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RHK Technology R9 manual available for free PDF download: User Manual
RHK Technology R9 User Manual (230 pages)
Brand:
RHK Technology
| Category:
Control Systems
| Size: 8 MB
Table of Contents
Table of Contents
3
About this Quick Start Guide
14
Significant Changes in R9S 4.0
16
Significant Changes in R9S 4.2
18
Significant Changes in R9S 5.0
20
Significant Changes in R9S 5.2
22
Chapter 1. Prepare Your SPM System
27
Check the Hardware for Damage
27
Configure the Power
27
Figure 1.1. Check the R9 for Damage
27
Connecting the Ethernet
28
Figure 1.2. Location of Power, Frequency, Voltage and Serial Number Information
28
Ethernet Connection
29
Using more than One Ethernet Communications Link
29
Start and Try the R9 Control System Software (R9S)
29
Figure 1.3. Ethernet Connection Diagram
29
Opening R9 Software (R9S)
30
Understand IHDL™ and the R9 Software Components
30
Figure 1.4. R9 Dashboard
30
Open a Preconfigured IHDL™ File
31
Figure 1.5. Opening a Preconfigured IHDL
32
Figure 1.6. Selecting the Workbench Tab
32
Figure 1.7. RHK UHV300 Preconfigured STM Hardware Workbench
33
Workbench User Interface Component Overview
34
Figure 1.8. UHV 300 STM Hardware Workbench Overview
34
Components of Interest
35
Figure 1.9. Hardware Space
36
Initial Testing of the R9 Controller
37
Figure 1.10. Save the IHDL with a New Name
38
Figure 1.11. Auto-Backup IHDL Files
38
Figure 1.12. Workbench - Testing UHV 300.Ihl
39
Initial Tests
40
Figure 1.13. R9S Testing Screen Using the Testing UHV 300 Ihl
40
Measuring Preamplifier Noise and Adjusting Input Circuit Parameters
42
Figure 1.14. Oscilloscope - Topography and Current
42
Figure 1.15. Testing the Input Offset
43
Figure 1.16. Spectrum Analyzer Result at Full Bandwidth
44
Adjusting Bias Voltage Parameters
45
Figure 1.17. Spectrum Analyzer Result with 2 Khz Filter with 48 Db Rolloff
45
Figure 1.18. Bias Voltage and CH1 Drive Settings
46
Figure 1.19. Bias Modulation through the Tunneling Gap Simulator
47
Further Testing
48
Chapter 2. Connect Your Microscope
49
Chapter 3. Approach
50
Approach Settings
50
Feedback Settings
51
Figure 3.1. Open the Approach Procedures Panel
51
Figure 3.2. Typical Dashboard for STM
52
Fast in
53
Slow Approach
53
Figure 3.3. Camera View of the Tip and Sample
53
Adjusting the Position with Single Steps
54
Operating Mode Switching
55
Figure 3.4. Z Feedback Bar
55
Figure 3.5. Mode Switching
55
Chapter 4. Acquire an Image
57
Verify the Available Signals
57
Figure 4.1. Checking the Available Signals
57
Configure Scan Settings
58
Figure 4.2. Scan Area Window Main Panel
58
Table 4.1. Z Bar Zoom Ranges
59
Figure 4.3. Scan Area Window - Advanced, Save
60
Figure 4.4. Scan Area Window - Tip Standby Position
60
Multi-Height Imaging
61
Figure 4.5. Scan Area Window - Nav Config., Image Settings
61
Begin Image Acquisition
62
Figure 4.6. Multi-Height Imaging
62
Figure 4.7. Open an Image Window
63
Figure 4.8. Open an Image Line
63
Optimizing Feedback and Scanning Parameters
64
Drift Correction
65
Figure 4.9. Scan Area Window - Drift Settings
65
