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ESI New Wave Research QuikLaze-50 ST2 Operator's Manual
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ESI New Wave Research QuikLaze-50 ST2 Operator's Manual

ESI New Wave Research QuikLaze-50 ST2 Operator's Manual

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QuikLaze-50 ST2
Operator's Manual
October 2014
Part No. 90-1536D
New Wave Research
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Summary of Contents for ESI New Wave Research QuikLaze-50 ST2

  • Page 1 QuikLaze-50 ST2 Operator’s Manual October 2014 Part No. 90-1536D New Wave Research...
  • Page 2 New Wave Research...
  • Page 3 Contact Information ESI New Wave Research Division New Wave Research, a Division of ESI 740 Kifer Road Sunnyvale, CA 94086-5121 Phone: 510.249.1550 Fax: 510.249.1551 E-mail: info@esi.com Web: http://www.esi.com ESI World Headquarters: Portland, Oregon 13900 NW Science Park Drive Portland, OR 97229-5497...
  • Page 4 Preface This manual contains information for proper installation and operation of the QuikLaze-50 ST2 and accessories. The QuikLaze-50 ST2 laser systems comply with the CDRH (Center for Device and Radiological Health) Standard 21 CFR 1040. The QuikLaze-50 ST2 systems are Class 3B and Class 4 lasers and emit laser radiation that can be harmful to your eyes and skin.
  • Page 5 Table of Contents Contents QuikLaze-50 ST2 ......................i Contact Information ..................... iii Preface ........................iv Chapter Two ........................1 Laser Safety ........................ 1 Safety Precautions ......................3 Laser Safety ........................4 Optical Safety ........................4 Electrical Safety ........................5 Safety Features ........................6 Government Regulations .....................
  • Page 6 Page 3: Interlocks Page ....................53 Left Screen ........................55 Page 4: Laser Info Page ....................55 Left Screen ........................56 Page 4-1: Apertures Setup Page ................... 57 Left Screen ........................58 Page 4-2: Video Marker Setup Page ................59 Left Screen ........................
  • Page 7 ........................74 Service Summary ......................74 LOTO (Lock out and Tag out) procedure ................75 Lock-out and tag-out of the system ................... 76 Cooling System ......................... 77 De-ionization Cartridge Replacement ................77 Checking the Mylar Shield ....................79 Flash Lamp Replacement....................80 Spare and Replacement Parts ...................
  • Page 8 Table of Figures Figure 2-1: CDRH Safety Label Locations 8 Figure 5-6 Run Page 48 Figure 2-2: Label Samples 10 Figure 5-7 Energy level vs. Energy control Figure 4-1: Power Supply 17 setting 50 Figure 4-2: Mounting holes drawing 20 Figure 5-8 Setups Page 51 Figure 4-3: FS60 Microscope modifications Figure 5-9 Interlock Page 54...
  • Page 9 Chapter Two Laser Safety CAUTION: Refer to documentation for further explanation. CAUTION: The power cord provides the mains disconnect. Ensure the power cord can be accessed during operation. CAUTION: Use product only as specified. If product is used in a manner not specified, the protection provided by the equipment may be impaired resulting in injury or death.
  • Page 10 All personnel must wear eye protection suitable for this radiation. ESI recommends the use of dedicated eye wear during laser installation and during laser operation. Refer to Laser Specification section for optical density &...
  • Page 11 Laser Safety WARNING: USE OF CONTROLS, ADJUSTMENTS OR PERFORMANCE OF PROCEDURES OTHER THAN THOSE SPECIFIED HEREIN MAY RESULT IN HAZARDOUS RADIATION EXPOSURE. Read the following safety precautions and operator’s manual prior to Safety powering up or operation to avoid injury and prevent damage to the Precautions QuikLaze Laser Cutting System or any interfacing devices.
  • Page 12 Laser Safety This manual contains information for the proper installation and Laser Safety operation of the QuikLaze Laser Cutter System. The term QuikLaze refers to the QuikLaze-50 ST2 laser systems unless otherwise noted. This system is designed for semiconductor design and failure analysis, micro-electronics machining and research applications.
