Page 1 Self-paced Training Manual Agilent B1500A Semiconductor Device Analyzer Agilent EasyEXPERT Software...
Page 2: Self-Paced Training Manual
Self-paced Training Manual Agilent B1500A Semiconductor Device Analyzer Agilent EasyEXPERT Software...
Page 3: In This Manual
No part of this manual may be reproduced in any form or by any means (including electronic storage and retrieval or translation into a foreign language) without prior agreement and written consent from Agilent Technologies, Inc. as governed by United States and international copyright laws. Manual Part Number...
Page 4: Module 1. Introduction
Module 1. Introduction...
Page 5 In This Module • New Features • EasyEXPERT • To Perform Easy Application Test • User Interface • Modular Mainframe • SCUU/GSWU • • B2200 Switch Control • Desktop EasyEXPERT • 415x Setup File Converter Note:...
Page 6 IV/CV variable module EasyEXPERT combination configuration environment ASU for 100 aA Comprehensive application B2200 switch library control 415x setup file converter Touch-screen w/optional USB keyboard Semi-auto & mouse prober control The B1500A has many exciting new features and capabilities.
Page 7: New Features
New Features • EasyEXPERT software • Application test environment (> 150 algorithms) • Classic test environment – 415x like setup • Quick test environment – multiple test execution • Semi-auto prober control and B2200 switch control • Modular mainframe • MFCMU for C-V sweep •...
Page 8 EasyEXPERT Technology Technology Nano- GaAs CMOS tech classifications classifications Bipolar Res. Cap. Device type Device type Device parameters Device parameters Idon Idoff gm Igleak Vsub V/I on terminals V/I on terminals Isub SMU1 SMU2 SMU3 SMU4 Measurement Mode Mode Mode Mode Mode Measurement...
Page 9: To Perform Easy Application Test
Step 3: Change the setup parameters (Device parameters and Test parameters) if you want. Step 4: Connect DUT, and click the Start button. The B1500A starts the selected test. Step 5: Analyze the measurement result data displayed on the Data Display window automatically opened after the test.
Page 10: User Interface
User Interface • Touch panel • Stylus pen (option) • Rotary knob • Softkeys • USB keyboard (option) • USB mouse (option)
Page 11: Modular Mainframe
E5288A ASU N1301A-100 SCUU N1301A-200 GSWU The following modules and accessories are available for the B1500A: •B1520A CMU: 1 kHz to 5 MHz CV capability (1 slot) •B1511A MPSMU: 100 mA/100 V force capability, 10 fA/0.5 mV measurement resolution (1 slot) •B1517A HRSMU: 100 mA/100 V force capability, 1 fA/0.5 mV measurement resolution (1 slot)
Page 12 The SCUU removes all of these worries and makes connection simple and easy. In addition, the B1500A software automatically takes care of the multiplexing based upon the type of algorithm selected from the front panel.
Page 13 GSWU SCUU GSWU The GSWU must be connected to the outer conductors of the manipulators/positioners connected to the Force1/CMUH and Force2/CMUL connectors of the SCUU. And the GSWU control cable must be connected between the GSWU and the SCUU. When the SMU paths are available for the manipulators/positioners, the GSWU opens between the outer conductors.
Page 14 The ASU has another feature, built-in switching capability. It can switch between the SMU and an auxiliary input (AUX input, two BNC). If the Agilent 4284A LCR meter is connected to the AUX inputs, the ASU can switch between the low current and CV measurements. Then connect a wire between the CMU return terminals of ASUs to make the return path of measurement current.
Page 15 GPIB cable GPIB cable Agilent B2200A/B2201A switching matrix can be controlled by B1500A/EasyEXPERT via GPIB. EasyEXPERT provides the Switching Matrix Operation Panel for interactive control of B2200 independent from the test execution mode of B1500. And switch setup can be saved to a classic test setup data.
Page 16 Desktop EasyEXPERT Software The Desktop EasyEXPERT software provides the following additional advantages to the B1500A, allowing you to minimize the amount of offline tasks performed on B1500A and increase the working ratio for measurements. •Allows B1500A to be controlled from an external computer via GPIB while online.
Page 17 C:\Mydata>SetupFileConverter.exe setup1.mes C:\Mydata>SetupFileConverter.exe *.mes To control the B1500A, you can reuse the 4155/4156 setup file (.MES file) by converting the .MES file to the EasyEXPERT setup file (.XTS file). The file conversion can be done by the SetupFileConverter.exe file. To execute the file conversion, see Module 8.
Page 18 Module 2. Performing Easy Tests...
Page 19 To Control B2200 Switching Matrix • To Manage Data Display Window This section explains the above tasks. You will understand how to launch B1500A/EasyEXPERT, how to perform application test and quick test, and how to create your test setups and preset groups.
Page 20: To Turn On/Off B1500A
To Turn on/off B1500A The Standby button works to turn on the B1500A when it is turned off. When the B1500A is turned on, the Standby button works to terminate the EasyEXPERT software, Windows, and turn off the B1500A. After the B1500A is turned on, log on Windows.
Page 21: To Launch Easyexpert
To Launch EasyEXPERT Start EasyEXPERT icon Start EasyEXPERT button/window After logging on, click Start EasyEXPERT button to launch the EasyEXPERT software. If you do not see the Start EasyEXPERT button, double click the Start EasyEXPERT icon to open the Start EasyEXPERT window.
Page 22 To create a private workspace, delete the check from the Allow other users to access this workspace box. Workspace is the space created in the Agilent B1500A’s internal hard disk drive, and is used to store the test setup, measurement result data, and so on. The workspace can be created and...
Page 23: To Create Workspace
To Create Workspace Check this box for Public workspace 1: New workspace name to create 2: New workspace name to rename Enter the workspace name and click OK to create/rename the workspace. If you want to create a public workspace, check the Allow other users to access this workspace box.
Page 24: Online Help
Online Help Online Help is available for the B1500A and EasyEXPERT. Select Help > Agilent EasyEXPERT Help menu to display the online help window. The online help provides the following information. •Introduction describes overview, front view, rear view, and measurement units of the Agilent B1500A.
Page 25 Application Test Description To know about the application test, click the ( i ) icon. This icon displays the message box that explains the application test definition. This function will help you to know what is and how to use the application test.
Page 26 Typical Value Selection You do not need to hit the keyboard. Right clicking this field displays the menu. The values are defined as typical values in the Test Definition. When you set a test condition of application test, you do not need to use keyboard. You can select the value from the typical values as shown below.
Page 27: Screen Keyboard
Screen Keyboard When you need to enter numeric characters in an entry field, you will see the icon at the right side of the entry field. This icon opens the Numeric KeyPad. You can use this screen keypad instead of the USB keyboard. When you need to enter alphabetic characters in an entry field, you will see the icon at the right side of the entry field.
Page 28: To Perform Application Test
Step 3: Change the setup parameters (Device parameters and Test parameters) if you want. Step 4: Connect DUT, and click the Single button. The B1500A starts the selected test. After the test, the test result data is displayed on the Data Display window. And the Test Result Editor is also displayed on the lower left area of the B1500 screen.
Page 29 Test Result Editor • Save/Delete • ! Important • # Valid • ? Questionable • Remarks • OK The Test Result Editor provides the following GUI to set a flag and remarks to the test result record. Set the flag and remarks to the test record. •Save button and Delete button Divides test records into groups, Save and Delete.
Page 30 Test Record List Area Results > Filter > Show Deleted Data Flag Setup Name Flag Setup Name Vth gmMax … Vth gmMax Vth gmMax … ID-VD1 Vth gmMax ID-VD1 Vth gmMax Vth gmMax ID-VD1 ID-VD1 ID-VD1 ID-VD1 ID-VD1 Expand Application Test Results Vth gmMax Vth gmMax ID-VD1...
Page 31 Single/Append/Repeat measurement Single Append Repeat The EasyEXPERT provides three execution modes, Single, Append, and Repeat. Single button triggers a single measurement. Append button triggers an append measurement. The measurement results will be appended to the Data Display window that shows the previous measurement results. The Data Display window can have maximum 10 layers for displaying measurement results.
