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Summary of Contents for Energetiq LDLS EQ-99
- Page 1 Model EQ-99 ™ LDLS Laser-Driven Light Source Operation and Maintenance Manual Revision 4 August 2011 Part Number DOC-4957...
- Page 2 Energetiq and shall not be reproduced in whole or in part without the written consent of Energetiq. The content of this manual is subject to change without notice.
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Page 3: Declaration Of Conformity
Declaration of Conformity We, the manufacturers Energetiq Technology Inc. 7 Constitution Way Woburn, Massachusetts USA hereby declare that the product family LDLS™ Laser-Driven Light Source Model EQ-99 High Brightness Broadband Light Source is in conformity with the requirements of the following standards... -
Page 5: Table Of Contents
TABLE OF CONTENTS Chapter 1..............................1 General Information........................... 1 Safety............................... 1 Chapter 2..............................7 Description ............................7 General ............................7 Specifications..........................7 System Description ........................9 Power Supply Controller......................10 Lamp House..........................12 Chapter 3..............................15 Installation............................15 Unpacking............................ 15 Connections.......................... -
Page 7: Chapter 1
The EQ-99 controller utilizes an internal Class 4 IR laser capable of causing severe injury to eyes or skin. Do not open or attempt to service this unit. Contact Energetiq regarding any problems with the unit. EQ99 Operation Manual Rev. 4... - Page 8 Other than a bulb replacement, there are no user-serviceable parts inside the EQ-99. For any problems encountered during operation, please contact Energetiq Technology for assistance. If there is a component failure, do not attempt to open the Power Supply Controller or Lamp House enclosure of the EQ-99.
- Page 9 Lamp House or Power Supply Controller enclosure. The unit must not be operated if the covers are removed or it is defective in any way. Contact Energetiq if any problems with the equipment are suspected. Labels and Safety Notification The following safety labels appear on the product.
- Page 10 Manufacturer’s identification label – gives the manufacturer’s name and address, and the model, serial number, and date of manufacture of the equipment. Explanatory label – states the classification of the laser product. Class 1 is the lowest hazard level classification. Certification label –...
- Page 11 Manufacturer’s Non-interlocked Certification ID Label Housing Label Label LASER DRIVEN LIGHT SOURCE Explanatory Label UV Hazard Non-interlocked Warning Label Housing Label Figure 1: Safety Label Locations Safety Interlocks The EQ-99 is equipped with interlocks to prevent operation of the device when the following conditions are present 1.
- Page 12 External Interlock External interlock pins are provided for the customer’s use (see Chapter 3 for connection details). Any suitable normally-open contact or solid-state switch can operate the interlock circuit. The interlock circuit must be connected to enable the operation of the unit. Should the interlock connection open during operation or standby, the source is immediately disabled, and all light output from the aperture ceases.
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Page 13: Chapter 2
C h a p t e r 2 DESCRIPTION General The EQ-99 is a broad-band lamp system for use in a wide variety of applications. The lamp produces high brightness, broad-band light from DUV wavelengths through visible and beyond. The output is very stable, and has a long lifetime before any service is required. A simple control interface ensures ease of use. - Page 14 EQ-99 D2 Lamp 0.01 0.001 Wavelength, nm Figure 2: Typical Output Spectrum Physical Specifications Dimensions (H x W x D) • Lamp House: 82 x 86 x 76 mm (3.2 x 3.4 x 3.0 in) • Power Supply Controller: 140 x 108 x 254 mm (5.5 x 4.2 x 10.0 in) Weight •...
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Page 15: System Description
• Type: Optocoupler LED • Logic: Active High • Input voltage: 5VDC • Input current: 8mA Digital Outputs • Type: Open collector to ground (digital common) • Logic: Active Low • Voltage: 30VDC max. • Sink current: 30mA max. User Power •... -
Page 16: Power Supply Controller
I/O Interface Power Supply Connector Controller Status Indicators Lamp Power Input House Connector Lamp House Signal Connector Armored Laser Optical Fiber Output Figure 3: EQ-99 Lamp System Power Supply Controller The Power Supply Controller contains: • IR Diode Laser • Laser power supply •... - Page 17 Provides access to control and status signals. See Chapter 3 for pin assignments and functions. This is the only operator interface to the EQ-99 – there are no local controls. Energetiq offers the EQ-99-RC Remote Control Module which connects to the Input/Output connector and provides a means of local control.
