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Related Manuals for Kurt J. Lesker 100014434
Summary of Contents for Kurt J. Lesker 100014434
- Page 1 Series 902 Piezo Transducer Operation and Maintenance Manual...
- Page 3 Series 902 Piezo Transducer Part # 100014434 Series 902 Piezo...
- Page 4 For more information or literature, contact: Kurt J. Lesker Company 1925 Worthington Avenue Clairton, PA 15025 USA Phone: 1-412-387-9200 1-800-245-1656 Fax: 1-412-384-2745 ©2002 by the Kurt J. Lesker Company, All rights reserved. Series 902 Piezo...
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Page 5: Table Of Contents
Table of Contents Package Contents ..............7 Symbols Used in this Manual ............ 8 Safety Precautions ..............9 General Specifications ............10 Feature and Control Locations ..........11 902 Piezo ....................11 Optional Piezo Display Module ..............11 About the 902 Piezo ..............12 Typical Applications for the 902 Piezo ........ - Page 6 Manufacturer – MF ................23 Model – MD ..................23 Pressure Reading – PR1 ..............23 Serial Number – SN ................. 23 Time On – TIM ................. 23 Transducer Temperature – TEM ............23 Set Point Commands ................24 Set Point Value – SP1 ..............24 Hysteresis Value –...
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Page 7: Package Contents
If any items are missing from the package, call Kurt J. Lesker Customer Service at 1-412-387-9200 or 1-800-245-1656. Do not return the product to Kurt J. Lesker unless specified to do so by Kurt J. Lesker Customer Service. Kurt J. Lesker Company Telephone 1-412-387-9200 5330 Sterling Dr. -
Page 8: Symbols Used In This Manual
Symbols Used in this Manual CAUTION: Refer to the manual. Failure to heed the message could result in personal injury, serious damage to the equipment, or both. Calls attention to important procedures, practices, or conditions. Series 902 Piezo... -
Page 9: Safety Precautions
Safety Precautions Do not substitute parts or modify instrument. Do not install substitute parts or perform any unauthorized modification to the instrument. Return the instrument to an Kurt J. Lesker Calibration and Service Center for service and repair to ensure that all of the safety features are maintained. -
Page 10: General Specifications
General Specifications Measuring range 0.1 to 1000 Torr Set point range 1 to 1000 Torr Analog out 0 to 5 VDC 0 to 10 VDC Maximum pressure 2000 Torr Accuracy 1.0% Reading Repeatability ± 0.03% FS Temperature effect on span ±... -
Page 11: Feature And Control Locations
Feature and Control Locations 902 Piezo User access is through the 9-pin D-sub connector. The ZERO adjust button allows the user to manually perform a zero calibration. The user can perform zero calibration whenever the pressure is below 10 mTorr. See Calibration Commands in the RS-485 Command Set section for more information. -
Page 12: About The 902 Piezo
About the 902 Piezo The 902 Piezo measures chamber pressures directly as a force or pressure is applied to the 902 Piezo’s diaphragm. Once integrated into the vacuum system, the 902 Piezo’s functions are computer-controlled, requiring little manual intervention by the user. This enables the system to monitor pressure as a procedure invisible to the user, and when the desired pressure is reached, trigger the next event in the system process. -
Page 13: Typical Applications For The 902 Piezo
Typical Applications for the 902 Piezo ♦ Atmospheric and sub-atmospheric pressure sensing. ♦ Measure fore and roughing pressures generated by mechanical vacuum pumps. ♦ Alarms to warn of abnormal pressures. ♦ Start or stop system processes with a relay set point. ♦... -
Page 14: Installing The 902 Piezo
Installing the 902 Piezo Transducer Installation Location Locate the 902 where it can measure chamber or manifold pressure. Orientation The 902 can be mounted in any orientation without change of output or calibration. Contamination Locate and orient the Piezo where contamination is least likely. For example, if the 902 is mounted directly above a source of evaporation, the vapor could contaminate the sensor elements and cause the calibration to shift. -
Page 15: Input/Output Wiring
Ensure a low impedance electrical connection between the 902 sensor body and the grounded vacuum system to shield the sensor from external electromagnetic sources. Input/Output Wiring The figure and the 902 Piezo Electrical Connections Table on the following page identify the pins of the 902 connector and their functions; make a cable using this information. - Page 16 RELAY N. O. PIN 1 PIN 5 RELAY N. C. POWER + POWER - ANALOG OUT + PIN 6 PIN 9 RELAY COMMON RS485 - / RS232 TXD MALE CONNECTOR ANALOG OUT - ON 902 RS485 + / RS232 RXD The values of the capacitance C and the resistance R can be calculated by the following equations: C = I...