  • Page 13 Laser Safety WARNING: The 532 (GN) nm output beam is visible and is dangerous. Extreme care and precaution must be taken. WARNING: The 1064 (IR), 355 (UV3), AND 266 (UV4) nm output beams are invisible and are extremely dangerous. Extreme care and precaution must be taken.
  • Page 14 Laser Safety Warning! Hazardous live voltages up to 850 VDC present inside the main umbilical connector when the unit is energized and operating. User and/or service personnel must remove all power to the unit before connecting or disconnecting this connector. The following features are built into the QuikLaze Nd:YAG lasers to Safety Features conform to government regulations and provide safe laser operation.
  • Page 15 Laser Safety Laser The governmental standards and requirements specify that the Classification laser must be classified according to the output power or energy and the laser wavelength. The QuikLaze is classified as Class 3B or Class 4, depending on the orderable configuration, and is appropriately marked.
  • Page 16 Laser Safety Danger (Non- Laser Warning Labels Interlocked) Housing Label Eye Piece Warning Label Aperture Warning Label Safety Shutter WEEE Label Label I.D. and Certification Label U.S. Patent Label Laser Emissions Indicator SRB I.D. Label (on the bottom) Laser Emission Indicator Key Switch Ext.
  • Page 17 Laser Safety SRB ID Label ID Label ID/Certification Label New Wave Research...
  • Page 18 Laser Safety Laser Warning Label Aperture Warning Label Non-Interlocked Housing Label Aperture Warning Label Class 3B Warning Label WEEE Label Patent Label Eyepiece Filter Label Class 4 Warning Label CE/TUV Label Circular Connector Warning Label Eyepiece Filter Warning Label Laser Safety Shutter Label Figure 2-2: Label Samples The QuikLaze conforms to the requirements of UL 3101 and CAN/CSA- US &...
  • Page 19 Chapter Three System Description New Wave Research...
  • Page 20 System Description New Wave Research...
  • Page 21 System Description This section provides an introduction to the QuikLaze Nd:YAG laser. Also, a Description and summary of system specifications is given. Specifications Model Wavelength Mitutoyo FS60 Green, UV3 FS60Y IR, Green, UV3 FS70ZS Green, UV3 FS70LS IR, Green, UV3 VM Zoom IR, Green, UV3 Optem...
  • Page 22 System Description The laser enters a STOP mode and cannot be restarted until the EMISSION button has been pressed, the 10 second delay elapsed and the Fire laser button has been pressed. The status of interlocks may be viewed on the interlock page of the remote control panel, which is shown in Figure 5-9.
  • Page 23 Chapter Four Installation and Setup New Wave Research...
  • Page 24 Installation and Setup New Wave Research...
  • Page 25 Installation and Setup The QuikLaze requires some preparation before it can be used. This Introduction chapter provides the information needed to install the complete system for safe operation. The chapter includes the modifications to the microscope and laser preparation. You will need a set of metric hex wrenches, 3, 2.5, 2 and 1.5 mm.
  • Page 26 Installation and Setup Stand-alone 1) The laser power supply and laser head must be within 2 meters of Installation each other 2) The laser power supply and laser head emission indictors ( must be within direct visual sight of one another when viewed near the laser aperture or near the operational control unit (i.e.
  • Page 27 Installation and Setup  In order to comply with EN61000-4-5 Industrial Immunity requirements, the laser power supply must be connected through the Tripp-lite ISOBAR® Series, EURO-4 surge suppressor (see the figure down below). Using the provided C13 to C14 interconnection cable: Connect the female plug end to the back of the laser power supply.
  • Page 28 Installation and Setup Gantry mounting If this system is to be used on a moving gantry system, it must be securely fastened to the laser using the 4 mounting holes. The front plate mounting by itself is not adequate for non-stationary applications. However, the mounting scheme using these 4 holes must be approved by Electro Scientific Industries prior to implementation.
