Table of Contents

Advertisement

Quick Links

Alcatel-Lucent ADS 501
Dry Pump
A l l t r a d e m a r k s , b r a n d n a m e s , a n d b r a n d s a p p e a r i n g h e r e i n a r e t h e p r o p e r t y o f t h e i r r e s p e c t i v e o w n e r s .
• C r i t i c a l a n d e x p e d i t e d s e r v i c e s
• I n s t o c k / R e a d y - t o - s h i p
Artisan Scientific Corporation dba Artisan Technology Group is not an affiliate, representative, or authorized distributor for any manufacturer listed herein.
Limited Availability
Parts Grade / As-Is
Buy Today!
https://www.artisantg.com/69689-5
• We b u y y o u r e x c e s s , u n d e r u t i l i z e d , a n d i d l e e q u i p me n t
• F u l l - s e r v i c e , i n d e p e n d e n t r e p a i r c e n t e r

Advertisement

Table of Contents
loading
Need help?

Need help?

Do you have a question about the ADP and is the answer not in the manual?

Questions and answers

Subscribe to Our Youtube Channel

Summary of Contents for Alcatel-Lucent ADP

  • Page 1 Alcatel-Lucent ADS 501 Dry Pump Limited Availability Parts Grade / As-Is Buy Today! https://www.artisantg.com/69689-5 A l l t r a d e m a r k s , b r a n d n a m e s , a n d b r a n d s a p p e a r i n g h e r e i n a r e t h e p r o p e r t y o f t h e i r r e s p e c t i v e o w n e r s .
  • Page 2: Table Of Contents

    B 160 Use of the Serial link (Service centers) ......B 170 Installation of silencer heating kit ....... Alcatel - High Vacuum Technology - User’s Manual ADP/ADS Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 3 «E1 logic»/«E2 logic» Alert or alarm ......D 150 «Valve option» Alert and alarm ........ D 160 «Variator» Alarm............. Alcatel - High Vacuum Technology - User’s Manual ADP/ADS Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 4 Warnings are used when failure to observe instructions or precautions could result in significant damage to equipment, and/or in injury to humans. Alcatel - High Vacuum Technology - User’s Manual ADP/ADS Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 5 : 100 448 ANUAL EFERENCE interchangeable parts - Easy to transport - Network compatible. : 04 - May 1998 DITION Alcatel - High Vacuum Technology - User’s Manual ADP/ADS Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 6: Adp/Ads Series One

    - Several equipments are available for semi-conductor’s processes applications, corrosives, CVD or clean processes 2 versions Standard or modular Alcatel - High Vacuum Technology - User’s Manual ADP/ADS Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 7: The Various Versions Of Adp Series One

    FRONT VIEW Inlet port Monitoring system Flowmeter panel REAR VIEW Utilities panel RS 232/485 OEM Interface (option) Exhaust port Alcatel - High Vacuum Technology - User’s Manual ADP/ADS Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 8 Standard version (continued) 1 - P : ADP or ADS* UMPING YSTEMS * In an ADS, a Roots pump is combined with an ADP. 2 - Silencer with check valve function 3 - Compact frame May be equipped with anti-vibration pads.
  • Page 9 5 meters from the pump if necessary. Alcatel - High Vacuum Technology - User’s Manual ADP/ADS Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 10: Adp/Ads Serie One Dry Pumps

    A 30 ADP/ADS Series One dry pumps for semi-conductor’s industry The ADP / ADS range is designed for three types of applications : Clean processes This concerns all applications for clean pumping (particle-free) and non-corrosive gases (load lock pumping for example).
  • Page 11 10 - Water electrovalve 11 - Water flowmeter 12 - Water flow sensor Accessories: 13 - Isolation valve Alcatel - High Vacuum Technology - User’s Manual ADP/ADS Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 12 ADP and Roots. Note : The ”TC” version (Temperature Controlled) includes an optimized cooling circuit and a temperature regulation on the ADP. These functions can be installed on equipment for corrosive processes without CVD option. Inlet ADP 81/ ADS 151/...
  • Page 13: Types Of Monitoring Systems

