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Apex Digital 5708009-C Generator User Manual

Apex generator user manual
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U S ER
MANUAL
Advanced Energy Industries, Inc.
1625 Sharp Point Drive
Fort Collins, CO 80525 USA
970.221.4670
technical.support@aei.com

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Summary of Contents for Apex Digital 5708009-C

  • Page 1 U S ER MANUAL Advanced Energy Industries, Inc. 1625 Sharp Point Drive Fort Collins, CO 80525 USA 970.221.4670 technical.support@aei.com...
  • Page 3 5708009-C...
  • Page 4 Written permission must be granted by: is a registered trademark of Advanced Energy Industries, Inc. Advanced Energy Industries, Inc. 1625 Sharp Point Drive Fort Collins, Colorado 80525 USA 5708009-C...

  • Page 5: Table Of Contents

    Environmental Specifications ........3-14 5708009-C Apex 1 to 5.5 kW Generator...
  • Page 6 Connecting Cooling Water ........5-4 5708009-C...
  • Page 7 Warranty Statement ......... . . 6-14 5708009-C...
  • Page 8 ® Advanced Energy 5708009-C...
  • Page 9 Harting type Han-Q connector ......... . 5-10 5708009-C...
  • Page 10 ® Advanced Energy 5708009-C...
  • Page 11 Global Support Locations ..........6-11 5708009-C...
  • Page 12 ® Advanced Energy 5708009-C...

  • Page 13: Chapter 1. Introduction

    The options installed on any Apex generator (that is, the configuration of the generator) are defined by an PIN number that is located on the serial number tag of the generator. Figure 1-1 is an example of a serial number tag. 5708009-C Apex 1 to 5.5 kW Generator Chapter...

  • Page 14: Using The Pin To Locate Information In The Manual

    • Throughout the manual, you will also see Configuration Notes similar to the following example. These configuration notes are placed at the beginning of many manual sections that provide option-specific information, and they provide information about the PIN position and option described in that section. These PIN positions 5708009-C...

  • Page 15: Using The Pin To Identify Apex Options

    Contact AE for any questions about availability of specific configurations. (For contact information, see “AE Customer Support” on page 6-11.) 5708009-C...
  • Page 16 B—1500 W C—2000 W D—3000 W E—4000 W F—5500 W G—8000 W H—10000 W J—5000 W K—1000 HALO L—1500 HALO M—3500 W N—7000 W For more information on power output and other specifications, see “Electrical Specifications” on page 3-5. 5708009-C...
  • Page 17 Apex Feature Position Input voltage Packaging 5708009-C Options, Descriptions, and Cross-References 0—208 V nominal, 187 to 229 Vac, 3 φ , 47 to 63 Hz, with breaker 1—400 V nominal, 360 to 440 Vac, 3 φ , 47 to 63 Hz, with breaker 2—reserved...
  • Page 18 1—Multidrop RS-485 with AE Bus (Currently NOT available) 2—DeviceNet (see “Host Port—DeviceNet” on page 4-72) 3—Profibus (see “Host Port—Profibus” on page 4-58) 4—exclusive option #1 5—DeviceNet (serial) 6—exclusive option #3 7—exclusive option #2 0—default (no secondary serial port) 1—RS 232 2—RS 485 5708009-C...
  • Page 19 User port options Output impedance On-board RF output connector location 5708009-C Options, Descriptions, and Cross-References A—no User port B—25-pin APEX standard (see “25-Pin Apex Standard User Port” on page 4-2) C—25-pin custom RFG compatible D—15-pin, exclusive option #2 (see “15-Pin User Port (Exclusive—Option D)”...
  • Page 20 J—5’ terminated, 4 conductor, SH with contact LS1 BF.F6 5+PE (30A) K—ODU connector with 20 degree rotation L—Harting Type Han-Q (16A) rotated 180 degrees M—6’,4 conductor with #10 ring lugs on each wire 0—no pulsing 1—pulse (see “Understanding and Setting Up Pulsing Output” on page 5-13) 5708009-C...

  • Page 21: Interpreting The Manual And Unit Labels

    Exceptions are port names, which simply begin with a capital letter (User port). • Commands (162) and command names (setpoint) appear in boldface lowercase letters. • Italic refers to any new or unfamiliar term. 5708009-C Options, Descriptions, and Cross-References 0—default (no CEX) 1—CEX add (see “To Use the Common Exciter (CEX) Feature (optional)”...

  • Page 22: Icons (Symbols)

    This box identifies hazards or unsafe practices that could result in personal injury. This box identifies hazards or unsafe practices that could result in product or property damage. The following symbols could appear on labels on your unit. 1-10 5708009-C...
  • Page 23 Apex 1 to 5.5 kW Generator Capacitor charge Hazardous Voltage Short circuit protected High voltage Protective earth ground Earth ground CE label 5708009-C 1-11...

  • Page 24: Safety

    • Verify that input line voltage and current capacity are within specifications before turning on the power supplies. • Use proper ESD precautions. • BE CAREFUL AROUND THIS EQUIPMENT PRODUCT SAFETY/COMPLIANCE Certain options of the Apex have been tested for and comply with the following Directives and Standards. 1-12 5708009-C...

  • Page 25: Directives And Standards

    Electronic Equipment For Use In Electrical Power Installations CSA C22.2 General Use Power Supplies—Industrial Products No. 107.1-95 This device must be installed and used only in compliance with the standards listed in addition to VDE 0113, EN 60204 (IEC 204), and applicable requirements. 5708009-C Description Description 1-13...

