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sens4 TriCAP VPM-15 Operating Manual

Programmable precision vacuum pressure transducer
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VPM-15 TriCAP™
Programmable precision vacuum pressure transducer
MEMS Pirani, Capacitance diaphragm and Piezo diaphragm
Voltage output
RS-232/RS-485 digital interface
Relay setpoints
OPM-VPM-15-01, Revision: E, September 2024
Operating manual
Our passion | Your value™

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Summary of Contents for sens4 TriCAP VPM-15

  • Page 1 VPM-15 TriCAP™ Programmable precision vacuum pressure transducer MEMS Pirani, Capacitance diaphragm and Piezo diaphragm Voltage output RS-232/RS-485 digital interface Relay setpoints OPM-VPM-15-01, Revision: E, September 2024 Operating manual Our passion | Your value™...
  • Page 2 Adjustment of the zero point ..................................29 Adjustment of full-scale ....................................30 Resetting to factory default .................................... 32 900 Series vacuum transducer compatibility ..............................34 Return ..........................................35 RMA – Return Material Authorization................................36 Sens4 A/S VPM-15 user manual – REV E Page 1...
  • Page 3 Specifications ......................................... 37 Accessories ........................................39 Declaration of Conformity ....................................40 Contact and support ....................................... 41 Sens4 A/S VPM-15 user manual – REV E Page 2...

  • Page 4: General Information

    General information Thank you for purchasing this Sens4 product. This operating manual contains important safety information, and we encourage you to read this manual and the quick start guide prior to installation and use of this product. Symbols used The following symbols are used in this manual: WARNING! Critical information to prevent dangerous situations that can result in serious injury or death.

  • Page 5: Warranty

    In case of warranty claim the customer should notify Sens4 immediately and no later than 3 weeks after the defect has been discovered. The warranty claim must specify the failure mode and other relevant information about the product defect and the application use.
  • Page 6 If the serial label should become unreadable, the serial- and part numbers are also stored in the internal non- volatile memory and can be read using the S4-Connect™ USB programmer and communicator. See page 27. Disposal symbol Part number Serial number Pressure signal Supply voltage range Sens4 A/S VPM-15 user manual – REV E Page 5...
  • Page 7 The MEMS-Pirani provides measurement resolution down to 1.00E-6 mbar (7.5E-7 Torr). When For measurement in the range below 1.0E-5 mbar it’s recommended to perform zero adjust Sens4 A/S VPM-15 user manual – REV E Page 6...

  • Page 8: Part Numbers

    RS-485 USB programmer, 1.5 m cable, D-sub 15 pin, wall plug-powered PRG-RS2-DS9-WP RS-232 USB programmer, 1.5 m cable, D-sub 9 pin, wall plug-powered PRG-RS4-DS9-WP RS-485 USB programmer, 1.5 m cable, D-sub 9 pin, wall plug-powered Sens4 A/S VPM-15 user manual – REV E Page 7...
  • Page 9 PRG-S4-HIR6 S4-Connect™ USB programmer, 1.5 m cable, Hirschmann GO-6, 6-pin Software for configuration and on-screen measurement The S4-Connect™ and RS-232/485 software is freeware and can be downloaded from the Sens4 website: https://sens4.com/support/ Calibration The VPM-15 is delivered factory-calibrated with a calibration test report. An optional accredited DAKKS calibration traceable to national standards can also be supplied with the VPM-15 transducer.

  • Page 10: Mechanical Installation

    In that case, the measurement deviation will increase with the cable length. Sens4 A/S VPM-15 user manual – REV E Page 9...

  • Page 11: Pin D-Sub Connector

    Supply voltage – (return) Analog voltage signal + REL COM Relay 1 Common RS-232TX RS-232 Transmit / RS-485 (-) Analog voltage signal – (return) RS-232RX RS-232 Receive / RS-485 (+) (1) Optional relay Sens4 A/S VPM-15 user manual – REV E Page 10...
  • Page 12 In that case, the measurement deviation will increase with the cable length. Sens4 A/S VPM-15 user manual – REV E Page 11...
  • Page 13 In that case, the measurement deviation will increase with the cable length. Sens4 A/S VPM-15 user manual – REV E Page 12...
  • Page 14 When the VPM-15 measures a pressure that exceeds its maximum measuring range of 1333 mbar (1000 Torr) the LED will blink orange. The dynamic LED can be enabled via the digital interface. Refer to page 21 for LED configuration. Sens4 A/S VPM-15 user manual – REV E Page 13...
  • Page 15 Digital vacuum pressure and temperature measurement The real-time digital vacuum gas pressure value and vacuum gas temperature can be acquired through the digital interface. Refer to digital command set on page 17. Sens4 A/S VPM-15 user manual – REV E Page 14...

