Page 1 SG19-236-007E Laser Autocollimator Smart LAC H410 Series User’s Manual Thank you very much for purchasing this product. Read this manual carefully before using the product. After done reading this manual, store in a safe place for easy reference.
Page 2 Safety Cautions Introduction This document is a “User’s Manual” of Model H410 laser autocollimator (hereinafter, referred to as “this product”). In this “User’s Manual”, information and basic operation methods on this product are described. Read this document carefully to use this product effectively and safety, and sufficiently understand its contents. Symbols and Meaning In this document, items to be followed to avoid injuries of the operators who use this product and other people, and damage to physical properties are indicated with the following symbols.
Page 3: Handling Of This Product
Safety Cautions Handling of this Product Before starting or operating this product, please check the functions and performance of this product ● are operating correctly. If this product is not working properly, take sufficient safety measures to prevent various damages, and ●...
Page 4: X84; Ambient Temperature
Safety Cautions „ Ambient Temperature Caution Changes of ambient temperature may cause measurement errors. Keep it constant. The use environment temperature of this product is 0 to 40°C, and the performance guarantee temperature is 23°C ± 5°C. „ Ambient Lighting Caution Do not use this product near a lighting facility where ON/OFF in a high frequency is repeated.
Page 5: X84; Vibration
Safety Cautions „ Vibration If a measurement target object is vibrating, the measured values may vary. In the case, a more precise measurement is possible by increasing the number of measurement values to calculate an average. „ Air Fluctuation A slow air fluctuation may cause measured values to vary. In such a case, the following measure is effective.
Page 6: Safe Use Of Laser Product
Safety Cautions Safe Use of Laser Product This product is laser class 1 product. Use this product paying attention to the following items. Do not look laser light directly for a long time. ● Do not disassemble this product. ● Caution Use of controls or adjustments or performance of procedures other than those specified here in may result in hazardous radiation exposure.
Page 7 ● Laser label location.
Page 8: Table Of Contents
„ Comparing 2 or more Target Objects .................. 0-3 „ Measuring in R, G, B, and Infrared Wave Lengths ............. 0-4 „ Single Spot and Multi-spot Measurement ................0-4 „ H410 Series Models ......................0-4 1 Preparations System Configurations ....................1-2 Each Part’s Name and Function ................
Page 9 „ Multi Absolute Measurement Mode .................. 3-12 „ Offset Tilt Measurement Mode ..................3-13 4 Angle Calibration Overview of Angle Calibration ................... 4-2 „ Wedge Substrate and Wedge Mirror that can be Used (made by Suruga Seiki) ....4-2 Angle Calibration ......................4-3 viii...
Page 10 Contents 5 Control from External Devices Connection Specifications with External Devices ........... 5-2 „ Connection with RS232C ....................5-2 „ Connection with Ethernet ....................5-3 Setting the PC Network and IPU (Image Processing Unit) IP Address ....5-4 „ Setting the PC Network IP Address ..................5-4 „...
Page 11 „ Sensor Head Cable ......................7-4 „ Robot Cable ........................7-4 External Dimensions ....................7-5 „ IPU HPU-500,HPU-1000 ....................7-5 „ Sensor Head H410 Series ....................7-6 8 Troubleshooting LED display state ......................8-2 Error messages ......................8-2 Phenomena and measures ..................8-3...
Page 13: Introduction
Introduction What are Laser Autocollimators? .......0-2...
Page 14: What Are Laser Autocollimators
0 Introduction What are Laser Autocollimators? Laser autocollimators are measuring instruments which use laser light for non-contact measurement in real time of minuscule angles on the target object or minuscule angle relations on multiple target objects. Below are examples of the use of laser autocollimators. „...
Page 15: X84; Comparing 2 Or More Target Objects
0 Introduction „ Comparing 2 or more Target Objects By using a dedicated adapter, the difference in minuscule angles on two or more target objects or their parallelism can be easily measured. Example 1: Height difference The laser autocollimator can measure the target object’s angles regardless of differences in working distance.
Page 16: X84; Measuring In R, G, B, And Infrared Wave Lengths
HPU-1000 Simultaneous measurement of up to five luminous points as well as measurement of the relative angles between them „ H410 Series Models Characteristics: (1) Select from four wave length types (2) Select from single spot and multi-spot measurement (3) Sensor head compatibility...
Page 17: Preparations
Preparations Preparations such as system configurations and function overview of this product that are necessary before using this product are explained. System Configurations ........1-2 Each Part’s Name and Function ......1-3 IPU Installation ............1-5 Installation of Each Part........1-5 Applying Power Source ........1-8 Function Overview ..........1-9 Flow of Measurement .........1-11...
Page 18: System Configurations
1 Preparations System Configurations This product can be used for measurement alone or in combination with commercially available equipment. (Image Processing Unit) Sensor Head Ethernet cable Ethernet cable RS232C RS232C Cross cable Cross cable Sensor head Sensor head Touch panel Touch panel connection cable connection cable...
Page 19: Each Part's Name And Function
1 Preparations Each Part’s Name and Function Each part’s name and function are described. „ IPU ① State display lamp ① Turns on in green when the power is ON. Turns on in red when there are problems like errors. ②...
Page 20: X84; Sensor Head
1 Preparations „ Sensor Head ① ① IPU connection connector Connects to IPU. ② State display lamp ② Turns on in green when the power is ON. Turns on in red when there are problems like errors. ③ Laser emission port Emits laser.
Page 21: Ipu Installation
1 Preparations IPU Installation IPU should be installed in the following environment. NOTE Do not place it horizontally. 30 mm or more 10 mm 10 mm or more or more Cable Clearance 80 mm or more Installation of Each Part „...