  • Page 26: Certification

    • Canadian Standards Association (CSA) (NRTL/C) • CE marking is self addressed by AE Compliance Engineering • EMC measurements verified by TÜV Product Services For more information, refer to the letter of conformance (US) or declaration of conformity (EU) accompanying the product. 1-14 5708009-C...

  • Page 27: Installation Requirements

    Ensure that all appropriate safety precautions are taken. RISK OF DEATH OR BODILY INJURY. Disconnect and LOCK-OUT/TAG- Out all sources of input power before working on this unit or anything connected to it. 5708009-C 1-15...

  • Page 28: Conditions Of Use

    • If your unit does not have a circuit breaker, install and operate it with a circuit breaker on the ac input to provide over current protection. The circuit breaker must have a trip value as specified in the line current section of Table 3-2. on page 3-5. 1-16 5708009-C...

  • Page 29: Chapter 2. Theory

    Mode selection is made through a designated pin in the interface connector or by receiving a command through a digital interface option. Cooling Apex generators are water-cooled only. 5708009-C Apex 1 to 5.5 kW Generator ™ matching networks and Chapter...

  • Page 30: Interlock

    Apex generator works. Following the diagram is an explanation of the diagram in a table to help the User utilize the Apex unit as well. Figure 2-1 and Table 2-1 describe the basic operation of the Apex generator. 5708009-C...
  • Page 31 This section is the main processor and data acquisition section. It Controller also provides host communications through an RS-232 port. (6) Sensor Electronics This section detects RF samples and sends them to the microprocessor. 5708009-C Amplifiers Measure Sensor Electronics RF Output...
  • Page 32 ® Advanced Energy 5708009-C...

  • Page 33: Chapter 3. Specifications

    For more information on using the PIN to identify information applicable to your Apex unit, see “Using this Manual to Find Information for Your Generator” on page 1-1. 5708009-C Apex 1 to 5.5 kW Generator Chapter...
  • Page 34 5.25 ″ (H) x 8.5 ″ (W) x 19.19 ″ (D) See Figure 5-1 on page 5-3 Note: The size of the unit depends on configuration of your Apex unit. These dimensions are for the drawing in Chapter 5. See Figure 5-1 on page 5-3. 18.2 kg (40 lbs.) No special requirements 5708009-C...
  • Page 35 PIN position 11. RF Connector location Note: Varies according to the option defined by PIN position 10. 5708009-C PIN Option—Specification A—ODU connector (see “ODU Connector” on page 5-7) B—Non-terminated 3 m, 4-conductor, shielded pigtail (see “NonTerminated, four-Conductor Pigtail” on page 5-8) C—Non-terminated 12¢, 4-conductor, pigtail (see...
  • Page 36 7—exclusive option #2 Female LIMO#EPL.00.250.NTN 0—3/8 BSP female 1—3/8 NPT adapters (adapters from 3/8 BSP female threads in the manifold)(increases unit length) 2—3/8 BSP to 1/2 ″ NPT For information on connecting the water, see “Connecting Cooling Water” on page 5-4. 5708009-C...

  • Page 37: Electrical Specifications

    Table 3-2. Input Power Specifications Description Line voltage Note: Varies according to the option defined by PIN position 3. 5708009-C PIN Option—Specification 0—on-board frame mount 1—Integrated rack-mount with blank panel 2—Integrated rack-mount with passive digital display 3—Integrated rack-mount with active digital display 4—exclusive option #1...

  • Page 38: Output Electrical Specifications

    • 3000 W/13.56 MHz—9 A/ φ ; 15 A breaker • 5500 W/13.56 MHz—15 A/ φ ; 25 A breaker PIN Option and Specification • Forward power • Load power • External feedback (dc bias, for example) 0—N/A 3—13.56 MHZ, ±0.005% 5708009-C...
  • Page 39 Note: Varies according to the option defined by PIN position 2. Delivered power into 3:1 VSWR loads Note: Varies according to the option defined by PIN 2. 5708009-C PIN Option and Specification A—1000 W B—1500 W C—2000 W D—3000 W E—4000 W F—5500 W...
  • Page 40 ± 0.25% of full-rated output, which ever is greater Less than 0.1% change in output power for 10% change in ac line voltage ° ° C to +40 ° ° C to +35 -40 dBc -50 dBc 5708009-C...

  • Page 41: Other Electrical Specifications

    Phase relationship (RF output inphase with the CEX input signal) 5708009-C PIN Option and Specification Approximately 2 s from ac-on to RF-on < 7 ms (6.4 ms typical) 10 µs until output decays to 1% of maximum rated value.

  • Page 42: Cooling Specifications

    (+40 ° C). For ≤ 3kW 7.6 1pm (2 gpm) For > 3kW 11.4 1pm (3 gpm) For ≤ 3kW 0.9 Bar (13psi) For > 3kW 2 Bar (29 psi) ± 0.005% ± 0.005% 5708009-C...
  • Page 43 Table 3-5. Cooling Specification (Continued) Description Maximum pressure rating Heat removal Contaminates 5708009-C Specification 6.9 Bar (100 psi) • For 1.5 kW, 3410 BTU/hour, 1000W at full rated output power • For 3 kW, 6825 BTU/hour, 2000W at full rated output power •...