  • Page 29 Installation and Setup The QuikLaze is designed to operate on specially modified Mitutoyo Microscope FS70, FS60, FS50 (Green only) and VM Zoom Microscopes or the Conversion Optem A-Zoom microscope. Become familiar with your microscope before attempting to install the QuikLaze. Order laser adapter kits from Mitutoyo for the VM Zoom and from Optem for the A-Zoom.
  • Page 30 Installation and Setup Note: Install the eye protection filter before installing the laser adapter ring.  Remove the three cap screws (use a 2.5 mm hex wrench) that secure the old adapter ring to the microscope (see Figure 4-3).  Install the new laser adapter ring with the interlocking pin positioned slightly to the right of front-center of the microscope.
  • Page 31 Installation and Setup Remove the four screws (3 mm hex) that secure the zoom mechanism plate or tube lens to the FS60 microscope body. Remove the zoom mechanism by lifting the back of the zoom mechanism plate while tilting it to the right. Unscrew the ring nut that secures the fiber optic condenser lens assembly to the zoom mechanism plate.
  • Page 32 Installation and Setup Unscrew the three screws securing the zoom mechanism to the zoom mounting plate. Install the replacement FS70ZS UV tube lens kit into the large threaded hole in the middle of the zoom mechanism plate. Reinstall the zoom plate on to the microscope body. Reinstall the binocular head on the microscope body.
  • Page 33 Installation and Setup This section describes laser and power supply connections. Laser Installation Laser Head Before installing the laser head, remove the eyepiece filter warning label from the laser head’s aperture. Mounting The laser head may now be mounted on the microscope. Tighten the set screws that secure the base of the laser head to the laser adapter ring.
  • Page 34 Installation and Setup Figure 4-5:– QuikLaze-50 ST2 Cable Connection Diagram (w/ Serial Remote Box) for Computer w/ two COM ports. Laser Umbilical Connect the large Main Umbilical and smaller Secondary Umbilical to the appropriate connectors on the rear panel of the power supply. Be sure to tighten the connector screws to the chassis.
  • Page 35 Installation and Setup Remote Control Either the remote control panel or a PC (but not both) may be connected Panel to the RS232 connector on the Power Supply. If using the remote control panel, connect the RS232 cable between the back of the remote control panel and the back of the Power Supply.
  • Page 36 Installation and Setup Interlock Two interlock connectors are supplied with the system and must be Connector installed before the system may be operated. The purpose of the interlock connector is to provide a method of interlocking the operation of the laser with a safety switch that may be installed on dark box or a laboratory door or other location.
  • Page 37 Installation and Setup Plug the laser power cord into a utility outlet. Video Marker The video spot marker system inserts an artificial representation of the laser spot into the video camera output signal. Under some conditions, this marker may be easier to see than the projected spot markers. Frame grabber card, tower PC and StageLase GUI or Remote Control Panel are required to add a Video marker.
  • Page 38 Installation and Setup Note: The pump may require priming to initiate water flow. This may be done by disconnecting the water hose at the WATER OUT connector on the back of the power supply and forcing water into the system from this connector when the pump is not operating. Laser Head The laser head is internally aligned at Electro Scientific Industries.
  • Page 39 Installation and Setup Turn the power supply key to the ON position and press the EMISSION button. Set the trigger switch to CONT and select a repetition rate of 10 Hz. Press the FIRE button and the laser will begin firing. Adjust the position of the green laser beam on the white card by slightly tilting the laser head.
  • Page 40 Installation and Setup Spot Marker The spot marker illumination is provided by an external 150 watt white light that is fiber coupled to the laser head. It can be installed using the following instructions. Connect the fiber optic cable from the laser head into the external illuminator.
  • Page 41 Installation and Setup The video marker is adjusted at the factory to closely match the size of Video Marker the laser cut. However, if the video marker does not closely match the Adjustment size of the laser cut (PAL vs. NTSC) or the location, the video marker may be adjusted from the Video Marker page that may be accessed from the Laser Info page, which is described on Page 58.
  • Page 42 Installation and Setup Laser RS232 The RS232 port on the back of the laser is a female DB9 connector. The Port Pinout pins are numbered as shown here (as viewed when looking at the back of the laser): Figure 4-12: Female DB9 connector Pin No.