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Page 18: Lamp House
Power Input Connector This is the input connector for 24 VDC power. Power can be provided using the optional EQ- 99-PS001 (US and Japan) or EQ-99-PS002 (Europe). Alternatively, the EQ-99 can be powered directly from a customer provided 24VDC power supply. See Chapter 3 for detailed information. - Page 19 Signal Connector (to Controller) Laser ON Indicator Lamp Window Purge Gas Port Lamp mounting flange Laser Input (SMA-type) Figure 4: Lamp House Assembly External features (refer to Figure 4): Lamp Window The lamp window at the optical output provides protection from the high pressure bulb inside the Lamp House.
- Page 20 Laser Input This is the inlet connector for the armored fiber from the Power Supply Controller. It contains a set of interlock pins that disable the laser when the SMA connector is not properly in place. Laser On Indicator This LED is illuminated when the laser is ON. J4 Signal Connector (mini D sub –...
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Page 21: Chapter 3
1) I/O cable with 15 pin D- connector at each end 1) 24 VDC Power Supply (universal input voltage) If any part is missing or appears damaged, contact Energetiq immediately. Do not attempt to substitute any parts. There are no user-serviceable parts inside the EQ-99 Lamp House or Power Supply Controller unit. - Page 22 Purge Gas Purge gas is optional but is recommended for best performance. With no purge, ozone will form from atmospheric oxygen and attenuate the light output in the 220 – 280nm band. In addition, atmospheric oxygen and water vapor will attenuate the output below 200nm. If required, connect a source of nitrogen purge gas to the port on the Lamp House.
- Page 23 Figure 5: Lamp House mechanical layout EQ99 Operation Manual Rev. 4...
- Page 24 EQ99 Operation Manual Rev. 4...
- Page 25 Signal Connections The EQ-99 is controlled through the remote I/O connector. Table 3 gives the pin assignments and functions for this interface. Connect to the user’s control system using a suitable cable. Mating connector is a standard high-density 15-pin d- sub male (for example, Amp part no.
- Page 26 5V Power Pin 5 Isolated 0.1uF 5VDC supply Contact or Inputs solid-state switch Pins 11, 12, 13 0.1uF Outputs Load Pins 1, 2, 3, 4 5V Return Pins 6, 7, 8, 9 5V Power Pin 5 Isolated 0.1uF 5VDC supply Contact or Inputs solid-state switch...
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Page 27: Installation Procedure
This is done to minimize the possibility of debris or particles contaminating the end of the laser fiber. Energetiq strongly recommends leaving the laser fiber connected, unless it is necessary to disconnect it for installation or routing of the laser fiber. If the laser fiber must be disconnected, apply SMA caps immediately to both ends, and follow directions on inspection and cleaning of the laser fiber described in Chapter 5. - Page 28 The system is now ready to operate. EQ99 Operation Manual Rev. 4...
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Page 29: Chapter 4
C h a p t e r 4 OPERATION Starting Once the lamp is set up properly, verify that all personnel that will be in contact with the lamp system are aware of the potential hazards involved. It is the responsibility of the user to verify that the lamp is being used safely. - Page 30 EQ99 Operation Manual Rev. 4...
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Page 31: Chapter 5
Fiber Cleaning Basics: • The LDLS laser fiber connector is carefully inspected and is clean prior to shipment. Energetiq strongly recommends leaving the laser fiber connected, unless necessary for installation or routing of the laser fiber. • Leave Laser Fiber SMA connected whenever possible. - Page 32 Start Start Inspect Fiber end Inspect Fiber end Inspect Fiber end Inspect Fiber end Inspect Fiber end Inspect Fiber end Clean Fiber Lint Clean Fiber Lint Clean Fiber Clean Fiber Is fiber end Is fiber end Is fiber end Is fiber end Clean Fiber Clean Fiber Is fiber end...
- Page 33 Figure 10: Westover FVD-2400 Benchtop USB/PC Operated Fiber Viewer Examples of Fiber Images Figure 11: Fiber End Images EQ99 Operation Manual Rev. 4...
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Page 34: Troubleshooting
• If all of the interlocks are OK and either the lamp or controller interlock faults will not clear, please contact the factory. Condition: Lamp fails to ignite after several tries. Action Contact Energetiq. EQ99 Operation Manual Rev. 4... -
Page 35: Lamp Replacement
Lamp Replacement Contact Energetiq if a bad lamp is suspected. EQ99 Operation Manual Rev. 4... - Page 36 EQ99 Operation Manual Rev. 4...
- Page 38 Energetiq and shall not be reproduced in whole or in part without the written consent of Energetiq. The content of this manual is subject to change without notice.
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