  • Page 44: Graphical Representations Of Flow Rate

    ® Advanced Energy Graphical Representations of Flow Rate The following graph shows how flow (gpm) lessens as the pressure (psi) drops. Figure 3-1. Flow Rate vs. Pressure Drop 3-12 PSI y x Pressure drop (PSI) 82.83 5708009-C...
  • Page 45 It represents the inlet temperature rising as flow rate increases. Figure 3-2. Water flow vs. Inlet Temperature Note: 5513 = 5500W and 13.56 MHz 3013 = 3000W and 13.56 MHz 1513 = 1500W and 13.56 MHz 5708009-C Water Flow vs Inlet Temp Apex Generator Flow - gpm 5513...

  • Page 46: Environmental Specifications

    Class 1K4 80 kPa to 106 kPa 800 mbar to 1060 mbar (approximately 2000 m above sea level) Class 2K3 66 kPa to 106 kPa 660 mbar to 1060 mbar (approximately 3265 m above sea level) 5708009-C...
  • Page 47 “Using this Manual to Find Information for Your Generator” on page 1-1. Each of the option-specific sections of this chapter also contain PIN configuration notes, which help you confirm whether or not a particular section applies to your unit. 5708009-C Apex 1 to 5.5 kW Generator Chapter Chapter...

  • Page 48: Apex User Port Options

    For more information about the PIN and for a complete list of how PIN positions correspond to Apex product options, see Table 1-1. on page 1-4. This User port is the standard option. The User port uses a 25-pin, shielded, female, subminiature-D connector. Figure 4-1. User Port connector 25 Pin APEX Standard 5708009-C...

  • Page 49: Satisfying Minimal Requirements For The 25-Pin User Port

    Additionally, the chassis of the Apex generator must be tied to a local earth ground through an adequately sized copper grounding strap. PIN DESCRIPTIONS FOR THE 25-PIN USER PORT Table 4-1 provides the connector pin descriptions for this User port interface. The pin numbers are arranged in signal pairs. 5708009-C...
  • Page 50 0 to 10V = 0 to maximum rated power output as defined by configuration PIN position 2 in Table 1-1. See Wiring Diagram 4-1. for wiring diagram. Pin 16 must be grounded 5708009-C...
  • Page 51 Apex 1 to 5.5 kW Generator Table 4-1. User Port 25-Pin APEX Standard Pin Descriptions (Continued) Signal Return Name RF PWR ON SETPOINT 5708009-C Signal Description Type Digital When a positive voltage between input 4 and 30 V is applied to this pin RF output is enabled.
  • Page 52 PIN position 2 in Table 1-1. See Wiring Diagram 4-6. Note: When using this regulation feature, the setpoint must be given at pin 5 (SETPOINT). Setpoints cannot be established through the serial interface at this time. 5708009-C...
  • Page 53 Signal Return Name DC BIAS INPUT FWD/LOAD PWR REGULATION OVERTEMP RETURN INTERLOCK LOOP 5708009-C Signal Description Type Analog This pin is used in conjunction input with signal pin 6 to allow the generator to regulate its power based on an external feedback signal.
  • Page 54 See pin 3 output Digital See pin 4 input Analog See pin 5 input Chassis This pin represents DC ground ground connection common to chassis ground. Analog See pin 7 input Chassis Chassis ground connection ground common to dc ground 5708009-C...

  • Page 55: Wiring Diagrams For The Standard 25-Pin User Port

    DC BUS OK CEX LOCK RETURN WIRING DIAGRAMS FOR THE STANDARD 25-PIN USER PORT The diagrams in this section provide wiring information to properly connect to the Apex standard 25-pin User port. 5708009-C Signal Description Type Digital When an internal...
  • Page 56 ® Advanced Energy Wiring Diagram 4-1. Forward/Load power monitor (pins 3 and 16) Wiring Diagram 4-2. RFL PWR monitor (pins 2 and 15) 4-10 5708009-C...
  • Page 57 Apex 1 to 5.5 kW Generator Wiring Diagram 4-3. Setpoint (pins 5 and 18) Wiring Diagram 4-4. DC Bias Input (pins 7 and 20) 5708009-C 4-11...
  • Page 58 ® Advanced Energy Wiring Diagram 4-5. RF Power On (pins 4 and 17) Wiring Diagram 4-6. DC Bias/Power Regulation (pins 6 and 19) 4-12 5708009-C...
  • Page 59 Apex 1 to 5.5 kW Generator Wiring Diagram 4-7. FWD/Load Power Regulation (pins 8 and 21) Wiring Diagram 4-8. Setpoint Status (pins 14 and 1) 5708009-C 4-13...
  • Page 60 ® Advanced Energy Wiring Diagram 4-9. Overtemp (pins 22 and 9) Wiring Diagram 4-10. DC Bus OK (pins 24 and 11) 4-14 5708009-C...
  • Page 61 Apex 1 to 5.5 kW Generator Wiring Diagram 4-11. CEX Lock (pins 12 and 25) Wiring Diagram 4-12. Interlock Loop (pins 10 and 23) 5708009-C 4-15...

  • Page 62: 15-Pin User Port (Exclusive-Option D)

    For more information about the PIN and for a complete list of how PIN positions correspond to Apex product options, see Table 1-1. on page 1-4. This 15-pin User port option offers only basic control and monitoring capability. The User port uses a 15-pin, shielded, female, subminiature-D connector. 4-16 5708009-C...

  • Page 63: Satisfying Minimal Requirements For Option D 15-Pin User Port

    EMI shield in the cable must be terminated to the metal shells of the cable’s connectors. Additionally, the chassis of the Apex generator must be tied to a local earth ground through an adequately sized copper grounding strap. 5708009-C 4-17...