Page 22: X84; Mount The Sensor Head To The Stand (Ha-14)
1 Preparations „ Mount the sensor head to the stand (HA-14) When using the stand (HA-14), install by following the next steps. Assemble the stand. Mount the rod on the base of the stand. Mount the tilt stage to the stand. Fix the tilt stage with the bolts (M3x12, 4pcs) attached to the stand.
Page 23: X84; Installation Of Touch Panel Monitor
1 Preparations Mount the sensor head to the tilt stage. Fix the sensor head with the bolts (M3x8, 3pcs) attached to the tilt stage. „ Installation of Touch Panel Monitor Connect the monitor cable, touch panel connection cable, and power source connection cable to the connector respectively.
Page 24: X84; Installation Of External Devices
1 Preparations „ Installation of External Devices ● Installation of PC Connect by using the RS232C cable or the Ethernet cable. For details, see “5 Control from External Devices” (→Page 5-1). ● Installation of PLC Connect to the 12-core connector by using the I/O cable. For details, see “6 Using Input/Output Terminal”...
Page 25: Function Overview
1 Preparations Function Overview This product is an autocollimator that measure tilting of the target object from the laser light entered to the CMOS (Complementary Metal Oxide Semiconductor) sensor. It mainly has the following features. Able to measure five spots at maximum simultaneously. ●...
Page 26 1 Preparations Function HPU-500/1000 Serial communication Interface RS-232C Command control ○ Data output CSV format *1: Measure the angle of one specified light spot out of a maximum of 5 light spots. *2: Measure the angles of all 5 light spots and the relative angles between light spots *3: HPU-500 is an image processor for single spot measurement only.
Page 27: Flow Of Measurement
1 Preparations Flow of Measurement Measurement Procedure Start-up Initial start After initial start Automatically load the setting file Automatically load the setting file at factory shipping at previous measurement Display of measurement screen Not change the setting Change the setting Display of setting screen Measure as is Change the measurement...
Page 29: Setting
Setting Various settings can be performed and measurement conditions can be changed on the screen by using the touch panel monitor of this product. In this section, the setting method utilizing the GUI is explained. Setting Method ............2-2 Use of Setting File ..........2-7 Setting of Basic Conditions ......2-13 Setting of Detail Conditions ......2-14 System Settings ...........2-28...
Page 30: Setting Method
2 Setting Setting Method This section describes the basic steps to change the settings and measure after the power is turned on and the outline of the setting items. „ Basic Flow of Setting Touch (Settings) in the measurement screen. The [Settings] screen is displayed.
Page 31 2 Setting After entry is done, touch the [Save] button. The changed content is saved in the selected setting file. Touch the [Run] button, and measure with the changed content. The measurement screen is displayed, and a measurement with the changed content is performed. Info •...
Page 32: X84; [Settings] Screen Details
2 Setting „ [Settings] Screen Details ① ② ③ ④ ⑤ ⑥ ⑦ ① Setting file name The currently selected setting file name is displayed. (→Page 2-7) (Select File) button ② Touch to bring up the dialog and load a setting file. (→Page 2-7) ③...
Page 33: X84; List Of Settings Menu
2 Setting „ List of Settings Menu Overview of the setting items and each setting item are shown. Group Item Overview Reference LD Adjustment Set the laser strength. Trigger Mode Set the measurement timing. − Page 2-13 (Basic condition Light Source Set the light source of the laser.
Page 34: X84; Numerical Value Input Method
2 Setting „ Numerical Value Input Method An input method for entering values as the setting values is explained. Touch the numerical entry field. The value input screen is displayed. Select a numerical number input method. Every time you touch the icon in the bottom part of the screen, the input method switches.
Page 35: Use Of Setting File
2 Setting Use of Setting File The settings can be changed by reading the settings file in which the measurement conditions are saved. „ Loading of Setting File In the [Settings] screen, touch the (Select File) button. The [Select File] screen is displayed. [Select File] screen details ①...
Page 36 2 Setting ⑥ [OK] button Execute a setting file loading. Touch a setting file to use. Touch the [OK] button. The selected setting file is loaded. When [Cancel] is touched, the setting file is not changed. NOTE When loading a setting file while the setting changes are not saved, [Setting Changed] dialog is displayed. To save the setting and load other file, touch [YES].
Page 37: X84; Copying Setting File
2 Setting „ Copying Setting File A setting file can be copied. In the [Settings] screen, touch the (Select File) button. The [Select File] screen is displayed. Touch a file to copy. Touch the (Copy) button. [File Copy Dialog] is displayed. Select a file number to copy to.
Page 38: X84; Resetting Setting File
2 Setting Touch the [OK] button. The confirmation screen is displayed. Touch the [OK] button. The original settings are copied to the selected file number. Touch the [Cancel] button to stop copying. „ Resetting Setting File The setting file can be reset to the factory setting. In the [Settings] screen, touch the (Select File) button.
Page 39: X84; Name Change Of Setting File
2 Setting Touch the (Reset) button. [File Reset Dialog] is displayed. Touch the [OK] button. The selected file setting is reset to the factory setting. Touch the [Cancel] button to cancel resetting. „ Name Change of Setting File The name of a setting file can be changed to your choice. In the [Settings] screen, touch the (Select File) button.
Page 40 2 Setting Touch the (Rename) button The text input screen is displayed. Enter a file name. Use the software keyboard to enter. After entry is done, touch the [Enter] button. NOTE • The maximum number of characters that can be entered is 24. •...
