Carrier File Management - Nikon NWL860 Series Manual

Wafer loader
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Chapter 4 Communications Specification
3-3-2.
4
3-3-3.
3-4.

Carrier File Management

3-4-1.
3-4-2.
28
<Scenario>
Process program (sample file) uploading by host
<Comment>
Requests formatted process program.
Sample File Downloading
The host transmits information to the equipment involving PPID and the size of the sample
file to be transferred.
The equipment allows the transfer, if no problems are detected.
The host transfers the sample file to the equipment.
The equipment checks the sample file and notifies the host of the results.
The sample files must be transferred to the NWL in multi-block data format.
<Scenario>
Process program (sample file) downloading by host
<Comment>
Inquires for process program loading.
Transmits formatted process program.
Acknowledges process program verification. S7F28 →
PPID List Transmission
The equipment transfers PPID information to the host for all host sample and carrier files.
<Scenario>
Process program directory request
<Comment>
Request for current EPPD.
Carrier File Uploading
The equipment transfers data to the host for the carrier file of the PPID selected by the host.
<Scenario>
Process program (carrier file) uploading by host
<Comment>
Requests formatted process program.
Carrier File Downloading
The host transfers the sample file to the equipment.
The equipment checks the carrier file and notifies the host of the results.
[Host]
[Equipment] <Comment>
S7F25 →
← S7F26
Transmits formatted process program data.
Message: S7F1,F2,F23,F24,F27,F28
[Host]
[Equipment] <Comment>
S7F1 →
← S7F2
Acknowledges inquiry for process program loading.
S7F23 →
← S7F24
Acknowledges formatted process program.
← S7F27
Transmits process program verification.
[Host]
[Equipment] <Comment>
S7F19 →
← S7F20
Transmits current EPPD data.
[Host]
[Equipment] <Comment>
S7F25 →
← S7F26
Transmits formatted process program data.
Message: S7F25,F26
Message: S7F19,F20
Message: S7F25,F26

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