Summary of Contents for Micronix VT-50 Series
- Page 1 VT-50 S e r i e s Translation Stage Reference Manual (Open and Closed Loop Versions)
- Page 2 VT-50L Linear Stage Reference Manual Rev 2.0 MICRONIX USA, LLC Tel: 949-480-0538 Fax: 949-480-0538 Email: info@micronixusa.com http://micronixusa.com...
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Page 3: Table Of Contents
Analog Output (Pins 1,2,6, and 7) ......................21 A.3.4 Index Window (Pins 3) ..........................21 A.3.5 Resolution ..............................21 Using the Digital Encoder ..........................22 A.4.1 Encoder Overview ..........................22 A.4.1 Operating and Electrical Specifications ..................... 22 A.4.1 Output Signals ............................22 MICRONIX USA,LLC Rev: 2.0 www.micronixusa.com... - Page 4 Legacy Vacuum, Digital Encoder with Interpolator Module Wiring Diagram ........ 25 A.5.4 Legacy Analog Encoder Wiring Diagram ................... 26 A.5.5 Legacy Digital Encoder Wiring Diagram ..................... 27 A.5.6 Legacy Using the Mercury 3000 Encoder Module ................28 MICRONIX USA,LLC Rev: 2.0 www.micronixusa.com...
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Page 5: Introduction
Vacuum versions available Motor Carriage Encoder Figure 1-A. VT-50L, Open Loop Version (Left), Closed Loop Version (Right) Recommended Controllers The following controllers are available from MICRONIX USA: • MMC-200 • NanoDrive Technical Data and Ordering Information Detailed specifications and ordering information can be found on the VT-50L product page on the MICRONIX USA website. -
Page 6: Preparing To Install The Vt-50L Stage
Important: Do not touch or manually turn the leadscrew, as this will contaminate the lubrication and jeopardize the longevity of the stage. Package Contents If the product is damaged or there are missing components, contact MICRONIX USA immediately. Do not discard product packaging in case of return shipment. Package Should Contain: •... -
Page 7: Installing The Vt-50L Stage
Figure 3-A. VT-50L General Mounting Installation *Assure the dowel pin holes on the mounting plate are not over-constraining the stage, i.e. one of the two holes needs to be a slot, see section 4.2 for reference. MICRONIX USA,LLC Rev: 2.0 www.micronixusa.com... -
Page 8: X-Y Mounting
4x M3 x 8 mm Socket Head Cap Screws 2x M1.5 x 6 mm Dowel Pins See 3.1.1 for Installation Direction of Travel Figure 3-B. VT-50L XY Mounting Installation MICRONIX USA,LLC Rev: 2.0 www.micronixusa.com... -
Page 9: Dimensions
VT-50L Linear Stage Reference Manual 4. Dimensions VT-50L Standard Dimensions *grey parts for closed loop version only MICRONIX USA,LLC Rev: 2.0 www.micronixusa.com... -
Page 10: General Mounting Pattern
Outer Most Screw Distance Travel [mm] 47mm 97mm 198mm 298mm *Ensure the dowel pin holes on the mounting plate are not over-constraining the stage, i.e. one of the two holes needs to be a slot. MICRONIX USA,LLC Rev: 2.0 www.micronixusa.com... -
Page 11: Stacking Configurations
• Positioning according to: No Adapters X-Y 100x100mm X-Y 300x100mm Using XZ Bracket (P/N: 430138) 430138* M3x0.5x16mm M2.5x0.45x16mm X-Z 100x100mm* *Custom length z-brackets are available for longer travel stages. 430138 is recommended for z-travel up to 100mm. MICRONIX USA,LLC Rev: 2.0 www.micronixusa.com... -
Page 12: Accessories
Optical Table Mounting Plate Used to adapt the VT-50L series to a perpendicular assembly for XZ Used to adapt the VT-50L series to an mounting configurations (up to English or Metric optical table. 100mm travel). MICRONIX USA,LLC Rev: 2.0 www.micronixusa.com... -
Page 13: Connecting The Vt-50L Stage
Stepper Motor Atmospheric Open Loop Pinout Cable A Dsub9M Pinout for VT-50L-1X010 Dsub9F Description Color Motor Phase A+ Motor Phase A- Motor Phase B+ Motor Phase B- Limit Ground Limit Switch - Limit Switch + MICRONIX USA,LLC Rev: 2.0 www.micronixusa.com... -
Page 14: Closed Loop (Encoder), Atmospheric Wiring Diagram
Index+ Violet Motor Phase B+ Grey Motor Phase B- +5VDC White (Grey TP) Limit Ground Cos- White (Brown TP) Limit Switch - Sin- White (Blue TP) Limit Switch + Index- White (Violet TP) Shield Casing MICRONIX USA,LLC Rev: 2.0 www.micronixusa.com... - Page 15 Motor Phase A- Index+ Violet Motor Phase B+ Grey Motor Phase B- +5VDC White (Grey TP) Limit Ground White (Brown TP) Limit Switch - White (Blue TP) Limit Switch + Index- White (Violet TP) Shield Casing MICRONIX USA,LLC Rev: 2.0 www.micronixusa.com...