Page 41: Setting Of Basic Conditions
2 Setting Setting of Basic Conditions In the tab, measurement basic conditions such as laser power and laser light source can be set. Setting item Setting value LD Adjustment Auto Adjusts the Laser power automatically. Adjustable range: LDPW 400~3600, Shutter Speed 1~8 Sets the laser power.
Page 42: Setting Of Detail Conditions
2 Setting Setting of Detail Conditions With the tab, the following contents can be set. - Setting of measurement conditions [Measurement] (→ Page 2-15) - Setting of the camera [Camera] (→ Page 2-25) - Setting of display state [Display] (→ Page 2-26) 2-14...
Page 43: X84; Setting Of Measurement Conditions [Measurement]
2 Setting „ Setting of Measurement Conditions [Measurement] In [Measurement], the measurement mode and light spot label assignment can be set. ● Mode Sets the measurement mode. For the display of measurement results per measurement mode, see “Verification of Measurement and Judgment Results (Page 3-10)”.
Page 44 2 Setting Setting item Setting value Mode Multi Relative The 2 or more receiving light spots (Up to 5 points) are detected, and the relative angle between each spot is measured and judged. Setting range Max Spot number: Simultaneously display 3 or more points. Select the display number from 3, 4, or 5.
Page 45 2 Setting ● Light Spot Sorting Rules Sets a number assignment method of the light spot labels. Setting procedure ❶ In [Spot Sorting Rules], select [Size]/[Angle]. ❷ In [Valid Light Size], select [On]/[Off]. ❸ When [On] is selected, the maximum value [MAX] and minimum value [MIN] of the effective light spot size are set.
Page 46 2 Setting ● Tolerance (Incase of Single, Multi Absolute, Multi Relative) Set the judgment area(OK/NG). Setting procedure ❶ In [Tolerance], select [On]/[Off]. ❷ In [Area Shape], select [Rectangle]/[Circle]. ❸ When [Rectangle] is selected, set XH/XL/YH/YL. X-direction maximum value XH, X-direction minimum value XL Y-direction maximum value YH, Y-direction minimum value YL ❹...
Page 47 2 Setting Item description Setting item Setting value Area Shape Rectangle Set the judgment criteria area to rectangle. Sets the angle to the X and Y direction from the measurement Sets the judgment standard area. center. Enter values in XH (right direction)/XL (left direction)/YH (upper direction)/YL (lower direction).
Page 48 2 Setting ● Offset Tilt Mode Set the measurement criteria when the Mode is set to the Offset Tilt mode. Setting procedure In Offset Tilt Mode, can be set two different judgment criteria. For the second criterion, the judgment area and offset position can be changed with respect to the first criterion.
Page 49 2 Setting Setting item Setting value Offset Tilt Mode D1/D2 As the judgment area, use the circle with its radius D1 for the first DUT and the circle with its radius D2 for the second DUT. Enter the offset value of the second measurement center. Setting range (Unit: deg) D1: 0.001 to 1.75 (def.=0.875) D2: 0.001 to 1.75 (def.=0.875)
Page 50 2 Setting ● Detect Mode Select the center of gravity position from the center of the light spot area, the luminance center of gravity, and the peak position. Setting procedure ❶ In [Detect Mode], select [Center (BIN)]/[Centroid (GRAY)]/[Peak]. ❷ When [Center (BIN)] is selected, Binarization Threshold can be set. When [Centroid] is selected, Noise Level and Valid Luminance Range can be set.
Page 51 2 Setting Setting item Setting value Detect Mode Centroid (GRAY) An angle is calculated based on the luminance weighed center (def.) of gravity formula of valid pixels that luminance is higher than the noise level. Enter a noise level in [Noise Level] that becomes valid. ■...
Page 52 2 Setting Item description Setting item Setting value Binarization Threshold − Setting range 600 to 4095 (def.=1000) When [Center (BIN)] is selected, the binary threshold is set. NOTE When the number of valid pixels exceeds 32767, it becomes an error. Noise Level −...
Page 53: X84; Settings Of Camera [Camera]
2 Setting ● Moving Average Set judgment value for number of averaging (moving average). Item description Setting item Setting value Moving Average − Set judgment value for number of averaging. Setting range 2/4/8/16/Off (def.) Info When a measurement becomes Error or NG, the number of processes is set to 1, and it is counted again.
Page 54: X84; Settings Of Display State [Display]
2 Setting „ Settings of Display State [Display] Display settings such as the display method and unit are set. Item description Setting item Setting value Mirroring Off (def.) No flip Flip horizontally Sets the mirroring display of an image. Flip upside down Flip horizontally and upside down Rotation Off (def.)
Page 55 2 Setting Setting item Setting value Auto Zoom Off (def.) No zoom in display is performed. Coarse Set the magnification from the specified choices. Sets the display magnification. Info Setting range The data to send the host × 2 (def.)/×4/x8 device also use same unit.
Page 56: System Settings
2 Setting System Settings With the tab, the following items can be set. - Settings of System Configuration [Configuration] - Settings of angle calibration [Calibration] - Verification of system information [Information] „ Settings of System Configuration [Configuration] Able to set communication connection and command mode. 2-28...
Page 57 2 Setting Item description Setting item Setting value Result Output - Mode Off (def.) No output. Stream Measurement results are always output. Sets the output method of an measurement result. Measurement results are output when the Hold command is entered. Result Output - Interface Serial (def.) Measurement results are output to the serial communication.
Page 58: X84; Settings Of Angle Calibration [Calibration]
2 Setting Info The image of Strobe signal movement is as follows. Pulse Width Image Processing Delay Time Strobe signal „ Settings of Angle Calibration [Calibration] Touch the [Calibration] button to perform angle calibration. For details of angle calibration, see “4 Angle Calibration” (Page 4-1). „...