Page 32: To Save/Recall Your Test Setup
To Save/Recall Your Test Setup My Favorite Setup button Preset Group name. Use this field to select preset group. The test setups you create or modify MUST be saved in a preset group (My Favorite Setup). To save the setup, click the Save button. To recall the setup, click the Recall button.
Page 33 To organize preset group for test setup My Favorite Setup button This dialog box is opened by selecting the Organize Preset Group function of the My Favorite Setup button menu, and is used to organize the preset group. •Preset Group List Lists the preset groups saved in the workspace.
Page 34: To Export/Import Your Preset Group
To Export/Import Your Preset Group My Favorite Setup button You can export/import your preset group. To export the present preset group, click the My Favorite Setup button, select Export, and specify the folder and the name of the preset group to export. To import the preset group, click the My Favorite Setup button, select Import, and specify the preset group to import.
Page 35: To Export/Import Test Record
To Export/Import Test Record 1. Select data record to export, and right click. 2. Select Transport Data > Export As xxxx. To export the test result record, specify the data records and select the Transport Data > Export As xxxx menu. You can save the data records as an EasyEXPERT file, a CSV file, a XML spreadsheet file, or a XML file created by using the specified XML style sheet.
Page 36 Exercise 1 Perform Application Test. 1. Open Vth gmMax test definition in the CMOS library. 2. Change the setup (SMU, output value, etc.) 3. Create your preset group, and save your setup. 4. Connect device (MOSFET). 5. Perform Application Test. Time to complete: 5 minutes.
Page 37 Device Connection Example GNDU Drain Gate Source Substrate MOSFET: SD214DE 16088-60002 Dual in line package (28 pin) For all class exercises, you need the 28-pin dual in line socket which comes standard with the 4145 fixture (16058A) or the 4156 fixture (16442A/B). Either fixture works fine. With the 16442A/B fixture, note that there are two SMU numbering schemes..3 SMUs with force and sense, or six SMUs with force only.
Page 38: Setup Example
Setup Example 5. created 3. changed 5. saved 3. changed 3. changed 2. selected 3. changed Test result data (record) is automatically saved after measurement. Note: 2-21...
Page 39 Result Example Note: 2-22...
Page 40: To Perform Quick Test
Step 2: Select the Preset Group. Step 3: Mark (check) the test setups to be executed while the Quick Test is executed. Step 4: Connect DUT, and click the Single button. The B1500A starts the selected tests from top to bottom in the list.
Page 41 To organize preset group for test setup My Favorite Setup banner This dialog box is opened by selecting the Organize Preset Group function of the My Favorite Setup banner menu, and is used to organize the test preset group. •Preset Group List Lists the preset groups saved in the workspace.
Page 42 Exercise 2 Perform Quick Test. 1. Open or create your preset group. 2. Edit your preset group as you want (changing the test execution order etc.). 3. Save your preset group. 4. Connect device (MOSFET). 5. Perform Quick Test. Time to complete: 5 minutes. Note: 2-25...
Page 43 Result Example Note: 2-26...
Page 44 To Control B2200 Switching Matrix Step 1: Click Switching Matrix button to open the Switching Matrix Operation Panel. Step 2: Enter the switch setup name. Step 3: Define the switch setup by using the matrix on the operation panel window. Label can be set to input ports and output channels.
Page 45 To organize preset group for switch setup Preset List button This dialog box is opened by selecting the Organize Preset Group function of the Preset List button menu, and is used to organize the switch preset group. •Preset Group List Lists the preset groups saved in the workspace.
Page 46 To add switch setup to test preset group Switch setups can be saved in the preset group for test setups. Click the Export to Current My Favorite Group button. The switch setup will be converted to a classic test setup and saved in the My Favorite Setup group opened in the main screen. To select the available preset group, use the Preset Group field.
Page 47 Exercise 3 Add switch setup to test preset group. 1. Create a switch setup. 2. Create your switch preset group, and save your setup. 3. Add the switch setup to your test preset group. 4. Save your test preset group. Time to complete: 5 minutes.
Page 48: To Manage Data Display Window
To Manage Data Display Window Data Display > Default Data Display Properties… The Data Display Properties window is used to set the default setting of the Data Display window. This window is opened by selecting the Data Display > Default Data Display Properties... menu of the main screen.
Page 49 To Manage Data Display Window Data Display > Manage Data Display… The Data Display Manager is used to control the appearances of the Data Display windows. This window is opened by selecting the Data Display > Manage Data Display... menu of the main screen.
Page 50 Tiling This is a display example of Tiling. 2-33...
Page 51 Stacking This is a display example of Stacking. 2-34...
Page 52 Overlaying This is a display example of Overlaying. 2-35...
Page 53 To tile/stack/overlay windows Stacking Overlaying Tiling When some Data Display windows are opened, the following Windows menu functions are useful. Tiling Tiles all Data Display windows on the screen. Stacking Stacks all Data Display windows on the screen. Overlaying Overlays all Data Display windows on the screen. Then the position, window size, and visibility of the most front window are applied to all windows on the screen.
Page 54 Module 3. Data Display and Management...
Page 55 In This Module • Data Display window • Graph Analysis Tools • Data Status • To Change Graph/List/Display Setup • To See Print Preview • To Print Display Data • To Copy Graph Plot/List Data • To Save Analysis Result •...
Page 56: Data Display Window
Data Display window Parameters X-Y Graph PLot List Display The Data Display window is opened after measurement automatically, or by clicking the Data Display button. And the window is used to display measurement data and analyze the data. The Show X-Y Graph icon displays/hides the X-Y Graph Plot area. This is the same as the View > X-Y Graph menu.
Page 57: Graph Analysis Tools
Graph Analysis Tools This bar indicates which axis is (X value, Y1 value, Yx value) effective for cursor/marker position marker control and auto scaling. marker (x : 2 to 8) cursor line (tangent line) active line (normal line) marker active cursor The Data Display window provides marker, cursors, and lines for analyzing test result data.
Page 58 Graph Analysis Tools Show Graph Legend Show Line Information Line Information: Line Information: Y1 intercept and Yx intercept and gradient of gradient of active line active line Line Information: X intercept of active line Graph Legend When a line is displayed, the line information can be displayed in the graph plot area. The Show Line Information icon displays/hides the line information.
Page 59 Graph Analysis Tools Hold this layer Close All Displays Switch Display Mode Close this layer Layer selection tab. This example has three layers. If the append measurement is performed, the data display layer is added to the Data Display window. In this example, the Data Display window has three layers. Use the icons shown above to organize the data display layers.
Page 60 Graph Analysis Tools Marker control Graph control (X value, Y1 value, Yx value) cursor/marker position marker line (tangent line) marker Graph control: Auto Scale icon changes graph scale to fit the trace in the graph automatically for the Choose Active Y Axis. Zoom In icon zooms the data graph in.
Page 61 Graph Analysis Tools Line control cursor line (tangent line) active line (normal line) marker active cursor Line control: Line 1 State icon enables or disables line 1 and its function: normal, gradient, tangent, or regression. Line 2 State icon enables or disables line 2 and its function: normal, gradient, tangent, or regression.
Page 62 To Enable Analysis Tools Line > Line 1 ON/OFF Marker > Marker ON/OFF Line 2 ON/OFF Line 1 & Line 2 Marker ON/OFF To enable maker, click the Marker ON/OFF icon, or select the Marker > Marker ON/OFF menu. To enable the Line 1, click Line 1 icon and select one of the line mode. Or select the Line > Line 1 ON/OFF menu and select one of the line mode.
Page 63 To Draw Normal Line Line N > Normal Cursor To Marker 2 cursors line Enable the Normal line by clicking the Line 1 (or Line 2) icon and Normal. Move cursors to draw the line. The line passes through the cursor points. To move the cursor, you can use the Cursor To Marker icon.
