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T&C POWER DCMP-1500 User Manual

Magnetron
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Magnetron Power Supply DCMP-1500
User Manual
Start-up, configuration & interfacing of the DCMP-1500 power supply
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  • Page 1 Magnetron Power Supply DCMP-1500 User Manual Start-up, configuration & interfacing of the DCMP-1500 power supply www.tcpowerconversion.com...
  • Page 2 DCMP-1500 – User Manual Rev. 2.0 Document History Version Date Sign Comment 2018-03-18 First version Manual name changed from Users Guide to Instrument Manual. 2018-05-20 History section added. Revised format and cosmetic changes. Grammar correction and table of 2018-10-21 contents liftings I/O interface section updated to 2019-07-21 proper data...

  • Page 3: Table Of Contents

    DCMP-1500 – User Manual Rev. 2.0 Table of Contents 1.Introduction............................5 1.1. Intended Use ............................5 1.2. Liabilities and Warranty ........................5 1.4 Safety ................................5 1.4.1. Personnel Qualifications ..............................5 1.4.2. Illustration Of Residual Dangers ..........................5 1.4.3. General Safety Instructions ............................6 2.
  • Page 4 DCMP-1500 – User Manual Rev. 2.0 4.2. Menu Operation ..........................22 4.2.1. Menu Navigation ................................23 4.2.2. HV Output Selection............................... 23 4.2.3. Constant Power Operation ............................24 4.2.4 Power Calculations................................25 4.2.5. Constant Voltage Operation ............................27 4.2.6. Constant Current Operation............................27 4.2.7 Timer Operation ................................

  • Page 5: Introduction

    DCMP-1500 – User Manual Rev. 2.0 Power Supply DCMP-1500 is a high voltage device which generates a high DC and Pulse DC voltage of negative polarity. DCMP-1500 can be operated in three modes: Constant Power, Constant Voltage or Constant Current The main field of application is the formation of plasma processes.

  • Page 6: General Safety Instructions

    DCMP-1500 – User Manual Rev. 2.0 1.4.3. G ENERAL AFETY NSTRUCTIONS For any type of work, adhere to all applicable safety regulations. Please observe all safety notes given in this document and relay the information to all other users of the product. In particular, pay attention to the following safety notes: Mains voltage.

  • Page 7: Technical Data

    DCMP-1500 – User Manual Rev. 2.0 1 1 M Dimensions: Width: 483 mm Height: 88,1 mm (2 HU) Depth: 395 mm See Fig . 2.1.1 Net Weight: 10.8 kg Installation: 19” Rack standard or Bench Top unit (mm) Dimensions Rear panel connectors may differ depending on the version of the device. ote: Temperature Storage: -10…+60 °C...

  • Page 8: Use And Operating Modes

    DCMP-1500 – User Manual Rev. 2.0 2.1.3. SE AND PERATING ODES There are three common operation modes: - manual control, with 5 buttons user interface on the front panel - software remote control, with RS232/RS485 or Ethernet Interface (All Read commands are accessible all the time, Write commands are accessible only with activation of this function from the user menu –...

  • Page 9: Specifications

    DCMP-1500 – User Manual Rev. 2.0 2.3. S PECIFICATIONS Electrical 195 to 250 Vac (43 …. 63 Hz), 1-phase operation * Input Supply Voltage Input Current Max 8A; Power factor = 0.87 Mode of operation DC and Unipolar PulseDC 0 – 1000 VDC negative (ignition voltage 1200V) Output Voltage / Current / Power 0 –...

  • Page 10: Features

    DCMP-1500 – User Manual Rev. 2.0 2.4 F EATURES Operating mode: DC, and PulseDC with variable frequency and duty cycle • Two high-voltage outputs - the ability to support two independent magnetrons • without_having to use an external switch Fast response arc detection/suppression •...

  • Page 11: Installation

    DCMP-1500 – User Manual Rev. 2.0 3. I NSTA ATION 3.1. U NPACKING 1. Visually inspect the transport packaging for signs of external damage 2. Unpack the DCMP-1500 and put the packaging material aside Note: Keep the packaging material for later use. The DCMP-1500 must be stored and transported in the original packaging material only.

  • Page 12: Connections

    DCMP-1500 – User Manual Rev. 2.0 3.3. C ONNECTIONS 3.3.1. R ANEL Fig. 3.3.0 Rear panel DCMP-1500 A – HV1 and HV2 output connectors type N-50/2-0/G1.07 B – fans and filters C – RS232 interface D-sub 9 female ( RS485 optionally ) D –...

  • Page 13: Mains Connection

    DCMP-1500 – User Manual Rev. 2.0 3.3.2. M AINS ONNECTION The mains connection is designed for a mains cable which contains 16A;250VAC; IEC 60320 connector on the device side. A mains cable is supplied with the device. If the plug is not compatible with your wall socket, you should replace it with a suitable mains cable: Three-conductor cable with protective ground •...

