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mks 999 Quattro Series
User Manuals: HPS mks 999 Quattro Series Transducer
Manuals and User Guides for HPS mks 999 Quattro Series Transducer. We have
1
HPS mks 999 Quattro Series Transducer manual available for free PDF download: Operation And Maintenance Manual
HPS mks 999 Quattro Series Operation And Maintenance Manual (54 pages)
Multi-Sensor Transducer
Brand:
HPS
| Category:
Transducer
| Size: 0 MB
Table of Contents
Table of Contents
5
Package Contents
9
Symbols Used in this Manual
10
Safety Precautions
11
General Specifications
12
Feature and Control Locations
14
About the 999 Quattro Transducer
15
Typical Applications for the 999 Quattro Transducer
16
Installing the 999 Quattro Transducer
17
Quattro Transducer Installation
17
Location
17
Orientation
17
Contamination
18
Vacuum Connection
18
Electrical Connection
19
Input/Output Wiring
19
999 Quattro Transducer Electrical Connections Table
20
Relay Inductive Loads and Arc Suppression
20
Control and Status Pins Operation
21
Degas on (Pin 13)
21
Degas Status (Pin 9)
21
Filament Select (Pin 10)
21
Operation
22
999 Quattro Transducer Factory Defaults Table
22
RS-485 Protocol
23
Standard Addresses
23
Universal Addresses
23
Query and Command Syntax
23
Response Syntax (ACK/NAK)
24
RS-485 Command Set
25
Set up Commands
25
Active Filament - AF
25
Baud Rate - BR
26
Analog Output - DAC
26
Emission Current - EC
26
Factory Default - FD
26
RS Delay - RSD
27
Test RS485 - TST
27
Unit - U
27
User Tag - UT
27
Status Commands
28
Device Type - DT
28
Filament Status - FS
28
Firmware Version - FV
28
Hardware Version Microprocessor - HV
28
Hardware Version Power Supply- HVHC
28
Manufacturer - MF
29
Model - MD
29
Serial Number - SN
29
Time on - TIM1, TIM2
29
Transducer Status - T
29
Transducer Temperature - TEM1, TEM2
30
Pressure Measurement and Degas Commands
30
Filament Power - FP
30
Degas Power - DG
30
Pressure Reading - PR1, PR2, PR3, PR4
31
Set Point Commands
31
Set Point Value - SP1, SP2, SP3
32
Hysteresis Value - SH1, SH2, SH3
32
Set Point Direction - SD1, SD2, SD3
32
Enable Set Point - EN1, EN2, EN3
33
Enable Control Set Point - ENC
33
Set Point Status - SS1, SS2, SS3
33
Protect Set Point - PRO
33
Calibration Commands
34
Atmospheric Calibration - ATM
34
Vacuum Calibration - VAC
34
Atmosphere Span Calibration - ATS
34
Atmosphere Zero Calibration- ATZ
34
Atmospheric Piezo Absolute Pressure Output Calibration - ATD
35
Gas Correction - GC
35
Analog Output
36
DAC1 Pressure to Voltage Table
37
DAC2 Pressure to Voltage Table
39
Sensitivities Relative to Nitrogen
40
Gas Correction Factor Table
40
Degassing the Sensor
42
Leak Detection
43
Maintenance and Troubleshooting
44
Maintenance and Troubleshooting Table
44
Cleaning the 999 Quattro Transducer Case and Sensor Tube
45
Accessories
46
Notes
47
Warranty
48
Appendix: How the 999 Quattro Transducer Works
49
Hot Cathode Ionization Sensor
49
Piezo
50
Pirani Sensor
51
Micropirani Sensor
52
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