Page 64 To Draw Gradient Line Line N > Gradient Cursor To Marker Adjust Gradient 1 cursor line gradient Enable the Gradient line by clicking the Line 1 (or Line 2) icon and Gradient. Move the cursor to specify the point that the line passes through. And click the Adjust Gradient icon.
Page 65 To Draw Tangent Line Line N > Tangent marker line data curve Enable the Tangent line by clicking the Line 1 (or Line 2) icon and Tangent. Move marker to draw the line. The tangent line will pass through the marker point. 3-12...
Page 66 To Draw Regression Line Line N > Regression Cursor To Marker 2 cursors line measured data Enable the Regression line by clicking the Line 1 (or Line 2) icon and Regression. Move cursors to specify the region of the measurement data used for the regression calculation. To move the cursor, you can use the Cursor To Marker icon.
Page 67: Data Status
Data Status If measurement unit detects any status while measurement, the status code is recorded with the measurement data. In this example, a SMU detected the compliance condition in the drain channel, so the status code C is put just before the Idrain value. SMU status code: •...
Page 68 To Change Graph Properties Edit > Graph Properties… Variety of thickness The Graph Properties dialog box is used to set the following setting of the selected Data Display window. This dialog box is opened by clicking the Properties... button in the X-Y Graph Plot area or by selecting the Edit >...
Page 69 To Change List Display Properties Edit > List Display Properties… Data Status Physical Unit Example: C -1.2345 V Example: -1.2345 mA Example: -1.23456789012345E-003 A This dialog box is used to set the data display format in the List Display area. This dialog box is opened by clicking the Properties...
Page 70 To Change Display Setup View > Display Setup… This dialog box is used to change the graph scale and data displayed in the Data Display window. The X-Y Graph area sets the X axis and Y axis of the X-Y Graph Plot area. •Name: Name of variable to plot on the X axis •Scale: Linear or Log •Min: Minimum value of the specified axis...
Page 71: To See Print Preview
To See Print Preview File > Print Preview… The Data Display window provides the File > Print Preview… function to show the print preview. This is an example of the print preview. •Select the File > Print Preview menu to open the Print Preview dialog box. •Set the Print Range, Data to print, and Scaling.
Page 72: To Print Display Data
The Data Display window provides the display image output capability to a printer or a file. Before printing, connect a printer to the B1500A via the parallel interface or the LAN, and set up it by using the Add Printer Wizard of Windows. After that, do following.
Page 73 To Copy Graph Plot Paste to WordPad You can copy graph image to the clipboard, and paste it to a word processing software. In the above example, the graph image is pasted to the WordPad. This is an example of the copy and paste operation. •Select the Edit >...
Page 74 To Copy List Data Paste to Notepad Read by Spreadsheet software You can copy the data list to the clipboard, and paste it to a word processing software. In the above example, the data list is pasted to the Notepad. This is an example of the copy and paste operation.
Page 75: To Save Analysis Result
To Save Analysis Result Saves graph information to data record. Select File > Update Test Result Select File > Save Image As… Saves graph image as a file. To leave the graph modification information such as scaling, marker, cursor, and line on the graph, select the File >...
Page 76 Exercise 4 Use the analysis tools. 1. Use your test setup and perform measurement as shown in Exercise 1. 2. Enable marker and draw line. Try it for all line types. 3. Copy/paste/save data list, and open it by using a spreadsheet software (optional, if you can).
Page 77: To Use Preview Window
To Use Preview Window The Data Display window provides the File > Print… function to print the graph image. However, you may want to set the graph title and change the line style. Then use the Preview window. The Preview window is used to see and print the graph image you modified. Select the View >...
Page 78 To Use Preview Window This example is result of the changes shown in the previous page. Line style was changed as shown above. The titles are set as follows. Graph title: ID-VG Characteristics X axis title: Gate Voltage Y1 axis title: Drain Current Y2 axis title: Transconductance Y3 axis title: Drain Current Also color of line1 was changed to red, and thickness of trace was changed.
Page 79 Exercise 5 Use the Preview window. 1. Use your test record used in Exercise 4. 2. Change the graph image as you want. - Add graph title and change axis title. - Change line style - Change color and thickness 3.
Page 80 Module 4. Modifying Application Test Definitions...
Page 81 Modification Overview 1. Open an application test definition to be modified 2. Open test definition editor 3. Save the definition as your test definition 4. Modify the definition as you like 5. Resave and close the definition 6. Export your test definition 7.
Page 82 To Open an Application Test Definition Example: Select Vth gmMax as template Click a test definition in Library list area, and click Select button to open the test definition. For example, open Vth gmMax.
Page 83: To Open Test Definition Editor
To Open Test Definition Editor Click Library/Open Definition of This Test… Cancel Define New Test… Open Definition of This Test… Delete Definition of This Test Import Test Definition… Export Test Definition… Click Library and select Open Definition of This Test… to open the test definition editor.
Page 84 To Save Definition As Your Definition Save the definition as your definition (ex: Trng vth) Save Ctrl+S Close Test Definition editor After changing test name, save as new name (ex. Trng vth). Saving the definition changes the window title to the new test name. Window title will be changed from Vth gmMax to Trng vth in this example.
Page 85: To Modify Test Definition
To Modify Test Definition Change default values, and add parameters (ex: Pcomp_d) This area sets the properties of the specified parameter. •Min •Max •Digits •Resolution •Unit •Typical Values •Symbols Test Definition editor On the Test Specification tab screen, you can add new parameters or change parameter settings. The above example adds the Pcomp_d test parameter.
Page 86 To Modify Test Definition Change or set test parameters (ex: Pcomp_d) Test Definition editor On the Test Contents tab screen, you can change the test execution flow (program flow), measurement conditions, display setup, and so on. To add the Pcomp_d parameter to the measurement setup, click the Vth_gmmax line in the program list.
Page 87 To Modify Test Definition Change display setup (ex: Y axis Max value) For example, change Max value to 1/10. Test Definition editor Next, display the Display Setup tab screen. And change the Y axis Max values. For example, add /, 1, and 0 at the last of entry field to change the Max value to 1/10.
Page 88 To Modify Test Definition Add local variable (ex: Yes and No) for Message box Variables Yes and No are used in the message box. Test Definition editor On the Test Contents tab screen, add program lines in the test execution flow. In this section, the following lines are inserted between the Vth_gmmax line and the Auto Analysis line.
Page 89 To Modify Test Definition Define Message box Variables. Yes=1/No=0 if Yes button is clicked. This message box Yes=0/No=1 if No asks if you want to button is clicked. perform auto analysis or do not. Yes and No buttons are made on this message box.
Page 90 To Modify Test Definition Add branching (ex: auto analysis is performed if Yes button is pressed) The lines terminate the test if No button is clicked. Test Definition editor At last, insert the branching lines. The example above terminates the test execution if the No button is clicked on the Message box, without performing auto analysis.
Page 91 To Modify Test Definition Example: Displaying Message box After measurement is performed, the message box will be displayed. The message box asks if you want to perform auto analysis or not. This is the example image when the Message box is displayed on the screen after the measurement is completed.
Page 92: To Use Debug Tools
To Use Debug Tools ReturnPort = SMU1 ReturnCh = OUT1 Break point Variable Inspector This slide shows an example of using the Variable Inspector for debugging. Confirm whether the correct values are passed to the variables properly. Set the break point, and click the Run button. After the program is paused, click the Inspect button.
Page 93 To Resave and Close Your Test Definition Close the definition editor, and overwrite your test definition Save Ctrl+S Close Test Definition editor After you create your test definition, save the definition and close the Test Definition editor. Click File > Close. Confirm Test Definition Save dialog box is opened. Click Yes to save your test definition and continue the close operation.
Page 94 To Export/Import Test Definition Click Library/Export Test Definition or Import Test Definition Cancel Define New Test… Open Definition of This Test… Delete Definition of This Test Import Test Definition… Export Test Definition… The test definition can be exported as the EasyEXPERT test definition file format or XML file format.
