MKS Granville-Phillips 274020 Manuals

Manuals and User Guides for MKS Granville-Phillips 274020. We have 1 MKS Granville-Phillips 274020 manual available for free PDF download: Instruction Manual

MKS Granville-Phillips 274020 Instruction Manual

MKS Granville-Phillips 274020 Instruction Manual (30 pages)

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Brand: MKS | Category: Control Unit | Size: 1 MB

Table of Contents

Table of Contents
5
Chapter 1 Introduction/Safety

7
- Definitions of Terms
  7
- Caution and Warning Statements
  7
- Electrical Shock
  8
- Explosion / Implosion
  9
- Overpressure
  9
- Temperature
  9
- System Grounding
  10
- Operation
  10
- Service Guidelines
  10
Chapter 2 Installation

11
- Receiving Inspection of Products
  11
- Vacuum System Connections
  11
- Electrical Connections
  12
- Grounding Requirements
  12
Chapter 3 Operation

15
- Theory of Operation
  15
- Filament Emission
  17
- Pumping Capacity
  17
- X-Ray Limit
  18
- Degas Procedure
  19
- Bakeout Procedure
  20
Chapter 4 Technical Information

21
- Operating Principle
  21
- Specifications
  22
  - Gas Species Effects
    22
  - Cathodes (Filaments)
    22
  - Pressure Indication
    23
  - Gauge Tube Sensitivity
    24
  - Gas Type Conversions
    24
  - Gas Sensitivity
    25
  - Gauge Specifications
    27
- Service Guidelines
  28

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