Gas Factor Table ("K" Factors) - Omega FMA 5400A User Manual

Mass flow controllers
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CAUTION:
be used in applications that require accuracy better than +/- 5 to 10%.
ACTUAL GAS
Acetylene C
H
2
2
Air
Allene (Propadiene) C
Ammonia NH
3
*Argon Ar
*Argon AR-1 (>10 L/min)
Arsine AsH
3
Boron Trichloride BCl
Boron Trifluoride BF
Bromine Br
2
Boron Tribromide Br
Bromine PentaTrifluoride BrF
Bromine Trifluoride BrF
Bromotrifluoromethane (Freon-13 B1) CBrF
1,3-Butadiene C
H
4
Butane C
H
4
10
1-Butene C
H
4
8
2-Butene C
H
CIS
4
8
2-Butene C
H
TRANS
4
8
*Carbon Dioxide CO
*Carbon Dioxide CO
Carbon Disulfide CS
Carbon Monoxide C0
Carbon Tetrachloride CCl
Carbon Tetrafluoride (Freon-14)CF
Carbonyl Fluoride COF
Carbonyl Sulfide COS
Chlorine Cl
2
Chlorine Trifluoride ClF
Chlorodifluoromethane (Freon-22)CHClF
Chloroform CHCl
3
Chloropentafluoroethane(Freon-115)C
Chlorotrifluromethane (Freon-13) CClF
Cyanogen C
N
2
2
CyanogenChloride CICN
Cyclopropane C
H
3
* Flow rates indicated ( ) is the maximum flow range of the Mass Flow meter being used.
APPENDIX 2

GAS FACTOR TABLE ("K" FACTORS)

K-Factors at best are only an approximation. K factors should not
H
3
4
3
3
3
5
3
6
2
-1 (>10 L/min)
2
2
4
4
2
3
5
K FACTOR
Relative to N
.5829
1.0000
.4346
.7310
1.4573
1.205
.6735
.4089
.5082
.8083
.38
.26
.3855
.3697
3
.3224
.2631
.2994
.324
.291
.7382
.658
.6026
1.00
.31
.42
.5428
.6606
.86
.4016
.4589
2
.3912
ClF
.2418
2
5
.3834
3
.61
.6130
.4584
38
Cp
[Cal/g]
2
.4036
.240
.352
.492
.1244
.1244
.1167
.1279
.1778
.0539
.0647
.1369
.1161
.1113
.3514
.4007
.3648
.336
.374
.2016
.2016
.1428
.2488
.1655
.1654
.1710
.1651
.114
.1650
.1544
.1309
.164
.153
.2613
.1739
.3177
Density
[g/I]
1.162
1.293
1.787
.760
1.782
1.782
3.478
5.227
3.025
7.130
11.18
7.803
6.108
6.644
2.413
2.593
2.503
2.503
2.503
1.964
1.964
3.397
1.250
6.860
3.926
2.945
2.680
3.163
4.125
3.858
5.326
6.892
4.660
2.322
2.742
1.877

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