Page 95 Exercise 6 Modify test definition. 1. Select Vth gmMax test definition and open it. 2. Modify it as shown in page 4-6 to 4-11. 3. Save it as Trng vth, and perform test. 4. Add program lines to start Id-Vd test by Yes button. 5.
Page 96: Modification Example
Modification Example The lines perform auto analysis if Yes button is clicked. The lines perform Id-Vd measurement if Yes button is clicked Test Definition editor Modification example for step 4. ! ***** Analysis ***** Message If Yes=1 Auto Analysis END IF ! ***** Id-Vd ***** Message If Yes=1...
Page 97: To Use Built-In Functions
To Use Built-in Functions Absolute value: abs(A) Averaging: avg(A), mavg(A,B) Data conversion: string(A), value(A) Difference: delta(A) Differentiation, integration: diff(A,B), integ(A,B) Exponent, logarithm: exp(A), lgt(A), log(A) Maximum, minimum: max(A), min(A) Reading data : getNumericData(A), getVectorData(A) Square root: sqrt(A) Trigonometric function: acos(A), asin(A) , atan(A), atan2(A,B), cos(A), sin(A), tan(A) The EasyEXPERT software provides the built-in functions to calculate the display data and parameter and to get the test result data.
Page 98 To Use Built-in Functions User function setup example gm = diff(Id,Vg) VG=getVectorData(Vg) gmMax = max(gm) ID=getVectorData(Id) GM=getVectorData(gm) VTH=getNumericData(Vth) GM_MAX=getVectorData(gmMax) This is an user function setup example. This example uses the diff function to calculate gm values and the max function to get the maximum gm value. Also, the getVectorData and getNumericData functions are used in the test execution flow to get the test result data.
Page 99 To Use Read Out Functions Marker index value: X coordinate value: @MX, @CX Y coordinate value: @MY, @MYn, @CY, @CYn Regression line parameter: @L1CO, @L2CO Line slope: @L1G, @L1Gn, @L2G. @L2Gn Line X intercept: @L1X, @L2X Line Y intercept: @L1Y, @L1Yn, @L2Y, @L2Yn Intersection of lines: @IX, @IY, @IYn n: integer.
Page 100 To Use Read Out Functions Analysis function setup example Vth = @L1X This is an analysis function setup example. This example uses the @L1X function to get the X intercept value of the line 1. 4-21...
Page 101 To Use Auto Analysis Function Analysis: Auto Analysis • Line 1 • Line 2 • Marker GM=GM_MAX The Auto Analysis statement provides the setup editor used to set up the automatic analysis function. When a measurement finishes, the function automatically draws lines, a marker, or both on the X-Y Graph of the Data Display window.
Page 102 To Use Auto Analysis Function Interpolation Line 1 setup Line 2 setup Marker setup The auto analysis capability allows you to display/move the marker/line on the data graph automatically after measurement. The above example is the Vth gmMax test definition. To add the auto analysis operation to your test definition, open your test definition and do the procedure shown above (1 to 5).
Page 103 To Use Auto Analysis Function Interpolation Line 1 setup Line 2 setup Marker setup Marker This area sets the marker automatically displayed and moved to the specified position after the measurement. Check Enable box to enable the marker. For Condition, enter a variable name and a condition expression to specify where you want the marker to display.
Page 104 To Use Auto Analysis Function User Function Analysis Function In the Vth gmMax test definition, the user functions and analysis functions are defined to use the auto analysis function. See the previous slide. The analysis function enables the line 1 for the Y1 data and displays the tangent line at the X-coordinate that takes the maximum gm value.
Page 105: To Add Data Display
To Add Data Display Analysis: Display Data Setup Measurement, data display, and data save Data display The test setup performs measurement and displays the test result as defined in the channel setup, measurement setup, and display setup. And the test result data will be stored to the test record.
Page 106 To Add Data Display Additional data display example This is a test result example displayed on the Data Display window. 4-27...
Page 107 To Control Test Result Data Outputs Analysis: Data Display Control Data Display: OFF/ON Miscellaneous: Data Store Control Data Store: OFF/ON By the default setting, the results of the tests defined in your test definition are displayed on the Data Display window and are stored to the data record. You can control the data display of the tests by using the Data Display Control statement.
Page 108 Module 5. Using Classic Test Environment...
Page 109 Classic Test Execution Mode • I/V Sweep • I/V-t Sampling • C-V Sweep • Switching Matrix Control To use the classic test mode, click the Classic Test tab. And select the execution mode. The following modes are available. •I/V Sweep: For X-Y characteristics measurement of I or V. •I/V-t Sampling: For time-Y characteristics measurement of I or V.
Page 110 I/V Sweep Measurement • To Define Source/Measurement Channels • To Read Time Stamp Data and Data Index • To Set Source Outputs (VAR1, VAR2, VAR1’, Pulse, CONST) • To Set Timing Parameters • To Set Sweep Abort Function • Range, ADC/Integ, Advanced •...
Page 111 To Define Source/Measurement Channels Channel Setup Setup Name SMU1 Channel Definition SMU2 -SMU -V name/I name SMU4 -I/V/IPULSE/VPULSE/COMMON -VAR1/VAR2/VAR1’/CONST SMU3 Click the I/V Sweep icon and open the setup editor. Then click the Channel Definition tab to display the channel definition screen. •Enter the Setup Name for the test setup to be defined on the setup editor.
Page 112 To Read Time Stamp Data and Data Index Channel Setup Variable name for time stamp data Variable name for data index You can read measurement data by using the Data Display window. Parameters displayed on the window are selected on the Display Setup tab screen. If you enter the variable name in the V Name, I Name, Time Stamp Name, and/or Index Name entry fields, you can choose the variables as the display parameters.
Page 113 To Set Primary Sweep Source Measurement Setup VAR1 Stop Step Start The Measurement Setup tab screen is used to set the source output value and timing parameters. At the VAR1 area, you set the primary sweep source output. •Unit: SMU name or number •Name: Variable name of source output •Direction: Single (start to stop) or Double (start to stop to start) •Linear/Log: Linear sweep or Log sweep...
Page 114 To Set Secondary Sweep Source Measurement Setup VAR1 VAR2 At the VAR2 area, you set the secondary sweep source output. •Unit: SMU name or number •Name: Variable name of source output •Start: Source output start value •Stop: Source output stop value •Step: Source output incremental step value •No of Step: Number of sweep steps •Compliance: SMU compliance value...
Page 115 To Set Synchronous Sweep Source Measurement Setup VAR1 VAR1’ At the VAR1’ area, you set the synchronous sweep source output. •Unit: SMU name or number •Name: Variable name of source output •Offset: B value of the above formula. •Ratio: A value of the above formula. •Compliance: SMU compliance value •Pwr Comp: SMU power compliance value The VAR1’...
Page 116: To Set Pulse Output
To Set Pulse Output Measurement Setup Trigger Width Width Base Period Hold time Delay time cannot be set. At the SMU Pulse area, you set the SMU pulse timing parameter and the pulse base value. •Unit: SMU name or number •Period: Pulse period •Width: Pulse width •Base: Pulse base value...
Page 117 To Set Constant Output Measurement Setup At the Constants area, you set the SMU constant output. •Unit: SMU name or number •V Name: Variable name for the voltage measurement or source data •I Name: Variable name for the current measurement or source data •Mode: Source output mode, V (voltage), I (current), VPULSE (voltage pulse), IPULSE (current pulse), or COMMON (ground) •Source: SMU output value...
Page 118 To Set Timing Parameters Measurement Setup Trigger Measurement time Delay time Hold time At the Timing area, you set the source output and measurement timing. •Hold: Source output hold time. Time after the measurement trigger until starting delay time. •Delay: Measurement start delay time. Time after the hold time until starting measurement. When a SMU forces pulse, the delay time is ignored.