Figure 4.10. Automatic Drift Correction
66
Automatic Drift Correction
67
Manual Drift Correction
67
Image+Spectroscopy Mode
67
Points
67
Line
68
Figure 4.11. Image+Spectroscopy - Points
68
Figure 4.12. Image+Spectroscopy - Line
68
Region
69
Line Spectroscopy with Image Line Verification
69
Figure 4.13. Image+Spectroscopy - Region
69
Chapter 5. Display and Analyze Your Image
70
Browser
70
Figure 5.1. File Explorer View
70
Basic Image Processing
71
Background Removal
71
Figure 5.2. Shadow Style Artifact from X Offset Subtract
71
Filtering
72
Displaying SPM Images
72
Image Manipulation
72
Figure 5.3. Image Manipulation
72
Display Image in 3D Format
73
Figure 5.4. Pre-Processing Data Mode and Color Map Mode
73
Export the SPM Image
74
Displaying Spectral Data on an Image
74
Figure 5.5. Interactive 3D
74
Figure 5.6. Image+Spectroscopy - Display Spectral Data
75
Locating SM4 Data Files
76
Figure 5.7. Locating SM4 Data Files
76
Chapter 6. Acquire Spectroscopy Data
77
Configuring the I/V Ramp Spectroscopy Settings
77
Figure 6.1. Dashboard View of the IV Ramp Spectroscopy Settings
78
Figure 6.2. Spectroscopy - Alternate Scan Direction: Disabled
79
Figure 6.3. Spectroscopy - Alternate Scan Direction: Enabled
79
Starting an IV Spectroscopy Procedure
80
Figure 6.4. Graphical Representation of Ramp Spectroscopy Timings
80
Figure 6.5. Scan Area Window Access to Spectroscopy Procedures
81
DI/DV Spectroscopy Measurements
82
Figure 6.6. the Preconfigured UHV300 Ihl
82
Figure 6.7. Dashboard for Uhv300.Ihl
83
Figure 6.8. Example I/V Spectroscopy Measurement on a Pair of Back to Back Fets
83
Figure 6.9. Spectroscopy Settings and Circuit Diagram for the Trial DI/DV Spectroscopy
84
Figure 6.10. Modification to Pre-Configured UHV300 Dashboard
84
Background for DI/DV Measurement
85
Figure 6.11. the 'DI' Oscilloscope Trace for 2Mv Oscillation Amplitude Shown above and a Series Resistance of 200 Meg Ohms
85
Figure 6.12. I/V and DI/DV Spectroscopy Plots
86
Figure 6.13. Pictorial Representation of DI/DV
87
Figure 6.14. Interferometer Feedback
88
Chapter 7. Analyze Spectroscopy Data
89
Analyzing Spectroscopy Data
89
Display and Analyze Your Spectroscopy Data
89
Exporting Your Spectroscopy Data
90
Figure 7.1. Spectroscopy
90
Figure 7.2. Two Different Kinds of File Export Format, Picture File and ASCII File
91
Appendix A. IHDL Element Details
92
Overview of a Hardware Item
92
Figure A.1. Hardware Space Properties
92
Hiding Dashboard Panels to Ribbon
93
Figure A.2. Hiding Dashboard Controls
93
Overview of an R9 Control
94
Figure A.3. Hiding Dashboard Panels to Ribbon
94
Figure A.4. Showing Panels on the Ribbon
94
Figure A.5. R9 Controls
95
Figure A.6. Ramping R9 Controls
95
User-Configurable Max/Min Ranges on Data Entry
96
Figure A.7. User-Configurable Limits on Data Entry
96
Figure A.8. Settings for User-Configurable Limits
96
Adding Procedure Panel to Hardware Composites on the Dashboard
97
Configure Measure Items
97
Figure A.9. Adding Procedure Panels to Composites on the Dashboard
97
Figure A.10. Preconfigured STM Measure Items
98
Appendix B. Hardware Space Components
99