    • Purge flow and exhaust pressure • Exhaust gas temperature • ADP motor power • Water flow rate • Maintenance Time Alcatel - High Vacuum Technology - User’s Manual ADP/ADS Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 14: Dry Pump Operational Principle

    A 50 Dry pump operational principle Multi-stage Roots The ADP pump consists of 5 Roots type stages. principle The two rotors rotate without touching each other. The three stages on the low pressure side are called “LP stages” and the two stages on the high pressure side are called “HP stages”.
  • Page 15 3 - Water cooling 4 - HP purge 5 - Dynamic seal 6 - Lubrication disk 7 - Gear casing Alcatel - High Vacuum Technology - User’s Manual ADP/ADS Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 16 The pump in a pumping Process installation chamber INLET PRESSURE Secondary pumping pump ATMOSPHERIC PRESSURE Alcatel - High Vacuum Technology - User’s Manual ADP/ADS Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 17: The Accessories

    Vibration force to the floor by pad: < 0,5N - Available till 150Hz. Part Number : ADP ....101838 ADP MD ...101942 ADS 151/301/501 .
  • Page 18: Technical Characteristics

    < 70 * Without nitrogen supply ** According to processes (see B120) See pumping curves at the chapter G Alcatel - High Vacuum Technology - User’s Manual ADP/ADS Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 19: Dimensions In Inches

    15.7 37.8 35.9 25.6 39.2 10.9 31.2 ADS 1001 59.4 56.8 15.7 41.3 37.2 28.3 41.3 10.9 34.5 Alcatel - High Vacuum Technology - User’s Manual ADP/ADS Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 20: Dimensions In Millimeters

    31.7 33.9 11.4 12.6 27.9 15.7 33.1 ADS 301MD 31.7 33.9 11.4 12.6 27.9 15.7 33.1 ADS 501MD Alcatel - High Vacuum Technology - User’s Manual ADP/ADS Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 21: Safety Instructions

    Switch off the pump and disconnect the main cable. Do not operate inside if your are not trained and authorized Alcatel - High Vacuum Technology - User’s Manual ADP/ADS Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 22 4”, the material can be PVC, except for flammable gases for wich stainless steel is strongly advised. Alcatel - High Vacuum Technology - User’s Manual ADP/ADS Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 23: Unpacking / Storage

    • Remove the long side of the outer crate. This side is attached with screws; all the other sides are held with nails. Alcatel - High Vacuum Technology - User’s Manual ADP/ADS Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 24 Our equipment can be stored without particular storage precautions (pump pressurized in nitrogen and sealed) at an ambient temperature between -20°C and + 70°C. Alcatel - High Vacuum Technology - User’s Manual ADP/ADS Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 25: Positioning The Pump In Pumping Installation

    See section B30 for installing Anti-vibration Pads. Alcatel - High Vacuum Technology - User’s Manual ADP/ADS Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 26 • Unfasten the lateral fastening and raise the cover by the handles (2). Toggle joints Handle Side cover Lateral fastening Alcatel - High Vacuum Technology - User’s Manual ADP/ADS Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 27 Failure to remove the shipping braces could later cause the pump to seize as a result of a strain exerted by the braces. Alcatel - High Vacuum Technology - User’s Manual ADP/ADS Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 28: Installing Anti-Vibration Pads

    B 30 Installing anti-vibration pads (Accessories) Anti-vibration pads ADP/ADS The ADP/ADS pumps can be equipped with anti-vibration pads which are mounted beneath the pump, near the locking feet. Standard version B 20 . • Remove the covers as described in section •...
  • Page 29: Modular Version - Layout

    It can be fitted to retrofit on older pumps by ordering P/N 104527. Positioning in pumping See page B 20. installation Alcatel - High Vacuum Technology - User’s Manual ADP/ADS Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 30 WATER & N2 POWER SUPPLY SUPPLIES POWER SUPPLY SUPPLIES MOTOR INLET MOTOR CONTROL FLOWMETER CONTROL PANEL CONFIGURATION A CONFIGURATION F Alcatel - High Vacuum Technology - User’s Manual ADP/ADS Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 31: Oil Quantities

