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QMS 100 Series
User Manuals: SRS Labs QMS 100 Series Gas Analyzer
Manuals and User Guides for SRS Labs QMS 100 Series Gas Analyzer. We have
1
SRS Labs QMS 100 Series Gas Analyzer manual available for free PDF download: User Manual
SRS Labs QMS 100 Series User Manual (280 pages)
Gas Analyzer
Brand:
SRS Labs
| Category:
Measuring Instruments
| Size: 3 MB
Table of Contents
Table of Contents
3
Safety
4
Fast Start
6
Specifications
7
Materials List
9
Calibration Log
10
. Introduction & Operation
11
Chapter 1 . Introduction & Operation
12
Introduction
12
External Connections
13
What's Inside
14
Gas Handling Subsystem
14
Operating Orientation
14
Mass Spectrometer
16
Operation
17
Front Panel Operation
18
Continuous Sample Mode
20
Startup Just the Pumps
20
Startup the Sample Flow
20
Idle
21
Shutdown
21
Batch Analyze Mode
22
Microcontroller Error Checks
23
Operating Modes of the Spectrometer
24
The RGA as a Mass Spectrometer
24
The RGA as a Single Gas Monitor
25
The RGA as a Total Pressure Gauge
25
Mass Spectrometry Basics
26
How Mass Spectra Are Interpreted
26
Partial Pressure Measurement
27
Partial Pressure Sensitivity Factors
28
. Windows Software
31
Chapter 2. Windows Software
31
Overview
33
Program Structure
33
RGA Files
33
RGA Files (.Rga)
33
RGA Scan Log Files (.Ana .Hst .Tbl)
33
System Requirements
34
Getting Started
34
RGA ASCII Data Files (.Txt)
34
RGA Graph Metafiles (.Wmf)
34
Connecting to a Head
35
Shutting down the RGA System
35
Starting the RGA Software
35
Features and Operation
36
Display Modes
36
Multiple Head Operation
36
The RGA Window
36
Analog (Mode Menu)
37
Histogram (Mode Menu)
37
P Vs. T (Mode Menu)
38
Annunciator (Mode Menu)
39
Leak Test (Mode Menu)
39
Data Acquisition
40
Library (Mode Menu)
40
Graph Management
41
Scan Data Logging
41
Head Management
42
Sensitivity Factors
42
Spectrum Analysis
42
RGA Head and Scan Parameters
43
Background Data
43
Changing Scanning Parameters
43
Changing Head Parameters
44
Changing Scan Trigger Rates
44
Display Modes
45
Scanning with the Filament off
45
Changing Display Modes
46
Manual Scaling of Graphs
46
Running in Split Display Mode
46
Using Scan Data as Background
46
General Utilities
47
Using the Data Cursors
47
Logging Scans
48
Scheduled Saving of Data
48
Viewing Scans
48
Analyzing the Mass Spectrum
49
Browsing through the Gas Library
49
Spectrum Analysis Description
49
Head Calibration and Security
50
Analysis Procedure
50
Pressure Reduction
50
Tuning the RGA Sensitivity
50
Adjusting the CEM Gain
51
Peak Tuning the RGA Head
52
RGA On-Line Help
53
Help Index
53
Help Search
53
Securing the RGA Head
53
Commonly Asked Questions
54
Sample Scans
54
. Measurement Techniques
55
Calibration
56
Effect of Total Pressure
57
Operating off the Design Pressure
57
Total Pressure and Composition
58
Calibration of Partial Pressure
59
Initial Calibration
60
Basic Recalibration
61
Calibration for Multiple Operating Conditions
62
Calibration with Fixed Reservoir
62
Peak Tuning Procedure
62
General Procedure
64
Peak Position Tuning Algorithms
65
Peak Width Tuning Algorithms
66
Temperature Effects on the Mass Scale Calibration
68
Electron Multiplier Tuning Procedure
69
Techniques
70
Correcting for the Chamber Background
70
Correcting for Multiple Species
71
Operation with Condensable Gases
71
Glossary
73
Table of Contents
81
Safety
82
Specifications
83
Materials List
85
Command List
86
. Principles of Operation
89
Internal View
90
Overall System
91
Power
91
Controller
91
Structure
92
Exhaust
92
Pressure Reducing Inlet
93
Flow Calculations
94
Diaphragm Pump
96
Turbo Pump
97
Capillary Design
98
Length & Bore
98
Materials and Fittings
100
Extensions
101
. Quadrupole Spectrometer
103
Introduction
104
Ecu
105
Rs232/Dce/28.8K Connector
105
Calibration Lockout
105
Electrometer
107
Detection Limit Vs. Scan Rate
107
Adjusting the Zero of the Ion Detector
108
Mass Filter Power Supply
109
Ionizer
110
Description
110
Principle of Operation
111
Parameter Settings
112
Quadrupole Mass Filter
114
Description
114
Principle of Operation
115
Mass Range, Resolution and Throughput
116
Zero Blast Suppression
