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Hamamatsu ENERGETIQ LDLS EQ-99X-FC Operation And Maintenance Manual

Laser-driven light source
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Model EQ-99X-FC
LDLS ®
Laser-Driven Light Source
Operation and Maintenance Manual
Revision 6
April 2024
DOC-6522

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  • Page 1 Model EQ-99X-FC LDLS ® Laser-Driven Light Source Operation and Maintenance Manual Revision 6 April 2024 DOC-6522...
  • Page 2   Copyright Information       Copyright © 2024 Energetiq Technology Inc. All rights reserved.   For a list of Energetiq product patents, visit www.energetiq.com/patents.   All technical information, including drawings, schematics, and specifications contained in this manual are the property of Energetiq and shall not be reproduced in whole or in part without the written consent of Energetiq. The content of this manual is subject to change without notice.

  • Page 3: Table Of Contents

      Table of Contents     Contents Contents.................................. 3 Chapter 1. Safety and Warranty Information ......................5 1.1 Safety Warnings............................5 1.2 General Precautions ............................. 6 1.3 Laser Information ............................7 1.4 Labels and Safety Notifications ........................8 1.4.1 Definition of Equipment and Document Symbols ..................10 1.5 Safety Interlocks ............................
  • Page 4   Table of Contents     4.4.2 Installing Alternative Remote Control ......................32 4.5 Installing the Remote Purge Orifice......................34 4.5.1 Tools Required ............................. 34 4.5.2 Installation Procedure ..........................34 Chapter 5. Operating the System ........................... 38 5.1 Starting the System............................. 38 5.2 Stopping the System ...........................

  • Page 5: Chapter 1. Safety And Warranty Information

      Chapter 1. Safety and Warranty Information       Chapter 1. Safety and Warranty Information 1.1 Safety Warnings The EQ-99X-FC system is a Class 1 laser product. All appropriate laser safety measures should be in place before operating the system. Consult your facility's laser safety officer. Laser protective eyewear should be worn at all times while operating the system.

  • Page 6: General Precautions

      Chapter 1. Safety and Warranty Information     WARNING   The EQ-99X-FC system power supply controller utilizes an internal Class 4 IR laser capable of causing  severe injury to eyes or skin. Do not open or attempt to service this unit. Contact Energetiq regarding any problems with the unit.   WARNING • If the equipment is used in a manner not specified by the manufacturer, the protection provided by the equipment may be impaired. Energetiq is not liable for damage or losses ...

  • Page 7: Laser Information

        Chapter 1. Safety and Warranty Information   The EQ-99X-FC system power source must also be cabled correctly and connected to a socket with a protective earth  ground prior to operation.   See Chapter 4. Installation for details of the facilities connections.   There are no user-serviceable parts inside the EQ-99X-FC system. For any problems encountered during operation, please contact Energetiq for assistance. If there is a component failure, do not attempt to open the power supply controller or lamp head enclosure of the EQ-99X-FC system.  ...

  • Page 8: Labels And Safety Notifications

      Chapter 1. Safety and Warranty Information     1.4 Labels and Safety Notifications The following safety labels appear on the product. The figures EQ-99X-FC Power Supply Controller Label Locations and  EQ-99X-FC Lamp Head Label Locations show the location of each label on the EQ-99X-FC system.     Output Connector Warning Label – indicates hazardous levels of broadband light are present.  Unit should only be operated with an output fiber installed to the EQ-99X-FC system and the far  end of the fiber terminated so that the output beam remains enclosed. UV Hazard Warning Label – indicates hazardous levels of UV light are present.
  • Page 9     Chapter 1. Safety and Warranty Information   Figure 1. EQ-99X-FC Power Supply Controller Label Locations   Figure 2. EQ-99X-FC Lamp Head Label Locations   EQ-99X-FC Operation & Maintenance Manual 9 of 50  ...