    For this to be accurate, wait a few minutes for the oil to settle over all internal surfaces. Replace the fill cap. (See location page 2) Alcatel - High Vacuum Technology - User’s Manual ADP/ADS Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 32 4 - ADP housing oil level sight glass 5 - Rear Roots housing filling 6 - Roots housing oil level sight glass Alcatel - High Vacuum Technology - User’s Manual ADP/ADS Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 33: Connection To The Cooling Circuit

    Standard version connections REAR VIEW 1/4 NPT 1/4 Gas 1/4 Gas 1/4 NPT ALCATEL supply Alcatel - High Vacuum Technology - User’s Manual ADP/ADS Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 34 Needle tap The water flow will be adjusted according to the processes with the needle tap (see section B120). Alcatel - High Vacuum Technology - User’s Manual ADP/ADS Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 35: Inert Gas Purge Connection (N 2 Plug)

    Standard version connections REAR FACE Customer supply 1/8 Gas 1/8 Gas ALCATEL supply Modular version REAR connections FACE Alcatel - High Vacuum Technology - User’s Manual ADP/ADS Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 36 The flowmeter is used to display the overall purge flow rate. Pressure Pressure gauge regulator WATER FLOW N2 FLOW PRESSURE Purge gas Flowmeter panel flowmeter Alcatel - High Vacuum Technology - User’s Manual ADP/ADS Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 37: Nitrogen Purge Flow Sensor

    Note if this triggering pressure corresponds to the minimum required one. Alcatel - High Vacuum Technology - User’s Manual ADP/ADS Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 38: Connection To The Pumping Circuit

    In this case, do not fit the anti-noise seal. Make sure that the pressure at the exhaust does not exceed 1200 mbar. Alcatel - High Vacuum Technology - User’s Manual ADP/ADS Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 39 Connect the electrical cable to the "inlet valve / exhaust valve" connector at the rear of the M3 monitoring system. Alcatel - High Vacuum Technology - User’s Manual ADP/ADS Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 40: Pump Power Supply

    Even if the main switch is locked in the "1" position, the disconnecting function remains operational. Alcatel - High Vacuum Technology - User’s Manual ADP/ADS Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 41 Mains connector The connection has to be carried out as defined previously in page 1. Alcatel - High Vacuum Technology - User’s Manual ADP/ADS Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 42 8 Sensors information (n° 2) Check the rotational direction of the pump at the first start-up (See B 130). Alcatel - High Vacuum Technology - User’s Manual ADP/ADS Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 43: Water Flowrate And Gas Purge According To Processes

    * Should the layer be thick (>1500A), please contact Alcatel Worldwide Technical Support for dry pumps. Alcatel - High Vacuum Technology - User’s Manual ADP/ADS Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 44 * Should the layer be thick (>1500A), please contact Alcatel Worldwide Technical Support for dry pumps. Alcatel - High Vacuum Technology - User’s Manual ADP/ADS Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 45: Checking The Rotational Direction

    Alcatel - High Vacuum Technology - User’s Manual ADP/ADS Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 46: Remote Control Plug Connection (M3 Monitoring)

    Wiring of the cover plug to put if the remote control is not used (REMOTE plug). Remote control «REMOTE» Alcatel - High Vacuum Technology - User’s Manual ADP/ADS Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 47 Only LOC order transmitted by the RS232 allows to enable keyboard or remote control. (Contact Alcatel) Alcatel - High Vacuum Technology - User’s Manual ADP/ADS Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 48 VALVE RS 232 WATER EXHAUST LI 3 LI 1 EMERG. WATTMETER REMOTE FLOW VALVE EMERGENCY Plug Prise EMERGENCY Alcatel - High Vacuum Technology - User’s Manual ADP/ADS Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 49: Remote Control Plug Connection (M1 Monitoring)

    With switch : Interrupteur MA/AR ON / OFF switch The remote control STOP button will stop the ADP, but it will restart as the push button is released. Alcatel - High Vacuum Technology - User’s Manual ADP/ADS Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 50 WATER EMERG MOTOR TEMP. VALVE REMOTE CB 1 EMERGENCY Plug Prise EMERGENCY Alcatel - High Vacuum Technology - User’s Manual ADP/ADS Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 51 Emergency stop Interrupteur MA/AR ON / OFF switch The remote control STOP button will stop the ADP, but it will restart as the push button is released. Alcatel - High Vacuum Technology - User’s Manual ADP/ADS Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 52 WATER EMERG MOTOR TEMP. VALVE REMOTE CB 1 EMERGENCY Plug Prise EMERGENCY Alcatel - High Vacuum Technology - User’s Manual ADP/ADS Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 53: Rs 232 Or Rs 485 Link Wiring

