ASAIR AS200 Series Manual

AS200 Gas Mass Flow Controller
AS200 Series Datasheet
Gas Mass Flow Controller
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Can support digital signal, 1~5V analog signal, 4~20mA analog signal at the same time
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Use single power supply (+15～+28VDC)
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Support automatic fault alarm, multi-gas multi-range and other functions
Product description
AS200 series gas mass flow controllers are suitable for a variety of conventional gases, improving
the accuracy and reliability of gas mass flow control measurement results. The repeatability is as high
as ±0.2%FS; the low leakage rate of 1×10-10
safety; it can support a variety of signal outputs, including digital signals, 1~5V analog signals, and
4~20mA analog signals, and can use a single power supply (+15~+28VDC), which is suitable for
different working scenarios; the standard open communication protocol provides convenience for
customers to develop control and acquisition software by themselves; at the same time, the product
also provides powerful free client host software to facilitate user debugging operations.
AS200 series products are developed by Aosong Electronics using advanced MEMS technology.
Core technologies are used in many aspects such as sensor drive, zero drift control and valve control,
ensuring the high performance, high quality and high reliability of the products. It is a high-quality
instrument with good stability, high precision, low leakage rate and high-pressure resistance.
Application
AS200 series gas mass flow controller (MFC) is mainly used for precise control and measurement of
gas mass flow. AS200 plays an important role in scientific research and production in various fields
such as semiconductor integrated circuit technology, special materials, chemical industry, petroleum
industry, medicine, environmental protection and vacuum. Its typical application scenarios include:
integrated circuit process equipment, such as epitaxy, diffusion, plasma etching, sputtering, ion
implantation and various CVD equipment; other industry equipment, such as optical fiber melting,
micro-reaction device, gas mixing and distribution system, gas sampling device, capillary measuring
instrument, gas chromatograph and other analytical instruments.
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Figure 1. AS200 series product images
May 2024
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sec He, good air tightness, and production
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