118
Ion Detector
119
Description
119
Faraday Cup Operation
120
Electron Multiplier Operation
120
. Programming the Rga
125
Chapter 3. Programming the RGA
125
Introduction
127
The RGA COM Utility
128
Command Syntax
129
Examples of Command Formats
129
Programming Tips
130
Communication Errors
131
Parameter Errors
131
Jumper Protection Violation
132
Troubleshooting the RGA Communications
132
Programming the RGA ECU
133
Initializing the RGA ECU
133
Programming the Ionizer
134
Programming the Detector
135
Setting up Analog Scans
137
Setting up Histogram Scans
138
Single Mass Measurements
140
Total Pressure Measurements
142
Storing Information in the RGA ECU
143
Programming the Quadrupole Mass Filter
144
Error Checking the RGA
145
RGA Command Set
149
In0, In1, In2
150
Initialization Commands
150
Dgparam, Param: 0 - 20
152
Flparam, Param: 0.00 - 3.50
154
Ieparam, Param: 0,1
155
Vfparam, Param: 0 - 150
156
Detection Control Commands
158
Hvparam, Param: 0 - 2490
160
Nfparam, Param: 0 - 7
162
Scan and Measurement Commands
164
Hsparam, Param:0 - 255
165
Mfparam, Param: 1 - M_MAX
167
Miparam, Param: 1 - M_MAX
168
Mrparam, Param:0 - M_MAX
168
Saparam, Param: 10 - 25
170
Sc[Param], Param: 0 - 255
171
Tp?, Tp0, Tp1
173
Parameter Storage Commands
175
Mvparam, Param: 0 - 2490
175
Spparam, Param:0.0000 - 10.0000
176
Stparam, Param:0.0000 - 100.0000
177
Mass Filter Control Commands
178
Mlparam, Param: 0.0000 - M_MAX
178
Error Reporting Commands
179
Tuning Commands
184
Diparam, Param: 0 - 255
184
Dsparam, Param: -0.8500 - +0.8500
185
Riparam, Param: -86.0000 - +86.0000, *, ?, None
187
Error Byte Definitions
190
. Trouble Shooting
195
Chapter 4. Trouble Shooting
195
System Problems
196
Diaphragm Pump Does Not Start
196
RGA Fails after Capillary Flow Valve Opened
196
Turbo Pump Does Not Reach Full Speed
196
Turbo Pump Does Not Start
196
Loud Noises While Shutting down
197
Nothing Operates
197
Internal Error Detection in the SRS RGA
198
24V DC Power Supply
199
Electrometer
199
Quadrupole Mass Filter RF P/S
200
Filament's Background Protection Mode
201
Windows Software Error Codes
202
Det1
202
Det3
202
Det4
202
Det5
203
Det6
203
Det7
203
Em7
204
Fl6
204
Fl7
205
Ps6
205
Ps7
206
Rf4
206
Rf6
206
Rf7
207
. Service
209
Chapter 5. Service
209
Warnings
210
Component Notes
211
Diaphragm Pump
211
Gas Handling Components
211
Turbo Pump
211
Fittings and Seals
212
CDEM Handling and Care
213
Contamination
213
Handling and Mounting
213
Initial Pump-Down
213
Operating Temperature & Pressure
213
Operating Voltage
213
CDEM Pre-Conditioning
214
Storage
214
Accessing Internal Components
215
Opening the Chassis
215
Internal View
216
Removing the RGA ECU
217
Removing the RGA Probe
217
General Checks
219
Internal Fuses
219
Leak Testing
219
Pressure Gauge Recalibration
219
Cleaning
221
Bake-Out
221
CDEM Cleaning
222
Ionizer Degas
222
Quadrupole Filter Cleaning
223
Component Replacement
228
Ionizer Replacement
228
Filament Replacement
231
CDEM Replacement
233
Replacement Parts
236
Factory Service
237
Appendix A. System Electronics
239
Description of Schematics
240
Schematic: MCA_C1
240
Schematic: MCA_C2
241
Schematic: MCA_D1
241
Parts List
242
Appendix B Rga Circuit Description
246
Appendix Brga Circuit Description
246
Overview of the RGA
248
Circuit Description
249
General Description
249
Circuit Boards
250
Description of Schematics
251
Digital I/O Ports
251
Microprocessor
251
The LED Port
252
The MPX Port
252
Clocks
253
The MISC Port
253
RS232 Interface
254
Schematic Name: QMSE_T2
254
I/V Calibration
254
DC Control Voltages
255
Power-Up Conditioning
255
Foldback Current Limiting
256
RF Amplitude Control
256
RF Amplitude Detection
256
Schematic Name: QMSE_B1
257
Mass Filter RF Supply
257
DC Potentials
258
Schematic Name: QMSE_B2
258
Filament Heater Supply
258
Bias Regulators
259
Schematic Name: QMSE_B3
260
Power Supplies
260
Schematic Name: QMSE_V1
260
Signal Conditioning
260
Schematic Name: QMSE_V2
262
Parts Lists
263
Top Board Components Parts List
263
Bottom Board Parts List
268
Vertical Board Parts List
275
Appendix C. Drawings & Schematics
279
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