    TD (Transmission data) (RS 232) RS232/485 GND (Ground) V(+) (RS 485) 9-pin male DB connector for V(-) (RS 485) serial link. Alcatel - High Vacuum Technology - User’s Manual ADP/ADS Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 54 The commands and messages reception syntax is dealt with in a special chapter (Contact Alcatel). Alcatel - High Vacuum Technology - User’s Manual ADP/ADS Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 55: Installation Of Silencer Heating Kit

    • two heating belts (1) • two insulation sleeves (2) • a connection box (3) • a mains cable (4). Alcatel - High Vacuum Technology - User’s Manual ADP/ADS Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 56: Alcatel - High Vacuum Technology - User's Manual Adp/Ads

    The heating kit will be used during pumping of condensable gases. Caution : Heating temperature = 130 °C. Take all the necessary precautions regarding burn risks. Alcatel - High Vacuum Technology - User’s Manual ADP/ADS Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 57: Start-Up Of The M3 Monitoring System

    An insulating film protects the keys. Do not use hard objects such as pens, screwdrivers, etc., which could damage the key. Alcatel - High Vacuum Technology - User’s Manual ADP/ADS Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 58 Valid the code ENTER with the key Acces code can be personalized (see C 30) Alcatel - High Vacuum Technology - User’s Manual ADP/ADS Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 59 Note : When you position the main switch to position I, the storage mode disappears automatically : Make a DATE/TIME setting (see previous paragraph) Alcatel - High Vacuum Technology - User’s Manual ADP/ADS Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 60: Setting The M3 Monitoring System Parameters

    Allows to monitor a logic sensor during sensors an alert time and stop pumping at the end of the alarm time. Alcatel - High Vacuum Technology - User’s Manual ADP/ADS Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 61: Factory Configuration

    C 30. *Temperature regulation occurs 10°C below the alert threshold. Alcatel - High Vacuum Technology - User’s Manual ADP/ADS Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 62: M3 Monitoring System Function Table

    BUZZER CONTROL SELECT. Valid/Disabled PURGE CONTROL SELECT. Valid/Disabled THERMO CONTROLLED Valid/Disabled FLOW N2 OPTION Valid/Disabled Other menus next page Alcatel - High Vacuum Technology - User’s Manual ADP/ADS Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 63 Initial config. : °C Initial config. : mbar PRESSURE UNIT mbar, hPa, Torr, PSI ( Technical modifications reserved ) Alcatel - High Vacuum Technology - User’s Manual ADP/ADS Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 64 10 ALERTS LAST ALARMS DISPLAY LAST 10 ALARMS CONFIGURATION LIST OF CUSTOMIZED PARAMETERS ( Technical modifications reserved ) Alcatel - High Vacuum Technology - User’s Manual ADP/ADS Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 65: Use Of The M3 Monitoring System

    ‘’PURGE’’ key STOP START PURGE ROOTS - to start-up the Roots at the same time as the ADP, set the ‘’Roots control’’ menu on disabled - to start-up or stop the Roots while the ADP is running, set ENTER the ‘’Roots control’’...
  • Page 66: Operation Monitoring

    PC via RS 232 interface and RS 485 ( see section B 150) or the remote control via the connector Remote ( see section B 140) . Alcatel - High Vacuum Technology - User’s Manual ADP/ADS Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 67: Use Of The M1 Monitoring System

    • stopping of the pumping although the STOP command has not been given. Alcatel - High Vacuum Technology - User’s Manual ADP/ADS Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 68 (250 V - 1 A - 100 VA). These contacts may be used for controlling automatic control systems. (see section B 140) . Alcatel - High Vacuum Technology - User’s Manual ADP/ADS Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 69: Safety Instructions Related To Maintenance

