Heidelberg MLA150 Manuals

Heidelberg MLA150 Manuals

Manuals and User Guides for Heidelberg MLA150. We have 1 Heidelberg MLA150 manual available for free PDF download: User Manual

Heidelberg MLA150 User Manual

Heidelberg MLA150 User Manual (81 pages)

Brand: Heidelberg | Category: Mask Aligners | Size: 5 MB

Table of Contents

Table of Contents
3
1 Introduction

7
- About this User Guide
  7
- Contact
  8
- Related Documentation
  9
2 Safety

11
- Intended Use and Limitations
  11
- Conventions
  12
- Laser Safety
  12
- Electrical Safety
  14
- Other Risks During Operation
  15
- Interlock
  15
- Labels
  16
3 System Description

19
4 Wizard Description

31
- Overview: Exposure Wizard
  31
- Figure 13: Wizard Window Overview
  31
- Static Wizard Elements
  33
  - Menu Bar
    33
  - Tab Section
    33
  - Info Section
    34
- Substrate Representation
  37
5 System Startup

39
- Powering up
  39
- Powering down
  40
6 Job Setup

41
- Select Job
  42
- Select Substrate Template
  43
- Load Design
  44
  - Standard: First Exposure
    44
  - Standard: Alignment
    45
  - Series
    46
- Convert Design
  47
- Load Substrate
  49
- Draw Structures
  52
  - Draw Image
    53
  - Draw Line or Polygon
    54
  - Expose Crosses in Draw Mode
    55
- Setup Overlay Alignment
  56
- Expose Design
  60
- Unload Substrate
  66
- Figure 14: Unloading Options in Standard Mode and Series Mode
  66
7 System Utilities and Tools

69
8 Operator Maintenance and Troubleshooting

77
- Operator Maintenance
  77
- Troubleshooting
  78
- Teamviewer Software
  79

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