  • Page 64: Pin Descriptions For Option D User Port

    (when the generator is operated in forward power regulation mode) or the load power (when operated in load power regulation mode). (1 V per 1 kW forward/load power). See Wiring Diagram 4-14. 5708009-C...
  • Page 65 Name RF POWER ENABLE FORWARD/LOAD POWER SETPOINT SIGNAL COMMON RF ON STATUS EXTERNAL BIAS 5708009-C Signal Description Type Digital RF output is enabled when a 4 to input 30 V input (pin 9, RF ON BIAS, can be used as a voltage source) is present on this pin.

  • Page 66: Wiring Diagrams For Option D 15-Pin User Port

    Note: Pulsing parameters are set via the digital/serial interface. Digital Load Power Regulation is Input enabled when a 4 to 30V input is present on this pin. Note: Forward Power Regulation is the default. See Wiring Diagram 4-22. 5708009-C...
  • Page 67 Apex 1 to 5.5 kW Generator Wiring Diagram 4-14. Forward/Load Power monitor (pins 3 and 6) Wiring Diagram 4-15. Reflected power monitor (pins 2 and 6) 5708009-C 4-21...
  • Page 68 ® Advanced Energy Wiring Diagram 4-16. Forward/Load Power setpoint (pins 5 and 6) Wiring Diagram 4-17. RF power enable (pins 4 and 6) 4-22 5708009-C...
  • Page 69 Apex 1 to 5.5 kW Generator Wiring Diagram 4-18. RF on status (pins 7 and 6) Wiring Diagram 4-19. Power limit status (pins 1 and 6) 5708009-C 4-23...
  • Page 70 ® Advanced Energy Wiring Diagram 4-20. External bias (pins 8 and 6) Wiring Diagram 4-21. RF on bias (pins 9 and 6) 4-24 5708009-C...
  • Page 71 Apex 1 to 5.5 kW Generator Wiring Diagram 4-22. FWD/LOAD Power Regulation (pins 13 and 6) Wiring Diagram 4-23. Interlock (pins 11 and 6) 5708009-C 4-25...

  • Page 72: 15-Pin User Port (Exclusive-Option E)

    This 15-pin User port option offers only basic control and monitoring capability. The User port uses a 15-pin, shielded, female, subminiature-D connector. Unless otherwise specified, all analog signals are 0 to 10 V, while all digital signals are 0 to 15 V. 4-26 5708009-C...

  • Page 73: Satisfying Minimal Requirements For Option E 15-Pin User Port

    Additionally, the chassis of the Apex generator must be tied to a local earth ground through an adequately sized copper grounding strap. PIN DESCRIPTION FOR OPTION E USER PORT Table 4-3 provides the connector pin information for the User port interface. 5708009-C 4-27...
  • Page 74 (when operated in load power regulation mode). 0 to 10V = 0 to maximum rated power output as defined by configuration PIN in Table 1-1 position 3 in Table 1-1. See Wiring Diagram 4-26. 5708009-C...
  • Page 75 Apex 1 to 5.5 kW Generator Table 4-3. User Port (15-pin) Connector Pins Exclusive for Configuration E (Continued) Signal Return Name RF POWER ENABLE FORWARD / LOAD POWER SETPOINT 5708009-C Signal Description Type Digital This pin represents RF input output being enabled...
  • Page 76 DeviceNet LED and is connected to the emitter of an opto-coupler. The User must limit the current draw through this pin to 45mA or less. Note: Defined by DeviceNet Specification, Release 2.0 See Wiring Diagram 4-24. 5708009-C...
  • Page 77 Table 4-3. User Port (15-pin) Connector Pins Exclusive for Configuration E (Continued) Signal Return Name INTERLOCK INERLOCK RETURN NETWORK STATUS LED OUTPUT (GREEN) 5708009-C Signal Description Type When connected externally, these pins close the interlock and allows RF output to be enabled.

  • Page 78: Wiring Diagrams For Option E User Port

    DeviceNet LED and is connected to the emitter of an opto-coupler. The User must limit the current draw through this pin to 45mA or less. Note: Defined by DeviceNet Specification, Release 2.0 See Wiring Diagram 4-24. 5708009-C...
  • Page 79 Apex 1 to 5.5 kW Generator Wiring Diagram 4-24. DeviceNet LEDs (pins 1,10,13,14 and 15) Wiring Diagram 4-25. Reflected power monitor (pins 2 and 6) 5708009-C 4-33...
  • Page 80 ® Advanced Energy Wiring Diagram 4-26. Forward/Load Power Monitor (pins 3 and 6) Wiring Diagram 4-27. RF Power Enable (pin 4 and 6) 4-34 5708009-C...
  • Page 81 Apex 1 to 5.5 kW Generator Wiring Diagram 4-28. Forward/Load Power Setpoint (pins 5 and 6) Wiring Diagram 4-29. RF on status (pins 7 and 8) 5708009-C 4-35...
  • Page 82 ® Advanced Energy Wiring Diagram 4-30. +15 Vdc (pins 9 and 6) Wiring Diagram 4-31. Interlock (pins 11 and 12) 4-36 5708009-C...

  • Page 83: Apex Host Port Options

    AE manufactures an interface software, Virtual Front Panel, which allows you to use a computer to communicate with the Apex unit through the RS-232 AE Bus port. For more information about this software, or to obtain a limited-time evaluation copy, 5708009-C 4-37...
  • Page 84 1 on the other connector, pin 2 is connected to pin 2 and so on.) A cable meant to create an interface between two computers will NOT work in this connection. Note: To reduce EMI, avoid routing the cable close to ac input or dc output cables. 4-38 5708009-C...

