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eTl-CRYOGENICS
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HELIX TECHNOLOGY CORPORATION
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SAFETY CONSIDERATIONS
Your Cryo·Torr"' High Vacuum Pump has been engineered to provide extremety safe and dependable operalion when properly
used. Certain safely considerations need to be observed during the normal use of your vacuum pump equipmenl. Warning blocks
within the Manual text pinpoint these specific safety considerations. Warnings are delined as hazards or unsafe practices which could
result in severe injury or loss of life.
IAWARNINGI
TOXtC, CORROSIVE OR OANGEROUS GASES present in a cryopump could
cause severe injury upon contacl.
1.
Always vent such gases to a safe location, using an inert purge gas.
2.
Clearly identify such gases on containers used to store or ship equipment after such
exposure.
FLAMMABLE OR EXPLOSIVE GASES present in a cryopump could cause severe injury if igniled.
1.
Always venl such gases to a safe location, using an inert purge gas.
2.
Do nol install a hot·filament Iype vacuum gauge on the cryopump side of the roughing
valve; it could be an ignition source of flammable gases in the pump.
3.
Cryopumping oxygen/ozone requires special precautions and frequent regeneration. Ozone
may be present as a by·product of oxygen processes.
HIGH VOLTAGE is present within the system and can cause severe injury from electric
shock.
1.
Disconnect the system from all power sources before making electrical connections be·
tween system components and also belore pertorming Troubleshooting and Maintenance
procedures.
HIGH GAS PRESSURE is present within the system and can cause severe injury from propelled
particles or parts.
1.
Do not modify or remove the pressure relief valves, either on the cryopump or within the
helium compressor.
2.
Always depressurize the adsorber to atmospheric pressure before disposing of il.
3.
Always bleed the helium charge down to atmospheric pressure before servicing or
disassembling the self·sealing gas half·couplings.
BEFORE INSTALLING, OPERATING OR SERVICING EQUIPMENT,
READ THIS MANUAL WHICH CONTAINS IMPORTANT SAFETY INFORMATION.
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Troubleshooting