Page 59: Measuring
Measuring In this product, measurement results are displayed on the touch panel monitor. In this section, measurement settings, and how to view the measurement screen and measurement results are explained. Overview of Measurement Screen ......3-2 Settings of the Measurement Mode ....3-4 Settings of the Judgment Area ......3-6 Verification of Measurement and Judgment Results ...3-10...
Page 60: Overview Of Measurement Screen
3 Measuring Overview of Measurement Screen In this product, after power source is applied, the specific data are read, which is displayed on the measurement screen, and a measurement starts. Here, how to view the measurement screen is explained. ① ②...
Page 61 3 Measuring Under normal conditions, the level display, which indicates the received light level status, is displayed continuously in both bar display and brightness. However, there are cases where only the luminance value is displayed without displaying the bar, so the example is described below. Level Bar Level Bar Normal state: Both level bar and brightness value displayed...
Page 62: Settings Of The Measurement Mode
3 Measuring ⑧ Setting value display The setting state of the following items is displayed. LD Adjustment, Light Source, LD Power, Spot Sorting Rules, Detect Mode, Trigger Interval, Mirroring, and Rotation (Settings) button ⑨ Touch this button to display the [Settings] screen (→ Page 2-2). Settings of the Measurement Mode The measurement and judgment criteria differ depending on the measurement mode.
Page 63 3 Measuring Set the number of measurement spots with [Max Spot Number], and set the judgment target spot with [Target]. Touch the [Run] button. It returns to the measurement screen. Info When saving the settings, touch the [Save] button before touching the [Run] button.
Page 64: Settings Of The Judgment Area
3 Measuring Settings of the Judgment Area When setting an allowable limit for the measurement result, set a reference judgment area. To set the judgment area, refer following the procedure as below. For details of setting contents, see Page 2-18. Depending on a measurement mode, the setting method of judgment standards differs.
Page 65 3 Measuring In [Area Shape], select [Rectangle]/[Circle]. In case of [Rectangle], judgement area is set at Center with Rectangle shape. In case of [Circle], judgement area is set at Center with Circle shape. Set the size of the judgment area. When [Rectangle] is selected, set the right and left side with XH/XL, and top and bottom with YH/YL.
Page 66 3 Measuring ● The Measurement Mode is Offset Tilt In case of the Offset Tilt, judgment is always done. Touch (Settings) in the measurement screen. The [Settings] screen is displayed. In the menu area, touch the (Detail settings) tab. In [Offset Tilt Mode], select [D1/D1]/[D1/D2]/[D1/X-Y]. In case of [D1/D1], use the circle with the same radius is the judgment area for both first and second times.
Page 67 3 Measuring Set the size of the judgment area. In case of [D1/D1], set the radius with D1. In case of [D1/D2], set the radius with D1 and D2. In case of [D1/X-Y], set the radius with D1, the right and left side with XH/XL, and top and bottom with YH/YL.
Page 68: Verification Of Measurement And Judgment Results
3 Measuring Verification of Measurement and Judgment Results The measurement and judgment criteria differ depending on the measurement mode. In this section, the measurement results per mode and calculation method of judgment results are explained. Info In case of below, the judgment becomes “Error”. •...
Page 69: X84; Multi Relative Measurement Mode
3 Measuring „ Multi Relative Measurement Mode Multiple spots (5 spots at maximum) are detected, and judgment results and measurement results are displayed. Absolute value Relative value Measurement results display The measurement result (Absolute and relative values) are shown. Measurement results (absolute value) - X: Tilting angle from center in X-axis component - Y: Tilting angle from center in Y-axis component - D: Tilting angle from center...
Page 70: X84; Multi Absolute Measurement Mode
3 Measuring „ Multi Absolute Measurement Mode Multiple spots (5 spots at maximum) are detected, and judgment results and measurement results are displayed. Measurement results display The result (absolute value) is shown as the angle between center point to each spot. - X: Tilting angle from center in X-axis component - Y: Tilting angle from center in Y-axis component - D: Tilting angle from center...
Page 71: X84; Offset Tilt Measurement Mode
3 Measuring „ Offset Tilt Measurement Mode In the case of external control, judgment can be made by changing the judgment criteria. Different values can be set for each judgment , and judgment can be made under various conditions by using different range and origin offset.
Page 73: Angle Calibration
Angle Calibration This section describes the angle calibration procedure. Perform angular calibration when changing the autocollimator or when angle adjustment is required. To perform angle calibration, a parallel mirror (HS-0) to be the horizontal standard and a wedge substrate (made by Suruga Seiki or equivalent product available commercially) to be the standard angle are necessary.
Page 74: Overview Of Angle Calibration
CMOS sensor built in the autocollimator. To perform calibration, install a parallel mirror (HS-0) to be the horizontal standard and the standard substrate of a wedge substrate (made by Suruga Seiki or equivalent product available commercially) to be the standard angle as shown below.
Page 75: Angle Calibration
4 Angle Calibration Angle Calibration In this section, the angle calibration procedure is explained. Prepare a parallel mirror (HS-0) to be the horizontal standard and a wedge substrate (made by Suruga Seiki or equivalent product available commercially) to be the standard angle beforehand. NOTE •...
Page 76 4 Angle Calibration Touch the [Start Calibration] button. [Calibration Wizard] is displayed. Select a calibration method, and touch the [Next] button. [Manual]: Select when there are value information of calibration values, and entering values directly. Go to Page 4-4: “Manual is selected”. [Measure]: Select when calibration is done by measuring a wedge mirror that wedge angle is already known.