Page 119 To Set Sweep Abort Function Measurement Setup CONTINUE AT ANY STOP AT ANY ABNORMAL -Range overflow -SMU compliance -SMU oscillation This field sets the sweep abort function. When this field is CONTINUE AT ANY, the sweep measurement is not aborted. When this field is STOP AT ANY ABNORMAL, the sweep measurement will be aborted when one of the following conditions is detected.
Page 120 To Set Ranging Mode Measurement Setup Not available when a pulse source is used The Range button opens the SMU Range Setup dialog box. The dialog box is used to set the measurement ranging mode. This button is not available when a pulse source is used. •Unit: SMU name or number •Name: Variable name for the measurement data •Mode: Ranging mode, AUTO, LIMITED, or FIXED...
Page 121 To Set ADC/Integration Time Measurement Setup Not available when a pulse source is used The ADC/Integ button opens the A/D Converter & Integration Time Setup dialog box. The dialog box is used to select the ADC for each SMU and set the integration time for each ADC (high This button is not available when a pulse source is used.
Page 122: Advanced Setup
Advanced Setup Measurement Setup The Advanced button opens the Advanced Setup dialog box. The dialog box is used to set the SMU filter and SMU series resistor settings, and set the wait time. Channel Settings: •Unit: SMU name or number •V Name: Variable name for the voltage measurement or source data •I Name: Variable name for the current measurement or source data •Series R: SMU series resistor NONE or 1MOHM (1000000 ohm)
Page 123 To Set Analysis Functions Function Setup Data calculation -Measurement data/source data -Built-in function, etc. Click the Function Setup tab to display the User Function/Analysis Function setup screen. The user functions can be displayed on the X-Y Graph Plot, List Display, and Parameters area of the Data Display window.
Page 124 To Set Analysis Functions Function Setup Data calculation -Measurement data/source data -Read out function -Built-in function, etc. The analysis functions can be displayed on the Parameters area of the Data Display window. Up to 20 functions can be set. Name: Function name Unit: Unit of the function Definition: Definition of the function.
Page 125 To Set Auto Analysis Function Auto Analysis Setup Interpolation Line 1 setup Line 2 setup Marker setup Click the Auto Analysis Setup tab to display the auto analysis setup screen. The auto analysis capability allows you to display/move the marker/line on the data graph automatically after measurement.
Page 126 To Set X-Y Graph Display Display Setup Specify X axis and Y axis Click the Display Setup tab to display the display setup screen. The X-Y Graph area is used to set the X axis and Y axis of the X-Y Graph Plot area in the Data Display window. •Name: Name of variable to plot on the X axis •Scale: Linear or Log •Min: Minimum value of the specified axis...
Page 127 To Set Data List Display Display Setup Select variables to list The List Display area selects the variables to be listed in the List Display area of the Data Display window. Up to 20 variables can be set. 5-20...
Page 128 To Set Parameters to Display Display Setup Select parameters to display The Parameters area selects the variables to be listed in the Parameters area of the Data Display window. Up to 20 parameters can be set. 5-21...
Page 129 To Save Test Setup My Favorite Setup button Preset Group name. Use this field to select preset group. The test setups you create MUST be saved to the internal hard disk drive as “My Favorite Setup”. To save the setup, click the Save button. To recall the setup, click the Recall button.
Page 130 To Export/Import Your Preset Group My Favorite Setup button You can export/import your preset group. To export the present preset group, click the My Favorite Setup button, select Export, and specify the folder and the name of the preset group to export. To import the preset group, click the My Favorite Setup button, select Import, and specify the preset group to import.
Page 131 Exercise 7 Define test setup and perform test. 1. Click I/V Sweep icon and open setup editor. 2. Define test setup as shown in page 5-4 to 5-21. 3. Save it as Trng Id-Vd. 4. Connect device, and perform test. SMU1 5.
Page 132 Measurement Result Example This is a test result example displayed on the Data Display window. 5-25...
Page 133: I/V-T Sampling Measurement
I/V-t Sampling Measurement • To Define Channels and Variables • To Set Sampling Parameters • To Set SMU Outputs (CONST) • To Set Ranging Mode • To Set User Functions/ Analysis Functions • To Set Data Display This section explains how to perform I/V-t sampling measurement. You will perform the above tasks to execute the I/V-t sampling measurement.
Page 134 To Define Channels and Variables Channel Setup Setup Name Channel Definition -SMU SMU5 -V name/I name -I/V/COMMON -CONST Variable name for time stamp data Variable name for data index GNDU Click the I/V-t Sampling icon and open the setup editor. Then click the Channel Definition tab to display the channel definition screen.
Page 135 For example, LOG10 mode is used to get 10 data/decade. For the log sampling, the B1500A holds only the data that can be plotted on the log scale in the same distance as close as possible. Only the held data is counted in the number of measurement result data.
Page 136 To Set Sampling Parameters Measurement Setup Trigger Sampling parameter Measurement time Sampling interval Hold time No of Samples: Number of samples. Integer. 1 to the following value. For linear: 100001 / (number of measurement channels) For logarithmic: 1 + (number of data for 11 decades) Total Sampling Time: This field just displays the total sampling time that is the time from the measurement start time for the first point to the end of sampling measurement.
Page 137 To Set SMU Outputs (CONST) Measurement Setup SMU constant output setup At the Constants area, you set the SMU constant output. •Unit: SMU name or number •V Name: Variable name for the voltage measurement or source data •I Name: Variable name for the current measurement or source data •Mode: Source output mode, V (voltage), I (current), or COMMON (ground) •Base and Source: SMU output value •Compliance: SMU compliance value...
Page 138 To Set Ranging Mode Measurement Setup Fixed range mode The Range button opens the SMU Range Setup dialog box. For details of the dialog box, see page 5-13. If the range changing occurs during measurement, the SMU may not complete measurement within the sampling interval.
Page 139 To Set User Functions/Analysis Functions Function Setup Data calculation -Measurement data/source data -Built-in function, etc. Data calculation -Measurement data/source data -Read out function -Built-in function, etc. Click the Function Setup tab to display the User Function/Analysis Function setup screen. The user functions can be displayed on the X-Y Graph Plot, List Display, and Parameters area of the Data Display window.
Page 140 To Set Data Display Display Setup Select variables to list Specify X axis and Y axis Select parameters to display Click the Display Setup tab to display the display setup screen. The X-Y Graph area is used to set the X axis and Y axis of the X-Y Graph Plot area in the Data Display window. •Name: Name of variable to plot on the X axis •Scale: Linear or Log •Min: Minimum value of the specified axis...
Page 141 Exercise 8 Define test setup and perform test. 1. Click I/V-t Sampling icon and open setup editor. 2. Define test setup as shown in page 5-27 to 5-32. 3. Save it as Trng Sampling. 4. Connect device (capacitance), and perform test. SMU5 5.
Page 142 Measurement Result Example This is a test result example displayed on the Data Display window. 5-35...
Page 143: C-V Sweep Measurement
C-V Sweep Measurement • To Define Channels and Variables • To Set Sweep Source • To Set Signal Source • To Set Measurement Timing and Abort Function • To Set SMU Outputs (CONST) • To Set User Functions/ Analysis Functions •...
Page 144 To Define Channels and Variables Channel Setup Setup Name SMU1 Channel Definition -CMU/SMU -V name/I name -I/V/COMMON SMU3 Variable name for data index Variable name for time stamp data Click the C-V Sweep icon and open the setup editor. Then click the Channel Definition tab to display the channel definition screen.
Page 145 To Set Sweep Source Measurement Setup CV sweep Stop Step Start The Measurement Setup tab screen is used to set the source output and timing parameters. At the C-V area, you set the DC bias output of the MFCMU. •V Name: Variable name of the MFCMU output •Model: MFCMU measurement mode.
Page 146 To Set Signal Source Measurement Setup At the Signal Source area, you set the MFCMU output frequency and oscillator level. •Frequency List: MFCMU output frequency •F Name: Variable name of MFCMU output frequency •AC Level: MFCMU oscillator level, 10 mV to 250 mV, 1 mV resolution 5-39...