  • Page 14: Interface Connector Analog Remote

    DCMP-1500 – User Manual Rev. 2.0 1 – HV1 ( - 1000 VDC ) 2 – HV2 ( - 1000 VDC ) type Fig. 3.3.2 HV connector , N-50/2-0/G1.07 DANGER Hazardous voltage. After entering "Operate" mode (HV LED indicator on the front panel is on), the connector develops voltage levels that may be lethal.
  • Page 15 DCMP-1500 – User Manual Rev. 2.0 Pin No AO Analog Output for output current measurement I_OUT; 0…5V ( 0…2000 mA ); Max load: 50mA AO Analog Output for output power measurement P_OUT; 0…5V ( 0…1500W ); Max load: 50mA AO Analog Output for output voltage measurement V_OUT; 0…5V ( 0…1000 V );...
  • Page 16 DCMP-1500 – User Manual Rev. 2.0 current consumption 5mA at 5 VDC IMPORTANT: If this input stays in non active mode (0VDC) together with the DI pin no. 16, unit will be switched into the Constant Voltage Mode. To set this pin active, Analog Control has to be set in the user menu –...

  • Page 17: Serial Interface Connector

    DCMP-1500 – User Manual Rev. 2.0 CAUTION In the case of incorrect connection - in accordance with Tab. 3.3.0 and Fig. 3.3.4, there is a danger of damage to the power supply. 3.3.6 S ERIAL NTERFACE ONNECTOR DCMP-1500 can be controlled via RS232 or RS485 interface. The transmission protocol is described in separate document –...

  • Page 18: Ethernet Interface

    DCMP-1500 – User Manual Rev. 2.0 3.3.7 E THERNET NTERFACE The Ethernet interface allows to communicate with DCMP-1500 based on IEEE 802.2 standard with 100 MB/s speed. Note: to achieve best performance and speed, the LAN cable has to be shielded and Cat-6 or higher.

  • Page 19: Using The Power Supply Dcmp-1500

    DCMP-1500 – User Manual Rev. 2.0 Please refer to Fig. 4.1.0 for front panel details Fig. 4.1.0 Front Panel of DCMP-1500 1 – main power switch – Rocker type 2 – membrane press keyboard 3 – alphanumeric display LCD 4 – power meter bar 5 –...

  • Page 20: Membrane Keyboard

    DCMP-1500 – User Manual Rev. 2.0 4.1.2. M EMBRANE EYBOARD USER INTERFACE Operations on the keys refer to interaction with the LCD display, and switches the power KEYBOARD: supply into the OPERATE or STAND BY mode HV On/Off – turn the high voltage ON/OFF – switch to OPERATE/ STANDBY mode Up, Down –...

  • Page 21: Rotary Encoder With Press Button

    DCMP-1500 – User Manual Rev. 2.0 4.1.6. R OTARY NCODER WITH RESS UTTON Multi-turn encoder provides a user interface for changing values/options selected with the keyboard. 4.1.7 M CREEN ESCRIPTION Fig. 4.1.1 Description Description Actual output selection PulseDC indicator Set point PulseDC frequency Deposition time indication Main Menu tab...

  • Page 22: Menu Operation

    DCMP-1500 – User Manual Rev. 2.0 4.2. M PERATION Selecting and setting the operation parameters can be done in two ways: by selecting ENTER / MENU button and navigate between the options of a menu using the arrow keys ▲or ▼. To enter the selected sub-menu, again press ENTER / MENU button. The current operation can be canceled at any time by pressing the ESC key.

  • Page 23: Menu Navigation

    DCMP-1500 – User Manual Rev. 2.0 4.2.1. M AVIGATION Navigation on the pages can be done in two ways: using the buttons on the front panel or rotary encoder knob Use narrow buttons or rotary encoder to move between the options. See Fig 4.2.1 as example of “Menu”...

  • Page 24: Constant Power Operation

    DCMP-1500 – User Manual Rev. 2.0 confirm selection by ENTER button or rotary encoder pressing; system will return to the option selection – no blinking tabs. 4.2.3. C ONSTANT OWER PERATION To operate power supply with Constant Power Operation, turn rotary encoder knob or use arrow buttons ▲...

  • Page 25: Power Calculations

    DCMP-1500 – User Manual Rev. 2.0 4.2.4 P OWER ALCULATIONS Output power of DCMP-1500 is up to the mode operation: DC or PulseDC. It is really important to understand how it works. For DC mode operation it is really easy, and output power is calculated according to the following formula: where: –...
  • Page 26 DCMP-1500 – User Manual Rev. 2.0 Fig.4.2.6 Output signal of the DCMP-1500 in PulseDC mode where: – peak value of power, voltage and current, respectively t – pulse width, T – pulse repetition interval. In the table below are presented relations between peak/average/rms power. Peak Power Average Power RMS Power...

  • Page 27: Constant Voltage Operation

    DCMP-1500 – User Manual Rev. 2.0 4.2.5. C ONSTANT OLTAGE PERATION To operate power supply with Constant Voltage Operation, turn rotary encoder knob or use arrow buttons ▲ or▼ to select voltage in SET field ( Fig.4.2.7 ) and then press the encoder or ENTER button to edit mode –...