  • Page 10: Definition Of Equipment And Document Symbols

      Chapter 1. Safety and Warranty Information       1.4.1 Definition of Equipment and Document Symbols The following symbols are found on the EQ-99X-FC system and in this document. The meaning of each symbol is listed  below: CAUTION: Controls or adjustments or performance of procedures other than those specified herein may result in hazardous radiation exposure. WARNING: Invisible laser radiation. Avoid eye or skin exposure to direct or scattered radiation from Class 1  laser product.
  • Page 11     Chapter 1. Safety and Warranty Information   Light output Light output remains above 80% and does not turn off.   ◦ Criteria B   Light output Light output remains above 50% and does not turn off.   ◦ Criteria C  ...

  • Page 12: Chapter 2. System Description

      Chapter 2. System Description       Chapter 2. System Description 2.1 System Overview The EQ-99X-FC system is a broadband lamp system for use in a wide variety of applications. The lamp bulb produces  high-brightness, broadband light from DUV wavelengths through visible and beyond. The output is very stable, and the system has a long lifetime before any service is required. A simple control interface ensures ease of use.  ...

  • Page 13: Power Supply Controller

        Chapter 2. System Description   Figure 3. EQ-99X-FC System Components The following subsections provide descriptions of the system components and controls and give an overview of their functions.   2.2.1 Power Supply Controller The power supply controller contains the following components:  • Status Indicator LEDs • I/O Port •...
  • Page 14   Chapter 2. System Description     Figure 4. Power Supply Controller   A. Status Indicator LEDs These five LEDs indicate the system status. The function of these indicators is shown below in the table Status Indicator LED Functions.     Table 2.
  • Page 15     Chapter 2. System Description   LED Label Meaning (when lit) One of the following has occurred in the lamp head: 1. Control cable not connected properly 2. Lamp head internal temperature too high LAMP MODULE FAULT 3. Laser fiber not correctly connected 4. Lamp bulb not correctly installed 5.

  • Page 16: Lamp Head

      Chapter 2. System Description     2.2.2 Lamp Head The lamp head contains the following components:  • FC Output Port • Nitrogen Purge Inlet • Laser Input • J4 Signal Port • Laser ON indicator • Lamp Bulb (internal, not shown) • Igniter (internal, not shown) •...
  • Page 17     Chapter 2. System Description   C. Nitrogen Purge Inlet This is the inlet fitting for nitrogen purge gas. See 3.4 Utility Requirements for more details.   For information on installing the remote purge orifice to reduce optical noise output, see 4.5 Installing the Remote Purge Orifice. D. Laser Input This is the inlet for the laser fiber optic cable from the power supply controller. It contains a set of interlock pins that  disable the laser when the SMA connector is not properly in place.   E. J4 Signal Port This port is used to provide various power and control signals to/from the power supply controller. No other connector or cable may be used with the EQ-99X-FC system other than the one supplied. ...

  • Page 18: Chapter 3. System Specifications And Requirements

      Chapter 3. System Specifications and Requirements       Chapter 3. System Specifications and Requirements 3.1 Optical Performance See the figure Typical Output Spectrum for the typical output spectrum.    Figure 6. Typical Output Spectrum 3.2 Physical Specifications Dimensions (H x W x D) • Lamp Head: 82 x 86 x 76 mm (3.2 x 3.4 x 3.0 in)  •...

  • Page 19: Utility Requirements

        Chapter 3. System Specifications and Requirements   Digital Outputs • Type: Open collector to ground (digital common) • Logic: Active Low • Voltage: 30VDC max. • Sink Current: 30mA max.   User Power • Voltage: 5VDC, referenced to digital common •...
  • Page 20   Chapter 3. System Specifications and Requirements     • Operating Altitude: 2,000 m max. • IP Code: IP20.   Transport • Temperature: -5–95 °C • Relative Humidity: non-condensing, 95% max.   EQ-99X-FC Operation & Maintenance Manual 20 of 50  ...