Page 77 4 Angle Calibration Touch the [OK] button. The angle calibration value is applied. When [Cancel] is touched, it ends without calibration. ● Measure is selected Set a parallel mirror, and touch the [Next] button. Set the measurement center, and touch the [Next] button. Adjust to match the light spot to the displayed center line, and touch [ZeroSet] to set the measurement center.
Page 78 4 Angle Calibration Set a wedge substrate, and touch the [Next] button. Set a wedge substrate on the reference surface and a parallel mirror on the wedge substrate. Info Instead of the wedge substrate and parallel mirror, a wedge mirror can be used. Enter a wedge substrate angle, and touch the [Next] button.
Page 79: Control From External Devices
Control from External Devices This product can be operated with commands from external devices by using serial communication (RS232C) and Ethernet communication. In this section, commands and various settings used in communication with external devices are explained. Connection Specifications with External Devices ...5-2 Setting the PC Network and IPU (Image Processing Unit) IP Address ...5-4 Setting the FTP .............5-9 Operating the Setup Transfer Tool ....5-22...
Page 80: Connection Specifications With External Devices
5 Control from External Devices Connection Specifications with External Devices This product connects with external devices via serial connection (RS232C) or Ethernet connection. „ Connection with RS232C Connection specifications of RS232C are explained. Command sending is performed by using communication application. The port to connect is checked through system information of PC.
Page 81: X84; Connection With Ethernet
5 Control from External Devices „ Connection with Ethernet Connection specifications of Ethernet are explained. Command sending is performed by using communication application. IP address and port number to connect is set with the system settings (→ Page 2-28). Communication items Output of measurement results (Data Output port) ●...
Page 82: Setting The Pc Network And Ipu (Image Processing Unit) Ip Address
5 Control from External Devices Setting the PC Network and IPU (Image Processing Unit) IP Address This section covers the basic setting procedure for connection of the H410 model with a PC. „ Setting the PC Network IP Address This section covers the basic setting procedure for the PC network IP address. The supported PC operating system is Windows10.
Page 83 5 Control from External Devices Click [Properties]. The [Ethernet Properties] screen is displayed. Check the [Internet Protocol Version 4 (TCP/IPv4)] box and click the [Properties (R)] button. The [Ethernet Protocol Version 4 (TCP/Pv4)] screen is displayed. Check the [Use the following IP address (S)] box. Continued to next page...
Page 84 5 Control from External Devices With reference to the [IP address (I)], [Subnet mask (U)], and [Default gateway [D] examples, input the setting information. Setting examples IP address (I): 192.168.0.99 Subnet mask (U): 255.255.255.0 Default gateway (D): Blank NOTE For the IP address, we recommend avoiding the use of the IPU default value (192.168.0.100). When the IPU IP address has been changed from the default value, (192.168.0.100) can be set.
Page 85: X84; H410 Model System Setting
5 Control from External Devices „ H410 Model System Setting This section covers the basic setting procedure for the H410 model system. Start up the H410 model. Touch [Settings] on the measurement screen. The [Settings] screen is displayed. On the [Settings] screen, touch the [System] tab.
Page 86 5 Control from External Devices Input the settings with reference to the [Ethernet] [IP address], [Subnet mask] and [Default gateway] examples. Setting examples IP address: 192.168.0.100 Subnet mask: 255.255.255.0 Default gateway: 0.0.0.0 NOTE The IP address can be set anywhere in the range of 192.168.0.xxx (xxx = 1 to 254) as long as it does not overlap with the IP address (ex.: 192.168.0.99) set in "■Setting the PC Network IP Address"...
Page 87: Setting The Ftp
5 Control from External Devices Setting the FTP „ Enabling the FTP Server Function This section covers the basic procedure for enabling the FTP server function. Open the Control Panel and click [Programs and Features]. The screens displayed will be [Control Panel] > [All Control Panel Items] > [Programs and Features]. Click [Turn Windows features on or off].
Page 88: X84; Creating A User
5 Control from External Devices „ Creating a User This section covers the basic procedure for creating a user to connect to the FTP server. Open the Control Panel and click [Administrative Tools]. The screens displayed will be [Control Panel] > [All Control Panel Items] > [Administrative Tools]. Double-click [Computer Management].
Page 89 5 Control from External Devices Right-click [Users]. Click [New User]. Input the user name and password. The user name and password may be chosen at will. Uncheck [User must change password at next logon (M)], check [Password never expires (W)], and click the [Create] button. Click the [Close] button to cancel the user creation process.
Page 90: X84; Setting The Ftp Server
5 Control from External Devices Double-click [Users] and confirm that the previously created user has been registered. „ Setting the FTP Server This section covers the basic setting procedure for the FTP server. Open the Control Panel and click [Administrative Tools]. The screens displayed will be [Control Panel] >...
Page 91 5 Control from External Devices Right-click the server icon on the left panel and click [Add FTP site]. The [Site Information] setting screen is displayed. Input a name into [FTP site name (E)], select [Physical path (H)], and click the [Next] button. [FTP site name (E)] may be chosen at will.
Page 92 5 Control from External Devices For [Authentication], check the [Basic (B)] box. For [Allow access to <1088>(C)], select [Specified roles or user groups] and input the user name created in 6 on Page 5-11. For [Permissions], check the [Read] and [Write] boxes and click the [Finish] button.