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Page 16: Vacuum Environments
The vacuum compatible VT-50L will be supplied with wiring for a straight through feed through not a cross over gender changer. MICRONIX USA supplies test connectors that simulate the vacuum feed through to allow for functionality testing prior to installation in a vacuum chamber, see Appendix A.1 for feedthrough pins. -
Page 17: Open Loop, Vacuum Wiring Diagram
Green Green Motor Phase A- Green/White White (Green TP) Motor Phase B+ Red/White Black Motor Phase B- Limit Ground Brown Brown Limit Switch - White White (Violet TP) Limit Switch + Violet Violet Shield Casing MICRONIX USA,LLC Rev: 2.0 www.micronixusa.com... -
Page 18: Closed Loop (Encoder), Vacuum Wiring Diagram
D. Encoder Breakout Cable (Female Dsub 15 Pin to Female Dsub 9 Pin, 1.5m PVC Black Cable) Temporary test connectors are standard. Requires customer supplied feed through connector Figure 6-D. VT-50L, Closed Loop, Vacuum Wiring Diagram MICRONIX USA,LLC Rev: 2.0 www.micronixusa.com... - Page 19 Brown Blue Blue Index+ Violet Violet Grey Grey White (Grey TP) White (Grey TP) White (Brown TP) White (Brown TP) White (Blue TP) White (Blue TP) Index- White (Violet TP) White (Violet TP) Shield Casing MICRONIX USA,LLC Rev: 2.0 www.micronixusa.com...
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Page 20: Supplementary Information
All measurements in this document are in the metric system of units. Metric Unit English Unit 1 millimeter 0.0394 inches 1 micron 0.0000394 inches 1 Newton 0.2248 lbs. 1 Newton-meter 8.85 in-lbs. A. Appendix A.1 Feedthrough MICRONIX USA,LLC Rev: 2.0 www.micronixusa.com... -
Page 21: Technical Specifications
VT-50L body which will prevent the carriage from running away should the limit switches fail. The limit switches are factory calibrated to ensure advertised travel length and cannot be adjusted by the customer. For custom travel lengths, please contact MICRONIX USA. A.2.2.1 Mechanical Limit Switches Contact Rating... - Page 22 VT-50L Linear Stage Reference Manual A.2.2.3 Direction of Motion Positive Direction - Limit + Limit VT-50L Shown in center position MICRONIX USA,LLC Rev: 2.0 www.micronixusa.com...
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Page 23: Using An Analog Encoder
All closed loop stages are supplied with 20µm scales. The interpolation is done in the MMC-200 to the resolution specified in the order. With an analog encoder the MMC-200 has an achievable resolution of 50nm. MICRONIX USA,LLC Rev: 2.0 www.micronixusa.com... -
Page 24: Using The Digital Encoder
*Note: The index pulse may be aligned with A- or B- at some interpolation values. A.4.1 Index Window A.4.2 Resolution All closed loop stages are supplied with 20µm scales. With a digital encoder an MMC controller has an achievable resolution of 50nm. MICRONIX USA,LLC Rev: 2.0 www.micronixusa.com... -
Page 25: Legacy Wiring
VT-50L Linear Stage Reference Manual A.5 Legacy A.5.1 Legacy MTE Encoder Pinout Function Low Cost Digital A+/Cos+ Brown B+/Sin+ Grey Index+ Violet Black & Inside shield A-/Cos- Orange B-/Sin- White Index- Blue Shield Outside Shield MICRONIX USA,LLC Rev: 2.0 www.micronixusa.com... -
Page 26: Legacy Atmospheric, Digital Encoder With Interpolator Module Wiring Diagram
Motor Phase A- Index+ Violet Motor Phase B+ Grey Motor Phase B- White (Grey TP) Limit Ground White (Brown TP) Limit Switch - White (Blue TP) Limit Switch + Index- White (Violet TP) Shield Casing Casing Casing MICRONIX USA,LLC Rev: 2.0 www.micronixusa.com... -
Page 27: Legacy Vacuum, Digital Encoder With Interpolator Module Wiring Diagram
White (Blue TP) Interpolator Cable E Pinout for VT-50L-1X316/1X319 Dsub15M Dsub15F Dsub9F Description Color Brown Blue Index+ Violet Grey White (Grey TP) White (Brown TP) White (Blue TP) Index- White (Violet TP) Shield Grey Casing Casing MICRONIX USA,LLC Rev: 2.0 www.micronixusa.com... -
Page 28: Legacy Analog Encoder Wiring Diagram
Blue Index+ Violet Violet Grey Grey White (Grey TP) White (Grey TP) Cos- White (Brown TP) White (Brown TP) Sin- White (Blue TP) White (Blue TP) Index- White (Violet TP) White (Violet TP) Shield Casing MICRONIX USA,LLC Rev: 2.0 www.micronixusa.com... -
Page 29: Legacy Digital Encoder Wiring Diagram
White (Blue TP) Cos+ Brown Brown Sin+ Yellow Yellow Index+ Violet Violet Cos- Orange Orange Sin- Green Green Index- Blue Blue Shield Note: For the pinout of cable E, refer to the appropriate MMC manual. MICRONIX USA,LLC Rev: 2.0 www.micronixusa.com... -
Page 30: Legacy Using The Mercury 3000 Encoder Module
When connected, the Encoder Module should display two green LED’s indicating a power source and proper encoder alignment. A Red or Yellow LED indicates misalignment of the Encoder Head, if this occurs contact MICRONIX USA. Do not manually adjust the Encoder Head or scale. For more information refer to MicroE Systems Mercury Encoders A.5.6.1...
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