IMTEC ACCUMEG UO1000PMCA Operating Manual

Megasonic generator

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Megasonic System Operating Manual

This manual contains proprietary information and is not to be reproduced or transmitted

in whole or in part without the express written consent of IMTEC Acculine.

Pub. No.: 15-A357-0307

For Accumeg Systems with

UO1000PMCA RF Generators

IMTEC Acculine

49036 Milmont Dr

Fremont, CA 94538 USA

Tel: 510-770-1800

Fax: 510-770-1800

imtec@imtecacculine.com

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Page 1 49036 Milmont Dr Fremont, CA 94538 USA Tel: 510-770-1800 Fax: 510-770-1800 imtec@imtecacculine.com This manual contains proprietary information and is not to be reproduced or transmitted in whole or in part without the express written consent of IMTEC Acculine. Pub. No.: 15-A357-0307...
Page 2: Table Of Contents
IMTEC Acculine Megasonic Operation Manual Table of Contents 1. Unpacking Procedures ....................3 Description Inspecting the Shipping Container Checking the Contents Unpacking Procedure 2. Introduction ........................5 Description The Megasonic System What This Manual Contains System Configurations 3. Safety Recommendations and Requirements...
Page 3: Unpacking Procedures
Keep the shipping container and packaging in which the system components where shipped. If any system component should ever need to be returned to IMTEC, it must be returned in an appropriate container to minimize risk of shipping damage. If the original container is not available, a packaging kit may be purchased from IMTEC for a nominal fee.
Page 4: Unpacking Procedure
IMTEC Acculine Megasonic Operation Manual Figure 1-1: Megasonic Components 1.4. Unpacking Procedure The unpacking of the components requires careful handling of the quartz tank to prevent breakage and to prevent “kinking” or crushing of the RF cables. All RF cables must be in excellent condition, free of creases, sharp bends, or crushing.
Page 5: Introduction
SC1, Solvent strip, post sulfuric and phosphoric rinse, and final rinse. The IMTEC Megasonic System cleans wafers by transmitting sonic waves at a frequency of approximately 1 MHz through a liquid medium to augment the particle removal efficiency of a wet- cleaning process step.
Page 6: Safety Recommendations And Requirements
Megasonic System. Please read through the recommendations completely before installing or operating the Megasonic System. NOTE: These recommendations are advisory in scope; IMTEC assumes no liability for the correct installation or use of this equipment. It is the user’s responsibility to ensure that facility preparation, system installation and operation are performed by properly licensed and trained personnel of the user’s choosing.
Page 7: System Components And Specifications
 4.2. Tank (Indirect) 4.2.1. All tanks used in the IMTEC Indirect Megasonic System are sloped bottom quartz tanks with a scalloped process chamber. Process chemistry is pumped through sparger tubes in the base of the tank. 4.2.2. The tank sits in a coupler tray supported by a plastic frame. The transducer arrays mount to the bottom of the coupler tray.
Page 8: Generator
IMTEC Acculine Megasonic Operation Manual Systems Components and Specifications creates a positive pressure inside the housing to prevent corrosive gases or liquids from entering. 4.4.5 Special coaxial cables connect the transducer(s) to the RF Generator. 4.5 Generator The Generator is specifically designed for driving the piezoelectric transducers for Megasonic Cleaning applications.
Page 9: Facility Requirements
Plumbing Requirements 5.2. Electrical Requirements 5.2.1. The Generator for the IMTEC Megasonic Cleaning System is wired for 200V+-4%, 208V  10% 10 amp (1000 W) or 12 amp (1200 W) operation. Contact IMTEC Technical Support before attempting any changes. 5.3.
Page 10: Installing The System
