Installation - HELIX CTI-CRYOGENICS CRYO-TORR 100 Installation, Operation And Servicing Instructions

)
4.1
Section 4:
Installation
Mounting the Cryopump
to the Vacuum System ..
.
. . .
4.2 Connecting to Roughing Pump.
4.3 Connecting Purge Gas . . . . .
CTI-CRYCXiENICS
HELIX TECHNOLOGY CORPORATION
4.4
4.5
Connecting a Vent Pipe. . .
Connecting the Cryopump
.
. .
.
. . .
.
. . . .
.
.
4-1
4-1
4-2
4-2
4.6
4.7
to the Compressor. . . . .
Connecting Power Cables.
Multi-Cryopump Installation Using
8300 Compressor. . . . . . . . . . . . . . .
.
. . . .
.
4-2
4-3
4-3
) 4.1 Mounting the Cryopump to
the Vacuum System
Connect the roughing pump system to the accessory port
of the cryopump using a roughing line with the largest
inside diameter possible to minimize the roughing time
required,during startup procedures prior to normal
operation.
Your cryopump may be installed in any orientation.
Before mounting the cryopump to a vacuum system, an
isolation valve (Hi-Vac valve) must be installed between
the cryopump and vacuum chamber as a means to isolate
the cryopump from the chamber.
To install the cryopump to the vacuum system, ref'-
'0
Figure 3.2, page 3-3, and proceed as follows:
1.
Remove the protective cover from the main flange
of the cryopump.
2. Clean all sealing surfaces and install the O-ring or
metal seal gasket as appropriate.
3. Mount the cryopump
to
the Hi- Vac valve or vacuum
chamber mounting flange. Be sure all mounting
bolts are secure.
4.2 Connecting to Roughing
Pump
The roughing pump system connects to the cryopump
accessory port. The port will accept an ISO NW -25
flange.
4-1
AWARNING
Do not install a hot-ftlament-!ype vacuum gauge
on the cryopump side of the roughing valve; it could
be a source of ignition for flammable gases.
The installation of a DV6M thermocouple
(TC)
gauge
is acceptable providing you install the roughing valve
and the TC gauge between the roughing pump system
and cryopump. Install the TC gauge and roughing valve
as close as possible to the cryopump. A distance of 4
to
6 inches from the cryopump accessory port is desirable.
A molecular sieve roughing trap
to
minimize oil
backstreaming from your roughing pump system may be
installed in the roughing pump line near the roughing
pump. The trap must be properly maintained.