Zeiss Crossbeam 550L Manuals

Manuals and User Guides for Zeiss Crossbeam 550L. We have 1 Zeiss Crossbeam 550L manual available for free PDF download: Instruction Manual

Zeiss Crossbeam 550L Instruction Manual (136 pages)

Focused Ion Beam - Scanning Electron Microscope (FIB-SEM)

Brand: Zeiss | Category: Microscope | Size: 13.93 MB

Table of Contents
3
Glossary
6
General Information
9
Text Conventions and Link Types
9
Explanation on Warnings and Additional Information
10
Further Applicable Documents
11
Contact
12
Safety
13
Intended Use
13
Safety Procedures
14
Safe Operation Conditions
14
Requirements for Personnel
14
Preventive Maintenance
14
Safe Handling of Spare Parts
15
Prevention of Hazards
15
Biological Hazards
15
Burn Hazards
15
Chemical Hazards
15
Electrical Hazards
16
High Pressure Hazards
16
Magnetic Field Hazards
16
Mechanical Hazards
16
Radiation Hazards
17
Suffocation Hazards
17
Safety Equipment
18
Protective Cover Panels
18
Main Switch
19
Emergency off (EMO) Option
19
Locking Devices
20
Lockout/Tagout Equipment
21
Safety Labels
22
Product and Functional Description
27
System Overview
27
Main Components
29
Vacuum System
29
Electron Optical Column | Gemini II
31
Ion-Sculptor Focused Ion Beam (FIB) Column (Optional)
35
Detectors
37
Specimen Stage
42
Dual Joystick
43
Optional Components and Accessories
44
Optional Detectors
44
Control Panel
53
Software Description
55
Smartsem
55
Smartsem User Interface
55
Graphical Control Elements
56
User Access Levels and User Privileges
57
Smartsem Program Suite
59
Smartfib
61
Smartfib User Interface
61
Graphical Control Elements
62
Smartfib Program Suite
63
Installation
64
Operation
65
Starting the System
65
Energizing the Microscope
65
Starting the Microscope
66
Starting Smartsem
66
Obtaining a First Image
68
Preparing the Specimen Holder
69
Loading the Specimen Chamber
70
Locating the Specimen
72
Switching on the Gun
73
Switching on the EHT
74
Acquiring an Image
74
Optimizing the Image
76
Saving the Image
78
Modifying Gun Parameters
79
Selecting the Gun Mode
79
Setting the Probe Current
80
Measuring the Probe Current
80
Changing the Extractor Voltage
81
Working with Different Aperture Configurations and Beam Modes
81
Determining the Installed Aperture Configuration | Gemini II Column
81
Selecting the Column Mode
82
Finding Appropriate Detector Settings
82
Selecting a Detector
82
Setting up the Inlens SE Detector
83
Setting up the SE Detector
83
Setting up the Esb Detector
84
Setting up the SESI Detector
85
Setting up the Absd/Bsd Detector
86
Setting up the Astem/Stem Detector
88
Setting up the CL Detector
91
Shutting down the System
91
Finishing the Work Session
91
Energizing the Microscope
92
Performing a Lockout/Tagout
93
Performing an Emergency Shutdown
93
Maintenance and Repair
94
Maintenance Work
94
Maintenance Intervals
94
Change of Consumables and Chemicals
94
Troubleshooting
96
Overview
96
Overall System
99
Checking the CAN Communication
99
Chamber
99
Initializing the Stage
99
Defining the Post Initialization Position of the Stage
100
Changing the Joystick TV Angle
100
Replacing the Chamber Door Seal
101
Resetting the Touch Alarm
101
Checking the Water Flow and Temperature
102
Column
102
Baking out the Gun Head
102
Calibrating the Probe Current
103
Power Circuit
104
Checking the Position of the Circuit Breakers
104
Detectors
105
Lubricating the Rod
105
Focused Ion Beam
106
Checking the Lifetime of the Ion Source
106
Regenerating the Ion Source by Heating
106
Manually Finding a New Extractor Value
107
Shutdown and Disposal
108
Putting the Microscope out of Operation
108
Transport and Storage
108
Disposal
110
Disposing of Solid Waste (Consumables)
110
Disposing of the Microscope
110
Technical Data and Conformity
111
Product Specification
111
Installation Requirements
114
Layout and Connections
124
System Layout
127
Declaration of Conformity
129
Parts and Tools
130
Consumables
130
Spare Parts
130
Tools and Accessories
130
Index
132

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Zeiss Crossbeam 550L Instruction Manual (136 pages)

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