Page 93 5 Control from External Devices Input the name classifying the Web server into [Alias (A)], input the Web server physical path into [Physical path (P)], and click the [OK] button. For [Physical path (P)], create a file directly under C: in advance and select it here. Ex.: [Alias (A)]: wwwroot [Physical path (P)]: C:\inetpub\wwwroot When setting "Upload Folder (FTP) in the IPU system setting, the content set with this item will...
Page 94: X84; Permitting Communication Through The Firewall
5 Control from External Devices „ Permitting Communication Through the Firewall This section covers the basic setting procedure for the firewall. Open the Control Panel and click [Security and Maintenance]. The screens displayed will be [Control Panel] > [All Control Panel Items] > [Security and Maintenance].
Page 95 5 Control from External Devices Click [Allow an app through firewall]. The screens displayed will be [Control Panel] > [All Control Panel Items] > [Windows Defender Firewall] > [Allowed apps]. Click the [Change settings] button. Check the [Private] and [Public] boxes under [FTP Server] and click the [OK] button.
Page 96: X84; Starting The Ftp Server
5 Control from External Devices „ Starting the FTP Server This section covers the basic startup procedure for the FTP server. Open the Control Panel and click [Administrative Tools]. The screens displayed will be [Control Panel] > [All Control Panel Items] > [Administrative Tools]. Double-click [Computer Management].
Page 97 5 Control from External Devices Double-click [Connect] for the FTP site. Click [Sites]. Right-click the registered site. Continued to next page 5-19...
Page 98: X84; Setting An Ip Address Connecting To The Ftp Server
5 Control from External Devices Click [FTP Site Management] and then [Start]. The FTP site will start up. „ Setting an IP Address Connecting to the FTP Server This section covers the basic setting procedure for IP addresses connecting to the FTP server. To set an IP address connecting to the FTP server, see the section on "■Setting the PC Network IP Address"...
Page 99: X84; Supplementary Items
5 Control from External Devices „ Supplementary Items 1) If connection with the FTP server is not possible even after completing FTP setting, do as follows. [Turn off firewall] In the order of [Control Panel] > [Systems and Security] > [Windows Defender Firewall], select [Turn off Windows firewall] under both [Private networks] and [Public networks] and click the [OK] button.
Page 100: Operating The Setup Transfer Tool
5 Control from External Devices Operating the Setup Transfer Tool This section covers the basic operation of the Setup Transfer Tool. „ Starting the Setup Transfer Tool This section covers the basic startup procedure of the Setup Transfer Tool. NOTE The Setup Transfer Tool cannot be used during measurement with the H410 model.
Page 101: X84; Understanding The [Setup Transfer Tool] Window
5 Control from External Devices Double-click [SettingTool.exe]. The [Setup Transfer Tool] window opens. „ Understanding the [Setup Transfer Tool] Window This section covers how to understand the [Setup Transfer Tool] window. ⑤ ⑨ ② ① ⑥ ③ ④ ⑦ ⑧ ① Device list Displays a list of each device's IP address.
Page 102: X84; Adding Devices
5 Control from External Devices ⑥ LAC settings Displays the name of the [setting files] on the H410 model. ⑦ [Download Settings] button When clicked, downloads the setting files on the H410 model. (→ Page 5-27) ⑧ [Upload Settings] button When clicked, uploads setting files to the H410 model. (→ Page 5-27) ⑨ [Firmware Update] button When clicked, updates the IPU firmware on the H410 model.
Page 103: X84; Removing Devices
5 Control from External Devices „ Removing Devices This section covers the basic procedure for removing devices. In the Device List, click the IP address to be removed and then click the [Remove] button. When the [Remove] button is clicked, a confirmation screen is displayed. Click the [OK] button.
Page 104: X84; Connecting Devices
5 Control from External Devices „ Connecting Devices This section covers the basic procedure for selecting an IP address for device connection. Click the IP address in the [Device List]. After connection with the device, if communication begins normally, the information in [Device Info] and [LAC Settings] will be updated.
Page 105: X84; Downloading Setting Files
5 Control from External Devices „ Downloading Setting Files This section covers the basic procedure for downloading setting files set with the H410 model. Click the IP address of the device for setting file download, and click the [Download Settings] button. The [Save As] window is displayed.
Page 106: X84; Updating Firmware
5 Control from External Devices Select a setting file and click the [Open (O)] button. The setting file extension is .lac. The [Update setup] window is displayed. Click the [Cancel] button to cancel the setting file upload. Click the [OK] button. NOTE To overwrite system settings other than network-related settings (IP address, network, gateway) at the same time, check the box.
Page 107 5 Control from External Devices Select firmware and click the [Open (O)] button. The firmware extension is .dat. The confirmation screen is displayed. Click the [Cancel] button to cancel the firmware upload. Click the [OK] button. Firmware updating begins and a window calling for a restart is displayed. 10 minutes or so are required for updating.
Page 108: Data Communication Format
5 Control from External Devices Data Communication Format For details of formats, see “■Command Format” (Page 5-33)”. In this section, examples of data receiving images by each mode are introduced. Info H410 and HIP-1200 mode use same communication format. ● In case of Internal Mode Judgment results and measurement values are sent to output destination with a specified cycle.
Page 109: Device Control With External Commands
5 Control from External Devices Judgment = In case of NG ● G,N,999999,999999,999999CRLF ASCII (hexadecimal notation): 472c4e2c3939393939392c3939393939392c3939393939390d0a Device Control with External Commands This product can control with commands from external devices connected by RS232C and Ethernet. In this section, the commands and command formats that can be used are explained. Info For default setting of IPU, data output at the maximum frame rate (25 ms) for both Normal Mode/HIP-1200 Mode in RS232C communication and Ethernet communication is supported.