  • Page 85: Rs-232, Ae Bus Host Port Cabling Requirements

    The time-out period for the Apex generator is factory set at 0.02 s (that is, no more than 0.02 s can elapse between bytes, or the unit will reset and begin looking for a new message packet). This value can be changed using command 40. 5708009-C Name Description...

  • Page 86: Ae Bus Protocol

    Figure 4-5. Graphic representation of a RS-232, AE Bus message packet 4-40 Data (0-255 bytes) 7 6 5 4 3 Optional 7 6 5 4 3 2 1 0 7 6 5 4 3 2 1 0 7 6 5 4 3 2 1 0 Checksum 1138 5708009-C...
  • Page 87 0 to 6 bytes of data. However, if the value in the Header field is 7, the Apex generator looks for an additional eight-bit byte after the Command field (the Optional field) and uses this value for the data byte count. 5708009-C 4-41...

  • Page 88: Creating An Ideal Communications Transaction

    Apex generator. Host Figure 4-6. AE Bus communications transaction First, the host computer sends a message packet to the Apex generator. The packet contains one of the following: • A command that requests data or status information 4-42 Apex generator 5708009-C...

  • Page 89: Host/Apex Communications Transaction Example

    If the Apex generator receives no response, it assumes an ACK and returns to the waiting state. HOST/APEX COMMUNICATIONS TRANSACTION EXAMPLE Figure 4-7 is a simplified graphic showing the steps in an example communications transaction between a host computer and an Apex generator. 5708009-C 4-43...

  • Page 90: Command Status Response (Csr) Codes-Rs-232, Ae Bus Host

    Wrong control mode Output is on Output is off Data is out of range User off active Active fault(s) exist Data byte count is incorrect CMD not accept T life Recipe active EPROM read/write Frequency out of range 4-44 Meaning 5708009-C...

  • Page 91: Command Set For The Rs-232, Ae Bus Host Port

    0 to the maximum feedback external feedback value. (Readback limit command is 171.) Note: This command sets the value at which the setpoint is limited during external regulation 5708009-C Number of Description Number of Host Data Response Bytes Data Bytes...
  • Page 92 Host Data Response Bytes Data Bytes 2 data bytes 16-bit value 3 data bytes 16-bit value 8-bit value 1 data byte 8-bit value 5 data bytes 8-bit value 32-bit value 1 data byte 8-bit value 2 data bytes 16-bit value 5708009-C...
  • Page 93 • 2 = joules mode Sets the Host port timeout value. Accepts a value of 2 to 500, representing 0.02 to 5.0 s. host port timeout (Readback command is 140.) value 5708009-C Number of Description Number of Host Data Response Bytes...
  • Page 94 For RS-232, send 1200, 4800, 9600, or 19200 For RS-485, send 9600, 19200, 38400, or 57600 Read back with CMD 212. 4-48 Number of Description Number of Host Data Response Bytes Data Bytes 3 data bytes 8-bit value 16-bit value 5708009-C...
  • Page 95 Explicit Fault clear Requests the generator type; returns 4 ASCII characters. supply type Requests the output capacity of the generator; returning packet contains 4 ASCII characters. supply size 5708009-C Number of Description Number of Host Data Response Bytes Data Bytes...
  • Page 96 Bytes Data Bytes 7 data bytes 7 ASCII characters 2 data bytes 16-bit value 1 data byte 8-bit value 1 data byte 8-bit value 1 data byte 8-bit value 1 data byte 4 data bytes 8-bit value 32-bit value 5708009-C...
  • Page 97 0 = current limit 1 = contactor failure 2 = Profibus error 3 = unassigned 4 = unassigned 5 = unassigned 6 = unassigned 7 = CEX is locked 5708009-C Number of Description Number of Host Data Response Bytes Data Bytes 4 data bytes 4—8-bit...
  • Page 98 Data Bytes 3 data bytes 16-bit value 8-bit value 2 data bytes 16-bit value 2 data bytes 16-bit value 2 data bytes 16-bit value 2 data bytes 16-bit value 2 data bytes 16-bit value 2 data bytes 16-bit value 5708009-C...
  • Page 99 Reports the allowable setpoint deviation Note: The response reports the percentage (1 to 99) and the supply can be out of setpoint before turning on the out-of- setpoint timer. 5708009-C Number of Description Number of Host Data Response Bytes...
  • Page 100 4-54 Number of Description Number of Host Data Response Bytes Data Bytes Varies; sends 4 data bytes for each recipe step 4 data bytes 32-bit value 2 data bytes 16-bit value 3 data bytes 3 ASCII characters 5708009-C...
  • Page 101 • bit 0 indicates ripple warning (0 = inactive, 1 = active) • bit 1 indicates ripple failure (0 = inactive, 1 = active) • bit 2 indicates temperature rate failure (0 = inactive, 1= active) 5708009-C Number of Description Number of Host Data Response...
  • Page 102 5 and 6 = unused bit 7 = communication protocol (0 = RS-232, 1 = RS-485) • Bytes 2 and 3 = baud rate 4-56 Number of Description Number of Host Data Response Bytes Data Bytes 3 data bytes 8-bit value 16-bit value 5708009-C...
  • Page 103 • 9 to 12: Process Status (see command 162 for definition) • 13,14: Cold Plate Temperature (see command 228 for definition) • 15,16: DC Voltage • 17,18: DC Current 5708009-C Number of Description Number of Host Data Response Bytes...

