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Table of Contents
Related Manuals for Agilent Technologies FRG700KF25
Summary of Contents for Agilent Technologies FRG700KF25
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Page 3: Table Of Contents
Contents Product Identification Validity Intended Use Functional Principle 1 Safety 1.1 Symbols Used 1.2 Personnel Qualifications 1.3 General Safety Instructions 1.4 Liability and Warranty 2 Technical Data 3 Installation 3.1 Vacuum Connection 3.1.1 Removing the Magnet Unit (Only for Gauges With CF Flanges) 3.2 Electrical Connection 3.2.1 Use With an Agilent Controller 3.2.2 Use With Another Control Device... -
Page 5: Product Identification
The part number (PN) can be taken from the product nameplate. If not indicated otherwise in the legends, the illustrations in this document corres- pond to the product with part number FRG700KF25. They apply to the other products by analogy. -
Page 6: Safety
Inverted Magnetron Pirani Gauge FRG-700 FRG-702 1 Safety 1.1 Symbols Used DANGER Information on preventing any kind of physical injury. WARNING Information on preventing extensive equipment and environmental damage. Caution Information on correct handling or use. Disregard can lead to malfunctions or minor equipment damage. -
Page 7: Liability And Warranty
Inverted Magnetron Pirani Gauge FRG-700 FRG-702 1.4 Liability and Warranty Agilent assumes no liability and the warranty becomes null and void if the end-user or third parties disregard the information in this document use the product in a non-conforming manner ... -
Page 8: Technical Data
Inverted Magnetron Pirani Gauge FRG-700 FRG-702 2 Technical Data … 1000 mbar Measuring range (air, N 5×10 ±30% Accuracy (N … 100 mbar in the range 1×10 ±5% Reproducibility … 100 mbar in the range 1×10 Appendix B Gas type dependence Output signal (measuring signal) 0 …... - Page 9 Inverted Magnetron Pirani Gauge FRG-700 FRG-702 Adjustment <HV> potentiometer at <10 mbar <ATM> potentiometer at atmospheric pressure Electrical connection FCC68 female, 8 poles Sensor cable 8 conductors plus shielding 50 m Line length (80.14 mm²) 3.3 kV Operating voltage 500 µA Operating current ...
- Page 10 Inverted Magnetron Pirani Gauge FRG-700 FRG-702 Dimensions [mm] FRG-700 FRG-702 ø 63.5 ø 63.5 DN 25 ISO-KF DN 40 ISO-KF DN 40 CF-F Weight 700 g 730 g FRG700KF25 FRG702KF25 980 g 750 g FRG700CF35 FRG702KF40 1010 g FRG702CF35...
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Page 11: Installation
Inverted Magnetron Pirani Gauge FRG-700 FRG-702 3 Installation 3.1 Vacuum Connection DANGER DANGER: overpressure in the vacuum system >1 bar Injury caused by released parts and harm caused by escaping process gases can result if clamps are opened while the vacuum system is pressurized. - Page 12 Inverted Magnetron Pirani Gauge FRG-700 FRG-702 The gauge may be mounted in any orientation. To keep condensates and particles from getting into the measuring chamber preferably choose a horizontal to upright position and possibly use a seal with a centering ring and filter. If adjustment should be possible after the gauge has been installed, be sure to install it so that the <HV>...
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Page 13: Removing The Magnet Unit (Only For Gauges With Cf Flanges)
Inverted Magnetron Pirani Gauge FRG-700 FRG-702 3.1.1 Removing the Magnet Unit (Only for Gauges With CF Flanges) Tools required Allen wrench AF 1.5 Open-end wrench AF 7 Procedure a) Unfasten the hexagon socket set screw (1) on the electronics unit (2). b) Remove the electronics unit without twisting it. -
Page 14: Electrical Connection
Inverted Magnetron Pirani Gauge FRG-700 FRG-702 3.2 Electrical Connection Precondition Make sure the vacuum connection is properly made ( 11). 3.2.1 Use With an Agilent Connect the sensor cable to the gauge and the controller. Controller 3.2.2 Use With Another Control ... -
Page 15: Operation
Inverted Magnetron Pirani Gauge FRG-700 FRG-702 4 Operation As soon as the required supply voltage is applied, the measuring signal is available between pins 3 and 5. ( Appendix for the relationship between the measuring signal and the pressure). Allow for a stabilizing time of approx. 10 min. Once the gauge has been switched on, permanently leave it on irrespective of the pressure. - Page 16 Inverted Magnetron Pirani Gauge FRG-700 FRG-702 As long as the cold cathode measuring circuit has not yet ignited, the measured value of the Pirani is output as measuring signal. The status output (pin 6, low) indicates the Pirani-only mode. If the gauge is activated at a pressure p < 3×10 , the gauge cannot recognize whether the cold cathode system has ignited.