Page 110 5 Control from External Devices Identification Command content Process on the IPU side character R127 Zero calibration value mode request command Send the setting values of zero calibration value mode R128 Zero calibration value for user settings request Send zero calibration value for user settings command R129 RAW image output mode request command...
Page 111: X84; Command Format
5 Control from External Devices Identification Command content Process on the IPU side character S109 Offset Tilt judgment 2 change command Send ACK after changing the judgment area to judgment 2 at Offset Tilt Note: The waiting time between each command should be 200msec or more. The IPU processing may not be in time then processing may not be possible.
Page 112 5 Control from External Devices <Setting value individual readout> Outputs the present setting value per item. , *1 , *2 CR LF Host Processing *1: Measurement mode (Here, since it is the angle measurement, “0” becomes the fixed value) *2: Item code (see the list of item codes shown below) *3: The setting contents (Value differs depending on items.
Page 113 5 Control from External Devices value-1) *6: Effective luminance judgment mode (“0”= OFF, “1”=ON) *7: Judgment type (“0”=OFF, “1”=Circle, “2”=Rectangular) *8: Circle-radius (0.001 to 1.750) 1 0 0 *9: Rectangular-XL (-1.750 to XH-1) ± 0 1 0 0 *10: Rectangular-XH (XL+1 to 1.750) ±...
Page 114 5 Control from External Devices The measurement result of the data acquired by the command is in the following format. [UNIT = deg] Data acquiring example (X,Y and D are common) Header Sign 1 digit 6 decimal places Measurement result display integer [UNIT = min + sec] (X,Y and D are common)
Page 115 5 Control from External Devices <LD output automatic adjustment mode readout> Outputs the LD output automatic adjustment mode. 2 CR LF Host Processing *1: LD output automatic adjustment mode (“0”=OFF, “1”=ON) <LD external light source mode readout> Outputs the LD external light source mode. 3 CR LF Host Processing...
Page 116 5 Control from External Devices <Measurement luminance value readout> Outputs the measurement luminance values. 9 CR LF Host Processing *1: Measurement luminance value (0 to 4095) 1 1 1 1 <Display setting readout> Outputs the display settings. 0 CR LF Host Processing *1: Rotation...
Page 117 5 Control from External Devices <DIO Strobe setting readout> Outputs DIO Strobe setting. 3 CR LF Host Processing *1: Strobe delay time (1 to 999) 1 1 1 *2: Strobe output width (1 to 999) 1 1 1 <Binary threshold for pixel calibration value readout> Outputs the binary threshold for pixel calibration value.
Page 118 5 Control from External Devices <Zero point calibration value for user setting readout> Outputs zero point calibration value for user settings. 8 CR LF Host Processing *1: Zero point calibration value X (0 to 960) 0 0 0 0 0 0 *2: Zero point calibration value Y (0 to 960) 0 0 0...
Page 119 5 Control from External Devices <RS232C setting readout> Outputs the RS232C settings. 1 CR LF Host Processing * 1: Baud rate: (“0”=9600, “1”= 19200, “2”= 38400, “3”= 57600, “4”= 115200) <Ethernet setting readout> Outputs Ethernet settings. 2 CR LF Host Processing *1 , *2 , *3 , *4 CR LF...
Page 120 5 Control from External Devices B. Writing type Command formats on writing such as settings are explained. Example: W102 command W102 command Host Overwrite Processing W102 ACK* *When a communication error is generated, IPU returns the error command. <File saving> Saves the present setting values to the specified file number.
Page 121 5 Control from External Devices Code Item name Numbering Judgment label Maximum No. of light spots Center of gravity calculation method Average Effective light spot size mode Effective light spot pixel upper limit value Effective light spot pixel lower limit value <Setting value batch writing>...
Page 122 5 Control from External Devices <LD output setting value writing> Changes the LD output setting values. , *1 CR LF Host Processing *1: LD output value (9 to 4095) 1 1 1 1 <LD output automatic adjustment mode writing> Changes the LD output automatic adjustment mode. , *1 CR LF Host Processing...
Page 123 5 Control from External Devices <Camera exposure time writing> Changes the exposure time of the camera. , *1 CR LF Host Processing *1: Camera exposure time (“0”=93µs, “1”=200µs, “2”=431µs, “3”=928µs, “4”=2000µs, “5”=4309µs, “6”=9283µs, “7”=20000µs) <Display setting writing> Changes the display settings. Host Processing 0 CR LF...
Page 124 5 Control from External Devices <DIO Strobe setting writing> Changes DIO Strobe setting. , *1 , *2 CR LF Host Processing *1: Strobe delay time (1 to 999) 1 1 1 *2: Strobe output width (1 to 999) 1 1 1 <Binary threshold for pixel calibration value writing>...
Page 125 5 Control from External Devices <Zero point calibration value for user setting writing> Changes the zero point calibration value for user setting mode. , *1 , *2 CR LF Host Processing *1: Zero point calibration value X (0 to 960) 0 0 0 0 0 0 *2: Zero point calibration value Y...
Page 126 5 Control from External Devices <Command mode writing> Changes the command mode. , *1 CR LF Host Processing *1: Command mode (“0”=Normal mode, “1”=HIP mode) C. Execution type Command formats to execute operations such as measurement start and stop are explained. Example: S107 command S107 command Host...
Page 127 5 Control from External Devices <Zero reset> Sets the measurement center in the measurement range center. 6 CR LF Host Processing <Zero set> Sets the measurement center in the light spot on the monitor. 7 CR LF Host Processing <Switch OFFSETTILT judgment 1> At OFFSET TILT measurement, switch the judgment area from judgment 2 (D1, D2, X-Y) to judgment 1 (D1).