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Page 17: Piezo Display Module Connection
Piezo Display Module Connection The Piezo Display Module (PDM) attaches to the 902 through the D-sub connector. The PDM has a through connector to attach the combined PDM and 902 unit to the rest of the system. The following figure shows how to connect the PDM to the 902. -
Page 18: Operation
Operation The 902 Piezo operation parameters are preset at the factory. The table below shows the factory default settings. Use the user interface and the commands described on the following pages to change parameter settings as necessary. The user interface to the 902 Piezo is through either RS-232 or RS-485 serial communications. -
Page 19: Rs-485 Protocol
RS-485 Protocol The 902 supports 2400, 4800, 9600, and 19200 baud rates (factory default: 9600). The data format is 8 data bits, no parity, and one stop bit. Standard Addresses Valid addresses are 1 to 253 (factory default: 253). Universal Addresses The 902 receives and responds to commands sent to address 254. -
Page 20: Response Syntax (Ack/Nak)
Response Syntax (ACK/NAK) The ASCII characters 'ACK' or 'NAK' preface the query or command response string. The ACK sequence signifies the message was processed successfully. The NAK sequence indicates there was an error. The response to a query or a successful command is: @<device address>ACK<data>;FF The response to a message with an error is: @<device address>NAK<NAK code>;FF... -
Page 21: Rs-485 Command Set
RS-485 Command Set The query and command formats shown in this section are examples; the values may vary for the user’s installation. Set Up Commands Address – AD The AD command returns or sets the 902 address. Note: If multiple devices are installed on the system, an address query using 254 (shown in the query example below) cannot determine the address of only one of the devices. -
Page 22: Factory Default - Fd
Factory Default – FD The FD command sets all 902 parameter values to the factory default settings shown in the 902 Piezo Factory Defaults Table (page 18). Note: The FD command overrides all parameter values the user sets; use with caution! The address and baud rate reset to 253 and 9600, respectively. The user must change the address and baud rate to these values on the host to communicate with the transducer after using the FD command. -
Page 23: Hardware Version - Hv
Hardware Version – HV The HV command returns the 902 hardware version. Query: @001HV?;FF Query Response: @001ACKA;FF Manufacturer – MF The MF command returns the 902 manufacturer. Query: @001MF?;FF Query Response: @001ACKHPS;FF Model – MD The MD command returns the 902 model number. Query: @001MD?;FF Query Response:... -
Page 24: Set Point Commands
Set Point Commands Set Point Value – SP1 The SP1 command returns or sets the set point value. The set point value is the pressure either below or above which the set point relay will be energized (i.e., N.O. and common contacts will be closed). The direction of the set point (ABOVE or BELOW) is configured using the Set Point Direction –... -
Page 25: Enable Set Point - En1
Enable Set Point – EN1 The EN1 command returns enable status or enables the set point relay. Values: OFF, ON (default: OFF) Query: @001EN1?;FF Query Response: @001ACKOFF;FF Command: @001EN1!ON;FF Command: @001ACKON;FF Set Point Status – SS1 The SS1 command returns the status of the set point relay. Values: SET, CLEAR Query:... -
Page 26: Analog Output
Analog Output The 902 analog voltage signal are pins 5 (+) and 8 (-). Connect them to a differential input voltmeter or analog-to-digital converter (ADC). The standard 902 analog transducer provides an analog output of 0 to 10 VDC. Users can select either linear or logarithmic analog output with the Analog Output Format –... -
Page 27: Linear 10
The following graphs show examples of the linear and logarithmic analog output. The Pressure to Voltage Table, following the analog output graphs, shows the relationship of linear and logarithmic analog output to pressure. Linear 10 The graph below shows the correlation of linear analog output to pressure on a 0 to 10 volt scale. -
Page 28: Linear 5
Linear 5 The graph below shows the correlation of linear analog output to pressure on a 0 to 5 volt scale. This is the output the user will see if the Analog Output Format – DAC value is LINEAR5. To receive analog output for LINEAR5, the converter must have a 5 volt scale. -
Page 29: Logarithmic 10
Logarithmic 10 The following graph shows the correlation of logarithmic analog output to pressure on a 2 to 10 volt scale. This is the output the user will see if the Analog Output Format – DAC value is LOG10. To receive analog output for LOG10, the converter must have a 10 volt scale. -
Page 30: Logarithmic 5
Logarithmic 5 The following graph shows the correlation of logarithmic analog output to pressure on a 1 to 5 volt scale. This is the output the user will see if the Analog Output Format – DAC value is LOG5. To receive analog output for LOG5, the converter must have a 5 volt scale. -
Page 31: Pressure To Voltage Table
Pressure to Voltage Table Pressure Linear10 Log10 Linear5 Log5 (Torr) (Volts) (Volts) (Volts) (Volts) Power Off 0.0000 0.0000 0.0000 0.0000 0.0000 2.0000 0.0000 1.0000 0.0010 2.0000 0.0005 1.0000 0.0020 2.6021 0.0010 1.3010 0.0030 2.9542 0.0015 1.4771 0.0040 3.2041 0.0020 1.6021 0.0050 3.3979 0.0025... -
Page 32: Maintenance And Troubleshooting
Maintenance and Troubleshooting Maintenance and Troubleshooting Table i l a – i l a – y f i – Series 902 Piezo... -
Page 33: Accessories And Part Replacement
Accessories and Part Replacement Description Part Number 902, display module, 1000 Torr, red LED K902001 Cable, 9-pin D-sub, 10 feet K31706S Cable 9-pin D-sub, 25 feet K31707S Cable 9-pin D-sub, 50 feet K31708S Operation and Maintenance Manual 100014434 Series 902 Piezo... -
Page 34: Warranty
Warranty Extent of the Warranty MKS Instruments, Inc. (MKS), HPS ® Products, warrants the HPS ® Products Series 902 Piezo Transducer and its accessories to be free from defects in materials and workmanship for one (1) year from the date of shipment by MKS or authorized representative to the original purchase (PURCHASER). -
Page 35: Appendix: How The 902 Piezo Transducer Works
Appendix: How the 902 Piezo Transducer Works The 902 sensor consists of a bridge of piezoresistive elements on a diaphragm, which change their resistance proportional to the pressure applied to the sensor. The resistance change in a monocrystalline semiconductor (piezoelectric effect) is substantially higher than that in a standard strain gauge. - Page 36 Series 902 Piezo...
- Page 37 Series 902 Piezo...
- Page 38 Series 902 Piezo...
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