  • Page 43 Installation and Setup Pin No. Name Description Data Carrier Detect † RS232 Receive RS232 Transmit Data Terminal Ready † Ground Data Set Ready † Request to Send † Clear to Send † Ring Indicator † † denotes signal not used by the laser interface Making an Table 4-4: DB9 male pin number, name and description Interface Cable...
  • Page 44 Chapter Five Controls and Operation New Wave Research...
  • Page 45 Operator Maintenance and Troubleshooting New Wave Research...
  • Page 46 Operator Maintenance and Troubleshooting After the installation procedure is completed and the laser safety section Starting the Laser is thoroughly understood, the laser may be started. All covers must be installed and the reservoir filled with de-ionized (distilled) water. The key switch on the power supply must be turned to the ON position prior to operation of the laser.
  • Page 47 Operator Maintenance and Troubleshooting The laser can be turned off at any time. The standard way to turn the laser Turning the Laser off is the following:  Press the STOP button on the Remote Control Panel.  Close the manual shutter control at the base of the laser head. See Figure 4-4 on page 25.
  • Page 48 Operator Maintenance and Troubleshooting External The laser may be interlocked so that laboratory or room doors cannot be Interlocks opened while the laser is running continuously. The connectors on the back of the power supply may be wired so as to disable the laser if an external interrupt switch has been tripped.
  • Page 49 Operator Maintenance and Troubleshooting “FLASHLAMP Source (INT/EXT)”: “INT” – The Fire Flashlamp signal will be generated by the internal control electronics at the repetition rate set through the control panel. “EXT” – The Flashlamp will be fired at a user defined time with user provided Fire Flashlamp Input signal.
  • Page 50 Operator Maintenance and Troubleshooting Internal Triggering The default mode for the QuickLaze is internal triggering. Internal triggering is the simplest way to run the QuikLaze. The flashlamp and Q- switch toggle switches should both be up, in the INT position. In this mode, the control electronics provide the necessary triggers to fire the laser.
  • Page 51 Operator Maintenance and Troubleshooting External In majority of the cases, internal triggering is used to run the laser. If Triggering external triggering is required, users can use the external triggering. This gives the user control over the timing of the laser pulse. In this case, the user must supply TTL pulses to both the flashlamp fire and Q-switch fire inputs with the appropriate delay.
  • Page 52 Operator Maintenance and Troubleshooting Laser Controls Power Supply The power supply has an ON/OFF switch on the rear panel and the key switch on the front panel. The power switch and key switch must be in the ON position for the laser to operate. The front panel also includes LED indicators showing the status of the laser system.
  • Page 53 Operator Maintenance and Troubleshooting Remote Control Panel The Remote Control Panel is a microprocessor-based device which connects to the Power Supply through a 6 ft. cable attached to the 9- pin D-sub RS-232 port and allows operators to control and operate the EzLaze 3 laser system from a convenient location.
  • Page 54 Operator Maintenance and Troubleshooting the STANDBY indicator will illuminate. When pressed in the RUN mode, the laser goes into the STANDBY mode immediately. The FIRE indicator will stop blinking. The LASER EMMISSION indicator and the Laser Enabled light on the Laser Head remain illuminated.
  • Page 55 Operator Maintenance and Troubleshooting LCD Pages The four LCD screens (pages) may be sequentially selected by pressing the PAGE button. The LCD pages are: RUN Page – allows control of the laser. The laser may be fired only from this page. SETUPS Page –...
  • Page 56 Operator Maintenance and Troubleshooting Page 1: Run Page Figure 5-6 The Run Page as shown in below displays and permits control of laser parameters. The laser may be fired only from the Run Page. Soft buttons Water level icon Aperture Soft Control Control knobs knob...
  • Page 57 Operator Maintenance and Troubleshooting Do not use standard objective lenses with IR or UV wavelengths. These wavelengths may damage standard objectives. 1: RUN PAGE – screen identifier Left Screen Laser Mode display – OFF, WAIT, READY, *-------- (laser firing), BURST LOCK Water Level –...
