Chaper 4 Communications Specification; Compliance With Gem; Gem Compliance Level Shown By E30 Gem Compliance Sheet (E30 Table 8.3) - Nikon NWL860 Series Manual

Wafer loader
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4

1. Compliance with GEM

1-1.
GEM Compliance Level Shown by E30 GEM Compliance Sheet
(E30 Table 8.3)
State model
Equipment processing state
S1F13/F14 scenario initiated by host
Event report
4
Online check
Error message
Control (started by operator)
Documentation
Establishment of Communications
Selecting the dynamic event report setting
Variable data collection
Trace data collection
Status data collection
Alarm management
Remote control
Equipment constant
Process program management
Material movement
Equipment terminal service
Clock
Limit monitoring
Spooling
Control (started by host)
20
Communications Specification
Communications Specification
GEM Compliance
GEM Basic Requirements
Additional Capabilities
Capability
Compliance
Yes
Yes
Yes
Yes
Yes
Yes
Yes
Yes
Capability
Compliance
Yes
Yes
Yes
Yes
Yes
Yes
No
Yes
Yes
Yes
Yes
Yes
Yes
Yes
Yes
Yes
Yes
No
No
No
No
No
Yes
Yes

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