    • to ventilate the premises well. • not to dispose of residue but, if necessary, to have it destroyed by a qualified organization. Alcatel - High Vacuum Technology - User’s Manual ADP/ADS Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 70 After a complete maintenance operation, on the pump or on the installation, it is recommended to perform a tightness test with helium. Alcatel - High Vacuum Technology -User’s Manual ADP/ADS Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 71: First Level Of Maintenance

    : ADP and Roots power circuit breakers Monitoring TR1 : Int* transformer * Int : internal for ADS801/1001 ADS Unit ADS opened Alcatel - High Vacuum Technology - User’s Manual ADP/ADS Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 72: Maintenance Operations

    This information can be red at any time using the “Operating time” menu. Perform maintenance on the relevant parts. Maintenance See Section E operations Alcatel - High Vacuum Technology -User’s Manual ADP/ADS Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 73: Maintenance Frequency

    ** For oil filling, see section B 50 A+C : ADS 801/1001 Maintenance Maintenance times can change according to processes and equipments used. Alcatel - High Vacuum Technology - User’s Manual ADP/ADS Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 74 Maintenance times can change according to processes and equipments used. (1) With TC version and silencer heating, the maintenance of the silencer can be extanded to 8500 h. Alcatel - High Vacuum Technology -User’s Manual ADP/ADS Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 75 ** For oil filling, see section B 50 A+C : ADS 801/1001 Maintenance Maintenance times can change according to processes and equipments used. Alcatel - High Vacuum Technology - User’s Manual ADP/ADS Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 76: Diagnosis And Troubleshooting

    D 50 The pump is running (no message) ..D 60 Alcatel - High Vacuum Technology - User’s Manual ADP/ADS Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 77: Pump Does Not Start

    Switch it on Call Alcatel customer service Other problem The keyboard is not working Call Alcatel customer service Alcatel - High Vacuum Technology - User’s Manual ADP/ADS Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 78 Problem on M3 “ADP“ plug Check the connection ADP does not run bad connected Defective management Call Alcatel customer service board Alcatel - High Vacuum Technology -User’s Manual ADP/ADS Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 79 Roots RT2 breaker Check its rate. ( See D 70 ). Check ADP mechanical condition. See next page 4/4 Alcatel - High Vacuum Technology - User’s Manual ADP/ADS Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 80 Check the main power. Main power is not correct No message displayed on Call Alcatel customer service Problem on M3 the screen Alcatel - High Vacuum Technology -User’s Manual ADP/ADS Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 81 See D 80 Exhaust pressure > 1450 mbar Alert “Pressure“ See D 80 Exhaust pressure > 1990 mbar Alcatel - High Vacuum Technology - User’s Manual ADP/ADS Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 82: The Pump Is Running And Then Is Showing

    Problems on platinium sensor “Consumption“ Alert See D 100 Consumption higher than “Consumption“ Alarm alert threshold or no power Alcatel - High Vacuum Technology -User’s Manual ADP/ADS Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 83 “Power supply“ Alert Check the voltage Mains voltage variation (± 15%) Call Alcatel customer service Problem on M3 Alcatel - High Vacuum Technology - User’s Manual ADP/ADS Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 84 Check the wiring Sensor not connected θ gas = 170°C See D 91 Problem on the platinium sensor Alcatel - High Vacuum Technology -User’s Manual ADP/ADS Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 85 θ ADP motor ≥ 65° See E 50 ADP mechanical problems Call Alcatel customer service Defect does not disappear Alcatel - High Vacuum Technology - User’s Manual ADP/ADS Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 86 500 mbar < P < Pres. threshold With flow purge See D 80 No nitrogen sensor option See D 80 Flowmeter bad set Alcatel - High Vacuum Technology -User’s Manual ADP/ADS Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 87 Check the sensors Sensor problems ( See D 140 ) Set the delays Delay not properly set Alcatel - High Vacuum Technology - User’s Manual ADP/ADS Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 88 Check the compressed air Valve does not open when supply. pump is starting Check the valve condition. See D 150 Contact problems Alcatel - High Vacuum Technology -User’s Manual ADP/ADS Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 89 (ADP, Bearings, Silencer of a parameter is reached corresponding time. or Roots) Check the maintenance thresholds. Alcatel - High Vacuum Technology - User’s Manual ADP/ADS Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 90: Pump Is Running - No Message

