Summary of Contents for Gatan 656
- Page 1 Dimple Grinder, Model 656 User’s Guide Gatan, Inc. 5933 Coronado Lane Pleasanton, CA 94588 (925) 463-0200 FAX (925) 463-0204 November 1998 Revision 2...
- Page 2 Part Number: 656.82002...
- Page 3 Preface About this Guide This Dimple Grinder User’s Guide is written to provide procedure for the installation of the unit, instruction on basic operations of the unit, procedures for routine maintenance and servicing, and specifics for troubleshooting. The Guide provides the following comment: Note: Used to highlight advice directed at getting the best performance from the equipment.
- Page 4 fitness for a particular purpose. Gatan, Inc., further reserves the right to revise this manual and to make changes to its contents at any time, without obligation to notify any person or entity of such revisions or changes.
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Page 5: Support
Support Contacting Gatan Technical Support Gatan, Inc. provides free technical support via voice, Fax, and electronic mail. To reach Gatan technical support, call or Fax the facility nearest you or contact by electronic mail: • Gatan Inc., USA (West Coast) - Page 6 Dimple Grinder User’s Guide...
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Page 7: Table Of Contents
Table of Contents Preface i Support iii Table of Contents v List of Figures vii Dimple Grinder, Model 656 1 1.0 Overview 1 2.0 Installation 2 3.0 Description 2 3.1 Control Panel 2 3.2 Measuring Devices 2 3.3 Counterweight 4 3.4 Specimen Rotation Axis 5... - Page 8 4.9 Double-Sided Dimpling 21 4.10 Specimen Removal 21 4.11 Taper Sections 22 5.0 Performance Check 22 5.1 Arm Pivot Friction 23 5.2 Zero Counterweight Scale 23 5.3 Eccentricity (Run-Out) 24 5.4 Vertical Movement of the Specimen Turntable 26 5.5 Grinding Wheel Alignment 26 5.6 Microscope alignment 27 5.7 Zero Stop Adjust 28 6.0 Electrical Control System 29...
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Page 9: List Of Figures
List of Figures Figure 1 Dimple Grinder, top view. 3 Figure 2 Measuring devices. 4 Figure 3 Grinding wheel rotation axis. 5 Figure 4 Wheel position alignment. 6 Figure 5 Wheel types. 7 Figure 6 Stereo microscope. 9 Figure 7 Specimen mounts. - Page 10 viii Dimple Grinder User’s Guide...
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Page 11: Dimple Grinder, Model 656
Dimple Grinder, Model 656 1.0 Overview The Gatan Model 656 Dimple Grinder is a precision instrument used to produce circular dimples (spherical or flat-bottomed profile) in materials such as ceram- ics, semiconductors, metals, and combinations thereof. The principle applica- tion is in the preparation of TEM specimens. When specimens are mechanically... -
Page 12: Installation
Installation 2.0 Installation The Dimple Grinder operates from the standard mains voltage with no other external services or utilities necessary. However, for reproducible high-quality results, the Dimple Grinder must sit on a flat, vibration-free surface in a rela- tively clean environment. The Counterweight is packed separately and should be attached by screwing it into position on the Platform. -
Page 13: Figure 1 Dimple Grinder, Top View
Description Figure 1 Dimple Grinder, top view. 1. Zero stop 11. Power On indicator 2. Raise/lower cam control 12. Speed control (wheel) 3. Analog dial indicator 13. Autoterminator control 4. Autoterminator socket 14. Dimple depth zero 5. Pivot platform 15. Dimple wheel axle 6. -
Page 14: Counterweight
Description Figure 2 Measuring devices. Analog dial indicator Raise/lower cam control Micrometer drive The Dial Indicator provides indication of contact between grinding wheel and specimen and presents an analog display of dimpling progress. The Micrometer Drive provides a digital readout for setting desired dimple depth or final specimen thickness. -
Page 15: Specimen Rotation Axis
Description 3.4 Specimen Rotation Axis The grinding wheel rotation axis (horizontal) is exactly orthogonal to and inter- sects the specimen rotation axis(vertical). Producing a good dimpled specimen requires the point of contact between specimen and grinding wheel to be on the specimen rotation axis directly below the intersection of the two axes. -
Page 16: Figure 4 Wheel Position Alignment
Description Figure 4 Wheel position alignment. Large grinding wheel β Pivot point Standard of rotating grinding grinding arm wheel Specimen Large Standard grinding wheel grinding wheel contact point contact point Specimen mount Specimen rotation axis Grinding Wheels The grinding wheels are phosphor bronze, available with spherical or flat edges. The spherical-edged wheel permits more accurate positioning of dimples and produces a spherical profile with a smaller thin area. -
Page 17: Figure 5 Wheel Types
Description Figure 5 Wheel types. Spherical rim grinding wheel, 10 mm, 15 mm, and 20 mm Flat rim, grinding wheel, 15 mm only Grinding wheel Dimple wheel axle Spherical Flat Thumb screw Dimple Durlon rim wheel polishing wheel axle 10 mm, 15 mm, and 20 mm Thumb screw... -
Page 18: Raise/Lower Cam
Description moistened with water or a solvent (e.g., acetone) if the contamination is difficult to remove. 3.6 Raise/Lower Cam The Raise/Lower Cam allows the Platform (and the grinding wheel) to be very gently lowered and must always be used to raise or lower the Platform through the final part of its movement. -
Page 19: Specimen Mounts
Description Figure 6 Stereo microscope. View through microscope Microscope field-of-view, Align circular spot with microscope crosshairs Circular spot generated by grinding wheel X left adjust Adjustment tool Y adjust X right adjust Specimen mount Microscope mount Centering ring 3.8 Specimen Mounts The specimen mount is held in position by a centering ring on the Magnetic Turntable. -
Page 20: Operation
Operation Figure 7 Specimen mounts. 10-mm grinding wheel Specimen mount (stainless steel) Microsope mount 15-mm grinding wheel Centering ring Specimen mount (pyrex or Microsope stainless steel) mount 20-mm grinding wheel Centering ring Specimen mount (pyrex or Microsope stainless steel) mount The specimen mount for use in conjunction with the small, 10-mm diameter wheel has a conical shape to prevent fouling of the grinding wheel axle assem- bly. - Page 21 Operation • Set grinding by final specimen thickness. Both methods are based on the interaction of the Micrometer Drive and the ana- log Dial Indicator. The Dimple Depth digital display shows the desired dimple depth set by lower- ing the end face of the Micrometer Drive. The analog Dial Indicator shows the progress of grinding and displays the thick- ness of specimen material remaining to be removed.