Page 128: X84; Communication Error
5 Control from External Devices „ Communication Error When a command can not be received or executed normally, the error information is sent from this product with the following format. * CR LF Host Processing The following error code is entered in *1. “1”: Communication error - The number of received characters from the header to [CRLF] is 60 or more.
Page 129: Using Input/Output Terminal
Using Input/Output Terminal In this section, the specification of the input/output terminal and timing chart are explained. Name of Input/Output Terminal and Function ...6-2 Timing Chart ............6-6...
Page 130: Name Of Input/Output Terminal And Function
6 Using Input/Output Terminal Name of Input/Output Terminal and Function This product is equipped with a 12-Pole connector. In this section, the name of the input/output terminal and function are explained. Terminal Terminal Signal Content Name Output 1 COM 0 Output Common Common terminal for output signal.
Page 131: X84; Equivalent Circuit Scheme
6 Using Input/Output Terminal „ Equivalent Circuit Scheme The circuit diagram of input/output terminals and connection examples are explained. ● IO Output ● IO Input Ω Ω Ω Ω Ω Ω Continued to next page...
Page 132 6 Using Input/Output Terminal ● IO Input connection example (Connection from NPN output) ● IO Input connection example (Connection from PNP output) ● IO Output connection example (Connection to NPN input)
Page 133 6 Using Input/Output Terminal ● IO Output connection example (Connection to PNP input) ● LASER ON +/- Connection Example ● TRIG 5V +/- Connection Example...
Page 134: Timing Chart
6 Using Input/Output Terminal Timing Chart In this section, the timing of input/output signal is explained. „ Internal Trigger Mode Measurement Setting Setting Measurement state Mode Mode Mode Hold input Trigger interval Camera/Internal control Process Process Process Process Process Process Process Measurement results Busy output...
Page 135: X84; External Trigger Mode
6 Using Input/Output Terminal „ External Trigger Mode Measurement Setting Setting Measurement state Mode Mode Mode Ignore due to Busy Ignore due to Busy Trigger output Image Image Image Exposure Exposure Exposure Camera control transfer transfer transfer Avai l a bl e Internal buffer Available Not available...
Page 136: X84; Details Of Strobe Signal
6 Using Input/Output Terminal „ Details of Strobe Signal Trigger input Camera/Internal control Process Process Measurement results Measurement results output STROBE output Delay Pulse Delay Pulse Time Width Time Width „ Details of Zero Set Signal Measurement Mode Setting Mode Measurement Mode Measurement state Invalid...
Page 137: Specification
Specification In this section, specifications of IPU and head, and external dimensions figure are explained. Main Specifications ..........7-2 External Dimensions ..........7-5...
Page 138: Main Specifications
7 Specification Main Specifications NOTE Please note that a part of specifications in this product may be changed without prior notice to improve performance. „ IPU Item Specification Model No. HPU-500,HPU-1000 Connection sensor head H410-175R, H410-175S1, H410-175G1, H410-175B1, H410-175G1-30 No. of sensor head connections Rating Power source...
Page 139: X84; Sensor Head
7 Specification Item Specification Operation USB 2.0 Type-A connector input Operation input from the touch panel monitor and mouse External RS232C D-sub 9-pin connector (use the cross cable) communication Baud rate: 9600, 19200, 38400, 57800, and 115200 Measurement data output and control command input/output Ethernet RJ-45 connector Transmission method: 1000Base-T and 100Base-TX...
Page 140: X84; Ac Adaptor (Optoipnal)
7 Specification Item Specification Display LED (Green/Red) Ambient 0 to 40°C temperature for Ambient humidity 35 to 85% RH for use Performance 23 ± 5°C guarantee temperature Storing -10 to +60°C temperature Vibration Frequency range: 10 to 500 Hz resistance Maximum acceleration: 2 G and X/Y/Z axis Weight Approx.
Page 141: External Dimensions
7 Specification External Dimensions „ IPU HPU-500,HPU-1000 134.4 4-M4Depth7...
Page 142: X84; Sensor Head H410 Series
7 Specification „ Sensor Head H410 Series 2- 3.5 3-M3Depth4.5 68.2 3-M3Depth5...
Page 143: Troubleshooting
Troubleshooting When errors and trouble are generated on the operation of this product, please read this section. LED display state..........8-2 Error messages ............8-2 Phenomena and measures ........8-3...
Page 144: Led Display State
8 Troubleshooting LED display state The state of this product can be checked with the LED. When errors and trouble are observed, always check the LED display first. Display state Meaning Measures (IPU/Head) Red ON Disconnected communication with Check if the sensor head is connected properly. the sensor Head Red ON EE-PROM failure...
Page 145: Phenomena And Measures
8 Troubleshooting Display state Meaning Measures [deg] R109,E, Unable to determine error due to Error due to object angle calculation, or error due to sensor head 999999999,999999999, possible multiple errors or image processing unit. 9999999999 Please try to measure the object angle using a standard mirror [min+sec] R109,E, (equivalent to our model: HS-0).
Page 146 8 Troubleshooting Phenomenon Cause Measures No light spot is Zoom magnification is large. Adjust the Zoom magnification or viewing angle so that the tilt of displayed on the the measurement target object is within the range of visual field. monitor / the light *The maximum value of visual angle is ±1.75°.
Page 148: Warranty
*Regarding the damage generated in this product, our company shall not be held responsible except for the repair based on this warranty. SURUGA SEIKI CO.,LTD. Overseas Sales Tel: +81-3-6403-4513 Fax: +81-3-6403-4514 https://eng.surugaseiki.com/...

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