Related Manuals for Raith ELPHY Plus
Summary of Contents for Raith ELPHY Plus
- Page 1 sales@artisantg.com artisantg.com (217) 352-9330 | Visit our website - Click HERE...
- Page 2 Hardware Operation Manual ELPHY Quantum and ELPHY Plus...
- Page 3 All information in this document has been carefully prepared and are Statement believed to be accurate and complete. If doubts exist about any detail or additional information is necessary, please inquire Raith GmbH or their accredited representative. © 2007 by Raith GmbH. All rights reserved.
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Page 4: Table Of Contents
1 Introduction 1.1 Using this manual 1.2 Notes, cautions, and warnings 1.3 Navigating through the manuals 2 ELPHY Plus and ELPHY Quantum Hardware Guide 2.1 Overview 2.2 Connection Overview 2.3 General Installation Considerations... -
Page 6: Introduction
A dedicated warning message appears when special handling is necessary to prevent personal injury or death. The same stickers are displayed at the instrument. Should any of the stickers be missing please notify Raith. Raith will send a replacement. -
Page 7: Navigating Through The Manuals
1 Introduction 1.3 Navigating through the manuals This manual provides information about • safety and handling procedure for system and personal safety, • startup, standby, shutdown, and bakeout procedures Information on the task-oriented operation of the system as well as the user interface is given in separate documents. -
Page 8: Elphy Plus And Elphy Quantum Hardware Guide
A high end PC system is supplied with the system. The ELPHY Plus will have a PCI SCSI card installed for communication with the pattern generator. The ELPHY Quantum will have PCI pattern generator installed. The PC may have a GPIB (IEEE-488) interface card for communication with a Keithley Picoammeter. - Page 9 2 ELPHY Plus and ELPHY Quantum Hardware Guide 2.1.2 ELPHY Quantum The ELPHY Quantum is a full length PCI multi layer card. The card requires one PCI slot and two access slots at the rear of the PC. The PCI card provides the following interface: •...
- Page 10 2.1 Overview • A switch for inverting the SEM external control signal; • A switch for inverting the beam blank control signal; • A toggle switch to reset the hardware; • Two LED bar displays to indicate the beam position; •...
- Page 11 The beam blanker control unit consists of a high voltage power supply and associated control electronics. It accepts a TTL signal from the ELPHY Quantum or ELPHY Plus to switch the high voltage on or off. Typical output of the high voltage is 200 volts. The high voltage is applied to the beam blanker hardware plates to deflect the electron beam.
- Page 12 2.1 Overview beam current at the specimen surface. The holder is provided with a base to match the users SEM stub mount. Figure 4 Universal Sample Holder. Faraday Cup Sample clamp Electrons entering the Faraday Figure 5 cup strike the internal surface. Some are absorbed;...
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Page 13: Connection Overview
2 ELPHY Plus and ELPHY Quantum Hardware Guide 2.1.8 Motorized Stage Control Most modern SEM’s will have a motorized stage. Control can be via RS-232, TCP/IP, or sometimes GPIB. Some SEM stages can be retro fitted with motors and a suitable control unit, e.g. from Deben. - Page 14 2.2 Connection Overview 2.2.1 ELPHY Quantum Quantum Card Figure 6 Typical ELPHY Quantum connection X DAC Output diagram. SEM Interface Y DAC Output Video Input External mode SEM Switch TTL Beam Blank Output Beam Blanker Electronics PC Options RS-232 SEM Control...
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Page 15: General Installation Considerations
2 ELPHY Plus and ELPHY Quantum Hardware Guide 2.2.2 ELPHY Plus Elphy Plus Figure 7 Typical ELPHY Plus connection diagram. X DAC Output SEM Interface Y DAC Output Video Input External mode SEM Switch TTL Beam Blank Output Beam Blanker Electronics... - Page 16 Some SEM installations will have an EDX option installed. In such a case there may be a switch box, which will switch between the X Y output of the ELPHY Quantum or ELPHY Plus and the X Y output of EDX system. The video signal may also be switched.
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