Page 147 To Set Meas. Timing and Abort Function Measurement Setup Sweep abort function Integration time (AUTO or PLC) CONTINUE AT ANY STOP AT ANY ABNORMAL -Range overflow -MFCMU error -SMU compliance -SMU oscillation Trigger Measurement time Timing parameters Delay time Hold time At the Integration Time area, you set the integration time of the impedance measurement by the MFCMU.
Page 148 To Set SMU Outputs (CONST) Measurement Setup SMU output setup At the Constants area, you set the SMU constant output. •Unit: SMU name or number •V Name: Variable name for the voltage measurement or source data •I Name: Variable name for the current measurement or source data •Mode: Source output mode, V (voltage), I (current), or COMMON (ground) •Source: SMU output value •Compliance: SMU compliance value...
Page 149 To Set User Functions/Analysis Functions Function Setup Data calculation -Measurement data/source data -Built-in function, etc. Data calculation -Measurement data/source data -Read out function -Built-in function, etc. Click the Function Setup tab to display the User Function/Analysis Function setup screen. The user functions can be displayed on the X-Y Graph Plot, List Display, and Parameters area of the Data Display window.
Page 150 To Set Data Display Display Setup Select variables to list Specify X axis and Y axis Select parameters to display Click the Display Setup tab to display the display setup screen. The X-Y Graph area is used to set the X axis and Y axis of the X-Y Graph Plot area in the Data Display window. •Name: Name of variable to plot on the X axis •Scale: Linear or Log •Min: Minimum value of the specified axis...
Page 151 To Perform Compensation and Correction Calibration button Advanced Options… Calibration The MFCMU is equipped with the error correction function used to realize accurate impedance measurements. The correction function minimizes the effects of the error elements in the extension cables and the DUT interface such as manipulator and probe card. •Phase compensation: Corrects phase error caused by extending measurement cables.
Page 152 Exercise 9 Define test setup and perform test. 1. Click C-V Sweep icon and open setup editor. 2. Define test setup as shown in page 5-36 to 5-42. And save it as Trng CV. 3. Open measurement terminals, and perform phase compensation and open correction.
Page 153 Measurement Result Example This is a test result example displayed on the Data Display window. 5-46...
Page 154 Switching Matrix Control • To Define Switch Setup This section explains how to define the switch setup for B2200 Switching Matrix. 5-47...
Page 155 -Open Input To specify Input Port This setup screen is used to create the relay control setup (switch setup) for Agilent B2200A/B2201A Switching Matrix. To send the switch setup to B2200, click the Single button. Before doing this, you have to establish the GPIB connection to B2200 by using the Switching Matrix tab screen of the Configuration window.
Page 156 Operation and number of Outputs Operation Description Number of Outputs Open All Opens all relays. Switch Setup Makes the connection from the specified input port to the specified output channels. Up to four output channels can be specified at once. Close Range Makes the connection from the specified input port to the specified output channels.
Page 157 Exercise 10 Define switch setup and send it to B2200. 1. Click Switching Matrix Control icon and open setup editor. 2. Define switch setup as you want. And save it as Trng Switch. 3. If B2200 is available, establish the GPIB connection between B1500 and B2200, and apply your switch setup.
Page 158 Module 6. Creating Your Test Definitions...
Page 159 In This Module • What is Test Definition • What is Test Contents • To Open Test Definition Editor • To Define Test Specification • To Define Test Contents • To Save and Close Your Test Definition • To Export/Import Test Definition •...
Page 160: What Is Test Definition
What is Test Definition Test Specification Test Output •Variables •Test name •Analysis parameters •Test description •Test result display •Variables •X-Y graph •Device parameters •Data list •Test parameters •Parameter display •Entry fields •Local variables •Test execution flow •Test setup •Classic test Test Contents •Application test •My Favorite setup...
Page 161: What Is Test Contents
What is Test Contents Test Output Test Specification Variables Variables •Device parameters •Analysis parameters •Test parameters Analysis Local variables Miscellaneous Program Component Classic Test My Favorite Application Test Test contents are the test execution flow (program flow), and is the core of the test definition. In the test contents, the following elements can be defined.
Page 162 To Open Test Definition Editor Define New Test… To start test definition, open the test definition editor. Select the Application Test tab, click the Library button, and select the Define New Test… function. The test definition editor will be opened. See next slide.
Page 163: To Define Test Specification
To Define Test Specification Set test information Set properties of parameter Define device parameters The test definition editor provides three tabs, Test Specification, Test Contents, and Test Output. At first define the test specification. Click the Test Specification tab. In the Test Information area: •Click the right button in the Category field to specify the category the new test definition belongs.
Page 164 To Define Test Specification Set properties of parameter Define test parameters In the Test Parameters Definition area: •Select the Background that will be displayed on the application test setup area of the main screen. Usually it is the image that shows the device connections. •Set the Name, data type, Default value, and Description for the parameter.
Page 165: Setup Example
Setup example Test Specification This example sets: Category: TRNG (newly created) Test Name: Trng idvd idvg Icon: IdVg.bmp Device parameters: Hold and Delay Background: Vth_gmmax.PNG Test parameters: Drain, Gate, Source, Subs IdVd_Vdstart, IdVd_Vdstop, IdVd_step, IdVd_Vgstart, IdVd_Vg_nop, IdVd_Vgstep IdVg_Vdout, IdVg_Vgstart, IdVg_Vgstop, IdVg_Vgstep Vsub, Vs, Icomp, Igcomp Entry field properties: 80 (width) x 30 (distance in vertical direction)
Page 166 Result example Parameter entry fields This is a result example of the test specification setup shown in the previous slide.
Page 167: To Define Test Contents
To Define Test Contents Select available element Click available button Specify the line to insert element Define the setup necessary or edit for the highlighted element Define the test contents as shown below: •Click the Test Contents tab. •Click the Local Variable Definition line to highlight the line. The right open space displays the Local Variables Definition statement setup editor.
Page 168: Available Elements
Available elements Program Component Application Test Analysis Classic Test Miscellaneous My Favorite Available elements are shown above. The Program Component provides the typical program statements such as IF, LOOP, FOR, and so on. They are used to control the test execution flow. The Application Test, Classic Test, and My Favorite are used to define the test setup/test condition.
Page 169 Defining Local Variables Local Variables Definition Add Numeric Variable button displays the Numeric Variable area that provides the following fields. •Name: Numeric variable name •Value: Initial value of the variable •Description: Additional information for the variable Add Vector Variable button displays the Vector Variable area that provides the following fields. •Name: Vector variable name.
Page 170 Editing test contents •Block Selection •Insert •Delete •Copy •Cut •Paste The Edit tab provides the following buttons: •Block Selection/Line Selection toggle button selects the edit target selection mode. In the line selection mode, clicking line just selects the line. In the block selection mode, clicking line selects the block the line belongs.
Page 171 Debugging test contents •Run •Abort •Stop •Break •Inspect The Debug tab menu provides the following buttons: •Run button starts the debug (executes the test flow). During execution, the label changes to Pause. Clicking Pause button pauses the execution, and changes the label to Run that is used to continue the debug (execution).
Page 172 Monitoring Variable Values Debug: Inspect button Break point Paused point The Variable Inspector is displayed by clicking the Inspect button after the program is paused, and is used to monitor or change the value of the device parameters, test parameters, analysis parameters, local variables, or system variables.
Page 173: Available Variables
Available variables Assign to external variables… Test Contents •Local variables Test Specification •Device parameters •Test parameters Test Output You can connect the •Analysis parameters variables in test setup with •Local variables •Device parameters Do not set the same name for •Test parameters variables and parameters.
Page 174 To Save and Close Your Test Definition Close Test Definition editor, and save your test definition Save Ctrl+S Close Test Definition editor After you create your test definition, save the definition and close the Test Definition editor. Select File/Close menu. Confirm Test Definition Save dialog box is opened. Click Yes to save your test definition and continue the close operation.