  • Page 58 Operator Maintenance and Troubleshooting Energy HI/LO The energy HI/LO switch is a power adjusting feature that changes the Switch maximum transmitted energy available. This switch operates independently from the variable attenuator. The switch has the following two settings: Full energy is available from the laser. Variable attenuation is about 30:1 for green and about 20:1 for IR and UV.
  • Page 59 Operator Maintenance and Troubleshooting Page 2: Setups The Setups Page as shown in Figure 5-8 allows up to 10 laser Page configurations to be stored or recalled. Each configuration needs to be created on the Run Page then stored/saved on the Setups Page. Soft buttons Aperture...
  • Page 60 Operator Maintenance and Troubleshooting Table 5-2 below summarizes the soft keys assignments for the Setups Page: Soft Assignment Variable Control Method button Control Panel Mode – Soft button – select & Store or Recall Switches the Control Panel input between the following modes: Store - allows storage of new setup configurations Recall –...
  • Page 61 Operator Maintenance and Troubleshooting 2: SETUPS – screen identifier Left Screen Laser Mode display – OFF, WAIT, READY *-------- or BURST LOCK _______________________ Current – this column displays the current setup configuration as entered on the RUN page Stored – this column displays the setup parameters stored in the selected memory location.
  • Page 62 Operator Maintenance and Troubleshooting Soft buttons Aperture Soft Control Control knobs knob Figure 5-9 Interlock Page Soft Assignment Variable Control Method button Reset System – pressed to Soft button – initiate none cause the Control Panel microprocessor to reload its program.
  • Page 63 Operator Maintenance and Troubleshooting 3: INTERLOCKS – screen identifier Left Screen Laser Mode display – OFF, WAIT, READY *-------- or BURST LOCK _______________________ Flow -Indicates the status of the Water Flow interlock: FAIL or OK. Temp -Indicates the status of the Water Temperature interlock: FAIL or OK.
  • Page 64 Operator Maintenance and Troubleshooting Soft Assignment Variable Control Method button Soft button – initiate Go to XY Aperture Setup page Soft button – initiate Go to Video Setup page Not used Not used Run Page – Press to call up the Soft button –...
  • Page 65 Operator Maintenance and Troubleshooting Page 4-1: Apertures Setup Page Soft buttons Soft Control Aperture knob Control knobs Figure 5-11 Apertures Setup Page Soft Assignment Variable Control Method button Soft button – select X axis Aperture calibration Left Aperture Control knob - calibrate Soft button –...
  • Page 66 Operator Maintenance and Troubleshooting APERTURES – screen identifier Left Screen Laser Mode display – OFF, WAIT, or READY *-------- __________________________________ XY Aperture Calibration Instructions XY Shutter position windows New Wave Research...
  • Page 67 Operator Maintenance and Troubleshooting Page 4-2: Video Marker Setup Page Soft buttons Soft Control Aperture knob Control knobs Figure 5-12 Video Marker Setup Page Soft Assignment Variable Control Method button Soft button – select Marker Gain Left Control knob - calibrate Soft button –...
  • Page 68 Operator Maintenance and Troubleshooting MARKER – screen identifier Left Screen Laser Mode display – OFF, WAIT, READY or *-------- __________________________________ Video Calibration Instructions XY Shutter position windows Rear Panel Figure 5-13 Serial Remote Box, Rear Panel — Power input for use when updating the Remote Control AUX +12VDC IN Panel software.
  • Page 69 Laser Exec is a Windows™ application supplied by New Wave Research a Division of ESI ™ for controlling a laser over the RS232 port. It replaces the SRB and is useful for doing simple, interactive control of the laser from the...
  • Page 70 Operator Maintenance and Troubleshooting Controls and Figure 5-14 shows the Laser Exec main screen for QuikLaze. It consists of Operations Main Menu, Tool Bar, Interlock Indicators, Detected Laser and Window Message. Their functions will be described in details in the following sections.