Channel 1 Drive and Channel 2 Drive
99
Hardware Space
99
Figure B.1. Channel 1 Drive - Hardware Space
99
Block Diagram of Output Circuitry
100
Property Panel in Hardware Space
100
Figure B.2. Block Diagram of Drive 1 and Drive 2 Output Circuitry
100
Figure B.3. Channel 1 Drive - Property Panel in Hardware Space
100
Table B.1. Channel 1 Drive Output
100
Channel 1 Input and Channel 2 Input
103
Hardware Space
103
Figure B.4. Hardware Space - Channel 1 Input
103
Block Diagram of Input Circuitry
104
Property Panel in Hardware Space
104
Figure B.5. Block Diagram of Channel 1 and Channel 2 Input Circuitry
104
Figure B.6. Property Panel in Hardware Space
104
Channel 3 Input and Channel 4 Input
106
Hardware Space
106
Block Diagram of Input Circuitry
106
Figure B.7. Hardware Space - Channel 3 Input
106
Figure B.8. Block Diagram of Channel 3 and Channel 4 Input Circuitry
106
Property Panel in Hardware Space
107
Figure B.9. Property Panel in Hardware Space
107
CH5 Input
108
STM Bias
108
Figure B.10. CH5 Input in Hardware Space
108
Figure B.11. STM Bias
108
Lock-In Amplifiers
109
Hardware Space
109
Figure B.12. Lock-In Amplifier - Hardware Space
109
Using the Lock-In Amplifier as a Low Pass Filter
110
Figure B.13. Lock-In Amplifier - Low Pass Filter
110
Using the Lock-In Amplifier for DI/DV Measurements
111
Lock-In Amplifiers Operating Independent of the High Speed Inputs
111
Figure B.14. Lock-In Amplifier Used for DI/DV
111
Feedback Loops
112
Figure B.15. Lock-In Amplifier Operating Independent of the Inputs
112
Figure B.16. Feedback Loop Controllers
113
Figure B.17. Feedback Loop Connections
113
Auxiliary PI Feedback Controller
115
Figure B.18. Auxillary PI Feedback Controller
115
Figure B.19. aux PI Input in Hardware Space
115
Kelvin PI Feedback Controller
116
Figure B.20. aux PI Input Settings
116
Figure B.21. Kelvin PI Feedback Controller
116
Figure B.22. Kelvin PI Input in Hardware Space
116
Filters for High Speed Inputs
117
Transient Recorder
117
Figure B.23. Kelvin PI Input Settings
117
Figure B.24. Filters for High Speed Inputs
117
Scan Processor
118
Figure B.25. Transient Recorder
118
Slope Compensation Range
119
Internal Piezo Modulation
119
Figure B.26. Scan Processor
119
Figure B.27. Slope Compensation
119
Figure B.28. Internal Piezo Modulation
120
High Voltage Amplifiers
121
Figure B.29. Internal Piezo Modulation Output
121
Figure B.30. High Voltage Amplifiers
121
Figure B.31. High Voltage X Scan Signal Output Examples
122
Status Adcs
124
Pulse Counting
124
Figure B.32. Status A/D Inputs
124
Figure B.33. Pulse Counting
124
TTL Inputs and Outputs
125
Figure B.34. TTL Output
125
Forth Scripts
126
Description
126
Figure B.35. Forth Scripts
126
Figure B.36. Description
126
Measure Item
127
Figure B.37. Measure Item
127
Data Channels Have User-Configurable Names
128
External Hardware Devices
128
Preamps
128
Figure B.38. Property Panel Configuration
128
Figure B.39. External Hardware Devices - Preamps
128
External Control Support for FEMTO Preamps
129
Figure B.40. External Control Support for FEMTO Preamps
129
PMC100 (Piezo Motor Controller)
130
