Agilent Technologies 16451B Operation Manual page 108

Error Factor using
Non-contacting
Electrode Method
3-62 Operation


r
C
s 1
C
s 2
t
g
t
a
Capacitance measurement Error
Gap Error
t
g

C t
2
s 1 g
C t
s 2 a
t
a

r
t
a
t
g