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Summary of Contents for Newport MKS IMS-V Series
- Page 1 IMS-V Series High-Performance Linear Stages for Vertical Use ’ ANUAL A531G...
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Page 2: Warranty
High-Performance Linear Stages for Vertical Use Warranty Newport Corporation warrants this product to be free from defects in material and workmanship for a period of 1 year from the date of shipment. If found to be defective during the warranty period, the product will either be repaired or replaced at Newport’s discretion. -
Page 3: Table Of Contents
4.1 DC-Servo Drive Version ................6 4.2 Sensor Position..................6 4.3 Feedback Signal Position .................7 4.4 Pinouts......................8 4.5 MCAB-5 Cable ....................8 — Connection to Newport Controllers ........9 5.1 Warnings on Controllers ................9 5.2 Connection to XPS Controller ...............10 5.3 Connection to ESP301 Controller............10 5.4 Connection....................10... - Page 4 IMS-V Series High-Performance Linear Stages for Vertical Use — Maintenance ................14 8.1 Maintenance ....................14 8.2 Repair .......................14 8.3 Calibration ....................14 Service Form ......................15 A531G1 - EDH0211En1061 — 08/23...
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Page 5: Ec Declaration Of Conformity
IMS-V Series High-Performance Linear Stages for Vertical Use EC Declaration of Conformity A531G1 - EDH0211En1061 — 08/23... - Page 6 IMS-V Series High-Performance Linear Stages for Vertical Use UK Declaration of Conformity A531G1 - EDH0211En1061 — 08/23...
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Page 7: Definitions And Symbols
Note indicates additional information that must be considered by the user or operator. European Union CE Mark The presence of the CE Mark on Newport Corporation equipment means that it has been designed, tested and certified as complying with all applicable European Union (CE) regulations and recommendations. -
Page 8: Warnings
Stop using the stage immediately, switch off the motor power and then disconnect the electronics power supply. After checking that smoke is no longer being emitted contact your Newport service facility and request repairs. Never attempt to repair the stage yourself as this can be dangerous. WARNING Make sure that this stage is not exposed to moisture and that liquid does not get into the stage. -
Page 9: Caution
When the carriage is in its end-of-run position, it is strongly recommended not to go beyond this point as this may damage the stage mechanism. CAUTION Contact your Newport service facility to request cleaning and specification control every year. A531G1 - EDH0211En1061 — 08/23... - Page 10 IMS-V Series High-Performance Linear Stages for Vertical Use A531G1 - EDH0211En1061 — 08/23...
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Page 11: Introduction
IMS-V Series High-Performance Linear Stages for Vertical Use High-Performance Linear Stages for Vertical Use IMS-V Series —Introduction This manual provides operating instructions for the stage that you have purchased in the IMS-V Series: IMS-V Series linear stages: 100 and 300 mm travel ranges. RECOMMENDATION We recommend you read carefully the chapter “Connection to electronics”... -
Page 12: Description
IMS-V Series High-Performance Linear Stages for Vertical Use —Description The IMS-V Series linear stage complements the (M-)IMS Series by providing linear travel ranging of 100 and 300 mm. The stages feature robust designs with high performance but without high cost, making them cost-effective solutions for precision industrial and laboratory applications. -
Page 13: Characteristics
168 points. Guaranteed and Typical Specifications Guaranteed maximum performance values are verified per Newport's A167 metrology test procedure. For more information, please consult the metrology tutorial section in the Newport catalog or at www.newport.com A531G1 - EDH0211En1061 — 08/23... -
Page 14: Mechanical Specifications
MTBF 20,000 h with 300 N load and with a 10% duty cycle For the definition of Typical and Guaranteed specifications see “Motion Basics Terminology & Standards” Tutorial at www.newport.com To obtain arcsec units, divide µrad value by 4.8. CAUTION To reach specifications stated, stages must be fixed on a plane surface with a flatness of 5 µm. -
