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Table 2. Standard DMD Illumination Conditions
"Input Conprmion' | Ourput Conpition:
f°
NA=nSINU
0.167 (£3.0)
0.167 (£3.0)
n= I (air)
U=9.6
20° + 0.25°
0°+0.25°
=
*
Z
Po
Relative to system interface
420 + 20nm
plane
700+ 20nm
Beam numerical aperture
(NA)
Beam chief ray angle off
perpendicular
Perpendicular to mirror tilt
axis
Chef ray clocking from
active area center lines
filters
420+ 20nm
700+ 20nm
blue edge
red edge
DMD Panel Screen
a. _ Bright, Color, Dark (all pattern) : (1 dot = 1 pixel)
Bright dot
not allowed
Dark dot
<
3
Adjacent dark dots
not allowed
Unstable, blemish dots
<
6
b. _—_ Blue 180 pattern :
Dark blemish dots
not allowed
c.
Gray 30 pattern:
Bright blemish dots
not allowed
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