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Page 17: Deinstallation
Inverted Magnetron Pirani Gauge FRG-700 FRG-702 5 Deinstallation DANGER DANGER: contaminated parts Contaminated parts can be detrimental to health and environment. Before beginning to work, find out whether any parts are contami- nated. Adhere to the relevant regulations and take the necessary precautions when handling contaminated parts. -
Page 18: Maintenance
Inverted Magnetron Pirani Gauge FRG-700 FRG-702 6 Maintenance Gauge failures due to contamination or wear and tear as well as expendable parts (e.g. filament) are not covered by the warranty. DANGER DANGER: contaminated parts Contaminated parts can be detrimental to health and environment. Before beginning to work, find out whether any parts are contami- nated. - Page 19 Inverted Magnetron Pirani Gauge FRG-700 FRG-702 While depressing the pin with the cylindrical pin, adjust the <HV> potentiometer … … to 4.20 V … to 5×10 mbar. After that, turn the potentiometer counter-clockwise by1/3 of a turn. Vent the gauge with air or nitrogen to atmospheric pressure, and wait at least 10 minutes.
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Page 20: Cleaning Frg-700, Replacing Parts
Inverted Magnetron Pirani Gauge FRG-700 FRG-702 6.2 Cleaning FRG-700, DANGER Replacing Parts DANGER: cleaning agents Cleaning agents can be detrimental to health and environment. Adhere to the relevant regulations and take the necessary precautions when handling cleaning agents and disposing of them. Consider possible reactions with the product materials (... -
Page 21: Cleaning Frg-700
Inverted Magnetron Pirani Gauge FRG-700 FRG-702 Unfasten the hexagon head screw (3) on the magnet unit (4) and remove the magnet unit. The magnetic force and the tendency to tilt make it difficult to separate the magnet unit and the measuring chamber (7). ... -
Page 22: Reassembling Frg-700
Inverted Magnetron Pirani Gauge FRG-700 FRG-702 Remove the FPM seal (13a) from the Pirani element (13). Fill the Pirani measuring tube with cleaning alcohol and let it work. Pour the alcohol out of the tube. Dry the tube (e.g. with a blow dryer <150 C). ... -
Page 23: Cleaning Frg-702, Replacing Parts
Inverted Magnetron Pirani Gauge FRG-700 FRG-702 If possible perform a leak test (leak rate <10 mbar l/s). WARNING WARNING: electric arcing Helium may cause electric arcing with detrimental effects on the electronics of the product. Before performing any tightness tests put the product out of operation and remove the electronics unit. -
Page 24: Disassembling Frg-702
Inverted Magnetron Pirani Gauge FRG-700 FRG-702 6.3.1 Disassembling FRG-702 Remove the gauge from the vacuum system ( 17). Unfasten the hexagon socket set screw (1) on the electronics unit (2). Remove the electronics unit without twisting it. The cover of the electronics unit cannot be removed. -
Page 25: Cleaning Frg-702
Inverted Magnetron Pirani Gauge FRG-700 FRG-702 6.3.2 Cleaning FRG-702 Cleaning the measuring chamber and the polarity Using a polishing cloth rub the inside walls of the measuring chamber and insert the polarity insert to a bright finish. The sealing surfaces must only be worked concentrically. ... -
Page 26: Reassembling Frg-702
Inverted Magnetron Pirani Gauge FRG-700 FRG-702 6.3.3 Reassembling FRG-702 ( figure 24) Insert the Pirani element (13) with the screw fitting (13a) and copper seal (13b) slid over it into the corresponding conic bore hole (7) of the measuring chamber. -
Page 27: Troubleshooting
Inverted Magnetron Pirani Gauge FRG-700 FRG-702 6.4 Troubleshooting Problem Possible cause Remedy Measuring signal No supply voltage. Turn on the power continually < 0.5 V supply. "Error low". Measuring signal Pirani measurement Replace the Pirani continually > 9.5 V element defective element (FRG-700 ... -
Page 28: Spare Parts
Inverted Magnetron Pirani Gauge FRG-700 FRG-702 7 Spare Parts When ordering spare parts, always mention: all information on the product nameplate description and ordering number according to the spare parts list Pos. Description Ordering number FRG-700 Maintenance kit, consisting of: FRG700MAINT 1×... -
Page 29: Returning The Product
Inverted Magnetron Pirani Gauge FRG-700 FRG-702 8 Returning the Product WARNING WARNING: forwarding contaminated products Contaminated products (e.g. radioactive, toxic, caustic or biological hazard) can be detrimental to health and environment. Products returned to Agilent should preferably be free of harmful substances. -
Page 30: Appendix
Inverted Magnetron Pirani Gauge FRG-700 FRG-702 Appendix Measuring Signal vs. Pressure Conversion formulae 1.667U-d p = 10 U = c + 0.6log [mbar] 11.33 [Torr] 6.875 11.46 [Pa] 9.333 where pressure valid in the range 5×10 mbar < p <1000 mbar measuring signal 3.8×10... -
Page 31: B: Gas Type Dependence
Inverted Magnetron Pirani Gauge FRG-700 FRG-702 Gas Type Dependence Indication range above Pressure indicated (gauge calibrated for air). mbar p (mbar) Indication range above 10 mbar Freon 12 –1 Water vapor –2 –3 –2 –1 4 6 8 4 6 8 4 6 8 4 6 8 (mbar) - Page 32 Inverted Magnetron Pirani Gauge FRG-700 FRG-702 In the range below 10 mbar, the pressure indication is linear. For gases other than air, the pressure can be determined by means of a simple conversion formula: = K × pressure indicated where gas type air (O , CO, N...
- Page 33 Inverted Magnetron Pirani Gauge FRG-700 FRG-702 Notes...