  • Page 21: Chapter 4. Installation

      Chapter 4. Installation       Chapter 4. Installation 4.1 Unpacking the System Upon arrival, inspect all parts of the EQ-99X-FC system for completeness and damage incurred in shipping. Use care  when unpacking to avoid damaging the laser fiber optic cable.   If any part is missing or appears damaged, contact Energetiq immediately. Do not attempt to substitute any parts.  ...
  • Page 22   Chapter 4. Installation     Qty Item Description Picture Lamp Head Interconnecting cable from lamp head to power supply controller  (9 pin mini D-sub)   One of the following output fibers: • UVFIBER-115-1M-FC  115um Output Fiber (1m long) • UVFIBER-115-2M-FC  115um Output Fiber (2m long) • UVFIBER-230-1M-FC  230um Output Fiber (1m long) • UVFIBER-230-2M-FC  230um Output Fiber (2m long) • UVFIBER-450-1M-FC  450um Output Fiber (1m long) • UVFIBER-450-2M-FC  450um Output Fiber (2m long)       EQ-99X-FC Operation & Maintenance Manual 22 of 50  ...

  • Page 23: Optional Accessories

        Chapter 4. Installation   4.1.2 Optional Accessories The EQ-99X-FC system shipping box may also contain the following optional accessories available from Energetiq:    Table 4. Optional Accessories in Shipping Box Qty Item Description Picture EQ-99-RC Remote Control with interlock jumper plug and 15-pin D-connector I/O cable • 12 VDC Power Supply (universal input voltage) – TDK Lambda model  no. DT150PW120D ◦...

  • Page 24: Procedure

      Chapter 4. Installation     4.2.2 Procedure To attach the laser fiber optic cable from the power supply controller to the lamp head:  Notes: – The lamp head pictured in this procedure may appear slightly different than the lamp head included with  your EQ-99X-FC system. – Use care when handling the fiber optic cable to avoid sharp bends, which will permanently damage the cable. Minimum bend radius for the cable is 30 mm (1.18 in). 1.
  • Page 25     Chapter 4. Installation   Figure 9. Removing the SMA Cap 5. Carefully insert the laser fiber optic cable into the Laser Input port of the lamp head. Insert the fiber optic cable at a slight angle until the fiber tip is inside the port on the lamp head. Figure 10.

  • Page 26: Installation Procedure

      Chapter 4. Installation         Figure 11. Screwing In the Laser Output Fiber Connector 7. Continue setting up your LDLS system as outlined in the product manual. 4.3 Installation Procedure The following section details how to install the EQ-99X-FC system. Note: The EQ-99X-FC system is typically delivered with the laser fiber optic cable connected to the lamp head. This  is done to minimize the possibility of debris or particles contaminating the end of the laser fiber. Energetiq strongly  recommends leaving the laser fiber optic cable connected unless it is necessary to disconnect it for installation or routing of the laser fiber.
  • Page 27     Chapter 4. Installation   Figure 12. Connecting the Laser Fiber Optic Cable to Lamp Head Note: Use care when handling the fiber optic cable to avoid sharp bends, which will permanently damage  the cable. Minimum bend radius for the cable is 30 mm (1.18 in). 2. Mount the power supply controller to an optical breadboard plate or other suitable mounting structure using the four supplied holes in the tabs on the bottom of the chassis.
  • Page 28   Chapter 4. Installation     3. Mount the lamp head in the orientation shown in the figure below, with the FC Output Port on top of the lamp  head facing upward. Four M4-threaded holes are available on the bottom of the EQ-99X-FC system for  mounting. Figure 14. Mounting the Lamp Head 4. Set up the lamp head with appropriate ultraviolet safety measures in place. It is recommended that any  enclosure or aperture-blocking hardware utilizes switches wired to the EQ-99X-FC system external interlock  circuit. 5. Connect the black 9-pin mini D-sub interconnect cable from the power supply controller (labeled TO LAMP) to the lamp head (labeled J4).
  • Page 29     Chapter 4. Installation   6. Connect the output fiber to the FC Output Port on the top of the lamp head. Before inserting and tightening the output fiber, ensure the notch on the output fiber is aligned with the small gap in the FC Output Port.   ...
  • Page 30   Chapter 4. Installation     Figure 18. Inserting the Interlock Jumper Plug  Alternatively, if you are integrating the EQ-99X-FC system into your own interlock system, connect a remote  contact or solid-state switch across pins 1 and 3 in the interlock port.  Figure 19. Interlock Pin Locations If using another remote control system, see 4.4.2 Installing Alternative Remote Control for more information.  9. Connect the 12VDC input power source to the power supply controller and a power outlet. Position the AC  adapter so that the AC inlet and power cord are readily accessible.  Note: Never use a power supply voltage other than the one specified. Use only the supplied AC cable for the power connection.  ...