6.2. Attaching the Transducers 6.2.1. The system is shipped with the transducers already mounted to the coupler tray (indirect) of the tank frame or the tank itself (direct). If this is not the case, please contact IMTEC Technical Support. 6.3.
Page 11: Mounting The Generator
6.6.1. The Generator is a high powered electronic device and, as such, should be located in a dry, well-ventilated area free of corrosive fumes with an operating temperature of 0-40 6.6.2. The generator is wired for (208V ±10%) (208V ±10%). Contact IMTEC Technical Support about operating the generator at other voltages.
Page 12: Limited Warranty
(1) ONE YEAR. Such warranty of IMTEC is limited as follows: In the event of such defect, IMTEC agrees at its option, to either repair or replace the defective unit or to refund the purchase price and IMTEC’s liability is limited thereto.
Page 13: Warranty Exclusions
Acculine B. WARRANTY EXCLUSIONS While other exclusions may apply, IMTEC specifically does not guarantee and accepts no responsibility for: 1. Penetration or chemical attack of any material by unauthorized or non-approved user chemistries. 2. Chemical attack on quartz components. 3. Breakage of quartz or other product by impact, improper facility/wet-station installation, handling or other abusive treatment, or damage related to such impact-related or physically induced damage, such as internal corrosion.
Page 14 Fremont, CA 94538 USA Tel: 510-770-1800 Fax: 510-770-1800 imtec@imtecacculine.com This manual contains proprietary information and is not to be reproduced or transmitted in whole or in part without the express written consent of IMTEC Acculine. 15-A357-0307 Pub. No.: CT98-011 Rev5...
Page 15: Safety Precautions
Megasonic cleaning system, and is designed and manufactured to meet the required standards of the Low Voltage Directive and the EMC Directive of Europe. IMTEC puts a CE marking on the UO1000PMCA Megasonic generators to declare that they conform to these standards.
Page 16 Table of Contents Table of Contents Product outline, Components and Major Specifications Product Outline Components Major Specifications Safety Precautions - Be sure to follow these instructions General Installation Operation Names and Functions of Component Parts Precautions for Installation Connecting the Components Connecting Outputs Connecting the Protective Ground Line Connecting the Power Supply Cable...
Page 17 Acculine Megasonic Generator Manual How to Use the Control Signal Connection Connector Pin Assignment of the Control Signal Connector Hardware Connection of the Control Signals Description of the Control Connection Signals Connector Specification for Master/Slave Connection Connector Specification for RS485 Connection Counter Measures when the Protective Circuit is Working or when an Error is Displayed 44 Specifications Megasonic Generator...
Page 18: Product Outline, Components And Major Specifications
Product Outline The UO1000PMCA Megasonic generator is a main component of the “ACCUMEG” Megasonic cleaning system. The generator combining with the IMTEC provided transducer develops a maximum output of 1000W nearly at 1000kHz. The generator is powerful enough to provide a wide cleaning area through a proper cleaning bath layout.
Page 19: Safety Precautions - Be Sure To Follow These Instructions
Acculine Megasonic Generator Manual 2. Safety Precautions - Be sure to follow these instructions 2.1. General 2.1.1. Ensuring safety To ensure safety means to protect people and their possessions from exposure to danger. For that purpose, it is necessary to predict all possible dangers and implement measures to prevent them from occurring.
Page 20 High voltage is used internally, and there is a risk of electric shock. Any repair and/or modification by a person other than IMTEC authorized personnel breaks the system standards indicated by the CE marking, thereby resulting in risk of the dangers described in Item (3), "Dangers due to unintended use."...
