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TPU 1600
Pfeiffer Vacuum TPU 1600 Manuals
Manuals and User Guides for Pfeiffer Vacuum TPU 1600. We have
1
Pfeiffer Vacuum TPU 1600 manual available for free PDF download: Operating Instructions Manual
Pfeiffer Vacuum TPU 1600 Operating Instructions Manual (44 pages)
Turbomolecular pump for corrosive gas processes
Brand:
Pfeiffer Vacuum
| Category:
Water Pump
| Size: 0 MB
Table of Contents
Inhalt
2
Table of Contents
2
Allgemeines
7
Wichtige Hinweise
7
Sicherheitsinstruktionen
9
Sicherheitshinweise zum Arbei
10
Produktbeschreibung
11
Technische Daten
13
Maße
14
Saugvermögen/Gasdurchsatz
14
Enddruck
15
Vorvakuumpumpe
15
Installation
16
Hinweis zur Installation
16
Hochvakuumanschluß
16
General Important Information 1.1 Safety Instructions 1.2 Working with Turbomolecular 1.2.1 Pumps; Safety Information 1.3 Product Description
18
Fore Vacuum Connection
18
Cooling
18
Water Cooling
18
Cooling Water Connection
19
Venting the Turbo Pump
20
Fitting the Venting Unit
21
Sealing Gas Connection
21
Adjusting the Sealing Gas Flow
22
Electrical Connection of the Turbo Pump
22
Circulatory Lubrication
23
Before the First Start
23
Before each Start
23
Switching on Procedure
23
Reset
24
Operating Characteristics under
25
Gas Load
25
Turbo Pump Heating
25
Switching off the Turbo Pump
26
Before Switching off
26
Switching off Procedure
26
After Switching off
26
Shutting down the Turbo Pump
27
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