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AL120-6Series
Olympus AL120-6Series Manuals
Manuals and User Guides for Olympus AL120-6Series. We have
1
Olympus AL120-6Series manual available for free PDF download: Maintenance Manual
Olympus AL120-6Series Maintenance Manual (66 pages)
Wafer Loader
Brand:
Olympus
| Category:
Laboratory Equipment
| Size: 2.3 MB
Table of Contents
Table of Contents
19
Nomenclature
21
Wafer Loader Main Body
21
Operation Panel
22
Remote Controller (Option)
23
Vacuum Stage
24
Adjustments
25
Adjusting the Cassette Positioning Guide Position
25
Registration of a New Type of Inspection Wafer
26
Thickness)
26
Test Programs
31
How to Use the Programs
31
Test Names and Functions
32
Replacement of Consumables
57
Macro (Center) Table: if a Vacuum Error Has Occurred or the Table Has Become Damaged
57
Macro (Center) Table Oil Seal: if a Vacuum Error Has Occurred
57
Arm: if a Vacuum Error Has Occurred or the A-Arm Has Become Damaged
59
Vacuum Table: if a Vacuum Error Has Occurred or the Table Has Become Damaged
60
Oil Seal for Vacuum Table: if a Vacuum Error Has Occurred
60
Arm Vacuum Pad
62
Rubber Microscope Legs: if Wafer Transfer Sound Has Increased
63
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