Page 21 Acculine Megasonic Generator Manual 2.1.5. Cautions on starting the generator CAUTION - Failure of, smoke from, and/or fire from generator and/or transducer 1) Do not start the generator without the transducer cables connected. 2) Before starting the generator, check that the cleaning bath contains a sufficient amount of solution.
Page 22: Installation
Acculine Megasonic Generator Manual Installation 2.2.1 Environmental conditions WARNING - Electric shock, fire, smoke, failure This product is designed to safely operate in the environmental conditions described below. Use in other conditions may result in damage to personnel including death or serious injury due to electric shock, physical damage including fire or failures, or any combinations of these.
Page 23 If radio disturbance and/or electromagnetic interference must be mitigated further after implementing the measures described in Item (2), measures that meet the specific situations must be taken. IMTEC is ready to assist the customers in implementing these measures for solution.
Page 24 Acculine Megasonic Generator Manual 2.2.3 Personnel for installation WARNING – Harm to human body, fires etc. Activities from the installation planning to the completions of the trial operation shall be implemented under engineers who have sufficient knowledge of electric hazards and were trained according to your safety standard and construction standard.
Page 25 Acculine Megasonic Generator Manual  Not to overlook warnings WARNING – Danger due to overlooking the label To prevent danger due to overlooking the label, install the system so that the operator can easily see the label from a working position. Also, make sure that there is enough lighting to read the label.
Page 26 Acculine Megasonic Generator Manual 2.2.5.2. Connecting the power supply cable (AC cable) to a protective ground system and power lines CAUTION – Electric shock To prevent risk of electric shock, follow the steps below: 1) Turn off the power switch of the ultrasonic generator. 2) Turn off the switch on the distribution board (customer’s switchboard).
Page 27: Operation
Acculine Megasonic Generator Manual deteriorated insulation. 2.3. Operation 2.3.1. Notes on cleaning solution WARNING – Harm, and damage due to explosion and/or fire, and health hazards This product does not have an explosion-proof design. The electric energy used in the system may trigger fire in a flammable environment.
Page 28: Names And Functions Of Component Parts
Acculine Megasonic Generator Manual Names and Functions of Component Parts FRONT VIEW- W [Output monitor] OUTPUT CHANNEL L. LIMIT H. LIMIT START OUTSET ‚s‚l ‚b‚g‚` ‚m‚m‚d‚k ‚r ‚s‚` ‚q‚s ‚n‚t ‚s‚o‚t ‚s ‚` ‚k‚` ‚q‚l ‚q ‚d‚l ‚n‚s‚d ‚n ‚t ‚s‚r ‚d‚s ‚g D ‚...
Page 29 Acculine Megasonic Generator Manual SET switch Confirms the channel number of the preset channel in setting mode (preset output power value setting, upper limit power value setting, lower limit power value setting) and in wait mode. * The user may press the SET switch while the LOCK lamp is off in local mode. START switch (with a lamp) Turns ON/OFF the ultrasonic generator.
Page 30 Acculine Megasonic Generator Manual OUTSET lamp Turns ON in preset output power value setting mode, and remains OFF in other mode. OUTPUT level display Indicates the preset output power value, upper limit power value, and lower limit power value in setting mode. The OUTPUT level display indicates the measurement value of the power being output while oscillation output does not starts in local mode or remote mode ("0"...
Page 31 Acculine Megasonic Generator Manual REAR VIEW- [Output connectors] POWER [Output connector guard] M / S ~AC208V 10A M ake sure of m at chi ng w i t h t he t ransduce ¢ C A U T I O N ‚m‚n D num ber m ar ked on t he cabl es D ‚o‚n‚v‚d‚q...
Page 32 Acculine Megasonic Generator Manual Output connector guard prevents the user from accidentally removing/connecting the output connector during the operation of the generator. Without the connector guard fixed, no ultrasonic is output. RS485 upper side connector Is used for connecting a cable near the upper side. The connector enables the generator to perform remote control via RS485 interface in remote mode.