PPC200 Approach Interface Module
130
Figure B.41. PMC100
130
Z Scan Input Added to the Piezo Tube Item
131
External Hardware Item for AFM Cantilevers
131
Figure B.42. PPC200
131
Figure B.43. a -Z Scan Added to the Piezo Tube Item
131
Figure B.44. External Hardware Item for AFM Cantilevers
131
Microscopes
132
Figure B.45. Microscopes
132
Figure B.46. Piezo Sensitivity Selector
132
Figure B.47. Show/Hide Items from Hardware Composites
133
Appendix C. Connecting the Microscope
134
RHK UHV300/700 - STM Beetle
134
Figure C.1. RHK STM Beetle - Connections Block Diagram
134
Figure C.2. R9 Connection Diagram for the RHK UHV300 Beetle STM
134
Figure C.3. Combined Bias and Preamp Cable
135
RHK UHV350/750 - AFM/STM Beetle
136
Figure C.4. RHK AFM/STM Beetle - Connections Block Diagram
136
RHK UHV900 - Pan STM
137
Figure C.5. RHK STM Pan - Connections Block Diagram
137
Figure C.6. Combined Bias and Preamp Cable
138
Appendix D. R9 Connector Pinouts
140
R9 Preamp I/O 44-Pin Female Connector
140
Figure D.1. R9 Preamp I/O 44-Pin Female Connector
140
R9 DC Power Output 9-Pin Female Connector
141
Figure D.2. DC Power Output 9-Pin Female Connector
141
R9 Laser I/O 26-Pin Female Connector
142
Figure D.3. R9 Laser I/O 26-Pin Female Connector
142
R9 High Voltage Output 10-Pin Female Connector
143
Figure D.4. R9 High Voltage Output 10-Pin Female Connector
143
Figure D.5. R9 High Voltage Output Defaults for RHK Microscopes
143
R9 Rear Panel Bncs
144
Figure D.6. R9 Rear Panel Bncs
144
R9 Low Voltage Outputs 15-Pin Female Connector
145
Figure D.7. R9 Low Voltage Outputs 15-Pin Female Connector
145
R9 Digital I/O 25-Pin Female Connectors (2)
146
Figure D.8. R9 Digital I/O 25-Pin Connectors
146
R9 Preamp I/O Cable 44-Pin to 15-Pin
147
Figure D.9. R9 Preamp I/O Cable 44-Pin to 15-Pin
147
Appendix E. Configuring the High Voltage Block
148
Figure E.1. Common Scan Head Designs
148
RHK UHV300/700 STM Beetle
149
RHK UHV350/750 AFM/STM Beetle
149
Figure E.2. RHK UHV300/700 High Voltage Block
149
Figure E.3. RHK UHV350/750 High Voltage Block
149
RHK UHV900 STM Pan
150
Figure E.4. RHK UHV900 High Voltage Block
150
Appendix F. Approach
151
RHK STM Beetle - UHV300/700
152
Confirm Connections to Microscope
152
Figure F.1. the Approach Procedure Panel
152
Table F.1. Preconfigured Approach Systems
152
Check Approach and Feedback Settings
153
RHK AFM/STM Beetle - UHV350/750
153
Confirm Connections to Microscope
153
Figure F.2. STM Beetle Approach Procedure Panel
153
Beetle Single Step in
154
Figure F.3. AFM/STM Beetle Approach Procedure Panel
154
Beetle Single Step out
155
Beetle Fast in
155
Figure F.4. Beetle Single Step in Procedure
155
Beetle Fast out
156
Z Beetle Approach Slow
156
RHK Pan - UHV900
156
Confirm Connections to Microscope
156
Figure F.5. Beetle Slow Approach Procedure
156
Check Approach and Feedback Settings
157
Appendix G. Feedback Modes
158
PI Controller Gain Values
158
Z PI Controller Linearization
158
STM Mode
159
Appendix H. Helpful Hints
160
Appendix I. Details on an IHL File's Construction
161
Scan Processor
161
Figure I.1. RHK UHV300 STM IHL
161