Page 175 To Export/Import Test Definition Click Library/Export Test Definition or Import Test Definition Cancel Define New Test… Open Definition of This Test… Delete Definition of This Test Import Test Definition… Export Test Definition… The test definition can be exported as the EasyEXPERT test definition file format or XML file format.
Page 176 Exercise 11 Define test definition and perform test. 1. Open test definition editor. 2. See setup examples and define your test definition. 3. Save the definition as Trng idvd idvg. SMU1 4. Connect device, and perform test. SMU2 SMU4 5. Export your test definition, and import it. SMU3 Time to complete: 10 minutes.
Page 177 Measurement Result Example This is a test result example displayed on the Data Display window. 6-20...
Page 178 If You Define Application Test Output • Defining Test Output Step 1. To define analysis parameters Step 2. To set display parameters • Reading test setup internal parameters Case 1. To use External Variables Setup dialog box Case 2. To use built-in functions If you want to get the output of the application definition, define analysis parameters and set display parameters in the Test Output tab screen.
Page 179 Defining Test Output 1. Define analysis parameters. 2. Set display parameters. Opens Analysis Parameter Definition window (see next slide). Specify X axis and Y axis Select parameters Select variables to list to display The test output setup is optional. If you need the test result output (test result display and record) for this application test, declare the variables (analysis parameters) and define the display setup.
Page 180 Step 1. To define analysis parameters Define Analysis Parameters… Declare the analysis parameters as shown below: At the Vector Parameters area or the Scalar Parameters area: •Click the Add button. •Enter the Name, Unit, and Description of the parameter. For the sweep output/measurement data, use the vector parameter. For the spot output/measurement data, use the scalar parameter.
Page 181: Step 2. To Set Display Parameters
Step 2. To set display parameters This example sets: X-Y Graph: ID-VG plot for Y1-X graph and GM-VG plot for Y2-X graph List Display: VG, ID, and GM Parameters: GM_MAX and VTH All parameters must be declared by using the Analysis Parameter Definition window shown in the previous slide or displayed on the last data display.
Page 182 Reading test setup internal parameters Case 1. To use External Variable Setup dialog box From Classic Test, Display Setup screen Assign to external variables… Assign to external variables… Internal variable •Local variable •Device parameter •Test parameter •Analysis parameter External Variable Setup From Application Test setup To read the value of variables used in an Application Test setup or a Classic Test setup, make a mapping table between the test setup internal variables and the external variables which mean...
Page 183: Setup Example
Setup example Assign to external variables… This example makes the mapping table between the test setup internal parameters and the analysis parameters. •Define VTH, GM_MAX, VG, ID, and GM as the analysis parameters. •Set these analysis parameters to the display parameters. •Open the External Variable Setup dialog box.
Page 184 Result example Data Display window This is a result example of the test output setup shown in the previous pages. 6-27...
Page 185 Reading test setup internal parameters Case 2. To use built-in functions Display parameters of Local Variables Definition the last Data Display window BLOCK IdVg Test setup VG = getVectorData(“Vg”) ID = getVectorData(“Id”) GM = getVectorData(“gm”) GM_MAX = getVectorData(“gmMax”) Vg, Id, gm, gmMax, and Vth must be the display parameters VTH = getNumericData(“Vth”) of IdVg.
Page 186 Setup example Test Contents This example sets the following test flow: Local Variables Definition ! Defiles Yes variable BLOCK Message ! Do you perform Id-Vg measurement? IF Yes=1 IdVg ! Classic test setup for Id-Vg measurement VG=getVectorData(“Vg”) ID=getVectorData(“Id”) GM=getVectorData(“gm”) GM_MAX=getVectorData(“gmMax”) VTH=getNumericData(“Vth”) END IF Message ! Do you perform Id-Vd measurement?
Page 187 Result example Data Display window This is a result example of the test output setup shown in the previous pages. 6-30...
Page 188 Module 7. Advanced Definitions and Operations...
Page 189 In This Module • To Control External GPIB Devices • To Call Execution Files • To Perform Repeat Measurements • Prober Control Script...
Page 190: To Control External Gpib Devices
To Control External GPIB Devices Miscellaneous: GPIB I/O Write String to send a string command to GPIB device Write Value to send a command to GPIB device Read String to read a string value from GPIB device Read Value to read a numeric value data from GPIB device Read List to read a vector data from GPIB device Read STB...
Page 191 This slide shows an example setup of the GPIB I/O statement. This is a component of the test contents used to control the Agilent B2200 switching matrix. This example uses the Write Value function to send the following command to the B2200.
Page 192 To Control External GPIB Devices Agilent B2200 control example To read data Programming image: *RST :ROUT:FUNC ACON (enters “SMU1” to StringPort) :ROUT:SYMB:PORT {0},”{1}” :ROUT:SYMB:PORT? {0} (reads string data) *OPC? (reads operation complete flag) (enters “OUT1” to StringCh) :ROUT:SYMB:CHAN {0},{2},”{1}” :ROUT:SYMB:CHAN? {0},{2}...
Page 193: To Call Execution Files
The above example calls the sleep.exe file used to insert the wait time for program execution. The WAIT value must be defined in msec. After the normal command execution, the sleep.exe returns 1 for Value and 0 for Result. The sleep.exe file is stored in the following folder. C:\Program Files\Agilent\B1500A\EasyEXPERT\Utilities...
Page 194 F or f: Fixed point G or g: General N or n: Numeric P or p: Percent R or r: Round trip X or x: Hexadecimal numeral For the format, see online help or manual of the Agilent T&M Programmers Toolkit.
Page 195 Exercise 12 Try to improve your test definition as you want. • To Use Built-in Functions • To Use Read Out Functions • To Control External GPIB Devices • To Call Execution Files Note:...
Page 196: To Perform Repeat Measurements
To Perform Repeat Measurements Start (Run) Count=0 Start Procedure status= 0 ? C:\Program Files\Agilent\B1500\EasyEXPERT\Utilities Count < limit C:\Program Files\Agilent\B1500\EasyEXPERT\Utilities Test Execution C:\Program Files\Agilent\B1500\EasyEXPERT\Utilities Count=Count+1 Iteration Procedure status= 0 ? Abort Final Procedure If Abort is clicked status limit Repeat measurement is performed as shown in this flowchart. The status is a response returned by the start/iteration procedure.
Page 197 Subsite move Test Setup Save Specify ProberType. Or specify driver for your prober in CustomProber. Select If you do not use the sub die (subsite) move operation, skip this page. Click Application Test tab and open the Subsite move test setup in the Utility category. On the Subsite move setup screen, specify ProberType (Cascade, Suss, or Vector) or driver for your prober in CustomerProber, and save it as a setup in your preset group (My Favorite Setup).
Page 198 To Use Subsite move C:\Program Files\Agilent\B1500\EasyEXPERT\Utilities C:\Program Files\Agilent\B1500\EasyEXPERT\Utilities C:\Program Files\Agilent\B1500\EasyEXPERT\Utilities If you do not use the sub die (subsite) move operation, skip this page. To perform the test with the sub die move operation, do as follows. 1. Add the Subsite move test setup to your preset group (My Favorite setup).
Page 199: Prober Control Script
• suss • vector Prober control script is sample program used for semi-automatic prober control. The Agilent EasyEXPERT can call the script by using the Repeat Measurement Setup window. See page 7-9 to call the script and perform repeat measurement.
Page 200 Start_xxxx.exe Start • Arguments: -a GPIB_address Displays Device ID Entry dialog box -l log_file_name Example: Updates prober_info.ini file –a GPIB0::5::INSTR –l C:\temp\prb.log Displays Start Confirmation dialog box • Response: XML format data Moves to the first position <Response> Prober error? <Break>status</Break>...
Page 201 Prober_info.ini [Prober] Address=GPIB::5::INSTR GPIB address of prober LogMode=True LogName=C:\temp\prb.log Full path name of log file [Target] device_id = prefix:coordinate UseID=True SubsiteInfo=False WaferInfo=False <Response> ID=waf1a <Break>0</Break> <Target>waf1a:4 1</Target> </Response> Prefix you enter in the Device ID Entry dialog box. ID is automatically recorded in the prober_info.ini file. The Device ID Entry dialog box is opened by Start_xxxx.exe.