Page 33: Precautions For Installation
Acculine Megasonic Generator Manual Precautions for Installation WARNING, CAUTION – Harms to person, damage to possessions Observe safety precautions described in Section 2.2 “Installation” including instructions hereinafter. Generator Unit Do not place the generator unit in direct sunlight or near a heater. ...
Page 34 Acculine Megasonic Generator Manual The lower part of the front panel absorbs air and the rear part discharge air from inside. For air flow, secure a distance of 10 cm or more for the front side and 20 cm or more for the rear side of the generator.
Page 35: Connecting The Components
Acculine Megasonic Generator Manual Connecting the Components WARNING, CAUTION – Electric shock, damage to possessions Observe safety precautions described in Section 2.2.5 “Connection” including followings. 5.1 Connecting Output -: See Figure 5-1. 1. Remove the output connector guard on the output connector on the rear panel of the generator.
Page 36: Connecting The Power Supply Cable
Acculine Megasonic Generator Manual Connecting the Power Supply Cable (power lines and protective ground line) Connect the power cables (black-1, black-2) with the power distribution panel in your plant, and the protective ground wire (green/yellow) with the protective ground. Refer to Figure 5-2 for discriminating the power supply line and the protective ground wire of the power cable.
Page 37: Control Signal Connector
Acculine Megasonic Generator Manual 5.4 Control Signal Connector Refer to Chapter 7, How to Use the Control Signal Connector, besides precautions for Note use. REMOTE 1. REMOTE connector It is used in REMOTE(Parallel) control configuration. Is used for controlling the upper controller and for connecting 19pin 37pin status signals in parallel.
Page 38: Master/Slave Connector
Acculine Megasonic Generator Manual 5.5 Master/Slave Connector Master/Slave connector It is used in MASTER/SLAVE operate configuration. 9pin 5pin Is a pin connector that connects between the MASTER generator and the SLAVE generator. Use the dedicated cable, described in Chapter 8, Connector Specification for the 6pin 1pin Master/Slave Connection.
Page 39: Operating The Generator
Acculine Megasonic Generator Manual Operating the Generator WARNING, CAUTION – Harm and/or damage due to explosion and/or fire Observe safety precautions described in Section 2.3 “Operation”. 6.1. Preparation 1. Pour the cleaning solution into the Megasonic bath (outer bath) and cleaning bath (inner bath).
Page 40: Setting A Preset Output Power Value
Acculine Megasonic Generator Manual 6.3. Setting a Preset Output Power Value The preset output power value is set at factory delivery. However, when the user wants to use another power value, the power value must be entered for the preset channel. (See to the inspection certificate to know the output power value at factory delivery.) W [Output monitor] OUTPUT...
Page 41 Acculine Megasonic Generator Manual (4) Press the SET switch to confirm the preset output channel. (5) The channel display stops blinking, and the OUTPUT level display starts blinking. (6) Use the UP switch and the DOWN switch to match the power value to be set for this channel.
Page 42 Acculine Megasonic Generator Manual 6.4 Initial Preset Values 1200W 1000W Preset No. Output Power Upper Limit Lower Limit Output Power Upper Limit Lower Limit 1000 1100 1200 1320 1000 1100 1045 1000 1100 1050 1155 1100 1210 1150 1265 1045 1200 1320 1000...
Page 43 6.5 Setting the Range of the Preset Values Maximum output 1200W Model 1000W Model power. Setting range of 20W to 1200W 20W to 1000W the output power. Output power set value. Possible setting range. Output power set value. Possible setting range. 75 to 75 to Setting range of...