  • Page 71 Operator Maintenance and Troubleshooting  Emission (stand by) This switch turns the laser power supply on and off (it does NOT fire the laser). When the power supply is turned on, the coolant pump and fan will run. The switch will light up in bright yellow when the laser is on.
  • Page 72 Operator Maintenance and Troubleshooting o Interlock Indicators Interlock bar shows the status of the interlocks. o Laser Type The Laser Type on top of the screen indicates the laser types the LaserExec finds by scanning all the COM ports connected to the PC. Currently LaserExec supports the following lasers: ...
  • Page 73 Operator Maintenance and Troubleshooting Chapter Six Maintenance and Troubleshooting New Wave Research...
  • Page 74 Operator Maintenance and Troubleshooting New Wave Research...
  • Page 75 Operator Maintenance and Troubleshooting WARNING: No operator serviceable parts inside. The QuikLaze Yd:YAG laser system contains internal components that present severe electrical and radiation hazards. Improper maintenance or servicing can result in death, blindness, other injury or material damage. Only qualified service personnel should perform service procedures on this equipment.
  • Page 76 Operator Maintenance and Troubleshooting The cooling system is an important part of the QuikLaze Nd:YAG laser Cooling System system. The cooling system must be maintained periodically to ensure reliable performance. Running the pump allows the de-ionizing filter to purify the water. Circulate the cooling water by running the laser power supply and pump at least 30 minutes each week.
  • Page 77 Operator Maintenance and Troubleshooting This section lists a number of conditions that may be observed during the Trouble-shooting lifetime of the QuikLaze Nd:YAG laser system. Following the list of conditions is a set of procedures that may be used for resolving specific conditions to improve laser performance.
  • Page 78 Operator Maintenance and Troubleshooting Procedure 2 Check the Fire Flashlamp and Fire Q-Switch toggle switches on the back Laser does not of the power supply between the BNC connectors. The switches should fire be in the INT position for normal operation. Procedure 3 Make sure that the Hi/Lo switch is in the Hi position.
  • Page 79 Operator Maintenance and Troubleshooting Procedure 6 If the energy distribution does not appear to be uniform across the cut Non Uniform areas check the following: Energy Distribution Check that the laser beam is not clipping a mount or some other object, and that there are no foreign objects in the beam path.
  • Page 81 Chapter Seven Service New Wave Research...
  • Page 82 Service WARNING: Service procedures expose the interior of the system and must be performed by service personnel trained by Electro Scientific Industries. Service personnel must be fully adept at Lock Out Tag Out (LOTO) procedures, general electrical safety, and laser safety practices. WARNING Before any service is performed, be sure to read and understand the complete Safety section of this manual and all warnings.
  • Page 83 Service should be greater than: 1064 nm - 200 uJ; 532 nm - 150 uJ; 355 nm - 60 uJ; and 266 nm - 90 uJ. As needed –  Replace flash lamp. The need for replacement will depend upon usage.
  • Page 84 Service Before the tool is restarted, notify affected persons in the area that LOTO has been terminated and that the tool will be turned on. Before any service or repair is performed on the laser, please employ the Lock-out and following guidelines if the system will be opened or if power to the system tag-out of the is terminated:...
  • Page 85 Service The cooling system is an important part of the QuikLaze Nd:YAG laser Cooling System system. The cooling system must be maintained to ensure reliable performance. The de-ionization (DI) cartridge must be replaced according to how De-ionization much the system is used: Cartridge If the systems is used…...
  • Page 86 Service Water flow arrow. Heat Exchanger Di-ionization Cartridge Water Reservoir Pump Push in locking mechanism to ridge and pull hose out. Figure 7-2: Cooling System in the Power Supply  Remove the old de-ionization cartridge by carefully pulling out from the C-Clamp of the power supply. ...
  • Page 87 Service In the QuikLaze-50 ST2, there is a protective, Mylar panel between the Checking the water storage and the electrical source. Check the Mylar shield for Mylar Shield condensation. If condensation is detected, it is important to shut down the laser, discontinue use and contact Electro Scientific Industries to report this problem.