Page 202 Iterator_xxxx.exe Start • Arguments: -a GPIB_address Chuck down -l log_file_name Example: Prober error? –a GPIB0::5::INSTR –l C:\temp\prb.log • Response: XML format data Moves to the next position <Response> Prober error? <Break>status</Break> <Target>device_id</Target> Gets X-Y coordinate </Response> status: 0 (no error) or 1 Prober error? device_id: prefix:coordinate...
Page 203 -l log_file_name Example: –a GPIB0::5::INSTR –l C:\temp\prb.log • Response: none Start C:\Program Files\Agilent\B1500\EasyEXPERT\Utilities Chuck down C:\Program Files\Agilent\B1500\EasyEXPERT\Utilities C:\Program Files\Agilent\B1500\EasyEXPERT\Utilities Stop condition To specify the final procedure on the Repeat Measurement Setup dialog box, enter the full path name of Final_xxxx.exe into the Final Procedure field.
Page 204 Subsite_xxxx.exe Start • Arguments: -a GPIB_address Chuck down -l log_file_name Example: Prober error? –a GPIB0::5::INSTR –l C:\temp\prb.log • Response: XML format data Moves to the next subsite <Response> Prober error? <Break>status</Break> <Target>device_id</Target> Gets X-Y coordinate </Response> status: 0 (no error) or 1 device_id: prefix:coordinate Chuck up...
Page 205 To Change Execution Flow Test Execution Subsite Procedure status= 0 ? Move to the 1 subsite If you use the subsite procedure, change the flowchart as follows. On the page 7-9, replace the box A with the block A shown above. On the page 7-13 and 7-15, insert the box B shown above to the position B of the flowchart.
Page 206 Module 8. Miscellaneous Operations...
Page 207 In This Module • Function Status Indicator • Automatic Data Export and Data Record • Calibration • Configuration • XSLT Samples • To Enable System Controller • To Start Desktop EasyEXPERT • To Use Setup File Converter This module describes the above topics. You will understand what is the status indicator, what is the automatic data export function and the automatic data record function, how to perform selftest and calibration, how to perform SMU zero offset cancel, and so on.
Page 208: Function Status Indicator
Function Status Indicator Automatic data record ON Automatic data export OFF SMU zero offset cancel OFF Status indicator lets you know the status OFF or ON of the following functions. The indicators are placed at the bottom of the main screen. SMU Zero OFF/ON: Shows the status of the SMU zero offset cancel function OFF or ON.
Page 209: Automatic Data Export And Data Record
Automatic Data Export and Data Record The automatic data export function and the automatic data record function can be enabled or disabled by using the Test Results Data Auto Export dialog box. This dialog box is displayed by selecting the Results > Transport Data > Auto Export Setting… menu. The automatic data export function is used to export the test result data to the storage device you specify.
Page 210: Smu Calibration
SMU Calibration Calibration The Calibration window is opened by clicking the Calibration button. The SMU calibration screen of this window is used to perform the calibration of SMUs. The list area of this screen lists Name, Full Range, and Status. Name: Name of module.
Page 211 SMU Zero Cancel Calibration The SMU Zero Cancel screen is used to perform the SMU zero offset current measurement and set the SMU zero offset cancel function. This function subtracts the offset current from the current measurement raw data, and returns the result as the measurement data.
Page 212: Cmu Calibration
CMU Calibration Calibration The CMU Calibration screen is used to perform the measurement data correction of the multi frequency capacitance measurement unit (MFCMU). For the easy way, perform the phase compensation and the open correction at least. The check boxes left of the Open/Short/Load Correction and the Phase Compensation are effective after the corresponding measurement is performed.
Page 213 Advanced Options for CMU Calibration Calibration This dialog box is opened by clicking the Advanced Options... button, and is used to set the information required to measure the open/short/load correction data and the phase compensation data. This dialog box provides the following action button. OK: Applies the setup changes and closes this dialog box.
Page 214 Advanced Options for CMU Calibration Calibration Integration Time area defines the integration time used for measuring phase compensation data or open/short/load correction data. The number of averaging samples (Mode=AUTO) or the averaging time (Mode=PLC) is set. Mode: A/D converter operation mode, AUTO or PLC. Factor: Factor for the initial value.
Page 215 Advanced Options for CMU Calibration Calibration Reference Standard Values area provides the following entry fields used to set the reference values of the open/short/load standard. If you use the standard, enter the reference values to the entry fields. OPEN Reference: Capacitance and Conductance. If you do not use the reference, enter 0 in the both fields.
Page 216: Main Frame
The Main Frame screen is used to display the system information and perform diagnostics. Model Identification: Displays the instrument ID. B1500A. Line Frequency: Sets the power line frequency, 50 Hz or 60 Hz.
Page 217 Configuration Modules The Modules screen is used to perform self-test of modules. Slot: Slot number where the module is installed. To select, check the left check box. Module Type: Module model number Name: Module name Status: Self-test status, Passed, Failed, Recovered, or ---- (self-test has not been performed) SCUU: Specifies if the module is connected to the SCUU.
Page 218: Switching Matrix
Configuration Switching Matrix The Switching Matrix screen is used to establish the GPIB connection with Agilent B2200A/B2201A switching matrix and define the B2200A/B2201A input port connections. Switching Matrix Type: Displays the type of the switching matrix. B2200A Femto Leakage Switch Mainframe, B2201A 14ch Low Leakage Switch Mainframe, or No Switching Matrix.
Page 219: Extended Configuration
• Select: Select this radio button to perform the capacitance compensation for the path from the B2200A/B2201A input ports to Agilent 16495F/G connector plate or Agilent B2220A probe card interface. The data after compensation is displayed and saved. DUT I/F field is used to specify the model number of the path you use. The selections are the 16495F/G and B2220A.
Page 220: Event Log
Configuration Event Log The Event Log screen displays the event log. Date/Time: Displays date and time of the event. Message: Event message ID: Process ID of the event Process: Process name User: User name. Windows login name. Host: Host name of the B1500 The Refresh button refreshes the event log.
Page 221 Configuration The ASU screen is available if the B1500A installs the HRSMU connected to the ASU (Atto Sense/Switch Unit), and shows the ASU information. Slot: Slot number Module Type: Type of module Name: Module name or SMU name ASU Serial Number: Serial number of the ASU connected to the HRSMU. This cell does not show the serial number if no ASU is connected or unpaired ASU is connected.
Page 222 The XSLT sample files are stored in the following folder. The files can be used as a XML style sheet file for exporting test data record. C:\Program Files\Agilent\B1500A\EasyEXPERT\Utilities\XSLT csv.xsl: This file can be used to export test record in the format that uses a comma (,) as data separator.
Page 223: To Enable System Controller
To Enable System Controller Agilent IO Library Connection Expert To control external GPIB devices, the B1500A must be set to system controller. Exit the EasyEXPERT, and close the Start EasyEXPERT window. After that, launch the Agilent Connection Expert by clicking Start, All Programs, Agilent IO Library Suite, and Agilent connection Expert.
Page 224: To Start Desktop Easyexpert
To open the Start EasyEXPERT window, click Start > Programs > Start EasyEXPERT menu. The Option menu provides the functions used to open the following dialog box. Gpib Configuration: Select Online if the B1500A is connected to your computer and you want to control the B1500A via GPIB. Or select Offline. EasyEXPERT Database: Specify the EasyEXPERT Database path if you want to move the database to the other folder.
Page 225 To convert the 4155/4156 setup file (.MES file) to the EasyEXPERT setup file (.XTS file), use SetupFileConverter.exe, and perform the following procedure. The SetupFileConverter.exe file is stored in the following folder. C:\Program Files\Agilent\B1500A\EasyEXPERT\Utilities 1.Create your working folder (for example, C:\415xdata). 2.Copy your .MES files to this folder.

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