Page 15: Load Characteristics And Stiffness
IMS-V Series High-Performance Linear Stages for Vertical Use Load Characteristics and Stiffness – C x Min. -Cx; +Cx 40 N + C x Max. -Cx; +Cx 400 N with XPS 100 N with ESP302 kay, Compliance in pitch 0.2 µrad/Nm kaz, Compliance in yaw 1 µrad/Nm , Off-center load... -
Page 16: Drives And Motors
IMS-V Series High-Performance Linear Stages for Vertical Use —Drives and Motors DC-Servo Drive Version A DC-motor and a linear steel scale, 20 µm signal period, 0.1 µm resolution. DC-Motor Performance Specifications and Characteristics Resolution Speed Nominal Max RMS Max. Peak Resistance Inductance Tachometer... -
Page 17: Feedback Signal Position
“Encoder” and “Index Pulse” are “differential pair” (type RS-422) type output signals. Using these signals permits a high immunity to noise. Emission circuits generally used by Newport are 26LS31 or MC3487. Reception circuits to use are 26LS32 or MC3486. A531G1 - EDH0211En1061 — 08/23... -
Page 18: Pinouts
IMS-V Series High-Performance Linear Stages for Vertical Use Pinouts The pinout diagram for the IMS-V stages SUB-D25M connector is shown below. IMS-V N.C. N.C. N.C. N.C. + Motor + Motor – Motor – Motor N.C. N.C. N.C. N.C. Mechanical Zero Ground Index Pulse I + End-of-Run... -
Page 19: Connection To Newport Controllers
IMS-V Series High-Performance Linear Stages for Vertical Use —Connection to Newport Controllers Warnings on Controllers Controllers are intended for use by qualified personnel who recognize shock hazards and are familiar with safety precautions required to avoid possible injury. Read the controller user’s manual carefully before operating the instrument and pay attention to all written warnings and cautions. -
Page 20: Connection To Xps Controller
These stages are ESP compatible. Enhanced System Performance is Newport's exclusive technology that enables Newport ESP motion controllers to recognize the connected Newport ESP stage and upload the stage parameters. This ensures that the user can operate the motion system quickly and safely. -
Page 21: Connection To Non-Newport Electronics
Keep this cable at a safe distance from other electrical cables in your environment to avoid potential cross talk. —Connection to Non-Newport Electronics Connections WARNING Newport is not responsible for malfunction or damage of IMS-V stages when used with non-Newport controllers. WARNING “ ”... -
Page 22: Dimensions
IMS-V Series High-Performance Linear Stages for Vertical Use —Dimensions (M-)IMS-V Stages 1.18 (30) 8 HOLES CLR FOR M6 SCREW 8 HOLES CLR FOR 1/4-20 SCREW 5.91 (127) (150) SUB-D25M 5.73 CONNECTOR (145.5) 7.09 (180) MODEL SHOWN: IMS300V DIMENSIONS IN INCHES (AND MILLIMETERS) MODEL (METRIC) TRAVEL 3.54... -
Page 23: Top Plate Interface
IMS-V Series High-Performance Linear Stages for Vertical Use Top Plate Interface MODEL SHOWN: IMS INTERFACE DIMENSIONS IN INCHES (AND MILLIMETERS) 5 HOLES M5 THD ON ø6.85 (174), 5 HOLES M5 THD / ø5.39 (137), EQUIDISTANT AT 60°, EQUIDISTANT AT 60°, 5 HOLES M4 THD DEPTH: .35 (9) DEPTH: .35 (9) -
Page 24: Maintenance
The (M-)IMS-V stage must be used or stocked in a clean environment, without dust, humidity, solvents or other substances. RECOMMENDATION It is recommended to return the stage to Newport for re-lubrication after 2000 hours of use. If the IMS-V stage is mounted on a workstation and cannot be easily removed, please contact Newport's After Sales Service for further instructions. -
Page 25: Service Form
Service Form Your Local Representative Tel.: Fax: Name: Return authorization #: (Please obtain prior to return of item) Company: Address: Date: Country: Phone Number: P.O. Number: Fax Number: Item(s) Being Returned: Model #: Serial #: Description: Reasons of return of goods (please list any specific problems): A531G1 - EDH0211En1061 —... - Page 26 Visit MKS I Newport Online at: www.newport.com Europe North America & Asia Newport Corporation MICRO-CONTROLE Spectra-Physics S.A.S 1791 Deere Ave. 7 rue des Plantes Irvine, CA 92606, USA 45340 Beaune-la-Rolande France Sales Tel.: +1 (949)-863-3144 Sales Europe (EMEAI) e-mail: sales@newport.com Tel.: +49 (0) 6151-708-0...
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