  • Page 104: Host Port-Profibus

    For more information about the PIN and for a complete list of how PIN positions correspond to Apex product options, see Table 1-1. on page 1-4. 4-58 Number of Description Number of Host Data Response Bytes Data Bytes 1 data byte 8-bit value 5708009-C...

  • Page 105: Ae Profibus Protocol

    Note: AE’s Profibus protocol does not support the following functions: address changing, freeze/unfreeze modes, or sync modes. Table 4-7 describes the Profibus Host port pins. Table 4-7. Profibus Host Port Pins Signal UNASSIGNED UNASSIGNED 5708009-C Name Data bus A Description 4-59...
  • Page 106 (descending order of significance). The switches are numbered 1 through 8. Switch 1 is the most significant byte (MSB), and switch 8 is the least significant byte (LSB). 4-60 Name Isolated ground Isolated +5 V Data bus B Description 5708009-C...

  • Page 107: Profibus Termination

    10 ms. Therefore, when using the Set_Prm function call, calculate the numbers for octet 2 and 3 accordingly. Remember, the values for octet 2 and 3 must not be equal to each other or be zero. Note: You can disable the watch dog timer through the Profibus master. 5708009-C 4-61...
  • Page 108 4. Send the download packet. 5. Repeat step 1, and continue as needed. By creating a procedure like this one, you can ensure the data for a command will not be changed before the next download packet is received. 4-62 5708009-C...

  • Page 109: Profibus/Apex Software Commands

    (“outbytes”) packet. The following list shows the response or “upload packet.” These bytes are also known as “inbytes.” Table 4-9. Configuration of Profibus Upload Packet (Inbytes) Byte Status flags—first byte Status flags—second byte Delivered power low Delivered power high 5708009-C Description Description 4-63...
  • Page 110 14 = Bus fault (high or low) 15 = Reserved 0 = Reserved 1 = Overtemperature condition 2 = Interlock mechanism open 3 = Momentary power failure 4 = Reserved 5 = Contactor not closed 6 = Reserved 7 = Output is on 5708009-C...
  • Page 111 13, the data field definition byte. Note that when the data extends over more than one byte, the Profibus sends the least significant byte (LSB) before the most significant byte (MSB). Byte 13 references the requesting command. 5708009-C 4-65...

  • Page 112: Profibus Command Set

    4-66 Description Number of Number of Transmit Response Data Bytes Data Bytes 1 data byte 8-bit value 2 data bytes 16-bit value 2 data bytes 16-bit value 2 data bytes 16-bit value 2 data bytes 16-bit value 5708009-C...
  • Page 113 (Readback command is 185.) Requests the generator type; returns 4 ASCII supply type characters. Requests the output capacity of the generator; supply size returning packet contains 4 ASCII characters. 5708009-C Description Number of Number of Transmit Response Data Bytes Data Bytes...
  • Page 114 Two decimals are implied— 100 = 1 kWh. 4-68 Description Number of Number of Transmit Response Data Bytes Data Bytes 5 data byte 5 ASCII characters 1 data byte 8-bit value 1 data byte 8-bit value 4 data bytes 32-bit value 5708009-C...
  • Page 115 0 = current limit 1 = contactor failure 2 = unassigned 3 = unassigned 4 = unassigned 5 = unassigned 6 = unassigned 7 = CEX is locked 5708009-C Description Number of Number of Transmit Response Data Bytes Data Bytes...
  • Page 116 2 data bytes 16-bit value 2 data bytes 16-bit value 2 data bytes 16-bit value 2 data bytes 16-bit value 2 data bytes 16-bit value 2 data bytes 16-bit value 2 data bytes 16-bit value 2 data bytes 16-bit value 5708009-C...
  • Page 117 Requests the amount of time (in seconds) that read run the generator was producing output. time Requests the total amount of energy (in kWh) read total delivered by the generator. energy output 5708009-C Description Number of Number of Transmit Response Data Bytes Data Bytes 1 data bytes...

  • Page 118: Host Port-Devicenet

    The DeviceNet connector is either a 5-pin, male, Lumberg, RSF 5/0.5m or Turck FS 4.5. Figure 4-9. DeviceNet connector Table 4-12 describes the DeviceNet port pin signals. Table 4-12. Host Port DeviceNet Pins Signal Name DRAIN 4-72 Description Shield DeviceNet supply DeviceNet supply 5708009-C...

  • Page 119: Devicenet Interface Characteristics

    The device supports the DeviceNet Duplicate MAC ID Check protocol. The device uses DeviceNet’s Group 2 I/O Poll Command message (and the associated Group 1 I/O Poll Response message) to transfer low-level I/O data between the device (slave) and the master. 5708009-C Description DeviceNet data transmit/ receive...

  • Page 120: Devicenet Rotary Switches: Baud Rate And Addressing

    One is labeled MOD and indicates module status. The other is labeled NET and indicates network status. Devicenet Module Status LED The MOD bi-color (amber/green) LED provides device status. It indicates whether the device has power and is operating properly. Table 4-14 shows the LED’s various states and meanings 4-74 5708009-C...

  • Page 121: Devicenet Network Status Led

    The NET bi-color (amber/green) LED indicates the status of the communication link. The following table shows the LED’s various states and their meanings. Table 4-15. Network Status LED Green (steady) 5708009-C State No power the unit is not receiving power.