    Unsynchronized gears Call Alcatel customer service No N2 purge Reset M3 configuration or Bad configuration set the purge manually. Alcatel - High Vacuum Technology - User’s Manual ADP/ADS Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 91 RT2 Roots breaker on position 1 - Check Roots mechanical condition Problem on M3 Call Alcatel customer service Alcatel - High Vacuum Technology - User’s Manual ADP/ADS Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 92: Breaker

    • Check that the emergency stop button is not tripped (unlock it by rotating 1/4 of turn). Emergency stop • If the defect still remains, call Alcatel customer service. Alcatel - High Vacuum Technology -User’s Manual ADP/ADS Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 93 • Check that the silencer, the pipe to exhaust are not clogged. • If the defect still remains, call Alcatel customer service. Alcatel - High Vacuum Technology - User’s Manual ADP/ADS Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 94 - Test the connection and the display (idem exhaust pressure too high see page 1/2 ). - If the incident is still present, call Alcatel customer service. Alcatel - High Vacuum Technology -User’s Manual ADP/ADS Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 95: Gas Temp." Alert

    • 157°C : 160 Ω - If the sensor is OK, there is another problem on the M3: call Alcatel customer service. Alcatel - High Vacuum Technology - User’s Manual ADP/ADS Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 96: Pump Temp." Alert

    - Check the cooling circuit. - If the sensor is OK, there is another problem on the M3: call Alcatel customer service. Alcatel - High Vacuum Technology - User’s Manual ADP/ADS Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 97: Consumption" Alert And Alarm

    Rotational direction of the Invert two phases on mains plug J1 pump not correct Call Alcatel customer service. Problem on M3 Alcatel - High Vacuum Technology - User’s Manual ADP/ADS Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 98 ( see A 30 rep. 12 ) 9 and 10 of J5 Call Alcatel customer service. Problem on M3 Alcatel - High Vacuum Technology - User’s Manual ADP/ADS Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 99: Motor Temp." Alert Or Alarm

    Remake the wiring The defect disappears ( see B 80 ) Call Alcatel customer service. Problem on M3 Alcatel - High Vacuum Technology - User’s Manual ADP/ADS Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 100: Analogic Input" Alert Or Alarm

    14 & 15 of J6 (15 = 0V) Problem on analogical Check the status of analogical sensor sensor (Customer one) Alcatel - High Vacuum Technology - User’s Manual ADP/ADS Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 101: E1 Logic"/"E2 Logic" Alert Or Alarm

    23 and 25 of J5. Call Alcatel customer service. Problem on M3 Alcatel - High Vacuum Technology - User’s Manual ADP/ADS Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 102: Valve Option" Alert And Alarm

    Remake the wiring and No defect at pump start up check valve contact condition. Call Alcatel customer service. Problem on M3 Alcatel - High Vacuum Technology - User’s Manual ADP/ADS Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 103: Variator" Alarm

    ADS 801/1001, ADS 501V M3 parameters (See C 30) or ADP 81V Problem on M3 Call Alcatel customer service. Alcatel - High Vacuum Technology - User’s Manual ADP/ADS Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 104 Replace the drain plug and the remove the fill plug. Introduce the quantity of new oil required (see Section B 5 0). Alcatel - High Vacumm Technology - User’s Manual ADP/ADS Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 105 Reinstall the backplate to the rear of the pumping unit and the side covers. Perform the maintenance of the replaced parts on a bench. Alcatel - High Vacuum Technology - User’s Manual ADP/ADS Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 106 Position the Borrelly washer (1) and install a new cartridge. Reassemble the other parts by replacing the O-rings (3 and 4) with new seals. Alcatel - High Vacuum Technology - User’s Manual ADP/ADS Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 107: Access Code

    DURATION : 0 H MAXI : 17000 H to reset the delay MINI : 1000 H ENTER Valid with the key Alcatel - High Vacuum Technology - User’s Manual ADP/ADS Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 108 E 50 Freeing up the ADP If, after a prolonged stop, the ADP does not restart using the function START because of sub-products deposed inside the pump, it is possible to free it up manually. Consult the standard precautions before intervention. (See Section D 00) •...

Table of Contents