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Page 22: Adjusting Zero Of Dial Indicator
Operation The disadvantages are the inaccuracies that are not taken into account, i.e., spec- imen mount may not seat at precisely the same height each time; the main “vari- able” thickness of the mounting wax. See Section 4.6 for more detailed instruction on this method. 4.1 Adjusting Zero of Dial Indicator Note: The zero of the Dial Indicator should always be checked prior to dim- pling. -
Page 23: Preparing The Specimen
The specimen is normally fixed to the mount with a low melting-point, thermo- plastic wax. The wax supplied by Gatan is liquid at 130 °C. Note: If the temperature of the wax is allowed to exceed 130 °C it will begin to decompose. -
Page 24: Specimen Positioning
Operation To mount a specimen 1. Place the specimen mount on the 130 °C hot plate. 2. After 5 min, touch the end of a wax stick against the surface of the mount. Only a small quantity (about 1-mm diameter) is necessary. Allow the wax to melt and flow. -
Page 25: Set Grinding By Dimple Depth
Operation 5. Position the specimen mount (and centering ring) until the desired fea- ture on the specimen coincides with the cross hair. 6. Check correct centering by turning on the Turntable Motor. The desired dimpled center should rotate about the cross-hair center. Remove microscope when complete. -
Page 26: Set Grinding By Final Thickness
Operation Figure 8 Set grinding by dimple depth. Analog dial indicator Zero Grinding stop wheel Specimen mount Spring loaded with stylus specimen Micrometer head raised. Digital display zeroed. 0.000 Digital display Material to be removed, 100 µm (dimple depth) 100 µm Micrometer head lowered 100 µm 0.100... - Page 27 Operation 2. Check both motors ( buttons on Control Panel) are off. ABLE 3. Lower the Micrometer Drive end face (clockwise). 4. Place centering ring and the specimen mount, without specimen, on the Magnetic Table. Carefully lower the grinding wheel (use the Cam) onto the specimen mount. 5.
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Page 28: Figure 9 Set Grinding By Final Thickness
Operation Figure 9 Set grinding by final thickness. Analog dial indicator Zero Grinding stop wheel Specimen mount without specimen Spring loaded stylus Micrometer head raised. Digital display zeroed. 0.000 Digital display Specimen mount with specimen 0.000 Final specimen thickness, 15 µm T µm Micrometer head raised 15 µm... -
Page 29: Polishing
Operation 4.7 Polishing When grinding has reduced the specimen thickness to within a few microns of the final thickness, the grinding wheel is replaced with a felt polishing wheel. Generally, a polishing treatment improves the final specimen quality obtainable with subsequent ion milling. To polish 1. -
Page 30: Polishing To Final Thickness < 20 Μm
Operation microscope. The exact time needed to polish the specimen will vary depending on hardness. 4.8 Polishing to Final Thickness < 20 µm Producing a dimpled area of < 20 µm thickness requires extended polishing with the felt wheel. The specimen has to be first coarsely polished and finished with a fine polish. -
Page 31: Double-Sided Dimpling
Operation • Use 0.05-µm gamma-alumina suspension polishing compound. The time necessary to complete fine polishing will depend on the initial and final thicknesses and the specific material. Silicon will normally take 15–20 min to achieve a thickness of 2-3 µm. As with coarse polishing, this time should be broken into short periods, interspersed by occasional cleaning and careful mon- itoring of the progress of polishing. -
Page 32: Taper Sections
Performance Check To remove specimen 1. Remove the specimen mount from the Magnetic Turntable. 2. Place the specimen mount on a hot plate set at 130 °C. 3. Allow the wax to completely melt, then slide the specimen off the mount with a cocktail stick. -
Page 33: Arm Pivot Friction
Performance Check • Adjusting zero stop. 5.1 Arm Pivot Friction To achieve an accurate response of the measuring system, the friction in the Platform pivots must be very low. To check arm pivot friction 1. Lift the Platform off the Micrometer Drive. 2. -
Page 34: Eccentricity (Run-Out)
Performance Check Unscrew the Counterweight sufficiently to balance the Platform at this point. 5. Screw the Counterweight in two full turns. This applies the necessary load to overcome the stylus spring and the weight of the wheel. 6. Lower the Platform onto the Micrometer end face. The Dial Indicator needle will rotate clockwise and creep towards zero when the dimple grinder base is gently tapped. - Page 35 Performance Check 4. Switch on the wheel motor; adjust the rotation speed to the lowest set- ting. 5. Carefully lower the Platform. 6. Adjust the Micrometer Drive to obtain a reading on the Dial Indicator. 7. The reading on the Dial Indicator must change by no more than 2 µm. Should the run-out be significantly greater than this amount, you may want to consider replacing the bearing assembly depending upon the outcome of the Axle/Grinding Wheel combination.