  • Page 16: Getting Started

    It is compatible with both 4-20 mA current output and 0-10 VDC voltage output transducers from Sens4. It is intended for configuration, calibration and setup of the unit, but it can also be used to acquire measurement data and perform diagnostics using a PC.

  • Page 17: Usb-To-Serial Converter

    The USB-to-Serial Converter is the quickest and simplest way to provide connectivity between an RS-232 or RS-485 capable Sens4 transducer and a computer or other compatible device. Featuring a built-in switch-mode power supply, the converter eliminates the need for an external power supply.
  • Page 18 Setpoint relay status <SETPOINT #> ● Setpoint source <SETPOINT #>, <P / T> ● ● STAT Statistics <P / T / (none) / CLEAR (Set only)> ● ● Vacuum sensor temperature ● Sens4 A/S VPM-15 user manual – REV E Page 17...
  • Page 19 Example: Change the device address from 253 (default) to 123 using the global address: Send: @254ADR!123\ Reply: @253ACK123\ All replies after this one will begin with the new device address, 123. Sens4 A/S VPM-15 user manual – REV E Page 18...
  • Page 20 MKS/Inficon 50 mbar full scale (linear) 0 - 10.00 VDC MKS/Inficon 100 mbar full scale (linear) 0 - 10.00 VDC MKS/Inficon 200 mbar full scale (linear) 0 - 10.00 VDC Sens4 A/S VPM-15 user manual – REV E Page 19...
  • Page 21 Example: Configure the analog 1 output linear expression between 1 VDC @ 10 mbar and 10 VDC @ 100 mbar. Send: @254AO!1,10,1000,100,10000\ Reply: @253ACKAO ANALOG OUT 1 # : PRESSURE , AOUT [mV] L : +1.00E+01, 1000 H : +1.00E+02, 10000\ Sens4 A/S VPM-15 user manual – REV E Page 20...
  • Page 22 Send: @254LED!DYNAMIC\ Reply: @253ACKDYNAMIC\ Pressure measurement (P) The digital pressure measurement can be accessed using the S4-Connect™ programmer or RS-232/485 serial digital interface. Reading the full range combined pressure value: Sens4 A/S VPM-15 user manual – REV E Page 21...
  • Page 23 The ratio readout provides the calculated ratio between the gas depended Pirani measurement and the none-gas depended capacitance diaphragm measurement. The ratio readout can be used to determine change of gas composition or detection of water vapor content. Ration = ((Pir-Cap)/Cap) x 100 Sens4 A/S VPM-15 user manual – REV E Page 22...
  • Page 24 The VPM-15 has a built-in high-resolution precision temperature sensor that provides a temperature measurement of the vacuum gas in degrees Celsius with a typical accuracy of better than ±1 °C. Reading the temperature: Send: @254T?\ Reply: @ACK25.22\ Sens4 A/S VPM-15 user manual – REV E Page 23...

  • Page 25: Statistics (Stat)

    Reading the statistics (parameter is left out, so pressure is assumed): Send: @254STAT?\ Reply: @254ACKSTAT<cr> MIN : 5.6104E+00<cr> MAX : 1.0159E+03<cr> HOURS : 37\ Reading the temperature statistics: Send: @254STAT?T\ Reply: @254ACKSTAT<cr> Sens4 A/S VPM-15 user manual – REV E Page 24...
  • Page 26 Change capacitance diaphragm and piezo diaphragm blending pressure: Send: @254BL!CPPZ,2.000,6.000\ Reply: @254ACK CPPZ - LOWER: 2.0000E00, UPPER: 6.0000E00\ The capacitance diaphragm and piezo diaphragm blending pressure can be set to values between 1E-1 to 7.5 mbar. Sens4 A/S VPM-15 user manual – REV E Page 25...
  • Page 27 Then it will change to energized (NO contact closed). The relay will de-energize (NC contact closed) again when the setpoint value is exceeded. Sens4 A/S VPM-15 user manual – REV E Page 26...
  • Page 28 <SETPOINT #>, <ABOVE, BELOW> Setpoint Enable <SETPOINT #>, <OFF/ON> Setpoint Hysteresis <SETPOINT #>, <PRESSURE VALUE> Setpoint Value <SETPOINT #>, <PRESSURE VALUE> Setpoint Source (pressure or temperature) <SETPOINT #>, <P/T> Read all setpoint settings Sens4 A/S VPM-15 user manual – REV E Page 27...
  • Page 29 Configuration of setpoint using VPM-15 configuration software Pre-configuration of setpoint values The VPM-15 transducer can be delivered with custom defined setpoint values. Contact Sens4 sales team for more information. Sens4 A/S VPM-15 user manual – REV E Page 28...

