Nikon NWL860INX Manuals

Manuals and User Guides for Nikon NWL860INX. We have 1 Nikon NWL860INX manual available for free PDF download: Manual

Nikon NWL860INX Manual

Nikon NWL860INX Manual (96 pages)

Wafer Loader

Brand: Nikon | Category: Laboratory Equipment | Size: 0.35 MB

Table of Contents

Table of Contents
4
Chaper 1 General Description

7
- Wafer Loader Model no
  7
- Summary
  7
- IFC Protection
  7
- Standard Compliance
  7
- Hardware and Setting
  8
Chaper 2 System Specification

9
- Communications Port
  9
- Control Mode
  9
- External Connection
  10
Chaper 3 Interface Specification

11
- Physical Interface (Common to All Ports)
  11
  - Interactive Signal Connection Circuit
    11
  - Connector
    11
  - Data Rate
    11
  - Pin Connection
    11
  - Synchronization System
    11
  - Transmission
    11
  - Connection
    11
- Character
  12
  - Character Length
    12
  - Format
    12
  - Start Bit
    12
  - Data Bit
    12
  - Parity Bit
    12
  - Stop Bit
    12
- Block Transfer Protocol
  13
  - System
    13
  - Transmission Control Character
    13
  - Protocol Parameter
    13
- Message
  14
  - Format
    14
  - Message Length
    14
  - Header
    14
  - Message Data
    14
  - Checksum
    14
  - Message Data
    17
- Message Protocol
  20
  - Detection of Double Block
    20
  - Handling of Multi-Block
    20
  - Multi-Transaction
    20
  - Size of Incoming Message
    20
  - Size of Outgoing Message
    20
- Examples of Data Link Protocol
  21
  - Normal Transmission and Receipt
    21
  - Contention
    21
Chaper 4 Communications Specification

23
- Compliance with GEM
  23
- List of SECS Messages to and from the Host
  28
- Functions Implemented in Communications with Host and Scenario
  30
  - Establishment of Communications
    30
  - Online Check
    30
  - Sample File Management
    30
  - Carrier File Management
    31
  - Equipment Information Management
    32
  - Event Report
    32
  - Control Mode Selection
    34
  - Remote Control
    36
  - Alarm Management
    36
  - Status Data Collection
    37
  - Error Message
    37
- Detailed Message Format
  39
  - Stream 1
    39
  - Stream 2
    45
  - Stream 5
    52
  - Stream 6
    52
  - Stream 7
    52
  - Stream 9
    64
- Definition of Message Variable (Data Item)
  68
  - Ackc5
    68
  - Ackc6
    68
  - Ackc7
    68
  - Ackc7A
    68
  - Alcd
    68
  - Aled
    69
- Alid
  69
- Altx
  71
- Ccode
  72
- Ceed
  75
- Ceid
  76
- Commack
  78
- Cpname
  78
- Cpack
  78
- Cpval
  78
- Datalenghth
  79
- Dataid
  79
- Drack
  79
- Eac
  79
- Ecdef
  80
- Ecid
  80
- Ecmax
  83
- Ecmin
  83
- Ecname
  83
- Ecv
  83
- Edid
  84
- Erack
  84
- Errw7
  84
- Grant6
  84
- Length
  84
- Lrack
  85
- Hcack
  85
- Mdln
  85
- Mexp
  85
- Mhead
  86
- Oflack
  86
- Onlack
  86
- Pparm
  86
- Ppgnt
  86
- Ppid
  87
- Rcmd
  87
- Rptid
  90
- Seqnum
  90
- Shead
  90
- Softrev
  91
- Svid
  91
- Svname
  92
- Units
  92
- VID
  92

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