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OWNERS
High-powered solutions for RF and microwave applications
MANUAL
PROCESS OPTIMIZED RF POWER SYSTEMS AND COMPONENTS
SERIES PB-3
13.56 MHz RF POWER SYSTEM
OWNERS MANUAL
CUSTOMER
DATE
SERIAL #
COPYRIGHT MANITOU SYSTEMS, INC. 2002
Part # 00800077 r-1
File # PB3 manual- 100_300W digital MSI
Manitou Systems, Inc.
12 South Street Danbury, CT 06810
Office Tel.203.792.8797 Fax.203.792.7097
Web: www.manitousys.com
Email: info@manitousys.com
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Summary of Contents for Manitou Systems PB-3 SERIES
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Page 1: Owners Manual
SERIES PB-3 13.56 MHz RF POWER SYSTEM OWNERS MANUAL CUSTOMER DATE SERIAL # COPYRIGHT MANITOU SYSTEMS, INC. 2002 Part # 00800077 r-1 File # PB3 manual- 100_300W digital MSI Manitou Systems, Inc. 12 South Street Danbury, CT 06810 Office Tel.203.792.8797 Fax.203.792.7097 Web: www.manitousys.com... - Page 2 Manitou Systems, Inc. reserves the right to make product changes and enhancements without notification or obligation. For more information, please write Manitou Systems, Inc. 12 South Street Danbury, CT 06810 USA or contact us via: • Telephone at (203) 792-8797 •...
- Page 3 SERIES PB-3 13.56 MHz RF Power System TABLE OF CONTENTS SECTION 1 INTRODUCTION General Description Icon Explanations Mechanical Description Technical Specifications Safety Precautions Theory of Operation SECTION 2 INSTALLATION Unpacking Your PB-3 System Components List Mechanical Installation Electrical Installation SECTION 3 OPERATION Front Panel / Operator Controls &...
- Page 4 SERIES PB-3 13.56 MHz RF Power System INTRODUCTION SECTION 1 GENERAL DESCRIPTION ICON EXPLANATIONS MECHANICAL DESCRIPTION TECHNICAL SPECIFICATIONS SAFETY PRECAUTIONS THEORY OF OPERATION GENERAL DESCRIPTION The budget minded SERIES PB-3 is specifically designed for continuous operation in gas plasma process applications. The RF power generator and manual impedance matching network are both housed in a single, compact enclosure.
- Page 5 SERIES PB-3 13.56 MHz RF Power System ICON EXPLANATIONS This symbol is used only where an immediate hazard exists. WARNING When this word is used, immediate danger exists and special precautions are necessary to prevent possible injury, death or significant property damage. This symbol is used when unsafe operating or service CAUTION practices could result in damage to the equipment...
- Page 6 SERIES PB-3 13.56 MHz RF Power System TECHNICAL SPECIFICATIONS: SYSTEM LEVEL Input Power PB3/100 110 VAC, 50/60 Hz, 1 Phase, 5A Max PB3/100 220 VAC, 50/60 Hz, 1 Phase, 2.5A Max PB3/300 220 VAC, 50/60 Hz, 1 Phase, 5A Max Cooling Forced air via a 110-CFM fan.
- Page 7 Proper use and safe operating practices with respect to this system are the responsibility of the user of this system. Manitou Systems, Inc. provides information on its products and associated hazards, but it assumes no responsibility for the after-sale operation and safety practices;...
- Page 8 SERIES PB-3 13.56 MHz RF Power System THEORY OF OPERATION The Series PB-3 is a fixed frequency plasma power system consisting of an RF generator and a manual impedance matching network. RF GENERATOR The RF generator is comprised of a DC power section, operator/control panel, switch mode RF power generator module and an RF power detector module.
- Page 9 ELECTRICAL INSTALLATION UNPACKING Remove the unit from its packing and shipping material. Inspect for any damage and contact Manitou Systems Inc. and the shipping company if any is found. High-powered solutions for RF and microwave applications Corporate Headquarters: 12 South Street Danbury, CT 06810...
- Page 10 SERIES PB-3 13.56 MHz RF Power System SYSTEM COMPONENTS LIST PB-3 System DB-25 User Interface Connector with Hood Owners Manual MECHANICAL INSTALLATION The Model PB-3 RF power system is designed to mount near the vacuum chamber RF feed- through in a standard 19" rack. It requires 7" of height in the rack. Alternately, it may be fastened to the system chassis using the four (4) 10-32 mounting holes in the baseplate.
- Page 11 SERIES PB-3 13.56 MHz RF Power System CONNECTING THE PB-3 The following installation steps will help the user understand how to connect the PB-3 to a plasma processing system. 1. The PB-3 is connected to an AC power source, 115 VAC or 220 VAC, 50/60 Hz via its three (3) conductor (grounded) cord.
- Page 12 SERIES PB-3 13.56 MHz RF Power System external control is to be used. This signal is referenced to pins 17 & 18 on the interface connector. A continuous contact closure is required to control the RF on/off function. This switch is connected to the user interface connector between pins 1 &...
- Page 13 SERIES PB-3 13.56 MHz RF Power System or 300 watts full scale) is displayed on the top meter, the reflected power (30W full scale) is displayed on the center meter, and the DC Bias (1kV full scale) is displayed on the bottom meter. Setpoint Control Knob: This ten (10) turn control pot enables the operator to set and vary the Forward RF Power output or DC Bias.
- Page 14 SERIES PB-3 13.56 MHz RF Power System • Pin 14 Remote Control Select (connect to pin 16 to enable remote setpoint control) • Pin 15 Local Control Select (connect to pin 16 to enable local [front panel] setpoint control) • Pin 16 Control Select Common •...
- Page 15 SERIES PB-3 13.56 MHz RF Power System PRELIMINARY CHECKS BEFORE TURNING ON THE RF POWER Prior to turning the RF Power On, preset and stabilize all process parameters such as vacuum chamber pressure and process gas flow. Turn on all cooling water channels (to electrode or cathode). Ensure that all RF connections and system grounds are tight.
- Page 16 SERIES PB-3 13.56 MHz RF Power System TROUBLESHOOTING PROCEDURES SECTION 4 RF GENERATOR PROBLEMS IMPEDANCE MATCHING NETWORK/TUNING PROBLEMS RF GENERATOR PROBLEMS • If the cooling fan does not start check the AC mains circuit. Is it operational? Is the PB3 power cord inserted properly into the rear panel connector? Is the AC Mains switch turned on? If all of the answers are yes, the problem may be a blown fuse on the control power supply.
- Page 17 It should also be noted that the PB3 is designed to mount close to the plasma source and utilize a coaxial cable not longer than 6’ in length. (Manitou Systems offers high current Teflon based cables in various lengths and with various connector styles to complement the user’s application.
- Page 18 SERIES PB-3 13.56 MHz RF Power System Tap #4 – Least Inductance Tap #3 – Medium Inductance Tap #2 – Medium Inductance Tap #1 – Most Inductance PB3 Matching Network Section Inductor Tap Selection MAINTENANCE PROCEDURES SECTION 5 CLEANING OF DEBRIS FRONT PANEL CLEANING CLEANING OF DEBRIS After continued use, the PB-3 will build up dust and debris around the air intake and exhaust...
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