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TG390M/420M Series
OSAKA VACUUM TG390M/420M Series Manuals
Manuals and User Guides for OSAKA VACUUM TG390M/420M Series. We have
1
OSAKA VACUUM TG390M/420M Series manual available for free PDF download: Instruction Manual
OSAKA VACUUM TG390M/420M Series Instruction Manual (55 pages)
Magnetically Suspended Compound Molecular Pump
Brand:
OSAKA VACUUM
| Category:
Water Pump
| Size: 1 MB
Table of Contents
Introduction
2
Features of Pump
2
Notation in this Manual
4
Safety
4
Mark and Symbol
5
Warranty and Liability
6
Copyright and Responsibilities
6
Definition of Eligible Worker
7
Handling Worker
7
Installation Worker
7
Operator
7
Maintenance Worker
7
Eligible Worker for each Chapter
8
Table of Contents
9
Contents
9
Workflow from Unpacking to Operation
11
Unpacking and Carriage
12
Unpacking
12
Checking of Pump Weight
12
Checking of Contents
13
Carriage
14
Handling of Pump
15
Using Gas
15
Usage Environment
16
External View and Dimensions
17
Name of Pump Part
19
Labels
21
Preparations before Installation
24
Strength of Equipment (Rapid Shutdown Torque)
24
Design of Chamber and Vacuum Piping
24
Fixing Method and Process
25
Pump Fixing Bolts
26
Fixing Method
27
Connecting the Peripheral Devices
30
Connecting of Exhaust Piping
30
Selection of Backing Pump
30
Installation of Backing Pump
30
Connecting of Purge Gas Piping
31
Connecting of Cooling Water Piping
32
Connecting of Controller and Cables
33
Operation
34
Confirmation before Operation
34
Notice During Operation
35
Touchdown
35
Pump Start-Up / Stop
35
Various Operation
36
Putting Gas into Vacuum Device
36
Start-Up Simultaneous with Backing Pump
37
Bake-Out
37
Using of Metal Band Heater (TG-MI Series)
38
Emergency off System
39
Emergency off (EMO) Circuits
39
Protection Signal
39
Troubleshooting
40
Check / Maintenance
41
Daily Check
41
Recommended Overhaul Interval
42
Low Speed Mode (TC011M Series)
42
Protective Bearing
43
Removal of Pump
44
Request of Overhaul / Repair
46
Storage / Scrap
47
Storage
47
Disposal
47
Specification
48
Model Code Explanation
51
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