  • Page 31: Installing Alternative Power Supply Or Remote Control

        Chapter 4. Installation   Figure 20. Connecting the 12VDC Input Power Source Alternatively, if using another power supply, see 4.4.1 Installing Alternative Power Supply for more information.    The system is now ready to operate.  4.4 Installing Alternative Power Supply or Remote Control If you are using a power supply other than the included 12VDC Power Supply, or if you are using a or a remote control other than the EQ-99-RC Remote Control, the following subsections detail how to install an alternative power supply or remote control for the EQ-99X-FC system. ...

  • Page 32: Installing Alternative Remote Control

      Chapter 4. Installation     4.4.2 Installing Alternative Remote Control The EQ-99X-FC system is controlled through the remote I/O port.     The table I/O Port Pin Assignments gives the pin assignments and functions for this interface. Connect to the user’s  control system using a suitable cable. The mating connector is a standard high-density 15-pin d-sub male (for example, Amp part no. 748364-1 with contacts 1658670-2).  ...
  • Page 33     Chapter 4. Installation   Figure 21. Remote Interface Schematic     EQ-99X-FC Operation & Maintenance Manual 33 of 50  ...

  • Page 34: Installing The Remote Purge Orifice

      Chapter 4. Installation     4.5 Installing the Remote Purge Orifice While being purged with nitrogen gas, the EQ-99X-FC system can exhibit high optical noise output due to nitrogen gas  flowing directly onto the lamp bulb. In product applications that are particularly sensitive to optical noise, it is recommended that you install the remote purge orifice to help reduce the optical noise output.  ...
  • Page 35     Chapter 4. Installation   Figure 22. Identifying the Purge Fitting and Flow Restrictor 3. Use the 1.5 mm hex wrench at 52.5 in-oz of torque to unscrew the purge fitting from the lamp head. Place the  purge fitting in a safe location for later use.  Note: After you remove the purge fitting, the flow restrictor may remain attached to either the purge fitting or lamp head.      Figure 23.
  • Page 36   Chapter 4. Installation              Figure 24. Removing the Flow Restrictor 5. Use the 1.5 mm hex wrench at 52.5 in-oz of torque to reinstall the purge fitting on the lamp head. Do not reinstall the flow restrictor.  Figure 25. Reinstalling the Purge Fitting 6.
  • Page 37     Chapter 4. Installation   Figure 27. Attaching the Remote Purge Orifice 8. Attach the nitrogen input purge tubing to the remote orifice by pushing the nitrogen input purge tubing (4 mm) into the open end of the remote orifice.  Figure 28. Attaching Input Purge Tubing to Remote Orifice 9.

  • Page 38: Chapter 5. Operating The System

      Chapter 5. Operating the System       Chapter 5. Operating the System 5.1 Starting the System Caution: Once the EQ-99X-FC system is properly set up, verify that all personnel that will be in contact with the  system are aware of the potential hazards involved as described in Chapter 1. Safety and Warranty Information. It is the responsibility of the user to verify that the EQ-99X-FC system is safely being used.
  • Page 39     Chapter 5. Operating the System   Figure 30. LASER ON LED Illuminated 3. In approximately 20-150 seconds, the igniter automatically turns on and the plasma ignites. The LAMP ON LED light illuminates. Figure 31. LAMP ON LED Illuminated 4.

  • Page 40: Stopping The System

      Chapter 5. Operating the System     the unit has reached the optimum conditions for ignition.   – If a bulb fails to ignite, 150 seconds after the OPERATE switch is turned ON:        •  the LASER ON LED will be OFF.        •  the LAMP FAULT LED will be ON.        •  the LAMP ON LED will remain OFF.   This is very unusual. However, if this occurs, turn the OPERATE switch to the OFF position ("down" position) and restart this procedure at Step 1. If this issue occurs multiple times, see Chapter 7.