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Page 36: Vertical Movement Of The Specimen Turntable
Performance Check Minor damage to the axle male taper can be repaired by turning on the motor at full speed, placing a minute quantity of diamond compound into the female taper of a wheel and carefully lapping the two. Do not permit the diamond compound to go beyond the wheel edge. -
Page 37: Microscope Alignment
Note: Should the point of contact appear as a ring instead of a spot, it indicates the pivoted Platform is out of alignment. This is a factory sealed adjustment which the user should not attempt to correct. Contact a Gatan service represen- tative. -
Page 38: Zero Stop Adjust
Performance Check 5.7 Zero Stop Adjust This procedure should only be performed if the Dial Indicator needle zero posi- tion is more than ± 10 µm away from the 12 o’clock position when the zero adjustment screw is flush with its housing. To adjust the zero stop 1. -
Page 39: Electrical Control System
Electrical Control System 6.0 Electrical Control System The Dimple Grinder is powered by a 24 Vdc desktop power module that oper- ates on input voltages ranging from 90 to 260 VAC at frequencies of 50 or 60 Hz. It is also current limited at 1.25 A, so there is no need for a fuse in the sys- tem. -
Page 40: Spares And Consumables
Mounting wax (12 rods, 3.5 mm x 32 mm) Alumina polishing suspension, 0.05 µm (2 oz) 656.04010 656.07541 Felt polishing ring for 656.07511, 10-mm diameter, x15 656.07542 Felt polishing ring for 656.07512, 15-mm diameter, x15 656.07453 Felt polishing ring for 656.07513, 20-mm diameter, x15... - Page 41 Spares and Consumables Accessories 601.07000 TEM Specimen Cross-Section Kit 623.40001 Specimen mounting hot plate (120 V) 623.40002 Specimen mounting hot plate (240 V) 656.0150T Axle calibration post Dimple Grinder User’s Guide...
- Page 42 Spares and Consumables Dimple Grinder User’s Guide...
- Page 43 Index Control panel Raise/Lower cam Counterweight Specimen Dial indicator mounting zeroing polishing coarse 20 fine 20 positioning Electrical control system removal Specimen mounts Grinding Specimen preparation by dimple depth dimpling techniques 11, 15 by final specimen thickness double-sided dimpling 11, 16 taper sections thickness issues Installation...
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Page 44: Dimple Grinder User's Guide
Dimple Grinder User’s Guide... - Page 45 Gatan Distributors and Agents Argentina Hungary Mexico Coasin S.A. Auro-Science Consulting Kft. IACSA de C.V. Virrey Del Pino 4071 1031 Budapest, Varosfal Koz 5. Insurgentes Sur #3807-3 1430 Buenos Aires, Argentina Budapest, Hungary Tlalpan, CP 14269 011-54-1-551-9361 011-36-1-173-0166 Mexico, D.F.
- Page 46 Gatan Distributors and Agents Republic of South Africa Netherlands Premier Technologies (PTY) Ltd. (So EDAX Int’l Analytical Systems Afr.) Ringbaan Noord 103 12 Executive City P.O. Box 4144 Industrial Road, Kya Sand NL-5004 JC Tilburg, The Netherlands Randburg 2162 011-31-13536-4000...
- Page 47 (PO) for the repair. If the item is under warranty and the customer is requesting an expedited exchange, as may be the case for a printed circuit board, a PO will be required. A credit against this PO will be issued by Gatan upon receipt of the item as returned in accordance with the RGA instructions.
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Page 49: Declaration Of Conformity
DECLARATION OF CONFORMITY (According to ISO/IEC GUIDE 22 and EN 45014) Gatan Inc. Manufacturer’s Name: Manufacturer’s Address: 5933 Coronado Lane Pleasanton, CA 94588 U.S.A. DECLARES THAT THE PRODUCT Product Name: Dimple Grinder Model Number: Serial Numbers: CONFORMS TO THE FOLLOWING EUROPEAN DIRECTIVES...