  • Page 122: Devicenet Operation

    Communication has failed; that is, the unit has detected an error that has made it incapable of communicating on the network. Meaning • the unit has no established connections to other nodes • the unit is not allocated to the master. 5708009-C...
  • Page 123 0s. This changes the 16-bit AI to a 12-bit AI with a value of 10 V = OFFF Note: Power Output Setpoint values exceeding OFFF DeviceNet Response Message Table 4-17 represents the structure of the response message. 5708009-C Bit 5 Bit 4 Bit 3 Bit 2...
  • Page 124 Forward Power Sense AO (MSB) Reflected Power Sense A1 (LSB) Reflected Power Sense AI (MSB) Not Used AI (LSB) Not Used AI (MSB) Not Used AI (LSB) Not Used AI (MSB) INTS are limited to OFFF Bit 1 Bit 0 5708009-C...

  • Page 125: Apex Status Indicators (Leds)

    Indicator AC ON RF ON INTERLOCK POWER LIMIT 5708009-C Description This green LED indicates that ac power is available within the generator and all three phases are present. This green LED indicates that RF power is on (enabled). Depending on the selected setpoint value, RF power may or may not be present at the output connector.

  • Page 126: Apex Panel Illustrations

    In the event of an alarm condition, after correcting the fault condition, an RF OFF signal has to be given to reset the generator since the generator has turned off RF output. See “Troubleshooting guide” on page 6-1 for more information. 5708009-C...
  • Page 127 User port (connector varies) Circuit breaker (optional) AC input Figure 4-11. Front Panel 5708009-C Host port (connector Water out varies; two Host ports may be present) Water in Ground Output (connector varies; may be on...
  • Page 128 ® Advanced Energy LED status indicators (may be absent or on the rear panel) Figure 4-12. Rear panel 4-82 Output (connector varies; may be on front panel) 5708009-C...

  • Page 129: Chapter 5. Installation, Setup, And Operation

    5/16 ″ x 18 US). A suitable chassis ground connection made to either of these holes prevents or minimizes radio frequency interference. Note: For more information about grounding, refer to AE Application Notes titled Grounding p/n 5600031A. 5708009-C Apex 1 to 5.5 kW Generator Chapter Chapter...

  • Page 130: Spacing Requirements

    ® Advanced Energy Do not attempt to turn on power until the generator is grounded. Spacing Requirements The following diagram illustrates the spacing requirements in the installation of an Apex unit. 5708009-C...
  • Page 131 Apex 1 to 5.5 kW Generator Figure 5-1. Apex dimensions 5708009-C...

  • Page 132: Mounting The Generator

    Table 5-1 and Figure 5-2 provide the connector pin locations and descriptions for the water control connector on the generator. The signals on this connector may be used with an externally mounted water control solenoid to inhibit the flow of water to the 5708009-C...

  • Page 133: Connecting Output Power

    Table 5-1. Water Control Connector Pins 1 (center pin) 2 (outer pin) Connecting Output Power The generator must be installed so the output connections are inaccessible to the user. 5708009-C Description +24 V/1A (switched source to enable solenoid) +24 V return...

  • Page 134: Connecting Input Power

    PIN to identify and find information about your generator, see “Using this Manual to Find Information for Your Generator” on page 1-1). The following sections provide signal pin locations and connector illustrations to aid in properly connecting input. 5708009-C...

  • Page 135: Odu Connector

    For more information about the PIN and for a complete list of how PIN positions correspond to Apex product options, see Table 1-1. on page 1-4. Figure 5-5 shows the ODU input connector. The pin numbers are labeled in the illustration. 5708009-C...

  • Page 136: Nonterminated, Four-Conductor Pigtail

    Ground NONTERMINATED, FOUR-CONDUCTOR PIGTAIL The following section describes the nonterminated, four-conductor pigtail input options. To determine if your Apex unit has one of these options, use the configuration PIN from your Apex unit and the following Configuration Note. Description 5708009-C...

  • Page 137: Harting Type Han-Q Connector

    PIN is not counted as a position. The PIN option is the number or letter you should look for in the specified position.) For more information about the PIN and for a complete list of how PIN positions correspond to Apex product options, see Table 1-1. on page 1-4. 5708009-C...

  • Page 138: Connecting I/O And Auxiliary Connectors

    I/O and auxiliary connector options. Use the PIN from the Apex unit and Table 1-1. on page 1-4 to identify the options installed on the unit. (For more information, see “Using this Manual to Find Information for Your Generator” on page 1-1. 5-10 5708009-C...

  • Page 139: To Control The Generator Through A User Port

    User port. To determine which User port you have, see the information for PIN position 8 in Table 1-1. on page 1-4. 2. Connect and secure the appropriate serial cable to the Apex unit and the host (cable requirements are identified in the individual Host port sections). 5708009-C 5-11...

  • Page 140: To Use The Common Exciter (Cex) Feature (Optional)

    LIMIT LED flashes, the unit has detected an error, and you will not be able to turn RF output on. To troubleshoot an error condition, see Chapter 6, “Troubleshooting and Customer Support.” 4. Verify that the AC ON LED is lit. If it isn’t lit, see “Troubleshooting guide” on page 6-1. 5-12 5708009-C...

  • Page 141: Normal Operation

    Some Apex units have a pulsing option, which allows you to produce either pulsed RF output or standard, steady output. To determine if your Apex unit has this option, use the configuration PIN from your Apex unit and the following Configuration Note. 5708009-C 5-13...

