rod to the locked
position.
5.3.15. Close MV-1.
5.4. Set the sample size
5.4.1. Menu "Operate" → Stage control → press SET button.
5.4.2. Set the sample size (1, 2, 3, 4 inches).
6. Apply high voltage
6.1. On the front panel: VALVE → set GUN switch to AUTO
6.2. Only if "Please Flush!!" flashing display appears, perform the following flashing procedure:
6.2.1. Menu "Setup" → "Column Setup" → set HV: Flushing Intensity to 2 → Close.
6.2.2. Menu "Setup" → "HV Control" → "Flashing" → "Execute".
6.3. In the "HV Control" window, set the acceleration voltage Vacc and the emission current Ie. Higher Vacc leads
to better resolution but more charging. Example: 10kV and 10mA.
6.4. In the "HV Control" window click ON.
6.5. The dialog box to set the sample size appears. Check it and click OK.
7. Adjust the electronic beam
Read the manual for more details.
7.1. Beam Alignment
7.1.1. Select "Alignment" from "Operate"
7.1.2. Click "Beam Align". A circular shape appears on the screen.
7.1.3. Rotate the "STIGMA/ALIGNMENT" knob on the operation panel in order to bring the circular shape in
the center of the screen.
7.1.4. Click "OFF"
7.2. Aperture alignment
7.2.1. Adjust the focus on a particular point on the sample.
7.2.2. Increase the mag up to 5k or 10k and adjust the focus.
7.2.3. Click "Aperture Alignment" in the "Alignment" window. The image will move periodically.
7.2.4. Rotate the "STIGMA/ALIGNMENT" knob on the operation panel in order to make the displacement as
small as possible.
7.2.5. Click "OFF"
7.3. Stigma Alignment X, Y
7.3.1. Click "Stigma Alignment X" in the "Alignment" window. The image will move periodically.
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