Figure I.2. Scan Processor Connection to High Voltage Block
162
Scan Heads
163
Preamplifiers
163
Input Channels
163
Lock-In Amplifiers
163
Z PI Loop
164
Each Feedback Mode Remembers Gain
164
Figure I.3. Setting Gain in Feedback Mode
164
Channel 1 Drive
165
Bias Setting
165
Z Offset
165
Ppc200
165
Measure Items
165
Scan Area Window
166
Ramp Spectroscopy Settings
166
Hardware Watchers
166
Figure I.4. Hardware Watcher in PLL
166
Fast Sweep Aborts
167
Fast Sweep Abort Setup
167
Figure I.5. Fast Sweep Abort
167
Figure I.6. Settings for Fast Sweep Abort
167
Yes/No' Message Box
168
Figure I.7. 'Yes/No' Message Box
168
Multiple R9 Controls in a State
169
Sweep Options in R9 Controls
169
Figure I.8. Play a Sound with Message Box Notification
169
Figure I.9. Simplified R9 Controls
170
Appendix J. Details on Procedure Space Constructions
171
Constructing Procedures
171
Figure J.1. Creating a Procedure
171
Figure J.2. New Procedure Space
172
Connecting Components in Hardware Space and Procedure Space
173
Rearranging Connecting Lines
173
Figure J.3. Connecting Components in Hardware Space and Procedure Space
173
Deleting a Connecting Line
174
Figure J.4. Selecting a Wire
174
Figure J.5. Using the Arranging Pins
174
Example Procedure
175
Figure J.6. Deleting a Wire
175
Figure J.7. Pulse Tip Template
175
Figure J.8. Pulse Tip - Set First Activate to CH1 Drive
175
Figure J.9. Pulse Tip - CH1 Drive Properties
176
Figure J.10. Pulse Tip - Hiding CH1 Drive Properties
177
Figure J.11. Pulse Tip - Setting the CH1 Drive Pulse Rise
178
Figure J.12. Pulse Tip - Setting the Pulse Duration
178
Setting Parameters as Reference or Value
179
Figure J.13. Pulse Tip - Setting the CH1 Drive Pulse Fall
179
Figure J.14. Pulse Tip - Setting a Reference
179
Naming a Procedure
180
Validating the Procedure
181
Figure J.15. Pulse Tip - Setting a Name
181
Figure J.16. Validating a Procedure
182
Figure J.17. Results of Validation
183
Figure J.18. Real-Time Wiring Validation
183
Figure J.19. Validation Status Indicators
184
Figure J.20. Initialization Progress Bar
184
Running the Procedure
185
From Hardware Space
185
Figure J.21. Compile on Initialize
185
From a Procedure Panel
186
Stopping the Procedure
186
Figure J.22. Opening a Procedure from Hardware Space
186
Figure J.23. Running a Procedure from Hardware Space
186
Adding Loops to Procedures
187
Figure J.24. Tip Pulse - Original Procedure
187
Figure J.25. Tip Pulse - Adding a Loop
187
Figure J.26. Selecting Multiple Objects
188
Figure J.27. Cutting and Pasting Objects in Procedure Space
189
Figure J.28. Cutting and Pasting States and Loops Inside Procedure Space
190
Figure J.29. Setting the Loop Count
190
Accidental Deletion of a State or Loop
191
Adding Conditionals to Procedures
191
Figure J.30. Tip Pulses Inside a Loop
191
Figure J.31. Protection against Accidentally Delecting a State or Loop
191
A "Script Conditional" Item
192
Configuring Startup and Shutdown Procedures
192
Figure J.32. Conditional Inside Procedure Space
192
Figure J.33. Script Condition in Procedure Space
192
Figure J.34. Configure Post-Initialize and Pre-Shutdown Procedures