Page 44 6.6 Setting an ID Number and a Baud Rate for RS485 6.6.1 Setting an Device ID To move to device ID setting mode, keep pressing the MODE switch for two seconds in normal state (non-oscillation, non-preset setting). (1) Keep pressing the MODE switch for two seconds in non-oscillation and non-preset setting mode.
Page 45 Acculine Megasonic Generator Manual The 7SEG LED displays the following: CHAN N EL CHA NN EL CHAN N EL CH ANN EL CHAN N EL CHANN EL 6.7 Remote Operation 1 (connecting parallel signals) (Preparation) Connect the attached control cable with the control signal connection connector on the rear panel of the generator.
Page 46: Precautions For Operation
Acculine Megasonic Generator Manual 6.9 Stop In remote control, turn OFF the START control of the remote control terminal. In local control, turn OFF the START switch on the front panel of the generator. (Turn OFF the START switch lamp.) Turn OFF the POWER switch on the front panel of the generator.
Page 47: How To Use The Control Signal Connection Connector
Acculine Megasonic Generator Manual 7.0 How to Use the Control Signal Connection Connector Note Connect the control signal connection connector to the master generator when a composition of MASTER/SLAVE operate. 7.1 Pin Assignment of the Control Signal Connector Input/Outp Operation Signal name Description in RS485...
Page 48: Hardware Connection Of The Control Signals
Acculine Megasonic Generator Manual 7.2 Hardware Connection of Control Signals Signal Name: PRS0, PRS1, PRS2, PRS3, PRS4, OE, OPSEL, WATT4, WATT5, WATT6, WATT7, WATT8, WATT9, WATT10, WATT11, WATT12,LLDS internal Input/Output Circuit Output Circuit + 5 V OUT + OUT - +12V Input Circuit +1 2 V...
Page 49 Acculine Megasonic Generator Manual Signal Name: ALARM,NFB Trip internal Output Circuit Current capacity of output circuit : Max. 0.3A Min. 100µA Maximum Voltage of output circuit : 42V Signal Name: OUTPUT MONITOR internal Output Circuit OUT (+) OUT (-) Current of output circuit : 4mA to 20mA Voltage of output circuit : MAX 15V(When OPEN)
Page 50: Description Of The Control Connection Signals
Acculine Megasonic Generator Manual 7.3 Description of Control Connection Signals The contact point to be connected must have no voltage. Use a gold contact point that weak current can conduct. Use the dedicated cable attached. On the connection attached cable, please refer to chapter 7-(4) ”REMOTE CABLE CIRCUIT DIAGRAM (3CD02147)”.
Page 51 Acculine Megasonic Generator Manual Ultrasonic output PRS4 PRS3 PRS2 PRS1 PRS0 channel × × × × × × × × × × × × × × × × × × × × × × × ○ × × × × ×...
Page 52 Acculine Megasonic Generator Manual OPSEL terminal Use this OPSEL terminal to specify power values on the master and slave generators to monitor the ultrasonic output power from a remote place. NOTE Circles in the table indicate closed, and x, open. OPSEL terminal--COMOPSEL Ultrasonic output monitor terminal...
Page 53 Acculine Megasonic Generator Manual STBY terminal Use this terminal for monitoring whether the ultrasonic generator is workable or not from a remote place. NOTE The circles in the following table indicate that the contact point is closed, and that x, open. STBY terminal--COM terminal Ultrasonic generator's state Oscillation is enabled...
Page 54 Acculine Megasonic Generator Manual Alarm terminal Use this terminal for monitoring whether an alarm occurs or not from a remote place. NOTE The circles in the following table indicate that the contact point is closed, and that x, open. Alarm A terminal-- Alarm B terminal-- Occurrence of alarms Alarm COM terminal...
Page 55: Connector Specification For Master/Slave Connection
Acculine Megasonic Generator Manual 8.0 Connector Specification for Master/Slave Connection Pin No. Signal name Input/Output Description Carrier Detect Received Data Transmitted data Data Terminal Ready Signal Ground Data Set Ready Request to Send Clear to Send Use the dedicated cable attached. Master side Slave side (Cable length: 2m)
Page 56: Connector Specification For Rs485 Connection