  • Page 142: Understanding Pulsing

    Host port commands 193 and 196 read back these pulsing settings. Pulsing settings are not saved when the Apex unit is turned off. To return pulsing settings to default, cycle power to the Apex unit. 5-14 5708009-C...

  • Page 143: Chapter 6. Troubleshooting And Customer Support

    1. Ensure the power to the unit is off. 2. Check for visible damage to the unit, cables, and connectors. 3. Ensure all unit connectors are installed correctly and are fastened tightly. 5708009-C Apex 1 to 5.5 kW Generator Chapter...
  • Page 144 ® Advanced Energy 4. Check to determine whether any system-related circuit breakers have been tripped. 5. Ensure there is input power to the unit, and ensure the input power meets specifications. 6. Ensure ground connections are adequate and secure. 5708009-C...

  • Page 145: Troubleshooting Questions

    5. Is the RF ON LED flashing? – If yes, see “Alarm LED Lit” on page 6-4. – If no, go to step 6. 6. Is RF ON LED lit? – If yes, go to step 7. – If no, send RF OFF command. 5708009-C...

  • Page 146: Troubleshooting Procedures

    When flashing, this indicator shows that the internal cold plate temperature is approaching the shutdown limit. This state does not affect RF output. Take precautions by ensuring that the unit receiving proper cooling as outlined in the Coolant Specifications Section. See Table 3-5. on page 3-10. 5708009-C...

  • Page 147: Interlock Led Is Not Lit

    Verify cable continuity. Swap suspected cables or units with known good cables or units. If the problem cannot be isolated after trying these tips, contact AE Global Support. 5708009-C...

  • Page 148: External Load Checks - Open/Short Rf Output Path

    2. Has any work been done recently on the chamber? 3. Have there been any changes in your process recently? 4. Is your reflected power readings close to the Apex reflected power limit? See “Electrical Specifications” on page 3-5. 5708009-C...

  • Page 149: Error Codes

    E004 This error is the same as when the Overtemp LED Over is on solid, Temperature Shutdown 5708009-C Solution To avoid this error, you can disable the timer, increase the amount of allowable time, or try to...
  • Page 150 If you receive one of these error codes, make sure that your input voltage is within specification see “Electrical Specifications” on page 3-5 and send RF OFF command to reset the error code. Call AE Global Support Call AE Global Support. 5708009-C...
  • Page 151 Temperature plate temperature is changing. If the temperature Rate Threshold increases too fast, the Apex generator protects itself error by shutting the output off. 5708009-C Solution Make sure that the RF output cover is firmly attached and ensure the interlock pins on the User port are satisfied.
  • Page 152 4-58. To recover from the “off state,” have a Profibus master establish communications with the Apex unit and send a “master reset” to clear the Apex unit’s display. See “Host Port— Profibus” on page 4-58. Call AE Global Support. 5708009-C...

  • Page 153: Ae Customer Support

    1007 Laurel Oak Road Voorhees, NJ 08043 USA AE, California 491 Montague Expressway Milpitas, CA 95035 USA AE, Austin 8900 Cameron Road Suite 100 Austin, TX 78754 5708009-C Solution Call AE Global Support. Call AE Global Support. Telephone Phone: 800.446.9167 or 970.221.0108 or 970.221.0156...

  • Page 154: Returning Units For Repair

    Such technical consultation is always available at no charge. 6-12 Telephone Phone: 49.711.77927.0 Fax: 49.711.7778700 Phone: 81.3.32351511 Fax: 81.3.32353580 Phone: 82.31.705.1200 Fax: 82.31.705.276 Phone: 44.1869.320022 Fax: 44.1869.325004 Phone: 886-2-82215599 Fax: 886-2-82215050 Phone: 86-755-3867986 Fax: 86-755-3867984 5708009-C...

  • Page 155: Warranty

    This consultation call will allow Customer Support to determine if the unit must actually be returned for the problem to be corrected. Such technical consultation is always available at no charge. 5708009-C ® products are thoroughly 6-13...

  • Page 156: Warranty Statement

    12 months after the date the goods are shipped from AE. In all cases, the seller has sole responsibility for determining the cause and nature of the failure, and the seller’s determination with regard thereto shall be final. 6-14 5708009-C...
  • Page 157 AC power input 4-43 4-43 acknowledgement AE Bus port 4-40 protocol 4-80 alarm 1-7, 2-3 analog I/O Apex configuration 5708009-C block diagram explanation bus host serial communications 1-14 certification 3-10 CEX in CEX lock (pins 12 and 25) 3-10 CEX out 4-41...
  • Page 158 2-2, 4-79 interlock Interlock Loop (pins 10 and 23) interpreting the manual introduction line current efficiency 3-12 5-10 5-10 4-40 4-58 4-37 4-38 4-59 1-10 1-15 1-15 4-3, 4-17, 4-27 4-15 5708009-C...
  • Page 159 User port 15 pin Configuration E 4-32 schematics for User port 15 pin configuration E 4-32 schematics for User port 15-Pin connector for configuration D 1-12 4-66 4-66 4-59 4-60 4-62 4-60 4-63 4-63 4-61 4-61 4-60 4-63 4-61 4-12 4-10 4-20 5708009-C...
  • Page 160 User port pin descriptions warm up warranty authorized returns returning units 6-14 statement water control connector water control connector pins water fitting threads water flow vs inlet temperature water solenoid water solenoid connector (optional) 4-43 4-64 1-10 4-18 6-13 6-13 3-13 5708009-C...

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