193
Appendix K. Reference Guide
194
Scan Area Window
194
Main Panel
194
Figure K.1. Scan Area Window Main Panel
194
Figure K.2. Toggle Zoom
195
Figure K.3. Procedure Panels
196
Figure K.4. Configuring Procedure Panels
197
Figure K.5. Z Feedback Meter Set Range
197
Advanced Panel
198
Figure K.6. Z Feedback Bar
198
Figure K.7. Scan Area Window Advanced Panel
198
Save Panel
200
Figure K.8. Scan Area Window Save Panel
200
Figure K.9. SM4 File Names
200
Figure K.10. Parameters Changed During Image Acquisition
201
Save - Datasafe
202
Navigation Config
202
Figure K.11. Scan Area Window Datasafe Panel
202
Figure K.12. Scan Area Window Navigation Config. Panel
203
XY Graph Windows
204
XY Graph Toolbar
204
Select Curve
204
Figure K.13. XY Graph Window
204
Figure K.14. XY Graph Toolbar - Select Curve
204
Zoom
205
Figure K.15. XY Graph Toolbar - Zoom
205
Cursor Mode
206
Statistics
207
Autoscale
207
Figure K.16. XY Graph Toolbar - Cursor Mode
207
Figure K.17. Cursor Mode Statistics Dialog Box
207
Pan
208
Curve Groups
208
Figure K.18. XY Graph Toolbar - Autoscale
208
Figure K.19. XY Graph Toolbar - Pan
208
Figure K.20. XY Graph Toolbar - Curve Groups
208
Settings Tab
209
Curves Tab
209
Figure K.21. XY Graph Settings
209
Figure K.22. XY Graph Settings - Curves
209
Show
210
Preprocessing Modes
210
Figure K.23. XY Graph Settings - Panes
210
Figure K.24. XY Graph Settings - Preprocessing Modes
210
Display Modes
211
Curve Attributes
211
Figure K.25. XY Graph Settings - Display Modes
211
Figure K.26. XY Graph Settings - Curve Attributes
211
Layout Tab
212
Figure K.27. XY Graph Settings - Layout
212
Cursor Mode Tab
213
Context Menu
213
Figure K.28. XY Graph Layout Settings
213
Figure K.29. XY Graph Context Menu
213
Oscilloscope
214
Settings
214
Figure K.30. XY Graph Oscilloscope
214
Figure K.31. XY Graph Oscilloscope Settings
214
Spectrum Analyzer
215
Figure K.32. XY Graph Spectrum Analyzer
215
Settings
216
Common Usage
216
Figure K.33. Spectrum Analyzer Settings
216
Monitor
217
Table K.1. Types of Monitors
217
Controls
218
Figure K.34. Monitor Controls
218
Transient Recorder and Transient Recorder FFT
219
Figure K.35. Transient Recorder Output
219
Figure K.36. Transient Recorder FFT Output
220
Appendix L. Power Supply Wiring
222
Figure L.1. Power Supply Terminal Wiring
222
Table L.1. R9 Input Fuses
222
Appendix M. Graphically Configured Oscillators and Lock-In Amplifiers
223
Typical Example
223
Figure M.1. Typical Reference Setup in Hardware Space
223
Advanced Example
224
Figure M.2. Typical Reference Setup on the Dashboard
224
Figure M.3. Advanced Reference Setup in Hardware Space
224
Figure M.4. Advanced Reference Setup on the Dashboard
225
Appendix N. Phase-Locked Loop (PLL)
226
PSD Alignment Window
226
Figure N.1. Phase-Locked Loop
226
Frequency Sweeps
227
Figure N.2. PSD Alignment Window
227
Coarse Sweep
228
Figure N.3. Frequency Sweep
228
Measure Peak
229
Set Frequency
229
Unwrap Phase
229
Figure N.4. Unwrap Phase Procedure in Frequency Sweep
229
Procedures
230
Appendix O. Inventor SDK
230
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