  • Page 88 Service The flash lamp must be changed when the specified energy cannot be Flash Lamp achieved or if the laser energy fluctuates significantly from shot to shot. Replacement This can be seen over the course of several hundred pulses. The flash lamp should be useful for at least 30 million shots.
  • Page 89 Service Socket head cap screws (6) Figure 7-5: Recessed Pump Chamber Screws  Loosen the six head cap screws located on the top of the pump cavity. Locate one of the two through holes. Insert a 3/32 hex ball screw driver in one of the holes to remove the top cover. ...
  • Page 90 Service CAUTION: Avoid all contact with the glass surface of the lamp and the surrounding ceramic. This may leave grease marks that will degrade the lamp performance and may shorten the lamp life.  Carefully remove a new flash lamp from the package. ...
  • Page 91 Service CAUTION: Avoid all contact with the glass surface of the lamp. This may leave grease marks that will degrade the lamp performance and may shorten the lamp life.  Replace the two end caps on the lamp cavity. Tighten the screws on the end caps evenly.
  • Page 92 Service Spare and Replacement Parts Listed below are recommended Spare Parts for the QuikLaze-50 ST2. Part Number Description Qty. 0002-0036 Flashlamp 0003-0005 Gasket, split pump cavity 1300-0001 De-ionization cartridge 9000-0016 EKE Lamp New Wave Research...
  • Page 93 Service New Wave Research...
  • Page 95 Appendix A Specifications New Wave Research...
  • Page 96 Appendix A Environmental Requirements Voltage* 100 - 240 ~, 50/60 Hz Temperature (operating) 21° C ± 5° C (70° F ± 10° F) 0° – 50° C (32° – 122° F) Temperature (non-operating) 20% – 80% non-condensing Relative Humidity Power 500W MAX Maximum Operating Altitude 2,000 m (~6,500 ft)
  • Page 97 Appendix A Wavelengths and Cutting Parameters Success in laser trimming, cutting and ablation is usually determined by the Laser choice of wavelength. Different materials react differently to various Wavelengths for wavelengths. Effective removal of metals depends on how much energy is Optimum Material absorbed and how much is reflected.
  • Page 98 Appendix A Table 7-1: Recommended Wavelengths for Various Materials Infrared (1064nm) Green (532nm) (355nm or 266nm) Metal/Conductors Aluminum Aluminum Chrome Chrome Ni-Chrome Ti-Tungsten Copper Gold Insulators Silicon Polyimide Nitride Teflon Silicon Silicon Dioxide Nitride Kapton Semiconductors Polysilicon Polysilicon Color Filter Green Blue Materials...
  • Page 99 Appendix A The following table presents a summary of recommended laser settings for Laser Cutting various machining operations. The settings are for a New Wave QuikLaze Parameters laser system. These settings should be viewed as a starting point from which a finely tuned cutting process can be defined for a specific application.
  • Page 100 Appendix A New Wave Research...
  • Page 101 Appendix A New Wave Research...
  • Page 102 Appendix A New Wave Research...
  • Page 103 Appendix B, Recommended External TTL Circuitry New Wave Research...
  • Page 104 Appendix B 470 OHM FIRE FLAS HLAMP ONE SHOT FLA S HLA MP SY NC OUT, OUTP UT, A CTIV E HIGH, P IN 3 +5V RE FE RA NCE , OUTPUT, P IN 23 S E T P FN V OLTA GE , INP UT, 0-5V , PIN 5 S E T A TTE NUATOR, INP UT, 0-5V , P IN 6 E NAB LE LA S E R, INP UT, ACTIV E HIGH, P IN 1 S E T RE P -RA TE , INP UT, 0-5V , P IN 9...
  • Page 105 Service Contact Information Japan New Wave Research New Wave Research a division of a division of ESI Japan Technology Center 740 Kifer Road Moriichi Building 2F, Sunnyvale, CA 94086-5121 14-3 Takabashi, Koto-ku Phone: 510.249.1550 Tokyo 135-0005 Japan Fax: 510.249.1551 Phone: +81-3-5625-5100 Email: americasupport@esi.com...