  • Page 28: Timer Operation

    DCMP-1500 – User Manual Rev. 2.0 4.2.7 T IMER PERATION DCMP-1500 can run with no limited operation time or according to the required timer set. ▲ Turn rotary encoder or use arrow buttons or▼ to select timer TAB; press ENTER button or rotary knob to edit.

  • Page 29: Menu Options Navigation And Settings

    DCMP-1500 – User Manual Rev. 2.0 Pulse duration is directly depended from the frequency, and automatically changing when frequency change as well. Pulse with is given in the time period and displayed at the graph – Fig.4.2.12. Fig. 4.2.12 NOTE: Frequency and duty cycle chart is displayed only when PulseDC mode is selected – ref.
  • Page 30 DCMP-1500 – User Manual Rev. 2.0 ▲ Turn rotary encoder or use arrow buttons or▼ to select Control Mode TAB; press ENTER button or rotary knob to edit. Press ENTER button or rotary knob again to confirm the settings. You can then set the following options: - Local: DCMP-1500 is controlled by active user interfacing using front panel buttons and rotary encoder are active and are set for device interfacing, - Analog: DCMP-1500 can be controlled via analog interface –...

  • Page 31: Screen Menu

    DCMP-1500 – User Manual Rev. 2.0 - Up: operation of DCMP-1500 is active continually and follows clock counting when HV ON is activated; time of operation is displayed at the main screen – see chapter 4.2.7 for details, - Down: operation of DCMP-1500 is active only for the time period which has been set on the main screen and counts down when HV ON is activated;...

  • Page 32: Target Menu

    DCMP-1500 – User Manual Rev. 2.0 2. Backlight: the LCD brightness; adjustable from 10…100% – Fig.4.3.7 ▲ Turn rotary encoder or use arrow buttons or▼ to select Backlight tab; press ENTER button or rotary knob to edit. Press ENTER button or rotary knob again to confirm the settings.

  • Page 33: Limits Menu

    DCMP-1500 – User Manual Rev. 2.0 Remaining value can be reset at any time by choosing Clear tab – Remaining value come back to the entered capacity value than - Fig. 4.3.11 Fig. 4.3.11 ▲ Turn rotary encoder or use arrow buttons or▼...

  • Page 34: Ramps Menu

    DCMP-1500 – User Manual Rev. 2.0 ▲ Turn rotary encoder or use arrow buttons or▼ to select Voltage Limit tab; press ENTER button or rotary knob to edit. Press ENTER button or rotary knob again to confirm the settings. 3. Current limit: output current of DCMP-1500 can be limited with this option – Fig.4.3.13.

  • Page 35: Software Menu

    DCMP-1500 – User Manual Rev. 2.0 2. Voltage ramp: output voltage ramp of DCMP-1500 can be set with this option. It can be set from 1…1000V/s for any mode of operation. ▲ Turn rotary encoder or use arrow buttons or▼ to select Voltage ramp tab; press ENTER button or rotary knob to edit.

  • Page 36: Interface Configuration

    DCMP-1500 – User Manual Rev. 2.0 5.1 A NALOG NTERFACE ONFIGURATION The DCMP-1500 can be controlled by I/O analog interface. To configure I/O port as the master control of the device go to the Control mode tab and select Analog mode – Fig. ▲...

  • Page 37: Ethernet Interface Configuration

    DCMP-1500 – User Manual Rev. 2.0 There are only two parameters to be set (Fig. 5.2.2): baudrate ( can be selected from: 2400 kBs, 4800 kBs, 9600 kBs, 19 200 kBs, 38 400 kBs, 57 600 kBs, 115 200 kBs) device address ( can be selected from 1 …..

  • Page 38: Maintenance And Service

    DCMP-1500 – User Manual Rev. 2.0 Fig.5.3.2 NOTE: as serial TCP ModBUS is implemented, the 5 parameter which Port it is, is by default set to 502 NTEN N E N NTEN N E The DCMP-1500 does not require any special maintenance work except filter cleaning and exchange.

  • Page 39: Storage And Disposal

    DCMP-1500 – User Manual Rev. 2.0 Please keep the original packaging. The packaging is required for storing the DCMP-1500 and for shipping it to a T&C Power Conversion, Inc. service center. The DCMP-1500 may only be stored in a dry room. The following requirements must be met: Ambient temperature: -20….+60 °C Humidity: as low as possible.

  • Page 40: Troubleshooting

    DCMP-1500 – User Manual Rev. 2.0 roblem rror: olution: description: check main cord connection, No reaction after check fuses in the main powering on – LCD Probably power failure power socket – ref.. to display stays dark; no section LEDs illuminating Replace main cord “No Interlock !!!”...

  • Page 41: Warranty Conditions

    DCMP-1500 – User Manual Rev. 2.0 T&C Power Conversion, Inc. warrants to the purchaser or end user of the equipment it sells that such equipment will be free from defects in material and workmanship under normal use and service. This warranty is for a period of 27 months from the date of original shipment or two years (24 months) from the date the equipment is placed in use by the purchaser or end user thereof, whichever occurs first.

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