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SMC Networks XLG Series Operation Manual

High vacuum l type valve
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Doc. no.XL*****-OMI0010-E
High Vacuum L Type Valve
PRODUCT NAME
XLG Series
MODEL/ Series
Thank you for purchasing this SMC product.
Be sure to read this Operation Manual carefully and understand its contents before
operating this product to ensure the safety of the operator and this product.
Please refer to the drawing and other informative documents for the construction and
specifications of this product.
Further, ensure your operating environment satisfies the requirements specified for the
product.
Keep this Operation Manual available whenever necessary.

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Summary of Contents for SMC Networks XLG Series

  • Page 1 Doc. no.XL*****-OMI0010-E High Vacuum L Type Valve PRODUCT NAME XLG Series MODEL/ Series Thank you for purchasing this SMC product. Be sure to read this Operation Manual carefully and understand its contents before operating this product to ensure the safety of the operator and this product.

  • Page 2: Table Of Contents

    Contents Safety Instructions - - - - - - - - - - - - - - - - - - - - - - - - - - - - 1. Product Specific Precautions 1 - - - - - - - - - - - - - - - - - - - - - - - - - - - - (Precautions on Design, Selection, Mounting, Piping, Wiring, Maintenance) 2.

  • Page 3: Safety Instructions

    Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of “Caution,” “Warning” or “Danger.” They are all important notes for safety and must be followed in addition to International Standards (ISO/IEC)*1), and other safety regulations.
  • Page 4 Safety Instructions Caution 1.The product is provided for use in manufacturing industries. The product herein described is basically provided for peaceful use in manufacturing industries. If considering using the product in other industries, consult SMC beforehand and exchange specifications or a contract if necessary. If anything is unclear, contact your nearest sales branch.

  • Page 5: Product Specific Precautions

    1. Product Specific Precautions 1 Common Precautions 1 Be sure to read before handling. Design Warning ●All models 1. The material of the body and bonnet is A6063, and other metal components of the vacuum part are made of SUS304. The sealing material of the vacuum part is FKM as standard, but this can be changed to other materials (refer to “How to Order”).
  • Page 6 3. When installing heater accessories or mounting a heater, check insulation resistance at the actual operating temperature. A current leakage breaker or fuse should be installed. 4. If the valve is to be insulated, only the body should be insulated, excluding the bonnet part. 5.

  • Page 7: Product Specific Precautions

    2. Product Specific Precautions 2 Common Precautions 2 Be sure to read before handling Maintenance Parts SMC specified parts should be used for service.Refer to the construction drawing. 1. Replace the bonnet assembly when changing the sealant material. Due to the different materials used, changing only the seal may prove inadequate.
  • Page 8 Additional symbols of the seal materials Barrel FKM for ULTIC Seal material EPDM Kalrez Chemraz Perfluoro PLASMA ARMOR Combination No. 2101-80 4079 SS592 SS630 SSE38 1232-70 3310-75 UA4640 Symbol -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 -XU1 Note1) Due to the different materials used, changing only the seal may prove inadequate. Barrel Perfluoro is a registered trademark of MATSUMURA OIL Co.,Ltd.

  • Page 9: Specifications

    3. Specifications 3-1. Vale specifications Model XLG-16 XLG-25 XLG-40 XLG-50-1 XLG-63-1 XLG-80-1 XLG-100-1 XLG-160-1 Flange (valve) size Actuating type Double acting / pressurized to open/close Fluid Vacuum of inert gas Operating temperature 5 to 60 (5 to 150 for high temperature type) Atmospheric pressure to 1 x 10 Operating pressure Pa(abs) Conductance l/s...
  • Page 10 3-2. Heater specifications Item XL□-25 XL□-40 XL□-50 XL□-63 Rated voltage of the heater 90 to 240 ACV Heater assembly number XLA25-60S-1 XLA25-60S-1 XLA25-60S-2 No. of heater assemblies 1 pc. 1 pc. 1 pc. Initial power / 100 VAC 200/40 200/50 400/100 Power 200 VAC...

  • Page 11: Construction And Outer Dimensions

    4. Construction and Outer dimensions 4-1. Size 16, 25 and 40 Auto switch (option) Pilot port (Pressurized / Totally closed) Bonnet assembly (maintenance part) ① Body, external seal and accessories are not included. Magnet (option) Heater (option) Pilot port (Pressurized / Totally closed) ③...
  • Page 12 4-2．Size 50,63,80,100,160 φG Unit: mm Model XLG-50-1 10.5 10.5 XLG-63-1 76.5 XLG-80-1 45.5 XLG-100-1 270.5 XLG-160-1 12.5 - 11 - XL*****-OMI0010-E...

  • Page 13: Period And Scope Of Warranty

    5. Period and scope of warranty The warranty period is 3 million cycles (for size 16, 25 and 40), 2 million cycles (for size 50, 63 and 80) or 1 million cycles (for size 100 and 160) (under SMC endurance test conditions), 18 months after delivery or 12 months in service, whichever comes first.

  • Page 14: Parts Replacement Procedure

    6. Parts Replacement Procedure 6-1. Precautions Be sure to follow [1. Precautions 1] when disassembling the product for maintenance. Along with the precautions above, comply with the following precautions too. Warning • If it is expected that product materials may get stuck to the product, ensure safety is assured before handling.
  • Page 15 6-2. Replacement Procedure of the valve seal (O-ring) Step 1 Step 2 Step 3 ③ ① ② ④ Bottom of the release groove Size Size16,25 and 40 50,63,80,100 and 160 Wipe any dust off the Loosen the hexagon socket head cap screws Remove the O-ring from the gas O-ring groove...
  • Page 16 6-3. Replacement Procedure of the External Seal (O-ring) Step 1 Step 2 Step 3 ③ ① ② ④ Size 16,25,40 Size 50,63,80,100,160 Wipe any dust off the Loosen the hexagon socket head cap screws O-ring surface gradually in numerical order. Remove the O-ring from the mounting surface of the Note) For valve sizes larger than 50, pay...
  • Page 17 Revision history Ｃ Ｃ Ｃ Ｃ Construction Ｄ Ｄ Ｄ Ｄ Safety Instructions Ｅ Ｅ Ｅ Ｅ Limited warranty and Disclaimer 1st Printing :JP 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer.