Tescan CLARA Manuals

Manuals and User Guides for Tescan CLARA. We have 1 Tescan CLARA manual available for free PDF download: Instructions For Use Manual

Tescan CLARA Instructions For Use Manual (141 pages)

Brand: Tescan | Category: Microscope | Size: 41 MB

Table of Contents
3
Introduction
7
Safety Instructions
8
Emergency Contact
8
Microscope Supervisor Contact
8
Limitations of Use
8
Clothing and Personal Safety
9
Reading the Manual
10
Levels of Hazards
11
Proper Use
12
Radiation Safety
15
Ionizing Radiation
15
Magnetic Field
15
EMO (Emergency Off) Button
16
Chemicals
18
Dismounting and Disposal
19
Installation and Repair
20
Transport and Storage
20
Moving the Microscope
20
Installation Instructions
20
Fuse Replacement
20
Instrument Repair and Spare Parts Usage
20
System Description
21
Electron Column (SEM)
22
SEM Scan Modes
24
UH-RESOLUTION Scan Mode
24
DEPTH Scan Mode
25
ANALYSIS Scan Mode
25
OVERVIEW Scan Mode
26
WIDE FIELD Scan Mode
26
SEM Potential Tube Modes
27
Chamber
28
Vacuum Modes
29
Sample Stage
30
Description of Stage Movements
30
Movement Along XYZ Axes
31
Rotation
31
Tilt
32
Detectors
34
Electron Beam-Sample Interaction
34
In-Beam Axial Detector
36
In-Beam Multidetector (MD)
36
Everhart-Thornley (E-T) Detector
37
Low Energy BSE (le BSE) Detector
37
Retractable BSE (R-BSE) Detector (Optional)
37
Low Energy 4Q BSE (le 4Q BSE) Detector (Optional)
38
Water Cooled BSE Detector (Optional)
38
Aluminum-Coated BSE Detector (Optional)
39
Retractable HADF STEM (R-STEM) Detector (Optional)
40
Cathodoluminescence (CL) Detectors (Optional)
41
Low Vacuum Secondary TESCAN (LVSTD) Detector (Optional)
42
Gaseous Secondary Electron (GSD) Detector (Optional)
42
Control Devices
43
Mouse and Keyboard
43
Trackball
44
Control Panel
45
Starting the Microscope
47
User Access Levels
48
Licences
48
System Saving Modes
49
Working with the SEM
50
SEM Basics Step-By-Step
52
SEM Imaging of Non-Conductive Samples
58
Low Energy Imaging
59
Ultra-Low Energy Imaging in BDM
61
Imaging in the Lowvac Mode
64
Advanced Scanning Strategies
68
Conductive Coating of Sample Surface
68
Using the Detectors (Advanced)
69
Presets
71
Finishing up Work with Microscope
74
Microscope Maintenance
75
Safety Precautions
75
Maintenance Schedule for Customers - Overview
76
Stage Center Adjustment
79
Field of View Fine Adjustment
80
SEM Centering Procedure
81
SEM Gun Centering
82
SEM Column Centering (SEM OBJ / IML Centering)
82
SEM Stigmators Adjustment
83
SEM Stigmators Centering
83
SEM Column Centering in the UH-RESOLUTION Scan Mode
85
SEM Column Centering in the DEPTH Scan Mode
86
SEM Column Centering in the OVERVIEW and ANALYSIS Scan Modes
87
SEM Column Centering in the WIDE FIELD Scan Mode
88
Switching the Electron Source off / on
89
Switching the Electron Source off
89
Switching the Electron Source on
90
Angular Intensity Adjustment
91
Changing the R-STEM Aperture
93
Centering the R-STEM Detector
94
Inserting / Removing the Lowvac Aperture
97
Cleaning the Lowvac Aperture
99
Exchanging the Lowvac Aperture Sealing O-Ring
100
Refilling Lowvac Water Reservoir
101
What to Do if
104
Health Status Reports a Problem
106
Non-Standard System Settings Status Reports a Problem
107
You Crashed with Your Sample
108
You Lost Signal
110
Maximum View Field Is Limited
112
The SEM Image Moves When Focusing
113
You See Image Astigmatism in SEM
114
The SEM Image Moves While Correcting Astigmatism
115
You Still Cannot Get a Properly Focused SEM Image
116
You Need to Restart Load Lock
117
Appendix
119
Using the Standard Automated Load Lock
120
Using the Manual Load Lock
127
Basic Microscope Accessories
136
Specimen Holders
137
Keyboard Shortcuts
138

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Tescan CLARA Instructions For Use Manual (141 pages)

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