  • Page 41: Chapter 6. Maintenance

      Chapter 6. Maintenance       Chapter 6. Maintenance 6.1 Fiber Cleaning Process Fiber Cleaning Basics Caution: Prior to installing any fiber optic cable on the EQ-99X-FC system, the fiber end-face MUST be cleaned and inspected at 200x magnification to ensure that contamination has been removed. Failure to properly clean and inspect fibers will significantly increase the risk of power loss and eventually cause laser failure. ...

  • Page 42: Fiber Inspection Tools

      Chapter 6. Maintenance     6.1.1 Fiber Inspection Tools Figure 32. JDS Uniphase/Westover FVD-2400 Benchtop Figure 33. FS-201 Handheld Fiber Inspection Scope USB/PC Operated Fiber Viewer   Note: A special SMA adapter must be used with either the FS201 handheld inspection scope or the Westover Digital  inspection scopes. This custom adapter allows the scope to be used with the laser fiber and integral interlock ring. The custom adapter may not be compatible with other fiber inspection equipment. ...

  • Page 43: Fiber Inspection And Cleaning Procedure

        Chapter 6. Maintenance   Table 10. Chemtronics QbE Cleaning Platform   Part Description Manufacturer Part Number UPC Chemtronics QbE Cleaning Platform QbE 32599094887   6.1.3 Fiber Inspection and Cleaning Procedure Caution: Disconnect power from the power supply controller before performing fiber inspection. Figure 34. Fiber Cleaning Process Flowchart   •...

  • Page 44: Lamp Bulb Replacement

      Chapter 6. Maintenance     Figure 35. Contaminated and Clean Fiber End Examples   6.2 Lamp Bulb Replacement If a bad lamp bulb is suspected in the EQ-99X-FC system, contact Energetiq for more information on having the lamp bulb replaced.    ...

  • Page 45: Chapter 7. Troubleshooting

      Chapter 7. Troubleshooting       Chapter 7. Troubleshooting As shown in the figure Power Supply Controller LED Lights below, there are five LED lights on the side of the power  supply controller that indicate the current status of the EQ-99X-FC system.     Figure 36. Power Supply Controller LED Lights   During normal operation, the three green LED lights on the left-hand side (POWER ON, LASER ON, LAMP ON) should be turned ON.

  • Page 46: Issues And Remedies

      Chapter 7. Troubleshooting     7.1 Issues and Remedies See below for a list of possible issues that may be encountered while operating the EQ-99X-FC system and the  potential steps to resolve those issues.    Table 11. Possible Issues and Remedies LED Light Name Possible Issues Troubleshooting Steps and Status One of the following has occurred in the lamp head:...
  • Page 47     Chapter 7. Troubleshooting   LED Light Name and Possible Issues Troubleshooting Steps Status The plasma inside the lamp bulb has been LAMP ON extinguished after ignition. This also causes the is OFF LAMP MODULE FAULT light to turn ON and LASER ON light to turn OFF.

  • Page 48: Appendix A. Mechanical Layout Drawings

      Appendix A. Mechanical Layout Drawings       Appendix A. Mechanical Layout Drawings Figure 37. Lamp Head Mechanical Layout     EQ-99X-FC Operation & Maintenance Manual 48 of 50  ...
  • Page 49     Appendix A. Mechanical Layout Drawings   Figure 38. Power Supply Controller Mechanical Layout     EQ-99X-FC Operation & Maintenance Manual 49 of 50  ...

  • Page 50: Appendix B. Revision History

      Appendix B. Revision History       Appendix B. Revision History Version Modified Date Modifications Made Number Modified Updated CE Mark, Logo, Page footer format, Fiber Cleaning Rev. 3 March 2018 Steinberg Procedure, added Appendix A Updated:  1. Declaration of Conformance with latest standards  2.

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