  • Page 30: Maintenance

    Following command example will perform a zero adjustment at 5.00E-5 mbar: 1. Adjust the vacuum pressure to a known value 2. Send command: @254VAC!5.00E-5\ 3. Reply: @254ACK<value>\ Sens4 A/S VPM-15 user manual – REV E Page 29...
  • Page 31 Send the command: @254FS!PZ,1013.1\ Reply: @254ACK<value>\ The acknowledge value represents the scaling factor for the new piezo full-scale calibration. The full-scale adjustment can be executed in the pressure range 400-1100 mbar (300-825 Torr). Sens4 A/S VPM-15 user manual – REV E Page 30...
  • Page 32 The Pirani sensor can also be full-scale adjusted by use of the internal piezo sensor as reference: Expose the transducer flange to a Nitrogen pressure between 1 and 20 mbar Send the command: @254FS!MP\ Reply: @254ACK<value>\ Sens4 A/S VPM-15 user manual – REV E Page 31...

  • Page 33: Resetting To Factory Default

    The Factory Default command will reset all user settings to factory default, including setpoint settings, pressure unit and user-adjustment of zero point and full-scale. Sens4 offers pre-configuration of user parameters, and if the product is delivered with a special user configuration, the factory default command will reset to the original user configuration as delivered.
  • Page 34 Reset to factory default using S4-Connect™ software Go to the factory Def. tab and check the parameters to be reset and press the “Issue Factory Default” button. Sens4 A/S VPM-15 user manual – REV E Page 33...
  • Page 35 Setpoint 3 direction ABOVE, BELOW Setpoint 3 enable OFF, ON Setpoint 3 hysteresis <PRESSURE VALUE> Serial number Sensor temperature Pressure unit MBAR, PASCAL, TORR Pirani Zero adjustment No input or <PRESSURE VALUE> Sens4 A/S VPM-15 user manual – REV E Page 34...
  • Page 36 Return Before returning a product to Sens4 proper return forms and a return materials authorization (RMA) must be filled out. The RMA procedure can be found on: www.sens4.com/support INFORMATION: Sens4 does not accept return of products without return materials authorization.

  • Page 37: Rma - Return Material Authorization

    Other harmful substances If “yes” has been answered to any of the above questions please note that Sens4 does not accept any return of products that have been exposed to or contaminated with radioactive, chemical, biological and other harmful or dangerous substances.

  • Page 38: Specifications

    Accuracy and repeatability specifications are typical values measured at ambient temperature in Nitrogen atmosphere after zero adjustment. (10) Refer also to maximum pressure rating for the used fittings. Exceeding maximum pressure will cause permanent damage to the capacitance diaphragm sensor. Sens4 A/S VPM-15 user manual – REV E Page 37...
  • Page 39 , low out- gassing epoxy resin, solder, RO4305, vitreous silica Process leak tightness <1·10 mbar·l/s Enclosure AISI 304L / Aluminium 6061 Approvals EMC directive 2014/30/EU RoHS compliance Directive EU 2015/863 Sens4 A/S VPM-15 user manual – REV E Page 38...
  • Page 40 9 p D-sub female to 15 p D-sub male with 3 m cable CAB-F15DSM15DS-005 9 p D-sub female to 15 p D-sub male with 5 m cable CAB-F15DSM15DS-010 9 p D-sub female to 15 p D-sub male with 10 m cable Sens4 A/S VPM-15 user manual – REV E Page 39...

  • Page 41: Declaration Of Conformity

    Declaration of Conformity This declaration of conformity has been made in accordance with EN ISO/IEC 17050-1:2010 Manufacturer: Sens4 A/S Address: Nordre Strandvej 119G 3150 Hellebaek Denmark We hereby declare under our sole responsibility that the following products: Product description: Vacuum Pressure Transducer...
  • Page 42 +45 88447044 Email: info@sens4.com Website: www.sens4.com Other featured products from Sens4 TDM-1 Programmable temperature transducer • Programmable configuration with S4-Connect™ • -50 to +150 °C / -58 to +302 °F • Class AA accuracy • Dual MEMS temperature sensor probe •...
  • Page 43 Our passion | Your value™...

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