Acculine Megasonic Generator Manual 9. Connector Specification for RS485 Connection (for upper and lower sides) Pin No. Signal name Input/Output Description Frame Ground Receive A(+) Transmission A(+) Signal Ground Receive B(-) Transmission B(-) Fame Ground Use the dedicated cable. NOTE Use the dedicated cable to conform to the CE standard. (Cable length: 5 m) The internal connections of the connector are as follows: DSUB15...
Page 57: Countermeasures When The Protective Circuit Is Working Or When An Error Is Displayed
10. Countermeasures When the Protective Circuit Is Working or When an Error Is Displayed Break ultrasonic output when the protective circuit is working. Table 10-1 Control signal Display Cause Protecting work Recovery operation connection connector ALARM is lit. An error has taken in the circuitry of the CPU. "E01"...
Page 58 Acculine Control signal connection Display Cause Protecting work Recovery operation connector Turn OFF the POWER switch . And After, turn ON the The ALARM A terminal POWER it one. (between 35-36) is closed. ALARM is lit. "E08" appears in the Switch error The error immediately arose, and it is a trouble of the level display.
Page 59 Acculine Control signal connection Display Cause Protecting work Recovery operation connector The ALARM A terminal (between 35-36) is closed. Ultrasonic output power has lowered the preset lower limit value. The ALARM B terminal Key stroking is (between 17-36) is open. Turn OFF the POWER switch and check for the cleaning ALARM is lit.
Page 60: Specifications
11. Specification 11.1 Megasonic Generator MODEL UO1000PMCA 1000W Rated output Power 50~1000W Output arranging range 710.0kHz~750.0kHz 950.0kHz~999.9kHz Oscillation frequency 0.1kHz step 0.1kHz step Crystal controlled synthesizer Oscillation system FET class D P.P system Output circuit 208VAC±10%, 10A, single phase 50 or 60Hz Rating power supply 50A or less Rush current...
Page 61: Applicable Megasonic Transducer
Acculine Megasonic Generator Manual 11.2 Applicable Megasonic transducer The adaptation: Limited for the IMTEC manufactured and for UO1000PMA. Model: IMTEC manufactured and specified Allowable input: Over 1000W. Frequency range: 950kHz to 999kHz Transducer element: laminar PZT 15-A357-0307 Pub. No.: CT98-011 Rev5...
Page 62: Appendix Schematics
12. Appendix drawing Composition No.1. :RS485 control and Single operate configuration. User’s system. (Upper controller) Generator A. 208VAC and PE *Remote Controller. Please prepare this PE wire in your company. REMOTE RS485 Controller. Transducer Generator B. 208VAC and PE Please prepare this PE wire in your company. *Remote Controller.
Page 63 Acculine Composition No.2. :RS485 control and MASTER/SLAVE operate configuration. User’s system. (Upper controller) Generator A. (MASTER) 208VAC and PE *Remote Controller. Please prepare this PE wire in your company. REMOTE RS485 Controller. Transducer. Generator B. (SLAVE) 208VAC and PE Please prepare this PE wire in your company. (1):RS485 cable (2):REMOTE cable.(Parallel) (3):US cables with BNC...
Page 64 Acculine Composition No.3. :Parallel control and Single operate configuration. User’s system. (Upper controller) 208VAC and PE Generator A. Remote Controller. Please prepare this PE wire in your company. REMOTE Transducer. Remote Controller 208Vac and PE Generator B. REMOTE Please prepare this PE wire in your company. (1):REMOTE cable.(Parallel) (2):US cables with BNC (6 Cables) (3):PE cable of the transduser.
Page 65 Acculine Composition No.4. :Parallel control and MASTER/SLAVE operate configuration. User’s system. 208VAC and PE (Upper controller) Generator A. (MASTER) Remote Controller. Please prepare this PE wire in your company. REMOTE Transducer. Generator B. (SLAVE) 208VAC and PE Please prepare this PE wire in your company. (1):REMOTE cable.(Parallel) (2):US cables with BNC (3):PE cable of the transduser.
Page 66: Drawings
13. Drawings UO1000PMCA GENERAL VIEW 3CK14402 UO1000PMCA BLOCK DIAGRAM 4CD01248 UO1000PMCA LABELING DIAGRAM 3CK14304 15-A357-0307 Pub. No : CT98-011 Rev5...